JPH0567326A - Magnetic disk medium - Google Patents
Magnetic disk mediumInfo
- Publication number
- JPH0567326A JPH0567326A JP22768691A JP22768691A JPH0567326A JP H0567326 A JPH0567326 A JP H0567326A JP 22768691 A JP22768691 A JP 22768691A JP 22768691 A JP22768691 A JP 22768691A JP H0567326 A JPH0567326 A JP H0567326A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- film
- magnetic disk
- disk medium
- protecting film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は磁気ディスク媒体に関
し、特に、保護膜に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk medium, and more particularly to a protective film.
【０００２】[0002]
【従来の技術】従来の磁気ディスク媒体における保護膜
は、シリコン系、あるいは、カーボン系の単一組成から
成る単層保護膜である。2. Description of the Related Art A conventional protective film in a magnetic disk medium is a single-layer protective film composed of a single silicon-based or carbon-based composition.
【０００３】[0003]
【発明が解決しようとする課題】前述した従来の磁気デ
ィスク媒体では、シリコン系保護膜は耐久性において劣
り、特にヘッドのコンタクト・スタート・ストップ時に
保護膜が削り取られ、ダストが発生して最約的にヘッド
・クラッシュに至る。また、カーボン系保護膜は耐食性
においてシリコン系保護膜より劣り、両者の特性的に良
好な条件を兼ね備えた保護膜は未だ実用化に至っていな
い。In the above-mentioned conventional magnetic disk medium, the silicon-based protective film is inferior in durability, and particularly when the head contact start / stop is performed, the protective film is scraped off and dust is generated to reduce the maximum amount. Head crash. In addition, the carbon-based protective film is inferior in corrosion resistance to the silicon-based protective film, and a protective film having both excellent characteristics has not yet been put into practical use.
【０００４】[0004]
【課題を解決するための手段】本発明の磁気ディスク媒
体は、アルミニウム合金又はガラスからなる基板と、こ
の基板上に設けた磁性層と、この磁性層上に設けたシリ
コン系又はカーボン系の第１保護膜と、この第１保護膜
の上に設けた窒素化合物からなる第２保護膜と、この第
２保護膜の上に設けた潤滑膜とを備えている。A magnetic disk medium of the present invention comprises a substrate made of an aluminum alloy or glass, a magnetic layer provided on the substrate, and a silicon-based or carbon-based substrate provided on the magnetic layer. The first protective film includes a first protective film, a second protective film made of a nitrogen compound provided on the first protective film, and a lubricating film provided on the second protective film.
【０００５】前記窒素化合物は窒化ケイ素であってもよ
く、又、窒化炭素であってもよい。The nitrogen compound may be silicon nitride or carbon nitride.
【０００６】[0006]
【実施例】次に本発明について図面を参照して説明す
る。The present invention will be described below with reference to the drawings.
【０００７】図１は本発明の磁気ディスク媒体の一実施
例の断面図である。FIG. 1 is a sectional view of an embodiment of the magnetic disk medium of the present invention.
【０００８】本実施例においては、アルミニウム合金１
上にＮｉ−Ｐのめっき膜を約５μｍの厚さに形成し、こ
れを研磨して下地めっき層２とし、下地めっき層２上に
無電解めっき法により厚さ約０．１μｍのＣｏ−Ｎｉ−
Ｐの磁性層３を形成する。その後、第１保護膜としてス
パッタ法でＳｉＯ2 膜４を約０．０１μｍの厚さで形成
し、ＳｉＯ2 膜４上にさらに第２保護膜としてスパッタ
法で約０．０１μｍの厚さで窒化ケイ素保護膜５を作製
する。その後、潤滑剤を約１ｎｍの厚さで塗布して潤滑
膜６とする。In this embodiment, aluminum alloy 1
A Ni-P plated film having a thickness of about 5 μm is formed thereon, and this is polished to form a base plating layer 2, and Co-Ni having a thickness of about 0.1 μm is formed on the base plating layer 2 by an electroless plating method. −
A P magnetic layer 3 is formed. Then, a SiO 2 film 4 having a thickness of about 0.01 μm is formed as a first protective film by a sputtering method, and a second protective film having a thickness of about 0.01 μm is nitrided on the SiO 2 film 4 by a sputtering method. The silicon protective film 5 is prepared. Then, a lubricant is applied to a thickness of about 1 nm to form the lubricating film 6.
【０００９】なお、第２保護膜に窒化炭素を用いても、
同じ効果を得ることができる。Even if carbon nitride is used for the second protective film,
You can get the same effect.
【００１０】[0010]
【発明の効果】以上説明したように、本発明は、磁気デ
ィスク媒体の第１保護膜上を窒素化合物で覆い、第２保
護膜を形成することにより、第１保護膜にも窒素をドー
プさせることができ、その結果、保護膜の硬度を高める
ことが可能であり、ヘッドによる保護膜の破壊を抑える
ことができる。As described above, according to the present invention, the first protective film of the magnetic disk medium is covered with the nitrogen compound and the second protective film is formed, so that the first protective film is also doped with nitrogen. As a result, the hardness of the protective film can be increased, and the damage of the protective film by the head can be suppressed.
【００１１】さらに、従来の保護膜単層構造の場合、保
護膜に存在する、マイクロ・ピンホール中への水の浸入
により下層の磁性膜上に腐食点が発生したが、保護膜を
組成の異なる二層構造とすることにより、マイクロ・ピ
ンホールの発生を減少させることが可能であり、腐食点
の発生を抑えることができるため、磁気ディスク媒体の
耐久性，耐食性を向上させることができるという効果を
有する。Further, in the case of the conventional protective film single-layer structure, a corrosion point is generated on the lower magnetic film due to the infiltration of water existing in the protective film into the micro pinholes. By using a different two-layer structure, it is possible to reduce the generation of micro-pinholes and suppress the generation of corrosion points, so it is possible to improve the durability and corrosion resistance of the magnetic disk medium. Have an effect.
【図１】本発明の一実施例の断面図である。FIG. 1 is a sectional view of an embodiment of the present invention.
１ アルミニウム合金基板 ２ 下地めっき層 ３ 磁性層 ４ ＳｉＯ2 ５ 窒化ケイ素保護膜 ６ 潤滑膜 1 Aluminum alloy substrate 2 Underplating layer 3 Magnetic layer 4 SiO2 5 Silicon nitride protective film 6 Lubricating film
Claims (3)
板と、この基板上に設けた磁性層と、この磁性層上に設
けたシリコン系又はカーボン系の第１保護膜と、この第
１保護膜の上に設けた窒素化合物からなる第２保護膜
と、この第２保護膜の上に設けた潤滑膜とを備えたこと
を特徴とする磁気ディスク媒体。1. A substrate made of an aluminum alloy or glass, a magnetic layer provided on the substrate, a silicon-based or carbon-based first protective film provided on the magnetic layer, and a first protective film on the first protective film. A magnetic disk medium comprising: a second protective film made of a nitrogen compound provided on the first protective film; and a lubricating film provided on the second protective film.
を特徴とする請求項１記載の磁気ディスク媒体。2. The magnetic disk medium according to claim 1, wherein the nitrogen compound is silicon nitride.
特徴とする請求項１記載の磁気デイスク媒体。3. The magnetic disk medium according to claim 1, wherein the nitrogen compound is carbon nitride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22768691A JPH0567326A (en) | 1991-09-09 | 1991-09-09 | Magnetic disk medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22768691A JPH0567326A (en) | 1991-09-09 | 1991-09-09 | Magnetic disk medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0567326A true JPH0567326A (en) | 1993-03-19 |
Family
ID=16864748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22768691A Pending JPH0567326A (en) | 1991-09-09 | 1991-09-09 | Magnetic disk medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0567326A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013101742A (en) * | 2011-11-07 | 2013-05-23 | Hgst Netherlands B V | FePt-C BASED MAGNETIC RECORDING MEDIUM WITH ONION-LIKE CARBON PROTECTION LAYER |
-
1991
- 1991-09-09 JP JP22768691A patent/JPH0567326A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013101742A (en) * | 2011-11-07 | 2013-05-23 | Hgst Netherlands B V | FePt-C BASED MAGNETIC RECORDING MEDIUM WITH ONION-LIKE CARBON PROTECTION LAYER |
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