JPH0560562A - Vibrating gyroscope - Google Patents

Vibrating gyroscope

Info

Publication number
JPH0560562A
JPH0560562A JP3244057A JP24405791A JPH0560562A JP H0560562 A JPH0560562 A JP H0560562A JP 3244057 A JP3244057 A JP 3244057A JP 24405791 A JP24405791 A JP 24405791A JP H0560562 A JPH0560562 A JP H0560562A
Authority
JP
Japan
Prior art keywords
variable resistor
piezoelectric elements
driving
side surfaces
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3244057A
Other languages
Japanese (ja)
Inventor
Kokichi Terajima
厚吉 寺嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akai Electric Co Ltd
Original Assignee
Akai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akai Electric Co Ltd filed Critical Akai Electric Co Ltd
Priority to JP3244057A priority Critical patent/JPH0560562A/en
Publication of JPH0560562A publication Critical patent/JPH0560562A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a vibrating gyroscope in which the relation in phase between the output voltage of a driving piezoelectric element and a driving AC voltage is stabilzed so that sensitivity toward angular velocities is stablized by feeding back the output voltage of the driving piezoelectric element itself. CONSTITUTION:A vibrator 5 comprises piezoelectric elements 9, 10 stuck to at least two adjacent side faces of a vibrator 1 having a polygonal cross section. The two fixed terminals of a variable resistor 6 are connected to the piezoelectric elements 9, 10 stuck to adjacent side faces of the vibrator 1 and are used as terminals for feedback and for detection and the movable terminal of the variable resistor 6 is used as a drive terminal.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は振動ジャイロ、特に、角
速度を検出するための非回転体の機械式振動ジャイロに
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyro, and more particularly to a non-rotating mechanical vibrating gyro for detecting angular velocity.

【0002】[0002]

【従来の技術】従来、この種の振動ジャイロは、ジャイ
ロ特有の回転素子を有しない機械式の振動ジャイロであ
り、例えば図4に示すものがある。即ち、この振動ジャ
イロは、横断面が三角形状の振動体1の3つの側面に駆
動用の圧電素子2および3と、帰還用の圧電素子4とが
貼着された振動子5を具え、これら駆動用の圧電素子
2、3に可変抵抗器6の両固定端子を接続し、駆動回路
7から駆動用交流電圧を可変抵抗器6の可動端子に加え
るとともに帰還用の圧電素子4の出力電圧を駆動回路7
に帰還し、駆動用交流電圧と、帰還用の圧電素子4の出
力電圧との位相関係を一定に保つようにして自励振動を
生ぜしめるような構成がとられている。
2. Description of the Related Art Conventionally, this type of vibrating gyro is a mechanical vibrating gyro that does not have a rotating element peculiar to the gyro, for example, there is one shown in FIG. That is, this vibrating gyro includes a vibrator 5 in which driving piezoelectric elements 2 and 3 and a returning piezoelectric element 4 are attached to three side surfaces of a vibrating body 1 having a triangular cross section. Both fixed terminals of the variable resistor 6 are connected to the driving piezoelectric elements 2 and 3, and the driving AC voltage is applied to the movable terminal of the variable resistor 6 from the driving circuit 7 and the output voltage of the feedback piezoelectric element 4 is applied. Drive circuit 7
To generate a self-excited vibration by keeping the phase relationship between the driving AC voltage and the output voltage of the feedback piezoelectric element 4 constant.

【0003】かかる振動子5は、それ自体を振動中に回
転させると、振動方向と回転方向との双方向に直交する
方向にコリオリの力が発生するので、この力を変位、歪
みまたは容量変化として検出することで回転角速度を計
測し得るようにしている。
When the vibrator 5 rotates itself during vibration, a Coriolis force is generated in a direction orthogonal to both the vibration direction and the rotation direction. Therefore, this force is displaced, strained or changed in capacitance. The rotational angular velocity can be measured by detecting as.

【0004】従って、上記コリオリの力が発生すると、
前記駆動用圧電素子2、3間には電圧差を生じるため、
駆動用圧電素子2および3の電圧を検出回路8にそれぞ
れ接続して差動するなどの手段により角速度の測定がで
き、また、駆動用の圧電素子2および3の静電容量値に
差がある場合、および駆動用の圧電素子2および3を貼
着した振動子1の2つの側面にそれぞれ直交する方向の
共振周波数に差がある場合には、駆動用の圧電素子2お
よび3間の電圧に位相ずれを生じ、角速度の正確な測定
が困難となるため、駆動用の圧電素子2および3に接続
される抵抗値を可変抵抗器6によって調整し、出力電圧
が同位相となるようにして使用している。
Therefore, when the Coriolis force is generated,
Since a voltage difference is generated between the driving piezoelectric elements 2 and 3,
The angular velocity can be measured by means such as connecting the voltages of the driving piezoelectric elements 2 and 3 to the detection circuit 8 and making a differential, and there is a difference in the electrostatic capacitance values of the driving piezoelectric elements 2 and 3. In this case, and when there is a difference in the resonance frequency in the directions orthogonal to the two side surfaces of the vibrator 1 to which the piezoelectric elements 2 and 3 for driving are attached, the voltage between the piezoelectric elements 2 and 3 for driving is different. Since a phase shift occurs and it becomes difficult to measure the angular velocity accurately, the resistance value connected to the driving piezoelectric elements 2 and 3 is adjusted by the variable resistor 6 so that the output voltages have the same phase. is doing.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上述し
た構成の振動ジャイロでは、帰還用の圧電素子4が駆動
用の圧電素子2および3とは独立した別の圧電素子で構
成されているため、温度変化等により各圧電素子2およ
び3のインピーダンス変化に差を生じると、駆動用交流
電圧と帰還用の圧電素子4の出力電圧との位相関係が変
動し、振動子5の自励振動の条件が変化することにな
り、角速度に対する感度が変化する等の欠点がある。ま
た、最小限3つの圧電素子を貼着する必要があるため、
組立作業が面倒である。
However, in the vibrating gyroscope having the above-mentioned structure, the piezoelectric element 4 for feedback is composed of another piezoelectric element independent of the piezoelectric elements 2 and 3 for driving. When a difference occurs in the impedance change of each piezoelectric element 2 and 3 due to a change or the like, the phase relationship between the driving AC voltage and the output voltage of the feedback piezoelectric element 4 changes, and the condition of the self-excited vibration of the vibrator 5 is changed. However, there is a defect that the sensitivity to angular velocity changes. Also, since it is necessary to attach at least three piezoelectric elements,
Assembly work is troublesome.

【0006】本発明の目的は、駆動圧電素子自体の出力
電圧を帰還させることにより、温度変化等によって圧電
素子のインピーダンス変化に差が生じても、圧電素子の
出力電圧と駆動用交流電圧との位相関係を安定化し、角
速度に対する感度を安定化し得るようにした上述した種
類の振動ジャイロを提供せんとすることにある。
An object of the present invention is to feed back the output voltage of the driving piezoelectric element itself so that the output voltage of the piezoelectric element and the driving AC voltage are different from each other even if a difference in impedance change of the piezoelectric element occurs due to a temperature change or the like. It is an object of the present invention to provide a vibration gyro of the type described above, which stabilizes the phase relationship and the sensitivity to angular velocity.

【0007】本発明の他の目的は、振動体に対し最小限
2つの圧電素子で振動子を構成し、組立工程を簡略化し
得るようにした上述した種類の振動ジャイロを提供せん
とすることにある。
Another object of the present invention is to provide a vibrating gyro of the above-mentioned type in which a vibrating body is constituted by a vibrator with a minimum of two piezoelectric elements and the assembly process can be simplified. is there.

【0008】[0008]

【課題を解決するための手段】本発明にかかる振動ジャ
イロは、横断面形状が多角形の振動体の少なくとも隣接
する2側面に、圧電素子を貼着して振動子を構成し、前
記振動体の隣接する各側面に貼着した圧電素子に、可変
抵抗器の2つの固定端子をそれぞれ接続し、この可変抵
抗器の2つの固定端子を帰還用および検出用端子とし、
この可変抵抗器の可動端子を駆動用端子として用いるよ
うにしたことを特徴とするものである。
In a vibrating gyroscope according to the present invention, a piezoelectric element is attached to at least two adjacent side surfaces of a vibrating body having a polygonal cross section to form a vibrating body. The two fixed terminals of the variable resistor are respectively connected to the piezoelectric elements attached to the adjacent side surfaces of the variable resistor, and the two fixed terminals of the variable resistor are used as the feedback and detection terminals.
The movable terminal of this variable resistor is used as a driving terminal.

【0009】また、本発明にかかる他の振動ジャイロ
は、横断面形状が多角形の振動体の少なくとも平行でな
い2側面に圧電素子を貼着して振動子を構成し、前記振
動子のそれぞれ平行な側面に貼着した圧電素子の組に共
通して可変抵抗器の2つの固定端子の一端を接続し、こ
の固定端子の他端を、平行する側面とは平行しないもの
の、互いは平行する側面に貼着した圧電素子の組に共通
して接続し、前記可変抵抗器の可動端子を駆動用端子と
し、前記可変抵抗器の2つの固定端子を帰還用および検
出用端子として用いるようにしたことを特徴とするもの
である。
In another vibrating gyroscope according to the present invention, a piezoelectric element is attached to at least two non-parallel side surfaces of a vibrating body having a polygonal cross section to form a vibrating element, and the vibrating elements are parallel to each other. Common to a set of piezoelectric elements attached to different side surfaces, one end of two fixed terminals of the variable resistor is connected, and the other end of these fixed terminals is not parallel to the parallel side surfaces, but is parallel to each other. Connected in common to a set of piezoelectric elements attached to the variable resistor, the movable terminal of the variable resistor is used as a driving terminal, and the two fixed terminals of the variable resistor are used as feedback and detection terminals. It is characterized by.

【0010】[0010]

【作用】本発明においては、横断面形状が多角形, 例え
ば、三角形や四角形の振動体1の少なくとも隣接する2
側面に、圧電素子9および10を貼着して振動子5を構成
し、この振動体1の隣接する各側面に貼着した圧電素子
9, 10に、可変抵抗器6の2つの固定端子をそれぞれ接
続し、この可変抵抗器6の2つの固定端子を帰還用およ
び検出用端子とし、この可変抵抗器6の可動端子を駆動
用端子として用いるようにする。
In the present invention, the vibrating body 1 having a polygonal transverse cross section, for example, a triangle or a quadrangle, has at least two adjacent vibrating bodies 1.
The piezoelectric elements 9 and 10 are attached to the side surfaces to form the vibrator 5, and the two fixed terminals of the variable resistor 6 are attached to the piezoelectric elements 9 and 10 attached to the adjacent side surfaces of the vibrating body 1. The variable resistors 6 are connected to each other, and the two fixed terminals of the variable resistor 6 are used as feedback and detection terminals, and the movable terminal of the variable resistor 6 is used as a driving terminal.

【0011】また、本発明においては、横断面が多角形
形状の振動体1の少なくとも平行でない2側面に圧電素
子(9,10;13,14)を貼着して振動子5を構成し、こ
の振動体1のそれぞれ平行な側面に貼着した圧電素子の
組(9,13)に共通して可変抵抗器の2つの固定端子の
一端を接続し、この固定端子の他端を前記平行な側面と
は平行しないものの、互いがそれぞれ平行となる他の側
面に貼着した圧電素子の組(10,14)に共通して接続
し、前記可変抵抗器6の可動端子を駆動用端子とし、前
記可変抵抗器の2つの固定端子を帰還用および検出用端
子として用いるようにする。
Further, in the present invention, the piezoelectric element (9, 10; 13, 14) is attached to at least two non-parallel side surfaces of the vibrating body 1 having a polygonal cross section to form the vibrator 5, One end of two fixed terminals of the variable resistor is connected in common to the set of piezoelectric elements (9, 13) attached to the parallel side surfaces of the vibrating body 1, and the other end of the fixed terminals is connected to the parallel side. Although not parallel to the side surface, they are commonly connected to a set of piezoelectric elements (10, 14) attached to the other side surfaces that are parallel to each other, and the movable terminal of the variable resistor 6 is used as a driving terminal, Two fixed terminals of the variable resistor are used as a feedback terminal and a detection terminal.

【0012】このように構成された本発明振動ジャイロ
によれば、可変抵抗器6を調整することで位相を一致さ
せた圧電素子(9,10,13,14)の出力電圧自体を帰還
用及び検出用として用いるので、駆動用交流電圧と帰還
させる電圧との間の位相関係が一定に保たれた自励振動
を実現させることができ、温度変化による角速度に対す
る感度の変化を抑えることができる。
According to the vibrating gyroscope of the present invention constructed as described above, the output voltage itself of the piezoelectric elements (9, 10, 13, 14) whose phases are matched by adjusting the variable resistor 6 is used for feedback and Since it is used for detection, it is possible to realize self-excited vibration in which the phase relationship between the driving AC voltage and the voltage to be fed back is kept constant, and it is possible to suppress the change in sensitivity with respect to the angular velocity due to temperature change.

【0013】[0013]

【実施例】以下、この発明の実施例を図面に基づいて説
明する。図1は、本発明振動ジャイロの一実施例を示す
図であり、図中図4に示す従来技術で説明した部分と同
一部分にはそれらと同一の番号を付して示す。横断面が
四角形の振動体1の側面に圧電素子9を貼着し、さらに
これと隣接する側面に圧電素子10を貼着して振動子5を
構成する。これら圧電素子9および10に可変抵抗器6の
両固定端子をそれぞれ接続し、駆動回路11から駆動用交
流電圧を可変抵抗器6の可動端子に印加する。そして、
圧電素子9および10と可変抵抗器6の両固定端子との接
続部の出力電圧を駆動回路11にそれぞれ帰還し、駆動用
交流電圧と出力電圧との位相関係を一定に保つようにし
て自励振動を発生させるようにする。この際、2つの出
力電圧の位相を一致させるように可変抵抗器6の可動端
子を調整する。さらに、これら圧電素子9および10と可
変抵抗器6の両固定端子との接続部の出力電圧を検出回
路12にそれぞれ供給して、出力電圧の差を角速度として
測定する。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing an embodiment of a vibrating gyroscope according to the present invention. In the figure, the same parts as those described in the prior art shown in FIG. 4 are designated by the same reference numerals. The piezoelectric element 9 is attached to the side surface of the vibrating body 1 having a quadrangular cross section, and the piezoelectric element 10 is further attached to the side surface adjacent thereto to form the vibrator 5. Both fixed terminals of the variable resistor 6 are connected to the piezoelectric elements 9 and 10, and a driving AC voltage is applied from the drive circuit 11 to the movable terminal of the variable resistor 6. And
The output voltage at the connection between the piezoelectric elements 9 and 10 and both fixed terminals of the variable resistor 6 is fed back to the drive circuit 11 to keep the phase relationship between the drive AC voltage and the output voltage constant and self-excited. Try to generate vibration. At this time, the movable terminal of the variable resistor 6 is adjusted so that the phases of the two output voltages match. Further, the output voltage at the connection between the piezoelectric elements 9 and 10 and both fixed terminals of the variable resistor 6 is supplied to the detection circuit 12, and the difference between the output voltages is measured as the angular velocity.

【0014】次に、本発明にかかる振動ジャイロの他の
例を図2に示す。本例では、図1に示す例とは次に示す
点が相違する。即ち、横断面形状が四角形の振動体1の
側面に圧電素子9を貼着し、これと平行な側面に圧電素
子13を貼着し、さらに、これら圧電素子に隣接しこれと
平行でない側面に圧電素子10を貼着し、これと平行な側
面に圧電素子14を貼着して振動子5を構成する点であ
る。その他の点は図1に示すものと同一である。すなわ
ち、可変抵抗器6の固定端子の1端を圧電素子9および
13にそれぞれ接続し、固定端子の他端を圧電素子10およ
び14にそれぞれ接続して図1に示す例と同様に自励振動
を発生させ、これによって角速度の検出を行うようにす
る。
Next, another example of the vibrating gyroscope according to the present invention is shown in FIG. This example is different from the example shown in FIG. 1 in the following points. That is, the piezoelectric element 9 is attached to the side surface of the vibrating body 1 having a quadrangular cross-sectional shape, the piezoelectric element 13 is attached to the side surface parallel to the same, and further to the side surface adjacent to and not parallel to these piezoelectric elements. The piezoelectric element 10 is attached, and the piezoelectric element 14 is attached to the side surface parallel to the piezoelectric element 10 to form the vibrator 5. The other points are the same as those shown in FIG. That is, one end of the fixed terminal of the variable resistor 6 is connected to the piezoelectric element 9 and
13 and the other ends of the fixed terminals are connected to the piezoelectric elements 10 and 14, respectively, and self-excited vibration is generated as in the example shown in FIG. 1, whereby the angular velocity is detected.

【0015】本発明にかかる振動ジャイロのさらに他の
例を図3に示す。本例では、横断面形状が三角形の振動
体1の互いに隣接する側面に図1に示す例の場合と同様
に圧電素子9および10を貼着し、これら圧電素子に可変
抵抗器6の両固定端子を接続し、その可変端子に駆動回
路11から駆動用交流電圧を供給して振動子5を自励振動
させ、これによって角速度の検出を行なわせるようす
る。上述したように本例では、振動体1の横断面形状が
異なる点以外は図1に示す例と全く同様であるので、そ
の詳細な説明は省略する。
Still another example of the vibrating gyroscope according to the present invention is shown in FIG. In this example, the piezoelectric elements 9 and 10 are attached to the side surfaces of the vibrating body 1 having a triangular cross-sectional shape adjacent to each other as in the example shown in FIG. 1, and both the variable resistors 6 are fixed to these piezoelectric elements. The terminals are connected, and a driving AC voltage is supplied to the variable terminals from the driving circuit 11 to cause the vibrator 5 to self-oscillate, thereby detecting the angular velocity. As described above, this example is exactly the same as the example shown in FIG. 1 except that the cross-sectional shape of the vibrating body 1 is different, and therefore a detailed description thereof will be omitted.

【0016】[0016]

【発明の効果】本発明は上述した構成とすることによ
り、温度変化等によって圧電素子のインピーダンス変化
に差を生じても駆動している圧電素子自体の出力電圧を
帰還させるので駆動用交流電圧との位相関係が安定し、
角速度に対する感度を著しく安定化させることができ
る。また、振動体に対し最小限2つの圧電素子により振
動子を構成することができるので、組立工程を簡略化す
ることができる。また、貼着する圧電素子の数を増大さ
せた場合、そのすべての圧電素子を駆動させることがで
きるので、振動の振幅が大きくなり検出感度をも向上さ
せることができる。
According to the present invention having the above-mentioned structure, the output voltage of the driving piezoelectric element itself is fed back even if the impedance change of the piezoelectric element is changed due to temperature change or the like. The phase relationship of is stable,
The sensitivity to angular velocity can be significantly stabilized. Further, since the vibrator can be constituted by at least two piezoelectric elements for the vibrating body, the assembling process can be simplified. Further, when the number of piezoelectric elements to be attached is increased, all the piezoelectric elements can be driven, so that the amplitude of vibration is increased and the detection sensitivity can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明振動ジャイロの一実施例の構成を示す説
明図である。
FIG. 1 is an explanatory diagram showing a configuration of an embodiment of a vibrating gyroscope of the present invention.

【図2】本発明振動ジャイロの他の実施例の構成を示す
説明図である。
FIG. 2 is an explanatory diagram showing the configuration of another embodiment of the vibration gyro of the present invention.

【図3】本発明振動ジャイロの更に他の実施例の構成を
示す説明図である。
FIG. 3 is an explanatory view showing the constitution of still another embodiment of the vibration gyro of the present invention.

【図4】従来の振動ジャイロの例を示す説明図である。FIG. 4 is an explanatory diagram showing an example of a conventional vibrating gyro.

【符号の説明】[Explanation of symbols]

1 振動体 2、3 駆動用圧電素子 4 帰還用圧電素子 5 振動子 6 可変抵抗器 7 駆動回路 8 検出回路 9、10、13、14 圧電素子 11 駆動回路 12 検出回路 1 Vibrating body 2, 3 Driving piezoelectric element 4 Feedback piezoelectric element 5 Transducer 6 Variable resistor 7 Driving circuit 8 Detection circuit 9, 10, 13, 14 Piezoelectric element 11 Driving circuit 12 Detection circuit

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 横断面形状が多角形の振動体の少なくと
も隣接する2側面に圧電素子を貼着して振動子を構成
し、前記振動体の隣接する各側面に貼着した圧電素子に
可変抵抗器の2つの固定端子をそれぞれ接続し、この可
変抵抗器の2つの固定端子を帰還用および検出用端子と
し、この可変抵抗器の可動端子を駆動用端子として用い
るようにしたことを特徴とする振動ジャイロ。
1. A vibrator is constructed by attaching piezoelectric elements to at least two adjacent side surfaces of a vibrating body having a polygonal cross section, and the piezoelectric element is attached to each of the adjacent side surfaces of the vibrating body. Two fixed terminals of the resistor are respectively connected, the two fixed terminals of the variable resistor are used as feedback and detection terminals, and the movable terminal of the variable resistor is used as a driving terminal. A vibrating gyro.
【請求項2】 横断面形状が多角形の振動体の少なくと
も平行でない2側面に圧電素子を貼着して振動子を構成
し、前記振動体のそれぞれ平行な側面に貼着した圧電素
子の組に共通して可変抵抗器の2つの固定端子の一端を
接続し、この固定端子の他端を、平行する前記側面とは
平行しないものの、互いは平行する側面に貼着した圧電
素子の組に共通して接続し、前記可変抵抗器の可動端子
を駆動用端子とし、前記可変抵抗器の2つの固定端子を
帰還用端子および検出用端子として用いるようにしたこ
とを特徴とする振動ジャイロ。
2. A vibrating body having a polygonal transverse cross section, wherein piezoelectric elements are attached to at least two non-parallel side surfaces of the vibrating body to form a vibrator, and a set of piezoelectric elements attached to the respective parallel side surfaces of the vibrating body. Is connected to one end of two fixed terminals of the variable resistor, and the other end of the fixed terminal is not parallel to the parallel side surfaces, but is connected to a pair of piezoelectric elements attached to the parallel side surfaces. A vibrating gyro, which is connected in common, wherein a movable terminal of the variable resistor is used as a driving terminal and two fixed terminals of the variable resistor are used as a feedback terminal and a detection terminal.
JP3244057A 1991-08-30 1991-08-30 Vibrating gyroscope Pending JPH0560562A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3244057A JPH0560562A (en) 1991-08-30 1991-08-30 Vibrating gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3244057A JPH0560562A (en) 1991-08-30 1991-08-30 Vibrating gyroscope

Publications (1)

Publication Number Publication Date
JPH0560562A true JPH0560562A (en) 1993-03-09

Family

ID=17113088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3244057A Pending JPH0560562A (en) 1991-08-30 1991-08-30 Vibrating gyroscope

Country Status (1)

Country Link
JP (1) JPH0560562A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0696721A3 (en) * 1994-08-10 1996-04-03 Akai Electric Vibration control apparatus having oscillation frequency regulation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02266215A (en) * 1989-04-06 1990-10-31 Murata Mfg Co Ltd Vibrator
JPH02293620A (en) * 1989-05-08 1990-12-04 Murata Mfg Co Ltd Vibration gyro
JPH0359414A (en) * 1989-07-28 1991-03-14 Yazaki Corp Angular velocity sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02266215A (en) * 1989-04-06 1990-10-31 Murata Mfg Co Ltd Vibrator
JPH02293620A (en) * 1989-05-08 1990-12-04 Murata Mfg Co Ltd Vibration gyro
JPH0359414A (en) * 1989-07-28 1991-03-14 Yazaki Corp Angular velocity sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0696721A3 (en) * 1994-08-10 1996-04-03 Akai Electric Vibration control apparatus having oscillation frequency regulation
US5594168A (en) * 1994-08-10 1997-01-14 Akai Electric Co. Vibration control apparatus having oscillation frequency regulation

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