JPH0562848U - Jig for spectrophotometer - Google Patents

Abstract

(57) [Summary] (Correction) [Purpose] A sample movement jig for a spectrophotometer that can calculate a highly accurate haze ratio. [Structure] The light from the light source 1 of the spectrophotometer is divided into a linear transmitted light and a diffuse transmitted light at two locations, one when the sample substrate 2 is installed on the light source 1 side and the other on the integrating sphere 4 side. taking measurement. At this time, guide means is provided as a jig for moving the sample substrate 2. As the guide means, the upper and lower guide rails 14, 15 or the guide groove 22 or the guide convex portion name is used, and the sample substrate 2 is formed with a sliding means having a shape suitable for the guide means. . Then, the orientation of the guide means is adjusted in advance to the direction of the measurement light.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a spectrophotometer using an integrating sphere, and more particularly to a spectrophotometer jig suitable for measuring linear transmittance and diffuse transmittance of the same sample substrate.

[0002]

[Prior Art]

 A spectrophotometer is sometimes used to calculate the haze ratio, which is a reference for the roughness of the sample surface, as one item for measuring the physical properties of transparent thin film materials and the like. Conventionally, a haze ratio calculation method using the spectrophotometer will be described with reference to the conceptual diagrams of the spectrophotometer shown in FIGS. 6 and 7. That is, in FIG. 6, the light emitted from the light source 1 is transmitted through the sample substrate 2, of which the linearly transmitted light 3 enters the integrating sphere 4 and the others are scattered light 5 and scattered. Then, at this time, the linear transmittance is measured. The sample substrate 2 is generally fixed by the double-sided tape 6.

Next, as shown in FIG. 7, the sample substrate 2 is moved immediately before the integrating sphere 4 and fixed by the double-sided tape 6. Then, by measuring the transmittance of the light transmitted through the sample substrate 2, the transmittance including the scattered light 5 on the substrate surface can be measured. In this way, the above-mentioned haze ratio is calculated from the following formula by measuring the two kinds of transmitted light including the former linear transmitted light 3 and the latter scattered light 5, that is, diffuse transmitted light. To do. That is, H: haze ratio A: diffuse transmitted light B: straight transmitted light, H = A−B / B · 100. In this way, the surface roughness of the transparent thin film material is calculated.

[0004]

[Problems to be solved by the device]

 In order to accurately calculate the above-mentioned value of the haze ratio, it is necessary to always make the light from the light source incident on the same point on the sample. However, in order to measure the diffuse transmitted light and the linearly transmitted light (or the transmittance), it is necessary to move the sample substrate as shown in FIGS. 6 and 7. The conventional method of moving the sample substrate is manually performed by using a double-sided tape. Therefore, when the sample substrate placed at a specified distance from the integrating sphere side is peeled off from the double-sided tape and then moved to the integrating sphere side and pasted on the double-sided tape, the light incident before and after the movement of the sample substrate is incident. It was very difficult to match the points, and it took a long time to adjust the light incident points.

The present invention has been made to solve the above problems, and an object thereof is to provide a jig for a spectrophotometer capable of calculating a highly accurate haze ratio. There is a thing.

[0006]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, the present invention irradiates a sample with light from a light source, irradiates an integrating sphere with the transmitted light that has passed through the sample, and retains the sample with the above light transmittance. In a jig for a spectrophotometer, which moves a holder from the light source side to the integrating sphere side with a jig to measure, in order to move the sample holder in parallel between the light source side and the integrating sphere side. The guide means and the guide means are configured such that the guide direction is parallel to the measurement light of the transmitted light that is transmitted through the sample from the light source and is irradiated to the integrating sphere, and the guide means is provided on the sample holder. A jig for a spectrophotometer, which is provided with a sliding means capable of sliding along it.

[0007]

[Action]

 In the spectrophotometer jig of the present invention, guide means is provided between the light source side and the integrating sphere side of the spectrophotometer, and the light emitted from the light source passes through the sample in the guide direction of the guide means. Of the light incident on the integrating sphere, it is preset to be parallel to the measurement light, and also the sliding means for sliding along the guide means to the sample holder holding the sample. Is provided, the sample will be completely moved horizontally. Therefore, the spots of light received by the sample on the light source side and the integrating sphere side are at exactly the same spot. This means that when various kinds of transmitted light are measured by changing the measurement position of the sample and the surface roughness of the sample is measured, highly accurate measurement is possible and the sample can be moved easily, so the measurement time Will be significantly shortened.

[0008]

【Example】

 An embodiment of the present invention is shown in FIGS. 1, 2 and 3 and will be described below with reference to the drawings. That is, as described in the conventional example, when linear transmitted light and diffuse transmitted light are measured using a spectrophotometer, the light from the light source 1 is always on the sample substrate 2 regardless of the position of the sample substrate 2. It is necessary to spot the same spot. For this purpose, as shown in FIG. 1, the present proposal includes a sample holder 9 including a support plate 7 for supporting the sample substrate 2 so as to sandwich both surfaces thereof, and a bolt 8 for fixing the support plate 7, and the sample holder. It is provided with a holder mounting jig 10 which is a guide means for translating 9 between the light source 1 side and the integrating sphere 4.

FIG. 2 is an exploded perspective view for explaining the sample holder 9 in detail, and FIG. 3 is a perspective view of the holder mounting jig 10. In FIG. 2, the sample holder 9 is fixed by a bolt 8 so that the sample substrate 2 is sandwiched by two supporting plates 7 on both sides, and the supporting plate 7 has a hole 13 for allowing light to pass therethrough. Each is formed. As shown in FIG. 3, the sample holder 9 has a through hole 11 for passing through the upper guide rail 14 which is a sliding step and a guide groove 12 slidably formed on the lower guide rail 15. As a result, the sample holder 9 can be smoothly translated from the light source 1 side to the integrating sphere 4 side, or vice versa, as shown by the arrow in FIG.

Next, a perspective view of the holder mounting jig 10 shown in FIG. 3 will be described. That is, the upper guide rail 14 and the lower guide rail 15 described above are integrally formed, and are fixed by the pillars 16 standing at the four corners. In particular, in order to make the sample holder 9 detachable, the upper guide rail 14 is provided with a spring retainer fitting 17 on one side as shown in an enlarged view in the drawing circle, and a spring 18 keeps the upper guide rail 14 constantly. The pressing force acts in the direction of the arrow in the figure. With this configuration, if the upper guide rail 14 is pulled against the spring 18 in the direction opposite to the direction of the arrow in the figure, the other end of the upper guide rail 14 will be separated from the column 16, and this will occur. Through the gap, the sample holder 9 can be attached and detached. It should be noted that if a recess is previously formed in a portion where the other end of the upper guide rail 14 abuts on the column 16, the parallel translation of the holder 9 can be performed stably even after the attachment of the supplement holder 9. You can The holder mounting jig 10 is fixed by a jig mounting metal fitting 19, and the metal fitting 19 is further fixed to the main body of the spectrophotometer.

FIG. 4 is a perspective view showing another embodiment of the present invention. As is apparent from the figure, the sample holder 9 is formed with convex portions 20 in two steps on both sides of the holder 9 holding the sample substrate 2 therebetween. On the holder mounting jig 10 side, opposing walls 21 that oppose the convex portion 20 are provided on both sides, and guide grooves 22 are formed inside the opposing wall 21, thereby providing the convex portion 20. The sample holder 9 can be moved in parallel along the guide groove 22. The vertical groove 23 formed opposite to the intermediate portion of the opposing wall 21 is for attaching and detaching the sample holder 9.

FIG. 5 is a perspective view showing another embodiment of the present invention. As is clear from the figure, the sample holder 9 has recesses 24 formed on both sides of the sample substrate 2 sandwiched therebetween. On the other hand, on the holder mounting jig 10 side, a guide convex portion 25 is formed on the counter wall 21 described in FIG. 4 at a position opposed to the concave portion 24 of the sample holder 9, whereby the sample holder 9 is guided by the guide. The parallel movement is possible along the convex portion 25. If the notch 26 is formed in the intermediate portion of the guide protrusion 25 so as to face each other, the sample holder 9 can be attached and detached.

As described above, the holder mounting jig according to the present invention can be set in advance in the direction of various guide means, that is, the guide rail, the guide groove, or the guide convex portion, in parallel with the linearly transmitted light from the light source. For example, the sample can be easily moved in parallel along the guide means, and the spot position of the light irradiated on the sample does not change even if the sample moves. In addition, since the sample is sandwiched between the two support plates, it does not depend on the shape and thickness of the sample, so it is not necessary to shred the sample more than necessary, and the sample can be set. It's easy to do.

[0014]

[Effect of the device]

 As described above, when measuring the surface roughness of a transparent thin film sample using a spectrophotometer, the sample is measured at two points, the light source side and the integrating sphere side, and In the above two measurements from the top, light had to be incident on the same spot on the sample, but the holder mounting jig of the present invention enables parallel movement of the sample, which results in measurement accuracy. In addition, the time required for adjusting the spot of the light on the sample due to the movement of the sample is no longer necessary, and the measurement time can be significantly shortened.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of a jig for a spectrophotometer according to the present invention.

FIG. 2 is an exploded perspective view showing an embodiment of the sample holder according to the present invention.

FIG. 3 is a perspective view showing an embodiment of a holder mounting jig according to the present invention.

FIG. 4 is a perspective view showing another embodiment of the jig for a spectrophotometer according to the present invention.

FIG. 5 is a perspective view showing still another embodiment of the jig for a spectrophotometer according to the present invention.

FIG. 6 is a conceptual diagram of a conventional spectrophotometer.

FIG. 7 is a conceptual diagram of a conventional spectrophotometric type.

[Explanation of symbols]

 1 light source 2 sample substrate 4 integrating sphere 6 double-sided tape 7 support plate 9 sample holder 10 holder mounting jig 11 through holes 12, 22 guide groove 14 upper guide rail 15 lower guide rail 20 convex portion 21 counter wall 23 vertical groove 24 concave portion 25 Guide projection 26 Notch

Claims (1)

[Reference number] 0030722-01 [Claims for utility model registration] 1. A sample holder, which irradiates a sample with light from a light source and irradiates the integrating sphere with transmitted light that has passed through the sample, holds the sample with light transmittance from the light source side to the integrating sphere side. In a spectrophotometer jig which is moved by a jig to measure, a guide means for moving the sample holder in parallel between the light source side and the integrating sphere side, and the guide means is a guide direction thereof. Is configured to be parallel to the measurement light of the transmitted light that is transmitted through the sample from the light source and is irradiated to the integrating sphere, and the sample holder and the sliding means that can slide along the guide means. A jig for a spectrophotometer, which is characterized by being provided.