JPH056378U - Test jig - Google Patents

Abstract

(57) [Abstract] [Purpose] A socket corresponding to the device is placed on a plane, the socket to be used is selected according to the information of the test program started by the tester, and the socket is connected to the tester and the inspection information. Get a test fixture that can display. [Structure] A multi-input 1-output circuit, that is, a selector having a multiplexing function is constituted by a plurality of switch elements using mercury, and the signal lines of each socket are collected in the selector, and the signal switched by the information from the tester is tested. And a test jig for inspecting by viewing the information on the display.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 This invention is a test jig with a socket used to inspect the electrical characteristics such as leakage current and current amplification factor of semiconductor devices (hereinafter referred to as devices) such as transistors and diodes using an automatic characteristic tester. It is about.

[0002]

[Prior Art]

 FIG. 5 is a view showing the outer shape of a conventional test jig. In FIG. 5, reference numeral 1 is installed at a position independent of an automatic characteristic tester (not shown, hereinafter referred to as a tester), and electrically connected to a signal cable. The test jig, which is connected to the tester by means of 2, is a socket for easily connecting and disconnecting the device, and the socket for electrically connecting the lead as the electrode of the device to the measurement circuit of the tester, 3 is the inspection with the socket 2 attached. Depending on the type of device to be used, a pin contactor is provided so that it can be inserted / removed into / from the test jig 1 and replaced, and one of the test adapters for transistors, diodes, etc., 4 is the tester above. A plurality of coaxial connectors for exchanging measurement signals between the test jigs 1. 6 is a side view of the test adapter 3. In FIG. 6, 5 is a plurality of pin contacts for facilitating exchange and connection of the test adapter 3, and 6 is inserted into the socket 2 for inspection. The device under test. FIG. 7 is a diagram showing the internal connection of the test jig 1 in the state where the transistor 6 is attached to the socket 2 as a device 6, and in the figure, 4a is the first coaxial connector among a plurality of coaxial connectors 4 connected to the tester. Connector, 4b is the second coaxial connector, 4c is the third coaxial connector, 7 is the electrical signal of the transistor of device 6, 7a is the collector electrode of transistor 7, 7b is the base electrode, 7c is the emitter electrode, 8a is the socket The first contactor among the three contactors 2; 8b is the second contactor; 8c is the third contactor; 9a is the first contactor among the plurality of pin contacts 5; 9b is the second contact, 9c is the third contact, and 10 is a transistor for measuring the current amplification factor (hereinafter referred to as HFE) of the transistor 7. Collector current (IC) flowing through the transistor 7, 11 is a base current (IB) similar to the collector current 10, and 12 is a measurement applied between the collector electrode 7a and the emitter electrode 7c of the transistor 7 when measuring the above HFE. It is the collector-emitter voltage (VCE) as a bias signal.

A conventional test jig is configured as described above. Now, for example, when inspecting a transistor as a device to be inspected, a test adapter 3 having a socket adapted to the electrode arrangement of the device 6 is attached to the test jig 1. Insert the device 6 into the socket 2 as shown in FIG. After that, when the test program of the device 6 is started and executed on the tester, it has a current or voltage value of the magnitude specified by the test program from the tester through the coaxial connector 4, the pin contact 5 and the socket 2. A measurement bias signal is applied to the electrodes of the device for a specified time. For example, in the case of the HFE measurement, as shown in FIG. 7, the collector-emitter voltage (VCE) 12 as the measurement bias signal is positive (+) on the coaxial connector 4a side and negative (-) on the coaxial connector 4c. ) Is applied between the collector electrode 7a and the emitter electrode 7c of the transistor 7 from the tester through these connectors and the connection inside the test jig 1 shown in FIG. At the same time, the collector current 10 passes through the coaxial connector 4a, the pin contactor 9a and the contactor 8a to the collector electrode 7a of the transistor 7, while the base current 11 passes through the coaxial connector 4b, the pin contactor 9b and the contactor 8b. Then, the collector current 10 is supplied for a specified time until it reaches a specified value. Since the tester measures the value of the base current 11, the value of HFE is calculated from the ratio of the known collector current 10 and the value of the base current 11, that is, IC / IB, and becomes the measured value of HFE. Next, the measured value of HFE in the tester is compared with the standard value that was set in advance when the program was created, and the transistor passed (GO), that is, within the standard value or failed (NOGO). Is determined. When inspecting a device (not shown) having an electrode arrangement different from that of the device 6, the test adapter 3 cannot be used. Therefore, pull out the test adapter 3 from the test jig 1 and set the electrode arrangement of the device to be inspected. A suitable test adapter (not shown) is inserted into the test jig 1, and the inspection is performed by the same procedure as above.

[0004]

[Problems to be solved by the device]

 When the types of test devices with different electrode arrangements in the above test jigs increase, it is necessary to prepare the required number of test adapters with sockets suitable for them, resulting in an increase in test adapter manufacturing costs. Also, it is necessary to replace the test adapter each time the type of inspection device changes, so it takes time to replace it, and if you accidentally replace or use a different test adapter, the worst device will be destroyed. For devices different from the standard electrode arrangement, the device insertion direction had to be checked one by one with a separate document, which was a problem.

The present invention has been made in order to solve such a problem, eliminates replacement of a test adapter, and automatically selects and identifies the position of a socket to be used, and only inserts the device into the socket. The purpose of the drawing is to reduce the time required to prepare for inspection and the error in the insertion direction of the device, and to reduce the manufacturing cost of the test adapter.

[0006]

[Means for Solving the Problems]

 In the test jig according to the present invention, the required number of sockets are arranged on the plane from the beginning, and the positions of the sockets used for the inspection are displayed and identified by the lighting of the light emitting diode under the control of the tester, and the test jig is tested. The switching circuit (selector) inside the tool automatically switches and selects to connect only the socket that uses the measurement signal, and the device can be displayed by the display without looking at other inspection-related data. It is the illustration of the insertion direction of the socket into the socket.

[0007]

[Action]

 In this invention, the required number of sockets are arranged on a flat surface, and as a constituent element of the selector inside the test jig, only a socket that has a function equal to or higher than that of a mercury relay and is used by a matrix structure of small switch elements is used. Not only does it save you the trouble of exchanging the socket by connecting the tester to the tester, but it also reduces the trouble of looking at other materials one by one by displaying the necessary information on the display unit. ..

[0008]

【Example】

 Example 1. FIG. 1 is a view showing an embodiment of the present invention, in which 1 is a test jig in which n sockets having different electrode arrangements are sequentially arranged on a plane from 1 to nth, and 2 are n pieces. The first device inspection socket in the inside, 13 is a connector for connecting electrical signals mainly consisting of digital signals to the tester, and 14 is a light emitting diode for displaying and identifying that the socket 2 has been selected. , 15 is a socket for device inspection located at the nth position among n sockets having a different electrode arrangement from the socket 2, 16 is a light emitting diode for the same selection and identification as the light emitting diode 14, and 17 is an inspection result GO / NG indicator to inform the operator (not shown) whether the test is a GO (GO) or a fail (NOGO), 18 is a push button switch for starting the inspection, and 19 is a data switch. LCD to illustrate the correspondence between chair model number, type and the device and the socket, a display device composed of a plasma panel or the like. FIG. 2 is a block diagram showing the internal structure of the test jig 1 mainly including the first socket 2 and the nth socket 15. In the figure, 15a is one of the three contacts of the socket 15. The second contactor, 15b is the second contactor, 15c is the third contactor, 20 is a multi-input one-output circuit that collects a plurality of elements having a switching function, a selector that constitutes a so-called multiplexer, 21 Is a switch element corresponding to the contact 8a of the socket 2 and 21a is one of the terminals of the switch element 21 which is semantically normally open when the contact resistance is low and mercury is used as a contact mechanism. NO terminal, 21b is a common terminal, 22 is a switch element corresponding to the contact 8b similar to the switch element 21, 22a is a NO terminal, 22b is a common terminal, and 23 is the same as the switch element 21. A switch element corresponding to the contact 8c, 23a is a NO terminal, 23b is a common terminal, 24 is a switch element corresponding to the contactor 15a of the socket 15, 24a is a NO terminal, 24b is a common terminal, and 25 is a switch element 21. A switch element corresponding to the similar contactor 8c, 25a is a NO terminal, 25b is a common terminal, 26 is a switch element corresponding to the contactor 15c, 26a is a NO terminal, 26b is a common terminal, and 27 is an interface function with a tester. The controller 27a has a plurality of signal lines from the controller 27 to the selector 20. The controller 27 has a controller for transmitting a drive signal to the selector 20 and controlling a light emitting diode and a display. FIG. 3 is a diagram showing a structure of a switch element 21 of a plurality of switch elements which are included in the selector 20 and have the same function and performance, in which 28 is a conductive leaf spring and 29 is an NO terminal 21a. An insulating cover 30 for holding the switch moves up and down by an external electric signal, and at the time of operation, the tip of the switch contacts the mercury surface and is electrically connected to the NO spring 21 and the NO terminal 21a. The conductive movable contactor that forms the contact point of the disk, 31 is attached to the movable contactor 30, and the disk is made of a material such as iron or nickel so as to be attracted to the external magnetic field, and 32 flows to the coil wound outside. Cylindrical material made of iron, nickel, etc. for strengthening the magnetic field generated by the electric current and acting as an electromagnet, 33 is a coil for generating a magnetic field by an electric current, and 34 is for accumulating silver hydroxide Glass tube, 35 is a mercury to maintain the contact resistance when in contact with the movable contact 30 to the lower have value. FIG. 4 is a diagram showing an example of the display screen of the display device 19. In the figure, 36 is the model number display of the device 6 to be inspected, and 37 is the same as 36 such as NPN of the device 6, polarity such as PNP, transistor, diode, etc. Identification display of the functional classification, 38 is a display showing the electrode arrangement of the socket 2, and 39 is a display showing the electrode arrangement of the device 6.

In the test jig configured as described above, the switch device (not shown) in the selector 20 immediately after the power is turned on is in a non-operating state (contacts are open), and the device is tested by the tester as a device. When inspecting a device 6 that fits the socket 2 on the test jig 1, first start the test program for the device 6 on the tester, and the controller 27 will include the model number of the device 6 through the connector 13 from the tester. Identification information is sent. The controller 27 operates the light emitting diode 14 according to the discrimination signal of the socket 2 to be used from the identification signal and lights up the display, and the selector 20 passes one of the signal lines 27a through the contacts 8a, 8b of the socket 2. A drive signal is sent to the switch elements 21, 22 and 23 corresponding to 8c so that they operate simultaneously. Further, the controller 27 uses the information of the model number in the identification signal to generate and send a signal for causing the display 19 to perform the display shown in FIG. The switch elements 21, 22 and 21 perform the same operation, but regarding the switch element 21, the drive signal causes a current to flow in the coil 33 to generate a magnetic field. This magnetic field is strengthened by the cylindrical member 32, the disk 31 is attracted by the action of the magnetic force, the leaf spring 28 expands, and the movable contact 30 moves downward to bring the tip end into contact with the mercury 35 and the NO terminal. 21a and the common terminal 21b are electrically connected. The same operation is performed for the switch element 22 and the NO terminal 22a and the common terminal 22b are conducted, and for the switch element 23, the NO terminal 23a and the common terminal 23b are conducted. As a result, between the coaxial connectors 4a, 4b, 4c and the contacts 8a, 8b, 8c are passed through the common terminal 21b and NO terminal 21a of the switch element, respectively, and for the switch elements 22 and 23, the common terminal 22b, NO terminal 23b and NO. It is connected through terminals 22a and 23a. Next, after checking the contents of the display of the light emitting diode 14 and the display shown in FIG. 4 as the device 6, the transistor 7 is inserted into the socket 2 and the test start start push button switch 18 is pushed. For inspection of a signal for, for example, HFE, a constant collector-emitter voltage 12 is applied between the coaxial connectors 4a and 4c in the same manner as in the conventional device, and the connection inside the selector 20 and the contact 8a. , 8c between the collector electrode 7a and the emitter electrode 7c of the transistor 7. The collector current 10 and the base current 11 are sent to the collector electrode 7a and the base electrode 7b of the transistor 7 through the coaxial connectors 4a and 4b, the switch elements 21 and 22, and the contacts 8a and 8b. The base current 11 is made to flow so that the current 10 becomes a specified constant value, and the ratio of the base current 11 measured by the tester to the known collector current 10 and the measured value of HFE are obtained from IC / IB. Be done. In the tester, the HFE inspection pass / fail judgment is made by comparing with the specified range value of HFE, and the inspection result is GO / NG indicator on the test jig 1 regardless of whether it passes or fails. Displayed at 17, the operator is informed. Regarding other inspection items such as leakage current and saturation voltage of HFE, the measured bias voltage value and the application method are different, but the connection state in the test jig 1 does not change and the inspection method is the same as above. When the socket 2 is used and the nth socket 15 is used, when the test program of the device that uses the socket 15 is started on the tester in the same manner as above, the identification information of the device is output from the tester to the connector 13 Sent to the controller 27 through. Similar to the case of the socket 2 described above, the controller 27 creates a display signal similar to the display content shown in FIG. 4 corresponding to the device using the socket 15, and sends it to the display device 19. A drive signal for operating the switch elements 24, 25, 26 together is sent from the controller 27 to the selector 20 through one of the plurality of signal lines 27a. At the same time, the drive signal that had been operating the switch elements 21, 22, and 23 until now turns off, and when looking at the switch element 21, the current flowing in the coil 33 is cut off, and the magnetic field disappears, resulting in movement. The contactor 30 returns to the position before the operation by the action of the leaf spring 28, and the conduction between the NO terminal 21a and the common terminal 21b is lost. The switch elements 22 and 23 also operate in the same manner as the switch element 21, and as a result, the connection between the coaxial connectors 4a, 4b, 4c and the contacts 8a, 8b, 8c of the socket 2 that have been connected up to now is reduced. It becomes non-conductive. Instead, the switch elements 24, 25, 26 operate, and the NO terminals 24b, 25b, 26b and the common terminals 24a, 25a, 26a are electrically connected to each other, whereby the coaxial connectors 4a, 4b, 4c are connected. The contacts 15a, 15b, 15c of the socket 15 are connected. Check the device (not shown) that fits in the socket 15 by checking the contents displayed on the display 19, and insert the socket 15 into the socket 15 and press the start start push button switch 18 to check HFE, leak current, saturation voltage, etc. Is applied to the contacts 15a, 15b, 15c of the socket 15 through the coaxial connectors 4a, 4b, 4c, and the same HFE measurement as described above is repeated. The same operation is performed for the second to n-1th sockets other than the above-mentioned first and nth sockets out of n sockets, and a device suitable for each socket is inspected.

[0010]

As described above, the present invention provides a socket that can be used in a short time and without error without replacing the test adapter by the selector function of a plurality of switch elements having a small size, low contact resistance and large current capacity. In addition to the ability to select devices and insert devices into sockets, and to inspect devices with relatively large current capacities from minute current and voltage, centralized placement of sockets reduces test adapter manufacturing costs. There is an effect that it can be achieved.

[Brief description of drawings]

FIG. 1 is a front view showing a first embodiment of the present invention.

FIG. 2 is a block diagram showing a first embodiment of the present invention.

FIG. 3 is a cross-sectional view of a switch element showing the first embodiment of the present invention.

FIG. 4 is a display screen of a display device showing Embodiment 1 of the present invention.

FIG. 5 is a front view showing a conventional test jig.

FIG. 6 is a side view of a conventional test adapter.

FIG. 7 is a connection diagram showing internal connection of a conventional test jig.

[Explanation of symbols]

 1 Test Jig 14 Light Emitting Diode 19 Display 20 Selector 21 Switch Element 30 Moving Contact 35 Mercury

Claims (1)

[Claims for utility model registration] 1. Sockets corresponding to a plurality of different types of devices are arranged on a plane in order to facilitate characteristic inspection of semiconductor devices having various outer shapes and electrode arrangements. In order to make it easier to understand the panel surface and the insertion direction of the device, to display the correspondence of the electrode arrangement between the device and the socket, the display composed of liquid crystal, plasma panel, etc., to switch the measurement signal to each socket A common terminal that contains mercury inside the glass tube and is in constant contact with it.
When operating by an external electric signal, a plurality of switch elements formed by the movable contactor that contacts the mercury surface are assembled to form a multi-input one-output circuit, and the selector is controlled by the program of the automatic characteristic tester. A test jig that can automatically select, identify and measure only the socket to be used for inspection from multiple sockets without replacing the socket.