JPH0558485B2 - - Google Patents
Info
- Publication number
- JPH0558485B2 JPH0558485B2 JP20269386A JP20269386A JPH0558485B2 JP H0558485 B2 JPH0558485 B2 JP H0558485B2 JP 20269386 A JP20269386 A JP 20269386A JP 20269386 A JP20269386 A JP 20269386A JP H0558485 B2 JPH0558485 B2 JP H0558485B2
- Authority
- JP
- Japan
- Prior art keywords
- rigid body
- acceleration
- deflection
- axis direction
- parallel flexible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 claims description 93
- 238000001514 detection method Methods 0.000 claims description 34
- 230000000694 effects Effects 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61202693A JPS6361114A (ja) | 1986-08-30 | 1986-08-30 | ジヤイロ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61202693A JPS6361114A (ja) | 1986-08-30 | 1986-08-30 | ジヤイロ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6361114A JPS6361114A (ja) | 1988-03-17 |
| JPH0558485B2 true JPH0558485B2 (enExample) | 1993-08-26 |
Family
ID=16461591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61202693A Granted JPS6361114A (ja) | 1986-08-30 | 1986-08-30 | ジヤイロ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6361114A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69322873T2 (de) * | 1993-03-30 | 1999-07-29 | Kazuhiro Ageo Saitama Okada | Mehrachsen-winkelgeschwindigkeits-messaufnehmer |
| JP3332460B2 (ja) * | 1993-04-16 | 2002-10-07 | キヤノン株式会社 | 角速度検出方法および振動ジャイロ |
-
1986
- 1986-08-30 JP JP61202693A patent/JPS6361114A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6361114A (ja) | 1988-03-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6742390B2 (en) | Angular velocity sensor | |
| KR100327481B1 (ko) | 마이크로 자이로스코프 | |
| US9052194B2 (en) | Extension-mode angular velocity sensor | |
| US7168317B2 (en) | Planar 3-axis inertial measurement unit | |
| US5691471A (en) | Acceleration and angular velocity detector | |
| US8336380B2 (en) | Angular velocity sensor | |
| JP2006215016A (ja) | ジャイロスコープと加速度計との両方の機能を有するセンサ | |
| JP6626075B2 (ja) | 変位検出方式の6軸力センサ | |
| US6520015B1 (en) | Tuning fork gyroscope | |
| EP3184961B1 (en) | Micromachined gyroscope including a guided mass system | |
| EP3564682B1 (en) | Inertial sensor with single proof mass and multiple sense axis capability | |
| WO2001079862A1 (en) | Z-axis micro-gyro | |
| US20240027489A1 (en) | Physical Quantity Sensor And Inertial Measurement Unit | |
| US7197928B2 (en) | Solid-state gyroscopes and planar three-axis inertial measurement unit | |
| JP2006133004A (ja) | 角速度センサ | |
| JPH0558485B2 (enExample) | ||
| EP0806631A1 (en) | Angular velocity and its fabricating | |
| JP3931405B2 (ja) | 角速度センサ | |
| JP4427876B2 (ja) | 半導体角速度センサ | |
| JP2012112819A (ja) | 振動ジャイロ | |
| JP5125138B2 (ja) | 複合センサ | |
| JP4858215B2 (ja) | 複合センサ | |
| JP6740965B2 (ja) | 振動型角速度センサ | |
| KR100408529B1 (ko) | 시소형정전구동마이크로자이로스코우프 | |
| JP3239529B2 (ja) | 振動ジャイロ |