JPH0563120B2 - - Google Patents

Info

Publication number
JPH0563120B2
JPH0563120B2 JP62283455A JP28345587A JPH0563120B2 JP H0563120 B2 JPH0563120 B2 JP H0563120B2 JP 62283455 A JP62283455 A JP 62283455A JP 28345587 A JP28345587 A JP 28345587A JP H0563120 B2 JPH0563120 B2 JP H0563120B2
Authority
JP
Japan
Prior art keywords
integrated circuit
cold plate
heat
board
chassis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62283455A
Other languages
Japanese (ja)
Other versions
JPH01124300A (en
Inventor
Shinji Mine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62283455A priority Critical patent/JPH01124300A/en
Priority to CA000582329A priority patent/CA1283225C/en
Priority to DE8888310468T priority patent/DE3877522T2/en
Priority to EP88310468A priority patent/EP0316129B1/en
Priority to US07/268,467 priority patent/US4884167A/en
Publication of JPH01124300A publication Critical patent/JPH01124300A/en
Publication of JPH0563120B2 publication Critical patent/JPH0563120B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Mounting Of Printed Circuit Boards And The Like (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は三次元実装される基板に搭載される集
積回路の冷却構造に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cooling structure for an integrated circuit mounted on a three-dimensionally mounted substrate.

〔従来の技術〕[Conventional technology]

近年における半導体素子の集積度の向上、プリ
ント配線板やセラミツク基板の大型化、および基
板当たりの搭載素子数の増大は集積回路の実装密
度を飛躍的に向上させた。一方、集積回路の増大
した総発熱量に対してより高性能かつ効率の良い
冷却技術が求められている。特に大型機の分野で
は冷媒流路を有するコールドプレートに集積回路
の放熱面を熱的に結合させる伝導冷却方式に代表
される水冷方式の採用が活発である。
In recent years, improvements in the degree of integration of semiconductor elements, the increase in the size of printed wiring boards and ceramic substrates, and the increase in the number of mounted elements per board have dramatically improved the packaging density of integrated circuits. On the other hand, there is a need for higher performance and more efficient cooling technology to cope with the increased total heat generation of integrated circuits. Particularly in the field of large machines, water cooling methods, typified by conduction cooling methods, are being actively employed, in which the heat dissipation surface of an integrated circuit is thermally coupled to a cold plate having a coolant flow path.

例えば第3図に示すような液体を冷媒とした冷
却構造が提案されている。すなわち基板51に実
装された集積回路52にはばね54によつて熱伝
導棒53が押圧されており、集積回路52で発生
した熱は熱伝導棒53→微小間隔59→コールド
プレート55へと伝えられ、コールドプレート5
5は冷媒注入口57から注入され冷媒流路56を
経由して排出口58から排出される冷媒によつて
冷却されている。
For example, a cooling structure using liquid as a refrigerant as shown in FIG. 3 has been proposed. That is, a heat conduction rod 53 is pressed against the integrated circuit 52 mounted on the substrate 51 by a spring 54, and the heat generated in the integrated circuit 52 is transferred from the heat conduction rod 53 to the minute gap 59 to the cold plate 55. cold plate 5
5 is cooled by a refrigerant injected from a refrigerant inlet 57 and discharged from an outlet 58 via a refrigerant flow path 56.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、上述した従来の冷却構造は集積回路を
機能的にまとめたモジユール単位にコールドプレ
ートを形成する平面実装方式を前提にしている。
したがつて基板間の実装ピツチの条件が厳しい三
次元実装への採用は難しい。さらに基板が大きく
なるに従つて保守性が悪くなり、製造原価も高く
なるという欠点がある。
However, the conventional cooling structure described above is based on a planar mounting method in which a cold plate is formed in a module unit in which integrated circuits are functionally assembled.
Therefore, it is difficult to use it for three-dimensional mounting, where the conditions for mounting pitch between boards are strict. Furthermore, as the size of the board increases, maintainability deteriorates and manufacturing costs also increase.

本発明の目的はシヤーシ内のコールドプレート
に三次元実装基板上の集積回路から効率的に放熱
させるようにして上記の欠点を改善した集積回路
の冷却構造を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide an integrated circuit cooling structure that improves the above-mentioned drawbacks by allowing a cold plate in a chassis to efficiently radiate heat from an integrated circuit on a three-dimensional mounting board.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の集積回路の冷却構造は、片面もしくは
両面に集積回路を搭載した基板と、シヤーシ内に
列設された前記基板の部品搭載面に対向して前記
集積回路に対応する位置に孔を設け内部に冷媒流
路を有し前記シヤーシ内に固定したコールドプレ
ートと、前記コールドプレートの孔内に前記孔の
内壁と微小間隔を保つて挿入した前記集積回路の
放熱面に一端を接触する熱伝導棒と、前記熱伝導
棒の他端と板バネにて連結し前記コールドプレー
ト内を前記基板面に平行に貫通して設けた前記集
積回路の放熱面に前記熱伝導棒の一端を押圧する
回転シヤフトとを含んで構成される。
The integrated circuit cooling structure of the present invention includes a board having integrated circuits mounted on one or both sides, and a hole provided at a position corresponding to the integrated circuit opposite the component mounting surface of the board arranged in a row in a chassis. a cold plate having a refrigerant flow path therein and fixed in the chassis; and a heat conductor having one end in contact with a heat dissipation surface of the integrated circuit inserted into a hole of the cold plate while keeping a minute distance from the inner wall of the hole. Rotation of pressing one end of the heat conduction rod against the heat dissipation surface of the integrated circuit, which is connected to the other end of the heat conduction rod by a leaf spring and penetrates through the cold plate parallel to the substrate surface. It is composed of a shaft.

〔実施例〕〔Example〕

次に、本発明について図面を参照して説明す
る。
Next, the present invention will be explained with reference to the drawings.

第1図は本発明の一実施例を示す斜視図であ
る。また第2図は第1図のAA断面図である。
FIG. 1 is a perspective view showing an embodiment of the present invention. Further, FIG. 2 is a sectional view taken along line AA in FIG. 1.

第1図において基板1は両面に集積回路2が搭
載されており、コールドプレート4と交互に蚕棚
状にシヤーシ3内に列設されている。シヤーシ3
に固定されたコールドプレート4は冷媒注入口5
から注入され排出口6から排出される冷媒によつ
て冷却されている。
In FIG. 1, a substrate 1 has integrated circuits 2 mounted on both sides, and is arranged in rows in a chassis 3 alternately with cold plates 4 in the shape of a silkworm shelf. Chassis 3
The cold plate 4 fixed to the refrigerant inlet 5
It is cooled by a refrigerant injected from the outlet 6 and discharged from the outlet 6.

第2図において基板1はカードガイド18に案
内挿入されてシヤーシ3内に列設されており、基
板1の部品搭載面、即ちここでは基板1の両面に
コールドプレート4が配置されている。コールド
プレート4には各々の集積回路2に対応した位置
に孔12が、さらに冷媒流路7が設けられてい
る。熱伝導棒8は前記コールドプレートの孔12
の中にその内壁と微小間隔を保つて挿入され、端
面が集積回路2の放熱面と熱的に接触している。
In FIG. 2, the boards 1 are guided and inserted into a card guide 18 and arranged in a row in the chassis 3, and cold plates 4 are arranged on the component mounting surface of the board 1, that is, on both sides of the board 1 here. The cold plate 4 is provided with holes 12 at positions corresponding to the respective integrated circuits 2, and further provided with coolant channels 7. The heat conduction rod 8 is inserted into the hole 12 of the cold plate.
The integrated circuit 2 is inserted into the integrated circuit 2 while keeping a small distance from the inner wall thereof, and its end surface is in thermal contact with the heat dissipation surface of the integrated circuit 2.

回転シヤフト19はコールドプレート4内を基
板面に平行に貫通して設けられており、熱伝導棒
8のもう一方の端面と板バネ21にて連結されて
いる。板バネ21は回転シヤフトが19aの状態
において熱伝導棒8を集積回路2押圧している。
回転シヤフトを矢印20方向に回転させて19b
の状態にすると、熱伝導棒8と集積回路2の接触
が解除されて基板1の挿抜が可能になる。
The rotating shaft 19 is provided to pass through the inside of the cold plate 4 in parallel to the substrate surface, and is connected to the other end surface of the heat conductive rod 8 by a leaf spring 21. The leaf spring 21 presses the heat conductive rod 8 against the integrated circuit 2 when the rotating shaft is in the state 19a.
19b by rotating the rotating shaft in the direction of arrow 20.
In this state, the contact between the heat conductive rod 8 and the integrated circuit 2 is released, and the insertion and removal of the board 1 becomes possible.

集積回路2が発生した熱は、熱伝導棒8→微小
間隔10→コールドプレート4へと伝えられる
が、熱伝導棒8は集積回路個別に板バネ21で押
圧されて接触するので、基板に搭載される集積回
路の実装高さのバラツキを容易に吸収できる。ま
た回転シヤフトによつて熱伝導棒と集積回路との
接触を解除できるので、コールドプレートをシヤ
ーシ内に残したまま基板の交換が可能である。し
たがつて基板の軽量化を実現でき、さらに保守交
換の際に冷媒系を遮断する必要がない。
The heat generated by the integrated circuit 2 is transferred from the heat conduction rod 8 to the minute interval 10 to the cold plate 4, but the heat conduction rod 8 is pressed by the leaf spring 21 and comes into contact with each integrated circuit, so that it is not mounted on the board. It is possible to easily absorb variations in the mounting height of integrated circuits. Further, since the contact between the heat conductive rod and the integrated circuit can be released by the rotating shaft, it is possible to replace the board while leaving the cold plate in the chassis. Therefore, the weight of the board can be reduced, and there is no need to shut off the refrigerant system during maintenance and replacement.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば熱伝導棒と
板バネを介して連結した回転シヤフトを用いてコ
ールドプレートと基板の接触を断つことにより、
コールドプレートをシヤーシ内に残したままでの
基板の挿抜を可能としている。即ち冷媒を遮断し
ないで基板の保守交換が可能な三次元実装を実現
できるという効果がある。
As explained above, according to the present invention, by breaking the contact between the cold plate and the substrate using a rotating shaft connected via a heat conductive rod and a leaf spring,
It is possible to insert and remove the board while leaving the cold plate inside the chassis. In other words, it is possible to realize three-dimensional packaging in which maintenance and replacement of the board can be performed without cutting off the refrigerant.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す斜視図、第2
図は第1図のAA断面図、第3図は集積回路の冷
却構造の従来例を示す断面図である。 1……基板、2……集積回路、3……シヤー
シ、4……コールドプレート、5……冷媒注入
口、6……冷媒排出口、8……熱伝導棒、10…
…微小間隔、12……孔、19……回転シヤフ
ト、21……板バネ。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a sectional view taken along line AA in FIG. 1, and FIG. 3 is a sectional view showing a conventional example of a cooling structure for an integrated circuit. DESCRIPTION OF SYMBOLS 1... Board, 2... Integrated circuit, 3... Chassis, 4... Cold plate, 5... Refrigerant inlet, 6... Refrigerant outlet, 8... Heat conduction rod, 10...
...Minute interval, 12...hole, 19...rotating shaft, 21...plate spring.

Claims (1)

【特許請求の範囲】[Claims] 1 片面もしくは両面に集積回路を搭載した基板
と、シヤーシ内に列設された前記基板の部品搭載
面に対向して前記集積回路に対応する位置に孔を
設け内部に冷媒流路を有し前記シヤーシ内に固定
したコールドプレートと、前記コールドプレート
の孔内に前記孔の内壁と微小間隔を保つて挿入し
た前記集積回路の放熱面に一端を接触する熱伝導
棒と、前記熱伝導棒の他端と板バネにて連結し前
記コールドプレート内を前記基板面に平行に貫通
して設けた前記集積回路の放熱面に前記熱伝導棒
の一端を押圧する回転シヤフトとを含むことを特
徴とする集積回路の冷却構造。
1 A board with an integrated circuit mounted on one or both sides, and a hole provided at a position corresponding to the integrated circuit opposite to the component mounting surface of the board arranged in a row in a chassis and having a refrigerant flow path therein. a cold plate fixed in a chassis; a heat conduction rod having one end in contact with the heat dissipation surface of the integrated circuit inserted into a hole of the cold plate while keeping a minute distance from the inner wall of the hole; and other heat conduction rods. and a rotary shaft that presses one end of the heat conductive rod against a heat radiation surface of the integrated circuit that is connected to the end of the heat conductive rod by a leaf spring and that extends through the inside of the cold plate parallel to the substrate surface. Integrated circuit cooling structure.
JP62283455A 1987-11-09 1987-11-09 Cooling structure of integrated circuit Granted JPH01124300A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62283455A JPH01124300A (en) 1987-11-09 1987-11-09 Cooling structure of integrated circuit
CA000582329A CA1283225C (en) 1987-11-09 1988-11-04 Cooling system for three-dimensional ic package
DE8888310468T DE3877522T2 (en) 1987-11-09 1988-11-08 COOLING SYSTEM FOR A THREE-DIMENSIONAL INTEGRATED CIRCUIT PACK.
EP88310468A EP0316129B1 (en) 1987-11-09 1988-11-08 Cooling system for three-dimensional ic package
US07/268,467 US4884167A (en) 1987-11-09 1988-11-08 Cooling system for three-dimensional IC package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62283455A JPH01124300A (en) 1987-11-09 1987-11-09 Cooling structure of integrated circuit

Publications (2)

Publication Number Publication Date
JPH01124300A JPH01124300A (en) 1989-05-17
JPH0563120B2 true JPH0563120B2 (en) 1993-09-09

Family

ID=17665769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62283455A Granted JPH01124300A (en) 1987-11-09 1987-11-09 Cooling structure of integrated circuit

Country Status (1)

Country Link
JP (1) JPH01124300A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013061409A1 (en) 2011-10-25 2013-05-02 富士通株式会社 Water-cooling apparatus, electronic apparatus having water-cooling apparatus, and water-cooling method

Also Published As

Publication number Publication date
JPH01124300A (en) 1989-05-17

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