JPH0562685B2 - - Google Patents
Info
- Publication number
- JPH0562685B2 JPH0562685B2 JP60081478A JP8147885A JPH0562685B2 JP H0562685 B2 JPH0562685 B2 JP H0562685B2 JP 60081478 A JP60081478 A JP 60081478A JP 8147885 A JP8147885 A JP 8147885A JP H0562685 B2 JPH0562685 B2 JP H0562685B2
- Authority
- JP
- Japan
- Prior art keywords
- speckle
- inspected
- excitation
- component lead
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 29
- 238000001514 detection method Methods 0.000 claims description 21
- 230000002123 temporal effect Effects 0.000 claims description 14
- 230000005284 excitation Effects 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 230000001427 coherent effect Effects 0.000 claims description 4
- 230000007547 defect Effects 0.000 description 26
- 238000007689 inspection Methods 0.000 description 25
- 230000002950 deficient Effects 0.000 description 16
- 230000003287 optical effect Effects 0.000 description 16
- 238000009825 accumulation Methods 0.000 description 10
- 238000007664 blowing Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000005476 soldering Methods 0.000 description 5
- 230000005291 magnetic effect Effects 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000002907 paramagnetic material Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60081478A JPS61240105A (ja) | 1985-04-18 | 1985-04-18 | 接合状態検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60081478A JPS61240105A (ja) | 1985-04-18 | 1985-04-18 | 接合状態検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61240105A JPS61240105A (ja) | 1986-10-25 |
| JPH0562685B2 true JPH0562685B2 (de) | 1993-09-09 |
Family
ID=13747515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60081478A Granted JPS61240105A (ja) | 1985-04-18 | 1985-04-18 | 接合状態検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61240105A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4967093A (en) * | 1988-06-22 | 1990-10-30 | Hamamatsu Photonics Kabushiki Kaisha | Deformation measuring method and device using cross-correlation function between speckle patterns with reference data renewal |
| JPH03128405A (ja) * | 1989-10-12 | 1991-05-31 | Keyence Corp | フォーミングマシン等における材料の送り量検出装置 |
| JP6838682B2 (ja) * | 2018-06-11 | 2021-03-03 | 株式会社島津製作所 | 欠陥検出方法及び装置 |
-
1985
- 1985-04-18 JP JP60081478A patent/JPS61240105A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61240105A (ja) | 1986-10-25 |
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