JPH0557934A - Thermal head - Google Patents

Thermal head

Info

Publication number
JPH0557934A
JPH0557934A JP21890391A JP21890391A JPH0557934A JP H0557934 A JPH0557934 A JP H0557934A JP 21890391 A JP21890391 A JP 21890391A JP 21890391 A JP21890391 A JP 21890391A JP H0557934 A JPH0557934 A JP H0557934A
Authority
JP
Japan
Prior art keywords
layer
electrode layer
photosensitive layer
thermal head
transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21890391A
Other languages
Japanese (ja)
Other versions
JP3170315B2 (en
Inventor
Tsuyoshi Yasutomi
強 安富
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP21890391A priority Critical patent/JP3170315B2/en
Publication of JPH0557934A publication Critical patent/JPH0557934A/en
Application granted granted Critical
Publication of JP3170315B2 publication Critical patent/JP3170315B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To provide a thermal head wherein occurrence of degradation of yield in manufacturing can be prevented even when high recording density is required, and the number of components can be reduced so as to make a structure small in size. CONSTITUTION:When light is emitted to a heat generating means 20, it is emitted to a photosensitive layer 14 through a transparent substrate 12 and a transparent electrode layer 13. Resistivity of a light receiving part 26 of the photosensitive layer 14 lowers, electric current 31 flows in the photosensitive layer 14 and a heat generating resistor layer 15 equivalent to the light receiving part 26, so that thermal printing is performed on a thermosensible paper 19.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ファクシミリ通信装置
やワードプロセッサの印字装置あるいは原稿像を複写す
る複写装置などに好適に用いられるサーマルヘッドに関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermal head suitable for use in a facsimile communication device, a printing device of a word processor, a copying device for copying an original image or the like.

【0002】[0002]

【従来の技術】図5は従来例のサーマルヘッド1の斜視
図である。電気絶縁性を有する材料からなる絶縁基板2
上には、複数の発熱素子3が一直線上に配列されて発熱
素子ライン4が構成される。各発熱素子3の共通する一
方側は、共通電極ライン5に共通に接続され、各発熱素
子3の他方側は各発熱素子3毎に形成される個別電極6
を介して、複数の駆動回路素子7に接続される。共通電
極ライン5と個別電極6とは、たとえばアルミニウムな
どの金属薄膜をフォトリソグラフィック技術でパターン
ニングして形成される。
2. Description of the Related Art FIG. 5 is a perspective view of a conventional thermal head 1. Insulating substrate 2 made of electrically insulating material
A plurality of heat generating elements 3 are arranged on a straight line to form a heat generating element line 4. One common side of each heating element 3 is commonly connected to the common electrode line 5, and the other side of each heating element 3 is an individual electrode 6 formed for each heating element 3.
Is connected to a plurality of drive circuit elements 7 via. The common electrode line 5 and the individual electrode 6 are formed by patterning a metal thin film such as aluminum by a photolithographic technique.

【0003】また前記共通電極ライン5は、絶縁基板2
の外周に沿って形成される。また各駆動回路素子7に
は、発熱素子3を選択的に通電して発熱するための信号
ライン8が接続され、各信号ライン8は外部配線基板9
に接続される。このような構成を有する絶縁基板2は、
たとえばアルミニウムなどの金属材料からなる放熱板1
0に装着される。
The common electrode line 5 is formed on the insulating substrate 2
Is formed along the outer periphery of the. A signal line 8 for selectively energizing the heating element 3 to generate heat is connected to each drive circuit element 7, and each signal line 8 is connected to the external wiring board 9.
Connected to. The insulating substrate 2 having such a configuration is
Heat sink 1 made of a metal material such as aluminum
It is attached to 0.

【0004】[0004]

【発明が解決しようとする課題】このような従来技術の
サーマルヘッド1は、図5に示すようにたとえば感熱記
録紙における記録密度と同密度に発熱素子3を配列し、
各駆動回路素子7の端子は個別電極6と一対一に対応す
るため、多数の駆動回路素子7が必要になる。このた
め、たとえば記録密度が16ドット/mm以上になると
発熱素子3および個別電極6を製造するに極めて高い位
置決め精度が必要となり、製造上の歩留まりが低下する
という課題を有している。また、駆動回路素子7が多数
必要となり、部品点数が増大してコストが上昇し、構成
が大型化するという課題を有している。
In such a conventional thermal head 1, as shown in FIG. 5, the heating elements 3 are arranged at the same density as the recording density of the thermal recording paper, for example.
Since the terminals of each drive circuit element 7 correspond to the individual electrodes 1 to 1, a large number of drive circuit elements 7 are required. Therefore, for example, when the recording density is 16 dots / mm or more, extremely high positioning accuracy is required for manufacturing the heating element 3 and the individual electrode 6, and there is a problem that the manufacturing yield is reduced. In addition, a large number of drive circuit elements 7 are required, the number of parts is increased, the cost is increased, and the configuration is enlarged.

【0005】本発明の目的は、上述の技術的課題を解消
し、高い記録密度が要求される場合であっても、製造上
の歩留まりが低下する事態を防止し、かつ部品点数が削
減されて構成の小型化を図ることができるサーマルヘッ
ドを提供することである。
The object of the present invention is to solve the above-mentioned technical problems, to prevent the production yield from decreasing even when high recording density is required, and to reduce the number of parts. An object of the present invention is to provide a thermal head that can be downsized.

【0006】[0006]

【課題を解決するための手段】本発明は、電気絶縁性の
透明基板上に透明電極層を設け、透明電極層上に感光時
に比抵抗が低下する材料からなる感光層を設け、感光層
上に発熱抵抗体層と電極層とを順次設けてなる発熱手段
を備え、前記透明な絶縁基板に選択的に光を照射し、感
光層の比抵抗を部分的に低下させ、透明電極層と電極層
との間で選択的に通電して感熱印画を行うようにしたこ
とを特徴とするサーマルヘッドである。
According to the present invention, a transparent electrode layer is provided on an electrically insulating transparent substrate, and a photosensitive layer made of a material whose specific resistance decreases during exposure is provided on the transparent electrode layer. And a heat generating means in which a heat generating resistor layer and an electrode layer are sequentially provided, and the transparent insulating substrate is selectively irradiated with light to partially lower the specific resistance of the photosensitive layer, thereby forming a transparent electrode layer and an electrode. The thermal head is characterized in that a heat-sensitive printing is performed by selectively energizing with a layer.

【0007】[0007]

【作用】本発明に従うサーマルヘッドは、電気絶縁性を
有する透明基板上に透明電極層を設け、透明電極層上に
感光時に比抵抗が低下する材料からなる感光層を設け、
感光層上に発熱抵抗体層と電極層とを順次設けてなる発
熱手段を備える。前記透明な絶縁基板に選択的に光を照
射し、感光層の比抵抗を部分的に低下させ、透明電極層
と電極層との間で選択的に通電して感熱印画を行う。
In the thermal head according to the present invention, a transparent electrode layer is provided on a transparent substrate having electrical insulation properties, and a photosensitive layer made of a material whose specific resistance decreases during exposure is provided on the transparent electrode layer.
A heat generating means is provided in which a heat generating resistor layer and an electrode layer are sequentially provided on the photosensitive layer. The transparent insulating substrate is selectively irradiated with light to partially reduce the specific resistance of the photosensitive layer, and a current is selectively applied between the transparent electrode layer and the electrode layer to perform thermal printing.

【0008】したがって、記録密度に対応した配列密度
の相互に分離された発熱素子と、これを規定する個別電
極とを高精度で形成する必要が解消され、製造上の歩留
まりを格段に向上することができる。また所定数毎の相
互に分離された発熱素子が接続される駆動回路素子が不
必要となり、部品点数の大幅な削減と構成の小型化とを
図ることができる。
Therefore, it is possible to eliminate the need to form the heating elements, which have the arrangement density corresponding to the recording density and are separated from each other, and the individual electrodes that define the heating elements with high precision, and to significantly improve the manufacturing yield. You can Further, a drive circuit element to which a predetermined number of heating elements separated from each other is connected is unnecessary, and the number of parts can be greatly reduced and the configuration can be downsized.

【0009】[0009]

【実施例】図1は本発明の一実施例のサーマルヘッド1
1の構成を示す系統図であり、図2はサーマルヘッド1
1の断面図である。本実施例のサーマルヘッド11は、
たとえばガラスからなる電気絶縁性を有する透明基板1
2を備え、透明基板12上にたとえばITO(インジウ
ムスズ酸化物)などの透明導電材料からなる透明電極層
13を全面に形成する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a thermal head 1 according to an embodiment of the present invention.
1 is a system diagram showing the configuration of FIG. 1, and FIG. 2 is a thermal head 1
It is sectional drawing of 1. The thermal head 11 of this embodiment is
For example, a transparent substrate 1 made of glass and having an electrical insulation property.
2, a transparent electrode layer 13 made of a transparent conductive material such as ITO (indium tin oxide) is formed on the entire surface of the transparent substrate 12.

【0010】透明電極層13上には、所定光量の光を受
光したときに、受光部位の比抵抗が低下するたとえばア
ルモファスシリコンやセレン系無機半導体材料あるいは
ロフタロシアニンなどの有機半導体材料などの半導体材
料から形成される感光層14が全面に形成される。感光
層14上には窒化タンタルTa34などからなる発熱抵
抗体層15が全面に形成され、発熱抵抗体層15上に
は、たとえばアルミニウムや銅あるいは金などの金属材
料からなる共通電極層16が全面に形成される。共通電
極層16は、たとえばSiNなどの電気絶縁性を有する
材料などからなる保護層17をスパッタなどの真空成膜
法で形成して被覆される。この保護層17にプラテンロ
ーラ18で感熱紙19が押圧されて後述するように感熱
印画が行われる。
On the transparent electrode layer 13, when a predetermined amount of light is received, the specific resistance of the light receiving portion is lowered. For example, a semiconductor such as alumophus silicon, a selenium-based inorganic semiconductor material, or an organic semiconductor material such as lophthalocyanine. A photosensitive layer 14 made of a material is formed on the entire surface. A heating resistor layer 15 made of tantalum nitride Ta 3 N 4 or the like is formed on the entire surface of the photosensitive layer 14, and a common electrode layer made of a metal material such as aluminum, copper, or gold is formed on the heating resistor layer 15. 16 is formed on the entire surface. The common electrode layer 16 is covered by forming a protective layer 17 made of an electrically insulating material such as SiN by a vacuum film forming method such as sputtering. The thermal paper 19 is pressed against the protective layer 17 by the platen roller 18, and thermal printing is performed as described later.

【0011】このような透明基板12ないし保護層17
の積層体からなる発熱手段20の透明基板12に感熱印
画される光学像を形成するために、レーザ光発生装置2
1と、レーザ光発生装置21からのレーザ光30を反射
して透明基板12上を矢符A1方向に走査させる反射鏡
22とが設けられる。反射鏡22は、駆動装置23によ
ってレーザ光発生装置21の発振動作に同期して回転駆
動され、透明基板12詳しくは感光層14上を走査す
る。このとき、感光層14上のレーザ光による光点24
の直径d1は、前記反射鏡22などを含む光学系により
所望の記録密度に対応して調整することが可能であり、
たとえば直径d1は100μm程度に選ばれる。前記透
明電極層13には電源25が接続され、共通電極層16
はたとえば接地電位に接続される。
Such a transparent substrate 12 or protective layer 17
In order to form an optical image which is heat-sensitively printed on the transparent substrate 12 of the heat generating means 20 composed of the laminated body of the laser light generator 2
1 and a reflecting mirror 22 that reflects the laser light 30 from the laser light generator 21 to scan the transparent substrate 12 in the arrow A1 direction. The reflecting mirror 22 is rotationally driven by the driving device 23 in synchronization with the oscillation operation of the laser light generating device 21, and scans the transparent substrate 12, specifically, the photosensitive layer 14. At this time, the light spot 24 by the laser light on the photosensitive layer 14
The diameter d1 can be adjusted in accordance with a desired recording density by an optical system including the reflecting mirror 22 and the like.
For example, the diameter d1 is selected to be about 100 μm. A power supply 25 is connected to the transparent electrode layer 13 and a common electrode layer 16
Is connected to ground potential, for example.

【0012】前記感光層14は、たとえば光量などの輻
射エネルギレベルが図3のラインL1に示すように、閾
値E0を越えて増大すると、比抵抗が急速に低下する特
性を有する材料が選ばれる。この比抵抗の低下の程度は
急峻な程好ましく、また閾値E0はエネルギ効率の点で
可及的に小さい程望ましい。
For the photosensitive layer 14, a material is selected which has a characteristic that the specific resistance rapidly decreases when the radiant energy level such as the amount of light increases beyond the threshold value E0 as shown by the line L1 in FIG. The steeper the degree of decrease in the specific resistance is, and the smaller the threshold E0 is as small as possible in terms of energy efficiency.

【0013】以下、本実施例の動作について説明する。
レーザ光発生装置21からのレーザ光が駆動装置23で
回転駆動される反射鏡22によって反射され、透明基板
12および透明電極層13を介して感光層14上に光点
24を形成する。このとき前述したように、感光層14
の受光部位26の比抵抗が低下し、この受光部位26に
相当する感光層14および発熱抵抗体層15を通って、
透明電極層13と共通電極層16との間に電流31が流
れる。これにより、発熱抵抗体層15が発熱し、その発
熱部32によって感熱紙19に感熱印画を行う。
The operation of this embodiment will be described below.
The laser light from the laser light generator 21 is reflected by the reflecting mirror 22 which is rotationally driven by the driving device 23, and the light spot 24 is formed on the photosensitive layer 14 via the transparent substrate 12 and the transparent electrode layer 13. At this time, as described above, the photosensitive layer 14
The specific resistance of the light receiving portion 26 of the light receiving portion 26 decreases, and the light receiving portion 26 passes through the photosensitive layer 14 and the heating resistor layer 15 corresponding to
A current 31 flows between the transparent electrode layer 13 and the common electrode layer 16. As a result, the heat-generating resistor layer 15 generates heat, and the heat-generating portion 32 performs heat-sensitive printing on the heat-sensitive paper 19.

【0014】このような実施例では、従来例で説明した
ような相互に分離して独立している発熱素子3や、発熱
素子3を規定する個別電極6を高精度のフォトリソグラ
フィック技術で形成する必要が解消され、製造上の歩留
まりが大幅に改善される。また従来例において、所定数
毎の個別電極6が接続されている駆動回路素子7を用い
る必要が解消され、部品点数を削減してコストダウンを
図ることができると共に、駆動回路素子7を用いる必要
が解消されるので、サーマルヘッド11の構成を格段に
小型化することができる。
In such an embodiment, as described in the conventional example, the heating element 3 which is separated from each other and independent of each other and the individual electrode 6 which defines the heating element 3 are formed by a highly accurate photolithographic technique. The need is eliminated and the manufacturing yield is greatly improved. Further, in the conventional example, the need to use the drive circuit elements 7 to which the predetermined number of individual electrodes 6 are connected is eliminated, the number of parts can be reduced and the cost can be reduced, and the drive circuit elements 7 need to be used. Is eliminated, the thermal head 11 can be remarkably downsized.

【0015】図4は本発明の他の実施例の構成を示す系
統図である。本実施例は前述の実施例に類似し、対応す
る部分には同一の参照符を付す。本実施例の注目すべき
点は、発熱手段20の受光側に蛍光層27を形成し、テ
レビジョン受信機に用いられている電子銃28からの電
子線29で蛍光層27上を走査する。これにより、電子
線29に対応した状態に蛍光層27が発光し、この蛍光
により発熱手段20に対して、前述したような感熱印画
動作を行わせる。
FIG. 4 is a system diagram showing the configuration of another embodiment of the present invention. This embodiment is similar to the above-mentioned embodiment, and corresponding parts are designated by the same reference numerals. The point to be noted in this embodiment is that the fluorescent layer 27 is formed on the light receiving side of the heat generating means 20, and the fluorescent layer 27 is scanned with the electron beam 29 from the electron gun 28 used in the television receiver. As a result, the fluorescent layer 27 emits light in a state corresponding to the electron beam 29, and the fluorescent light causes the heat generating means 20 to perform the heat-sensitive printing operation as described above.

【0016】このような実施例においても、前述の実施
例で述べた効果と同様な効果をえることができる。
Also in such an embodiment, the same effect as the effect described in the above embodiment can be obtained.

【0017】本発明のその他の変形例として、図1に示
す発熱手段20に光学像を供給する手段は、前記実施例
に限定されるものではなく、たとえば光ファイバによっ
て光学像を伝達してもよく、また光学像の投射装置によ
り、図1の感光層14上に平面画像を直接に結像させる
ようにしてもよい。また発光ダイオードアレイを用いる
ようにしてもよい。
As another modification of the present invention, the means for supplying the optical image to the heat generating means 20 shown in FIG. 1 is not limited to the above-mentioned embodiment, and the optical image may be transmitted by an optical fiber, for example. Alternatively, a plane image may be directly formed on the photosensitive layer 14 in FIG. 1 by an optical image projection device. Alternatively, a light emitting diode array may be used.

【0018】[0018]

【発明の効果】以上のように本発明に従うサーマルヘッ
ドは、透明な絶縁基板上に透明電極層を設け、透明電極
層上に感光時に比抵抗が低下する材料からなる感光層を
設け、感光層上に発熱抵抗体層と電極層とを順次設けて
なる発熱手段を備える。したがって、記録密度に対応し
た配列密度の相互に分離された発熱素子と、これを規定
する個別電極とを高精度で形成する必要が解消され、製
造上の歩留まりを格段に向上することができる。また所
定数毎の相互に分離された発熱素子が接続される駆動回
路素子が不要となり部品点数の大幅な削減と構成の小型
化を図ることができる。
As described above, in the thermal head according to the present invention, the transparent electrode layer is provided on the transparent insulating substrate, and the photosensitive layer made of a material whose specific resistance decreases during exposure is provided on the transparent electrode layer. A heating means having a heating resistor layer and an electrode layer sequentially provided thereon is provided. Therefore, it is possible to eliminate the need to form with high precision the heating elements that are separated from each other and have the array density corresponding to the recording density, and the individual electrodes that define the heating elements, and it is possible to significantly improve the manufacturing yield. In addition, a drive circuit element to which a predetermined number of heating elements separated from each other are connected is not required, and the number of parts can be significantly reduced and the configuration can be downsized.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例のサーマルヘッド11の系統
図である。
FIG. 1 is a system diagram of a thermal head 11 according to an embodiment of the present invention.

【図2】サーマルヘッド11の断面図である。FIG. 2 is a sectional view of a thermal head 11.

【図3】感光層14の特性を説明するグラフである。FIG. 3 is a graph illustrating characteristics of a photosensitive layer 14.

【図4】本発明の他の実施例の構成を示す系統図であ
る。
FIG. 4 is a system diagram showing a configuration of another embodiment of the present invention.

【図5】従来例のサーマルヘッド1の斜視図である。FIG. 5 is a perspective view of a conventional thermal head 1.

【符号の説明】[Explanation of symbols]

11 サーマルヘッド 12 透明基板 13 透明電極層 14 感光層 15 発熱抵抗体層 16 共通電極層 20 発熱手段 21 レーザ光発生装置 22 反射鏡 25 電源 27 蛍光層 28 電子銃 11 Thermal Head 12 Transparent Substrate 13 Transparent Electrode Layer 14 Photosensitive Layer 15 Heating Resistor Layer 16 Common Electrode Layer 20 Heating Unit 21 Laser Light Generator 22 Reflector 25 Power Supply 27 Fluorescent Layer 28 Electron Gun

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 電気絶縁性の透明基板上に透明電極層を
設け、透明電極層上に感光時に比抵抗が低下する材料か
らなる感光層を設け、感光層上に発熱抵抗体層と電極層
とを順次設けてなる発熱手段を備え、 前記透明な絶縁基板に選択的に光を照射し、感光層の比
抵抗を部分的に低下させ、透明電極層と電極層との間で
選択的に通電して感熱印画を行うようにしたことを特徴
とするサーマルヘッド。
1. A transparent electrode layer is provided on an electrically insulating transparent substrate, a photosensitive layer made of a material whose specific resistance decreases during exposure is provided on the transparent electrode layer, and a heating resistor layer and an electrode layer are provided on the photosensitive layer. The transparent insulating substrate is selectively irradiated with light to partially lower the specific resistance of the photosensitive layer and selectively between the transparent electrode layer and the electrode layer. A thermal head characterized by being energized for thermal printing.
JP21890391A 1991-08-29 1991-08-29 Thermal head Expired - Fee Related JP3170315B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21890391A JP3170315B2 (en) 1991-08-29 1991-08-29 Thermal head

Applications Claiming Priority (1)

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JP21890391A JP3170315B2 (en) 1991-08-29 1991-08-29 Thermal head

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JPH0557934A true JPH0557934A (en) 1993-03-09
JP3170315B2 JP3170315B2 (en) 2001-05-28

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JP21890391A Expired - Fee Related JP3170315B2 (en) 1991-08-29 1991-08-29 Thermal head

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