JPH0557532B2 - - Google Patents

Info

Publication number
JPH0557532B2
JPH0557532B2 JP62295840A JP29584087A JPH0557532B2 JP H0557532 B2 JPH0557532 B2 JP H0557532B2 JP 62295840 A JP62295840 A JP 62295840A JP 29584087 A JP29584087 A JP 29584087A JP H0557532 B2 JPH0557532 B2 JP H0557532B2
Authority
JP
Japan
Prior art keywords
pressure
vibrating
vibrating beam
base
receiving diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62295840A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01138432A (ja
Inventor
Kinji Harada
Kyoichi Ikeda
Takashi Kobayashi
Tetsuya Watanabe
Sunao Nishikawa
Takashi Yoshida
Hideki Kuwayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP29584087A priority Critical patent/JPH01138432A/ja
Publication of JPH01138432A publication Critical patent/JPH01138432A/ja
Publication of JPH0557532B2 publication Critical patent/JPH0557532B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP29584087A 1987-11-24 1987-11-24 振動形差圧センサ Granted JPH01138432A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29584087A JPH01138432A (ja) 1987-11-24 1987-11-24 振動形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29584087A JPH01138432A (ja) 1987-11-24 1987-11-24 振動形差圧センサ

Publications (2)

Publication Number Publication Date
JPH01138432A JPH01138432A (ja) 1989-05-31
JPH0557532B2 true JPH0557532B2 (enrdf_load_stackoverflow) 1993-08-24

Family

ID=17825862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29584087A Granted JPH01138432A (ja) 1987-11-24 1987-11-24 振動形差圧センサ

Country Status (1)

Country Link
JP (1) JPH01138432A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186725A (ja) * 1984-03-06 1985-09-24 Yokogawa Hokushin Electric Corp 圧力センサ

Also Published As

Publication number Publication date
JPH01138432A (ja) 1989-05-31

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees