JPH0557469A - Laser beam processing - Google Patents

Laser beam processing

Info

Publication number
JPH0557469A
JPH0557469A JP3215531A JP21553191A JPH0557469A JP H0557469 A JPH0557469 A JP H0557469A JP 3215531 A JP3215531 A JP 3215531A JP 21553191 A JP21553191 A JP 21553191A JP H0557469 A JPH0557469 A JP H0557469A
Authority
JP
Japan
Prior art keywords
work
hole
laser beam
laser
piercing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3215531A
Other languages
Japanese (ja)
Other versions
JP3110504B2 (en
Inventor
Yuichi Morita
勇一 森田
Satoshi Imai
聡 今井
Takeshi Chikagawa
健 近川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippei Toyama Corp
Original Assignee
Nippei Toyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippei Toyama Corp filed Critical Nippei Toyama Corp
Priority to JP03215531A priority Critical patent/JP3110504B2/en
Publication of JPH0557469A publication Critical patent/JPH0557469A/en
Application granted granted Critical
Publication of JP3110504B2 publication Critical patent/JP3110504B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To form a hole of a large diameter necessary for shifting to cutting by sufficiently admitting an assist gas into the hole and stably and well executing piercing at the time of boring in the laser beam processing method of executing the cutting of a work by a laser beam. CONSTITUTION:The focus P of the laser beam L is first held parted at a prescribed distance from the surface of the work W at the time of executing the piercing and the work is irradiated in this sate with the laser beam L by the higher laser output and higher assist gases pressure than at the time of the boring, by which a shallow recess C having the large diameter is formed on the surface of the work W. The focus P of the laser beam L is then aligned near to the surface of the work W and the work is irradiated with the laser beam L by the laser output an assist gaseous pressure at the time of the boring, by which the hole H is formed continuously from the bottom of the recess C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、レーザ光によりワー
クの切断加工を行うレーザ加工方法に関するもので、主
として比較的厚いワークの加工に適用されるレーザ加工
方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing method for cutting a work with a laser beam, and more particularly to a laser processing method applied to processing a relatively thick work.

【0002】[0002]

【従来の技術】一般に、この種のレーザ加工において
は、図2に示すように、レーザ発振器1から出力される
レーザ光Lが、ミラー2等で案内されて加工ヘッド3の
レンズ4に入射され、このレンズ4によってノズル5の
外方の焦点Pにおいて集光される。又、加工ヘッド3に
はアシストガス供給装置6からアシストガスが供給さ
れ、そのアシストガスがノズル5からレーザ光Lと同軸
状に噴出されて、ワークWの加工が行われる。
2. Description of the Related Art Generally, in this type of laser processing, as shown in FIG. 2, a laser beam L output from a laser oscillator 1 is guided by a mirror 2 or the like and is incident on a lens 4 of a processing head 3. The lens 4 collects the light at a focal point P outside the nozzle 5. Further, the assist gas is supplied from the assist gas supply device 6 to the processing head 3, and the assist gas is ejected from the nozzle 5 coaxially with the laser light L to process the work W.

【0003】前記加工ヘッド3はサーボ制御回路7によ
り加工経路に沿って、例えばX,Y,Z方向へ3軸制御
される。これと同時に、ノズル5あるいはノズル5の近
傍に設けられたギャップセンサ8により、ノズル5の先
端からワークWの表面までの距離すなわちギャップ量が
検出され、その検出データに基づいてギャップコントロ
ーラ9により、加工時のギャップ量が所定値となるよう
にノズル5の高さが制御される。
The machining head 3 is controlled by a servo control circuit 7 along a machining path, for example, in three axes in X, Y and Z directions. At the same time, the distance from the tip of the nozzle 5 to the surface of the work W, that is, the gap amount is detected by the gap sensor 8 provided in the nozzle 5 or in the vicinity of the nozzle 5, and the gap controller 9 is made based on the detected data. The height of the nozzle 5 is controlled so that the gap amount during processing becomes a predetermined value.

【0004】一方、この種のレーザ加工に際しては、切
断加工のスタート点で穴あけ加工、すなわちピアッシン
グを行う必要がある。このピアッシング時のレーザ出力
を切断加工時と同一条件とした場合には、レーザ出力が
強すぎるため、穴があかないうちにワークWの内部にレ
ーザ光Lの熱が蓄積されて溶融金属ができやすい。そし
て、この溶融金属が突然一度に飛び散って爆発が生じ、
これにより溶融金属がレンズ4にまで跳ね上がって、レ
ンズ4を破損させたりする等の危険があった。
On the other hand, in this type of laser processing, it is necessary to perform drilling, that is, piercing, at the starting point of cutting. When the laser output at the time of piercing is set to the same condition as that at the time of cutting, the laser output is too strong, so that the heat of the laser light L is accumulated inside the work W before the hole is formed, and molten metal is formed. Cheap. Then, this molten metal suddenly scatters at once and an explosion occurs,
As a result, the molten metal jumps up to the lens 4, which may damage the lens 4.

【0005】このような危険を防止するために、従来の
レーザ加工においては、ピアッシング時のレーザ出力値
を切断加工時の出力値よりも低い値に設定していた。と
ころが、このように、爆発を生じない程度の低いレーザ
出力値でピアッシングを行った場合、レーザ出力が弱す
ぎるため、ピアッシングの効率が悪くてピアッシング時
間が長くかかり、加工能率を低下させるという問題があ
った。
In order to prevent such a danger, in the conventional laser processing, the laser output value at the time of piercing is set to a value lower than the output value at the time of cutting processing. However, when piercing is performed at such a low laser output value that explosion does not occur, the laser output is too weak, resulting in poor piercing efficiency and a long piercing time, resulting in a problem of reduced machining efficiency. there were.

【0006】特に、板厚が厚いワークWについては、こ
の問題点が顕著に現れる。実際に、板厚12mmの鋼板
を従来の方法でピアッシングしたところ、ピアッシング
終了までに40〜60秒の長い時間がかかり、しかも、
その所要時間のばらつきも大きかった。
[0006] In particular, with respect to the work W having a large plate thickness, this problem becomes remarkable. Actually, when piercing a steel plate having a plate thickness of 12 mm by the conventional method, it takes a long time of 40 to 60 seconds until the end of piercing, and
The variation in the required time was also large.

【0007】このため、従来では通常レーザ光Lの焦点
PをワークWの表面に合わせ、レーザ光Lのエネルギー
密度が最も高い状態でピアッシングを行うようにしてい
る。
For this reason, conventionally, the focus P of the laser light L is normally focused on the surface of the work W, and the piercing is performed in the state where the energy density of the laser light L is the highest.

【0008】[0008]

【発明が解決しようとする課題】しかし、従来のような
加工方法では、ピアッシング時間は短縮できる反面、焦
点位置での加工のため、形成される穴径が小さくなる。
特に、板厚が厚いワークWについては、この穴の直径が
0.1〜0.3mm程度の小さなものになる。そして、
ピアッシングで形成される穴径が切断加工開始時に必要
な穴径より小さくなると、切断加工を行う際にアシスト
ガスがピアッシング穴に流れ込まないため、発振条件や
アシストガス圧をピアッシング加工から切断加工に切り
換えると同時にアシストガスの吹上げを起こすおそれが
あり、前記爆発時と同様に溶融金属が跳ね上がったり、
切断加工にスムーズに移行することができなかったりし
た。
However, in the conventional processing method, the piercing time can be shortened, but the hole diameter formed is small because of the processing at the focal position.
In particular, for the work W having a large plate thickness, the diameter of this hole is as small as about 0.1 to 0.3 mm. And
If the hole diameter formed by piercing becomes smaller than the hole diameter required at the start of cutting, the assist gas does not flow into the piercing hole during cutting, so the oscillation condition and assist gas pressure are switched from piercing to cutting. At the same time, there is a possibility that assist gas may be blown up, causing molten metal to jump up as in the case of the explosion,
I couldn't move smoothly to cutting.

【0009】更に、図5に示すように、透孔が形成され
る前に、ピアッシング時に生じる溶融金属MがワークW
の表面のピアッシング穴の周囲に付着して盛り上がって
しまうため、ピアッシング穴がその盛り上がり分だけ深
くなるのと同じになり、又、ピアッシング穴の入口が狭
くなって、同穴内へのアシストガスAの流入を妨げてい
た。従って、ピアッシング穴内に充分にアシストガスA
が供給されないため、内部に熱がこもって爆発が起こり
やすかった。このため、レーザ出力をより低くする必要
が生じ、よって形成される穴径が更に小さなものとな
る。
Further, as shown in FIG. 5, before the through holes are formed, the molten metal M generated during piercing is transferred to the work W.
Since the piercing hole adheres to the periphery of the piercing hole and rises, it is the same as the piercing hole becoming deeper by the height of the piercing hole, and the entrance of the piercing hole becomes narrower, so that the assist gas A into the hole becomes smaller. It was blocking the inflow. Therefore, the assist gas A is sufficiently filled in the piercing hole.
Since it was not supplied, heat was trapped inside and it was easy for an explosion to occur. Therefore, it becomes necessary to lower the laser output, and the diameter of the hole formed is further reduced.

【0010】この発明は、このような従来の技術に存在
する問題点に着目してなされたものであって、その目的
とするところは、穴明け時にアシストガスを穴内へ充分
に流入させ、ピアッシングを安定して良好に行うことが
でき、切断加工に移行するのに必要な大径の穴を形成す
ることができるレーザ加工方法を提供することにある。
The present invention has been made by paying attention to the problems existing in such a conventional technique, and the purpose thereof is to allow the assist gas to sufficiently flow into the holes at the time of drilling and to perform piercing. The present invention is to provide a laser processing method capable of stably performing satisfactorily and forming a hole having a large diameter necessary for shifting to cutting processing.

【0011】[0011]

【課題を解決するための手段】上記の目的を達成するた
めに、この発明では、レーザ光によりワークの切断加工
を行うレーザ加工方法において、ピアッシングを行う際
に、まず、レーザ光の焦点をワークの表面から所定量離
した状態で、穴明け時よりも高いレーザ出力と高いアシ
ストガス圧とでレーザ光の照射を行って、ワークの表面
に凹所を形成し、次に、レーザ光の焦点をワークの表面
付近に移動した状態で、穴明け時のレーザ出力とアシス
トガス圧とでレーザ光の照射を行って、前記凹所の底部
から穴明けを行うことを特徴とするものである。
In order to achieve the above object, according to the present invention, in a laser processing method for cutting a workpiece by laser light, when piercing is performed, the focus of the laser light is first focused. The laser beam is irradiated with a higher laser output and a higher assist gas pressure than when drilling with a predetermined distance from the surface of the workpiece to form a recess on the surface of the workpiece, and then the focus of the laser beam. The laser beam is irradiated with the laser output and the assist gas pressure at the time of drilling in the state of moving to near the surface of the work, and the hole is drilled from the bottom of the recess.

【0012】[0012]

【作 用】上記のようなレーザ加工方法によれば、ピア
ッシング時に、まず、レーザ光の焦点をワークの表面か
ら所定量離した状態で、比較的高いレーザ出力と高いア
シストガス圧とでレーザ光の照射を行って、ワークの表
面に大径でかつ浅い凹所を瞬時に形成する。このため、
ワークの表面の凹所の周囲に溶融金属が付着して盛り上
がりが生じたりするのを防ぐことができる。引き続き、
レーザ光の焦点をワークの表面付近に移動し、設定され
た穴明け時のレーザ出力とアシストガス圧とでレーザ光
の照射を行って、前記凹所の底部から連続して穴明けを
行う。この際に、穴内で生じる溶融金属はアシストガス
とともに凹所に案内されて外方へ広く吹き飛ばされる。
又、穴が明くまでに、わずかに溶融金属が残留しても、
大径の凹所にとどまることができ、ワークの表面に盛り
上がったり、穴の周囲に付着して穴径を狭くしたり、塞
いだりするようなことがない。従って、その穴内にアシ
ストガスが凹所に案内されて効率よく供給される。従っ
て、ピアッシングを安定して良好に行うことができ、切
断加工に移行するのに必要な大径の穴を形成することが
できる。
[Operation] According to the laser processing method as described above, at the time of piercing, the laser beam is first moved with a relatively high laser output and a high assist gas pressure with the focus of the laser beam being separated from the surface of the work by a predetermined amount. Is performed to instantly form a large-diameter and shallow recess on the surface of the work. For this reason,
It is possible to prevent molten metal from adhering to the periphery of the recess on the surface of the work and causing swelling. Continuing,
The focus of the laser light is moved to the vicinity of the surface of the work, and the laser light is irradiated with the set laser output and assist gas pressure at the time of drilling, and the hole is continuously drilled from the bottom of the recess. At this time, the molten metal generated in the hole is guided to the recess together with the assist gas and widely blown outward.
Also, even if a slight amount of molten metal remains by the time the hole is made,
It can stay in a large-diameter recess, and it does not bulge on the surface of the work, stick to the periphery of the hole, and reduce or block the hole diameter. Therefore, the assist gas is guided to the recess in the hole and efficiently supplied. Therefore, the piercing can be stably and favorably performed, and the large-diameter hole required for shifting to the cutting process can be formed.

【0013】[0013]

【実施例】以下、この発明を具体化したレーザ加工方法
の一実施例を、図1〜図3に基づいて詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a laser processing method embodying the present invention will be described in detail below with reference to FIGS.

【0014】さて、この実施例の加工方法においては、
ワークW上にピアッシングを行う場合、図2に示すNC
装置10により、サーボ制御回路7を介して加工ヘッド
3をZ軸方向、すなわち光軸方向に移動させ、ノズル5
の先端とワークWの表面との間のギャップ量を、図3に
示すように変更制御する。それと同時に、図2に示すレ
ーザ発振制御回路11により、レーザ発振器1から出力
されるレーザ光Lの出力値を制御しながらレーザ加工を
行う。
Now, in the processing method of this embodiment,
When performing piercing on the work W, NC shown in FIG.
The processing head 3 is moved by the device 10 via the servo control circuit 7 in the Z-axis direction, that is, the optical axis direction, and the nozzle 5 is moved.
The amount of gap between the tip of the workpiece and the surface of the workpiece W is changed and controlled as shown in FIG. At the same time, the laser processing is performed while controlling the output value of the laser light L output from the laser oscillator 1 by the laser oscillation control circuit 11 shown in FIG.

【0015】すなわち、ピアッシング開始時には、図3
に示すようにギャップ量G1を通常の設定値よりも大き
くし、図1(a)に示すように、レーザ光Lの焦点Pが
ワークWの表面よりも上方へ所定量離れるように設定す
る。又、レーザ光Lの出力値及びアシストガスAの圧力
値をピアッシングに適した穴明け時の設定値よりも高い
値に設定する。この状態でワークWの表面に所定時間T
1レーザ光Lを照射して、大径でかつ浅い凹所Cを形成
する。
That is, at the start of piercing, FIG.
As shown in FIG. 1, the gap amount G1 is set to be larger than the normal set value, and as shown in FIG. 1A, the focus P of the laser light L is set to be separated from the surface of the work W by a predetermined amount. Further, the output value of the laser light L and the pressure value of the assist gas A are set to values higher than the set values for drilling suitable for piercing. In this state, the surface of the work W has a predetermined time T
Irradiation with 1 laser beam L forms a shallow recess C having a large diameter.

【0016】この凹所Cの形成時には、レーザ光Lの焦
点PがワークWの表面よりも上方へ所定量離して設定さ
れているため、ワークW上ではレーザ光Lが分散され、
そのレーザ光Lの出力値がたとえ高い値に設定されてい
ても、ワークWの表面の凹所Cの周囲に溶融金属が付着
して盛り上がりが生じたりすることはなく、大径でかつ
浅い凹所Cを安定して形成することができる。
When forming the recess C, the focus P of the laser light L is set above the surface of the work W by a predetermined amount, so that the laser light L is dispersed on the work W.
Even if the output value of the laser beam L is set to a high value, the molten metal does not adhere to the periphery of the recess C on the surface of the work W to cause swelling, and a large-diameter and shallow recess is formed. The location C can be stably formed.

【0017】その後、図3に示すように、ピアッシング
開始から所定時間T1経過して、ワークWの表面に所定
深さの凹所Cが形成された後、ギャップ量G2をピアッ
シング開始時のギャップ量G1よりも減少させ、図1
(b)に示すように、レーザ光Lの焦点PをワークWの
表面付近に設定する。この状態で、ワークWの表面に爆
発を生じない程度に設定されたレーザ出力及びアシスト
ガス圧でレーザ光Lを照射し、凹所Cの底部から連続し
て穴Hを形成する。
Thereafter, as shown in FIG. 3, after a predetermined time T1 has elapsed from the start of the piercing, a recess C having a predetermined depth is formed on the surface of the work W, and then the gap amount G2 is set to the gap amount at the start of the piercing. Reduced from G1, Figure 1
As shown in (b), the focus P of the laser light L is set near the surface of the work W. In this state, the laser beam L is irradiated with the laser output and the assist gas pressure set so as not to cause the explosion on the surface of the work W, and the hole H is continuously formed from the bottom of the recess C.

【0018】そして、図3に示すように、穴Hの形成開
始時から形成終了時までの所定時間T2の間に、ギャッ
プ量をG2からG3へと徐々に減少させ、穴Hの形成に
従ってレーザLの焦点PをワークWの内部へと徐々に追
い込んでいく。
Then, as shown in FIG. 3, the gap amount is gradually reduced from G2 to G3 during the predetermined time T2 from the start of forming the hole H to the end of forming the hole H, and the laser is formed in accordance with the formation of the hole H. The focus P of L is gradually driven into the work W.

【0019】この穴Hの形成時には、図4に示すよう
に、穴H内で生じる溶融金属MはアシストガスAととも
に凹所Cに案内されて穴Hの外方へ広く吹き飛ばされ
る。又、穴Hが明くまでに溶融金属Mがわずかに残留し
ても、その溶融金属Mは大径の凹所Cにとどまることが
でき、ワークWの表面に盛り上がったり、穴Hの周囲に
付着して穴径を狭くしたり、塞いだりするようなことが
ない。従って、アシストガスAの吹き上がりもなく、大
径の凹所Cに案内されて穴H内にアシストガスAが効率
よく供給されるため、穴Hの形成を安定して良好に行う
ことができ、切断加工に移行するのに必要な大径の穴H
が形成される。ちなみに、板厚が9mm以上の比較的厚
いワークWにおいては、切断開始時に必要な穴Hの直径
が0.5〜0.8mmであるが、この実施例の加工方法
によれば、直径が0.8〜1.0mmの大きな穴径を得
ることができた。従って、ピアッシングから切断加工に
移行する際に、アシストガスの吹き上がりによりセルフ
バーニングを生じ、溶融金属Mが跳ね上がったりするこ
とがなく、その移行をスムーズに行うことができる。
At the time of forming the hole H, as shown in FIG. 4, the molten metal M generated in the hole H is guided to the recess C together with the assist gas A and widely blown to the outside of the hole H. Further, even if the molten metal M slightly remains before the hole H becomes clear, the molten metal M can stay in the large-diameter recess C, rise up on the surface of the work W, or around the hole H. It does not adhere to reduce the hole diameter or block it. Therefore, since the assist gas A is not blown up and the assist gas A is efficiently supplied into the hole H by being guided by the large-diameter recess C, the hole H can be formed stably and satisfactorily. , Large-diameter hole H required for shifting to cutting
Is formed. Incidentally, in the relatively thick work W having a plate thickness of 9 mm or more, the diameter of the hole H required at the start of cutting is 0.5 to 0.8 mm, but according to the processing method of this embodiment, the diameter is 0. A large hole diameter of 0.8 to 1.0 mm could be obtained. Therefore, when shifting from piercing to cutting, self-burning does not occur due to blow-up of the assist gas, the molten metal M does not jump up, and the transition can be performed smoothly.

【0020】なお、この発明は前述した実施例に限定さ
れるものではなく、例えば、凹所Cの形成後に穴Hを形
成する際に、レーザLの出力値及びアシストガスの圧力
を、穴Hの形成に従って適宜に変更制御するように構成
する等、この発明の趣旨から逸脱しない範囲で、任意に
変更して具体化することも可能である。
The present invention is not limited to the above-described embodiment. For example, when forming the hole H after forming the recess C, the output value of the laser L and the pressure of the assist gas are set to the hole H. It is also possible to embody the invention by arbitrarily changing it, for example, by appropriately controlling the change in accordance with the formation of the above, without departing from the spirit of the present invention.

【0021】[0021]

【発明の効果】この発明は、以上説明したように、ピア
ッシング開始時、先ず大径の凹所を形成した後に穴明け
を行うので、穴明け時にアシストガスが凹所に案内され
て穴内にスムーズに流れ込む。従って、穴内に充分にア
シストガスが送り込まれるので、ピアッシングを安定し
て良好に行うことができ、切断加工に移行するのに必要
な大径の穴を形成することができて、その移行をスムー
ズに行うことができるという優れた効果を奏する。又、
凹所形成時に、レーザ出力値及びアシストガス圧値を穴
明け時よりも高い値に設定することにより、非常に効率
よく瞬時に凹所を形成することができる。
As described above, according to the present invention, when piercing is started, a hole having a large diameter is first formed and then a hole is formed. Flow into. Therefore, since the assist gas is sufficiently fed into the hole, piercing can be performed stably and satisfactorily, and a large-diameter hole necessary for the transition to the cutting process can be formed, and the transition can be performed smoothly. It has an excellent effect that it can be performed. or,
When the recess is formed, the laser output value and the assist gas pressure value are set to values higher than those at the time of drilling, so that the recess can be formed very efficiently and instantaneously.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明を具体化したレーザ加工方法の一実施
例を工程順に示す概略断面図である。
FIG. 1 is a schematic sectional view showing an embodiment of a laser processing method embodying the present invention in the order of steps.

【図2】そのレーザ加工方法が用いられるレーザ加工装
置の制御系を例示する構成図である。
FIG. 2 is a configuration diagram illustrating a control system of a laser processing apparatus in which the laser processing method is used.

【図3】ギャップ量の制御方法を示す図である。FIG. 3 is a diagram showing a method of controlling a gap amount.

【図4】本発明によるピアッシング時のアシストガスの
流れを示す概略断面図である。
FIG. 4 is a schematic sectional view showing a flow of assist gas during piercing according to the present invention.

【図5】従来方法によるピアッシング時のアシストガス
の流れを示す概略断面図である。
FIG. 5 is a schematic sectional view showing a flow of assist gas during piercing by a conventional method.

【符号の説明】[Explanation of symbols]

Lレーザ光 、P 焦点、A アシストガス、W ワー
ク、C 凹所、H 穴。
L laser light, P focus, A assist gas, W work, C recess, H hole.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 レーザ光によりワークの切断加工を行う
レーザ加工方法において、ピアッシングを行う際に、ま
ず、レーザ光の焦点をワークの表面から所定量離した状
態で、穴明け時よりも高いレーザ出力と高いアシストガ
ス圧とでレーザ光の照射を行って、ワークの表面に凹所
を形成し、次に、レーザ光の焦点をワークの表面付近に
移動した状態で、穴明け時のレーザ出力とアシストガス
圧とでレーザ光の照射を行って、前記凹所の底部から穴
明けを行うことを特徴とするレーザ加工方法。
1. In a laser processing method for cutting a work by laser light, when piercing is performed, first, a laser beam having a focal point separated from a surface of the work by a predetermined amount is higher than a laser beam when a hole is drilled. Laser light is irradiated with high output and high assist gas pressure to form a recess on the surface of the work, and then the laser output when drilling with the focus of the laser light moved near the surface of the work And a assist gas pressure to irradiate a laser beam to form a hole from the bottom of the recess.
JP03215531A 1991-08-27 1991-08-27 Laser processing method Expired - Lifetime JP3110504B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03215531A JP3110504B2 (en) 1991-08-27 1991-08-27 Laser processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03215531A JP3110504B2 (en) 1991-08-27 1991-08-27 Laser processing method

Publications (2)

Publication Number Publication Date
JPH0557469A true JPH0557469A (en) 1993-03-09
JP3110504B2 JP3110504B2 (en) 2000-11-20

Family

ID=16673973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03215531A Expired - Lifetime JP3110504B2 (en) 1991-08-27 1991-08-27 Laser processing method

Country Status (1)

Country Link
JP (1) JP3110504B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003037085A (en) * 2001-07-06 2003-02-07 Data Storage Inst Method and apparatus for cutting substrate using laser irradiation
US7673388B2 (en) 2003-11-12 2010-03-09 The Yasunaga Co., Ltd. Method of forming fracture start portion of ductile metal part and fracture start portion forming device
JP2011224600A (en) * 2010-04-19 2011-11-10 Koike Sanso Kogyo Co Ltd Laser piercing method
CN102896427A (en) * 2011-07-29 2013-01-30 发那科株式会社 Method and system of laser processing for piercing
WO2014198395A1 (en) 2013-06-11 2014-12-18 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Method for piercing metal workpieces by means of a laser beam
US9919383B2 (en) 2014-10-17 2018-03-20 Mitsubishi Electric Corporation Laser machining method and laser machining apparatus

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003037085A (en) * 2001-07-06 2003-02-07 Data Storage Inst Method and apparatus for cutting substrate using laser irradiation
US7673388B2 (en) 2003-11-12 2010-03-09 The Yasunaga Co., Ltd. Method of forming fracture start portion of ductile metal part and fracture start portion forming device
KR101067312B1 (en) * 2003-11-12 2011-09-23 가부시기가이샤야스나가 Method of forming fracture start portion of ductile metal part and fracture start portion forming device
JP2011224600A (en) * 2010-04-19 2011-11-10 Koike Sanso Kogyo Co Ltd Laser piercing method
US9248524B2 (en) 2011-07-29 2016-02-02 Fanuc Corporation Method and system for laser drilling
JP2013027907A (en) * 2011-07-29 2013-02-07 Fanuc Ltd Laser beam machining method and laser beam machining apparatus performing piercing
CN102896427B (en) * 2011-07-29 2015-01-28 发那科株式会社 Method and system of laser processing for piercing
DE102012014323B4 (en) * 2011-07-29 2015-06-25 Fanuc Corporation Method and system of laser processing for punching
CN102896427A (en) * 2011-07-29 2013-01-30 发那科株式会社 Method and system of laser processing for piercing
WO2014198395A1 (en) 2013-06-11 2014-12-18 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Method for piercing metal workpieces by means of a laser beam
CN105339129A (en) * 2013-06-11 2016-02-17 通快机床两合公司 Method for piercing metal workpieces by means of laser beam
US9956648B2 (en) 2013-06-11 2018-05-01 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Piercing metal workpieces by a laser beam
US9919383B2 (en) 2014-10-17 2018-03-20 Mitsubishi Electric Corporation Laser machining method and laser machining apparatus
DE112014006885B4 (en) 2014-10-17 2018-03-29 Mitsubishi Electric Corporation Laser processing method and laser processing apparatus

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