JPH055948Y2 - - Google Patents
Info
- Publication number
- JPH055948Y2 JPH055948Y2 JP7885590U JP7885590U JPH055948Y2 JP H055948 Y2 JPH055948 Y2 JP H055948Y2 JP 7885590 U JP7885590 U JP 7885590U JP 7885590 U JP7885590 U JP 7885590U JP H055948 Y2 JPH055948 Y2 JP H055948Y2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- low
- temperature
- temperature gas
- cooled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 33
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 28
- 238000001816 cooling Methods 0.000 claims description 22
- 239000007788 liquid Substances 0.000 claims description 20
- 239000003507 refrigerant Substances 0.000 claims description 18
- 238000012360 testing method Methods 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 8
- 239000006096 absorbing agent Substances 0.000 claims description 7
- 239000000110 cooling liquid Substances 0.000 claims description 6
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical group CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 5
- 235000019441 ethanol Nutrition 0.000 claims description 4
- 238000007664 blowing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000006200 vaporizer Substances 0.000 description 2
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7885590U JPH055948Y2 (cg-RX-API-DMAC7.html) | 1990-07-25 | 1990-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7885590U JPH055948Y2 (cg-RX-API-DMAC7.html) | 1990-07-25 | 1990-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0437534U JPH0437534U (cg-RX-API-DMAC7.html) | 1992-03-30 |
| JPH055948Y2 true JPH055948Y2 (cg-RX-API-DMAC7.html) | 1993-02-16 |
Family
ID=31622496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7885590U Expired - Lifetime JPH055948Y2 (cg-RX-API-DMAC7.html) | 1990-07-25 | 1990-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH055948Y2 (cg-RX-API-DMAC7.html) |
-
1990
- 1990-07-25 JP JP7885590U patent/JPH055948Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437534U (cg-RX-API-DMAC7.html) | 1992-03-30 |
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