JPH0554902B2 - - Google Patents

Info

Publication number
JPH0554902B2
JPH0554902B2 JP61176466A JP17646686A JPH0554902B2 JP H0554902 B2 JPH0554902 B2 JP H0554902B2 JP 61176466 A JP61176466 A JP 61176466A JP 17646686 A JP17646686 A JP 17646686A JP H0554902 B2 JPH0554902 B2 JP H0554902B2
Authority
JP
Japan
Prior art keywords
test sample
detector
mirror
light
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61176466A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332338A (ja
Inventor
Takeo Murakoshi
Sadao Minagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61176466A priority Critical patent/JPS6332338A/ja
Priority to US07/076,292 priority patent/US4810872A/en
Publication of JPS6332338A publication Critical patent/JPS6332338A/ja
Publication of JPH0554902B2 publication Critical patent/JPH0554902B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/425—Reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/08—Beam switching arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1738—Optionally different kinds of measurements; Method being valid for different kinds of measurement
    • G01N2021/1742—Optionally different kinds of measurements; Method being valid for different kinds of measurement either absorption or reflection

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP61176466A 1986-07-26 1986-07-26 光学特性測定装置 Granted JPS6332338A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61176466A JPS6332338A (ja) 1986-07-26 1986-07-26 光学特性測定装置
US07/076,292 US4810872A (en) 1986-07-26 1987-07-22 Optical property measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61176466A JPS6332338A (ja) 1986-07-26 1986-07-26 光学特性測定装置

Publications (2)

Publication Number Publication Date
JPS6332338A JPS6332338A (ja) 1988-02-12
JPH0554902B2 true JPH0554902B2 (enEXAMPLES) 1993-08-13

Family

ID=16014174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61176466A Granted JPS6332338A (ja) 1986-07-26 1986-07-26 光学特性測定装置

Country Status (2)

Country Link
US (1) US4810872A (enEXAMPLES)
JP (1) JPS6332338A (enEXAMPLES)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0741302U (ja) * 1993-12-27 1995-07-21 株式会社サン・フロンティア・テクノロジー ガス容器の誤装填防止装置
JPH0741303U (ja) * 1993-12-27 1995-07-21 株式会社サン・フロンティア・テクノロジー ガス容器の誤装填防止装置

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5157459A (en) * 1989-08-29 1992-10-20 Asahi Kogaku Kogyo Kabushiki Kaisha Wave front aberration measuring apparatus
JPH05172742A (ja) * 1991-07-29 1993-07-09 Shimadzu Corp 色分解プリズムの分光透過率測定装置
DE69330010T2 (de) * 1992-05-29 2001-09-13 Eastman Kodak Co., Rochester Vorrichtung und Verfahren zur Beschichtungsdichteanalyse mittels Bildverarbeitung
US5298346A (en) * 1992-07-27 1994-03-29 Motorola, Inc. Battery identification system
US5400116A (en) * 1993-11-03 1995-03-21 Eastman Kodak Company Apparatus and method for producing gradated exposures on radiation sensitive material
US5608526A (en) * 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
US6734967B1 (en) 1995-01-19 2004-05-11 Kla-Tencor Technologies Corporation Focused beam spectroscopic ellipsometry method and system
US5745234A (en) * 1995-07-31 1998-04-28 The United States Of America As Represented By The Secretary Of The Navy Variable angle reflectometer employing an integrating sphere and a light concentrator
JP3931605B2 (ja) * 2001-09-19 2007-06-20 セイコーエプソン株式会社 光学素子の検査装置および光学素子の検査方法
EP1457840B1 (en) 2003-03-14 2014-07-30 Ricoh Company, Ltd. Colour image forming apparatus, which controls the image density by evaluating a reflection signal and a diffuse reflection signal of an optical detecting unit
US10156488B2 (en) * 2013-08-29 2018-12-18 Corning Incorporated Prism-coupling systems and methods for characterizing curved parts
US9983064B2 (en) 2013-10-30 2018-05-29 Corning Incorporated Apparatus and methods for measuring mode spectra for ion-exchanged glasses having steep index region
US9919958B2 (en) 2014-07-17 2018-03-20 Corning Incorporated Glass sheet and system and method for making glass sheet

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2146904A (en) * 1936-05-07 1939-02-14 Eastman Kodak Co Reflection and transmission densitometer
DE2047952C3 (de) * 1970-09-30 1973-10-18 Fa. Carl Zeiss, 7920 Heidenheim Verfahren zur photometrischen Auswertung der sich bei der Auftrennung von Substanz gemischen in dünnen Schichten aus licht streuendem Material ergebenden Zonen
US4040750A (en) * 1976-05-28 1977-08-09 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Real time reflectometer
NL8006097A (nl) * 1980-11-07 1982-06-01 Nl Bank Nv Inrichting voor het automatisch vaststellen en beoordelen van kwaliteiten van afdrukken.
US4589776A (en) * 1982-09-27 1986-05-20 Chiratech, Inc. Method and apparatus for measuring optical properties of materials
US4591271A (en) * 1983-03-21 1986-05-27 Byers Donald W Method and apparatus for coating detection and surface evaluation
US4672196A (en) * 1984-02-02 1987-06-09 Canino Lawrence S Method and apparatus for measuring properties of thin materials using polarized light

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0741302U (ja) * 1993-12-27 1995-07-21 株式会社サン・フロンティア・テクノロジー ガス容器の誤装填防止装置
JPH0741303U (ja) * 1993-12-27 1995-07-21 株式会社サン・フロンティア・テクノロジー ガス容器の誤装填防止装置

Also Published As

Publication number Publication date
US4810872A (en) 1989-03-07
JPS6332338A (ja) 1988-02-12

Similar Documents

Publication Publication Date Title
US5042951A (en) High resolution ellipsometric apparatus
US5581350A (en) Method and system for calibrating an ellipsometer
US5469259A (en) Inspection interferometer with scanning autofocus, and phase angle control features
EP1103784B1 (en) Ellipsometer
US7471392B2 (en) Polarimetric scatterometry methods for critical dimension measurements of periodic structures
TW579436B (en) Interferometer, beam-combining unit and manipulator system
US6870621B2 (en) Small spot ellipsometer
JPH0554902B2 (enEXAMPLES)
EP0396409B1 (en) High resolution ellipsometric apparatus
JP4399126B2 (ja) 分光エリプソメータ
CA2025204C (en) Spectrum measuring equipment
US4560272A (en) Three-axis angle sensor
US4762417A (en) Fringe scanning point diffraction interferometer by polarization
JPS62266439A (ja) 分光偏光測定装置
US4105335A (en) Interferometric optical phase discrimination apparatus
EP0128183A1 (en) METHOD AND DEVICE FOR EXAMINING OBJECTS.
JPH04127004A (ja) エリプソメータ及びその使用方法
CN222070090U (zh) 一种诺马斯基棱镜光束分束角直接测量装置
JP3519605B2 (ja) エリプソメトリ装置
JP2000292347A (ja) 旋光度測定装置
JP2712987B2 (ja) 偏光測定装置の調整方法
JPH02238376A (ja) 電界測定用プローブ
JPH0262801B2 (enEXAMPLES)
JPS6244215B2 (enEXAMPLES)
JPH10253527A (ja) 反射面測定用光学装置ならびに絶対反射率測定方法および絶対面精度測定方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term