JPH0560989A - Raster scanner - Google Patents

Abstract

PURPOSE:To perform high-speed raster scanning without increasing the driving speed of an XY-direction deflector neither preparing a high-intensity light source. CONSTITUTION:In the caster scanner which irradiates the surface of a mask 3 with circular beam light R1 from a light source 1 by an XY-direction deflector 2, a cylindrical lens 5A or a prism 5B is arranged in the optical path between the light source 1 and the XY-direction deflector 2 or in the optical path in the XY-direction deflector 2 so that the major axis of the cylindrical lens 5A is orthogonal to the raster scanning direction or the top side of the prism 5B divides the incident beam light R1 into two and coincides with the raster scanning direction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a raster scanning device capable of high speed raster scanning.

[0002]

2. Description of the Related Art Conventionally, a typical example of this type of raster scanning device will be described with reference to FIG. This raster scanning device
The laser light from the laser oscillator 1 is supplied to the XY direction deflector 2 (in this example, the Y direction deflector is a galvanometer scanner 2Y,
The X-direction deflector is configured to irradiate the liquid crystal mask 3 with raster by a polygon mirror scanner 2X). The application configuration of the raster scanning device in the figure is such that the work 4 is irradiated with the raster light from the raster scanning device and the pattern on the liquid crystal mask is printed on the work.

As another conventional technique, an XY direction deflector 2 is used.
Is a polygon mirror scanner for the Y-direction deflector, a galvanometer scanner for the X-direction deflector, and a galvanometer scanner for both, and can be rotated, swung, or moved with such a galvanometer scanner or polygon mirror scanner. A combination of a lens system such as a spherical lens, a cylindrical lens or a prism is known. As the mask 3, a fixed mask having a fixed pattern is also known. The application configuration of the raster scanning device is such that the work 3 is directly irradiated with the mask 3 as described above.
And a work 4 further provided with a second XY direction deflector,
Irradiating the work 4 through the second XY direction deflector,
Various known.

By the way, in the raster scanning, as shown in the figure, the beam light is moved in the lateral direction (the X direction) from the left end to the right end of the upper first row on the mask 3 by the X direction deflector 2X. After being irradiated in order, the Y-direction deflector 2Y causes a line feed on the next line in the vertical direction (referred to as the Y-direction), and the X-direction is repeated again.
Irradiation is performed from the left end to the right end of the next row by the direction deflector 2X, and this is irradiation that is sequentially performed to the right end of the bottom row. The “raster scanning direction” in the present invention means the above “X
"Direction".

[0005]

By the way, as one means for improving the efficiency of raster scanning, reduction of raster scanning time can be mentioned. In this case, it is roughly classified into increasing the driving speed of the XY direction deflector (a) and increasing the diameter of the beam light for raster irradiation (b). However, these have the following disadvantages.

In the case of (a), the raster scanning time is shortened, but a problem occurs in high-speed drive control of the XY direction deflector. For example, referring to the raster scanning device of FIG. 6, it is usually 10 mm / 2 to 3 ms due to the rotation of the polygon mirror scanner 2X (depending on the number of the surfaces, the laser intensity, the work material and the mask length in the X direction). The raster scanning is performed at a speed of. In this case, the responsiveness of the galvanometer scanner 2Y that controls line feed during raster scanning (time required from driving to stop during line feed) is required to be about 2 ms. That is,
In order to make the galvanometer scanner 2Y respond in a timely manner within such a minute time, various problems such as inertia of the galvanometer scanner 2Y, rattling, and interruption of the control signal from external noise will occur. That is, even if the driving speed of the XY direction deflector is simply increased,
The reality is that there are many problems.

In the case of (b), since the number of line feeds during raster scanning is reduced, the raster scanning time itself is shortened, but the light source 1 becomes large. In other words, a high intensity light source is needed. That is, as shown in FIGS. 7 to 8,
If the diameter of the beam light is doubled or more, it is necessary to prepare a high-intensity light source proportional to the square of the multiple of the diameter.

The present invention focuses on the above-mentioned conventional problems, and
An object of the present invention is to provide a raster scanning device capable of high-speed raster scanning without increasing the driving speed of the direction deflector and without preparing a high intensity light source.

[0009]

In order to achieve the above-mentioned object, the raster scanning apparatus according to the present invention will be described with reference to FIG. 1, and a circular beam light from a light source 1 is deflected by an XY direction deflector 2. In a raster scanning device for irradiating the mask 3 with the raster, a cylindrical lens 5A is arranged in the optical path between the light source 1 and the XY direction deflector 2 such that its long axis is orthogonal to the raster scanning direction. And As a result, the circular light beam from the light source 1 becomes an elliptical shape having a long axis in a direction orthogonal to the raster scanning direction after passing through the cylindrical lens 5A (claim 1).

Further, as shown in FIG.
In the above configuration, the cylindrical lens 5A may be arranged in the optical path in the XY direction deflector 2, and in this case also, similarly to the above, the circular beam light from the light source 1 is transmitted through the cylindrical lens 5A and then rasterized. It becomes an ellipse having a long axis in a direction orthogonal to the scanning direction (claim 2).

Further, referring to FIGS. 1 and 4, in the raster scanning device in which the circular beam light from the light source 1 is raster-irradiated onto the mask 3 by the XY direction deflector 2, the light source 1 and the XY direction deflection are performed. Prism 5B in the optical path between
May be arranged so that its top side 51 bisects the incident beam light and coincides with the raster scanning direction.
In this case, the circular light beam from the light source 1 is emitted from the prism 5
After passing through B, it becomes an ellipse having a major axis in a direction orthogonal to the raster scanning direction (claim 3).

2 and 4, the prism 5B may be arranged in the optical path in the XY direction deflector 2. In this case, the light source 1 is also the same as above.
After passing through the prism 5B, the circular beam light from is an elliptical shape having a long axis in a direction orthogonal to the raster scanning direction (claim 4).

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the raster scanning device of the present invention will be described below with reference to FIGS. FIG. 1 is a diagram showing a first embodiment. In the figure, the laser light from the laser oscillator 1 is applied to the liquid crystal mask 3 via the cylindrical lens 5A, the galvanometer scanner 2Y, the condenser lens 6 and the polygon mirror scanner 2X.
The polygon mirror scanner 2X has 36 surfaces, and each surface corresponds to one row in the X direction on the liquid crystal mask 3, while the galvanometer scanner 2Y moves from one surface to the next by rotation of the polygon mirror scanner 2X itself. The laser beam is deflected in the Y direction by one minute deviation angle while the receiving position of the laser beam is moved to one surface. The condenser lens 6 condenses the reflected laser light of the entire deflection area by the galvanometer scanner 2Y on one point of each surface of the polygon mirror scanner 2X, and makes the incident light to the polygon mirror scanner 2X and the polygon mirror scanner 2X. In addition to correcting the deviation angle difference of each reflected light to be uniform, it contributes to downsizing of the polygon mirror scanner 2X itself. The cylindrical lens 5A is arranged such that its major axis is orthogonal to the raster scanning direction (claim 1).
Is an example of).

A second embodiment is shown in FIG. In this example,
The cylindrical lens 5A is arranged between the galvanometer scanner 2Y, which is a Y-direction deflector, and the condenser lens 6 (the first embodiment of claim 2).

In the third embodiment, although not shown, a cylindrical lens 5A is arranged between the condenser lens 6 and the polygon mirror scanner 2X serving as an X-direction deflector (claim 2). It is an example).

The operation of the above first to third embodiments will be described with reference to FIG. As shown in the figure, the laser light R1 incident on the cylindrical lens 5A has a circular cross-sectional shape, but since the cylindrical lens 5A is arranged so that its major axis is orthogonal to the raster scanning direction, The cross-sectional shape of the laser light that has passed through the cylindrical lens 5A becomes an ellipse having a major axis in the Y direction.

The fourth embodiment borrows FIG. 1 and FIG.
The prism 5B is replaced by the prism 5B in the optical path between the laser oscillator 1 and the galvanometer scanner 2Y instead of the cylindrical lens 5A in the first embodiment. Is divided into two and the top side 51 of the prism 5B is aligned with the raster scanning direction (the embodiment of claim 3).

The fifth embodiment borrows FIG. 2 and FIG.
The prism 5B of the fourth embodiment will be described with reference to FIG.
A galvanometer scanner 2Y which is a Y-direction deflector,
It is arranged between the condenser lens 6 and the condenser lens 6 (the first embodiment of the third aspect).

In the sixth embodiment, similarly borrowing FIG. 2 and explaining with reference to FIG. 4, the prism 5B of the fifth embodiment is replaced with a condenser lens 6 and a polygon serving as an X-direction deflector. It is arranged between the mirror scanner 2X and the mirror scanner 2X (which is the second embodiment of claim 3).

The operation of the above fourth to sixth embodiments will be described with reference to FIG. As shown in the figure, the laser light R1 incident on the prism 5B has a circular cross-sectional shape, but the prism 5B divides the incident beam light into two by the top side 51 of the prism 5B, and Since the top side 51 of the prism 5B is arranged so as to coincide with the raster scanning direction, the cross-sectional shape of the laser light that has passed through the floor prism 5B becomes an ellipse whose major axis is in the Y direction.

To list other embodiments, the XY direction deflector 2 is a polygon mirror scanner for the Y direction deflector and a galvanometer scanner for the X direction deflector, as described in the section of the prior art. Further, both may be a galvanometer scanner, or a combination of such a galvanometer scanner or a polygon mirror scanner and a lens system such as a spherical lens, a cylindrical lens or a prism that can be rotated, rocked or moved. The liquid crystal mask 3 may also be a fixed mask having a fixed pattern.

According to the above-mentioned embodiment, the laser light whose cross-sectional shape is originally circular is changed without changing the light source 1.
As shown in FIG. 5, since an elliptical laser beam having a long axis in the Y direction can be formed on the mask 3, the number of line feeds in raster scanning can be saved. That is, it is possible to perform high-speed raster scanning without having to increase the driving speed of the XY direction deflector.

[0023]

As described above, according to the raster scanning device of the present invention, the circular light beam R1 from the light source 1 is transmitted in the XY direction.
In a raster scanning device for irradiating the mask 3 surface with raster by the direction deflector 2, a cylindrical lens 5A or a prism 5B is provided in the optical path between the light source 1 and the XY direction deflector 2 or in the XY direction deflector 2. In the optical path, if the cylindrical lens 5A has its major axis orthogonal to the raster scanning direction, or if it has the prism 5B, its apex divides the incident beam light R1 into two, and the raster scanning direction. The raster scanning light on the mask 3 becomes the elliptical shape R2 having the long axis in the Y direction because the arrangement is made so as to coincide with. Therefore, high speed raster scanning can be performed without increasing the driving speed of the XY direction deflector and without preparing a high intensity light source.

[Brief description of drawings]

FIG. 1 is an external configuration diagram of a raster scanning device according to a first embodiment of the present invention.

FIG. 2 is an external configuration diagram of a raster scanning device according to a second embodiment of the present invention.

FIG. 3 is a diagram for explaining the operation of a cylindrical lens relating to the raster scanning device of the present invention.

FIG. 4 is a diagram illustrating the operation of a prism related to the raster scanning device of the present invention.

FIG. 5 is a diagram of raster irradiation on the mask surface in the raster scanning device of the present invention, which is a diagram for explaining the effect of the present invention.

FIG. 6 is an external configuration diagram of a conventional raster scanning device.

FIG. 7 is a diagram of raster irradiation on a mask surface in a conventional raster scanning device.

FIG. 8 is a diagram of raster irradiation by irradiation light with a diameter twice as large as a mask surface in a conventional raster scanning device.

[Explanation of symbols]

 1 Light Source 2 XY Direction Deflector 3 Mask 5A Cylindrical Lens 5B Prism R1 Circular Beam Light R2 Mask Irradiation Light

Claims (4)

[Claims] 1. A raster scanning device for raster-irradiating a circular beam of light from a light source 1 onto a mask 3 by means of an XY direction deflector 2, wherein a cylindrical lens 5A is provided in an optical path between the light source 1 and the XY direction deflector 2. A raster scanning device characterized by being arranged such that its long axis is orthogonal to the raster scanning direction. 2. In a raster scanning device for irradiating a circular beam of light from a light source 1 on a mask 3 by an XY direction deflector 2 in a raster manner, a cylindrical lens 5A having a long axis is provided in an optical path in the XY direction deflector 2. A raster scanning device characterized by being arranged so as to be orthogonal to the raster scanning direction. 3. A raster scanning device for raster-irradiating a circular beam of light from a light source 1 onto a mask 3 by an XY direction deflector 2, wherein a prism 5B is provided in an optical path between the light source 1 and the XY direction deflector 2. Its top 51 bisects the incident beam of light,
A raster scanning device characterized by being arranged so as to coincide with the raster scanning direction. 4. A raster scanning device for irradiating a circular beam of light from a light source 1 on a mask 3 by a XY direction deflector 2 in a raster manner, and a prism 5B is provided in an optical path in the XY direction deflector 2.
The raster scanning device is characterized in that the top side 51 divides the incident light beam into two and is aligned with the raster scanning direction.