JPH055331B2 - - Google Patents

Info

Publication number
JPH055331B2
JPH055331B2 JP59254813A JP25481384A JPH055331B2 JP H055331 B2 JPH055331 B2 JP H055331B2 JP 59254813 A JP59254813 A JP 59254813A JP 25481384 A JP25481384 A JP 25481384A JP H055331 B2 JPH055331 B2 JP H055331B2
Authority
JP
Japan
Prior art keywords
plate
reflecting mirror
mirror surface
fulcrum
support plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59254813A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61132919A (ja
Inventor
Naomasa Wakita
Makoto Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP59254813A priority Critical patent/JPS61132919A/ja
Priority to DE19853542154 priority patent/DE3542154A1/de
Priority to US06/803,734 priority patent/US4705365A/en
Publication of JPS61132919A publication Critical patent/JPS61132919A/ja
Publication of JPH055331B2 publication Critical patent/JPH055331B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP59254813A 1984-12-01 1984-12-01 光偏向装置 Granted JPS61132919A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59254813A JPS61132919A (ja) 1984-12-01 1984-12-01 光偏向装置
DE19853542154 DE3542154A1 (de) 1984-12-01 1985-11-28 Lichtumlenkvorrichtung
US06/803,734 US4705365A (en) 1984-12-01 1985-12-02 Light deflecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59254813A JPS61132919A (ja) 1984-12-01 1984-12-01 光偏向装置

Publications (2)

Publication Number Publication Date
JPS61132919A JPS61132919A (ja) 1986-06-20
JPH055331B2 true JPH055331B2 (US20030199744A1-20031023-C00003.png) 1993-01-22

Family

ID=17270235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59254813A Granted JPS61132919A (ja) 1984-12-01 1984-12-01 光偏向装置

Country Status (1)

Country Link
JP (1) JPS61132919A (US20030199744A1-20031023-C00003.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2554279B2 (ja) * 1989-04-28 1996-11-13 株式会社小松製作所 レーザスキャナの駆動装置
US5550669A (en) * 1993-04-19 1996-08-27 Martin Marietta Corporation Flexure design for a fast steering scanning mirror

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5250709B2 (US20030199744A1-20031023-C00003.png) * 1973-10-18 1977-12-27
JPS5340544A (en) * 1972-05-02 1978-04-13 Zeiss Stiftung Method of producing light compatible multiple focus spectacles lens

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5250709U (US20030199744A1-20031023-C00003.png) * 1976-10-01 1977-04-11

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340544A (en) * 1972-05-02 1978-04-13 Zeiss Stiftung Method of producing light compatible multiple focus spectacles lens
JPS5250709B2 (US20030199744A1-20031023-C00003.png) * 1973-10-18 1977-12-27

Also Published As

Publication number Publication date
JPS61132919A (ja) 1986-06-20

Similar Documents

Publication Publication Date Title
US4705365A (en) Light deflecting apparatus
JPH0441808B2 (US20030199744A1-20031023-C00003.png)
US5408355A (en) Micromechanical transducer
US6028689A (en) Multi-motion micromirror
US6661561B2 (en) High frequency deformable mirror device
US6710949B2 (en) Tilting device for lens
US20040165249A1 (en) Micromirror systems with concealed multi-piece hinge structures
KR20050043423A (ko) 주파수 변조 가능한 공진형 스캐너
US5400184A (en) Kinematic high bandwidth mirror mount
WO2002037162A2 (en) Gimbaled micro-mirror positionable by thermal actuators
WO2005102909A1 (ja) アクチュエータ
US8072664B1 (en) Biaxial scanning mirror having resonant frequency adjustment
JPH0968661A (ja) ティルトミラー構造
JP2003117897A (ja) マイクロアクチュエータ
JPH055331B2 (US20030199744A1-20031023-C00003.png)
KR19990007821A (ko) 이중 경사각을 제공하는 박막 액츄에이티드 거울 어레이
JP2001075042A (ja) 光偏向器
JP2018004683A (ja) 光学デバイス、及び光学装置
JPH10104487A (ja) 傾斜装置
JPH055332B2 (US20030199744A1-20031023-C00003.png)
JP2003262803A5 (US20030199744A1-20031023-C00003.png)
JPS644091Y2 (US20030199744A1-20031023-C00003.png)
JP2003075738A (ja) 光スイッチ
JPH046009Y2 (US20030199744A1-20031023-C00003.png)
JPS61121109A (ja) 微動テ−ブル装置