JPH05504186A - マイクロバルブ - Google Patents

マイクロバルブ

Info

Publication number
JPH05504186A
JPH05504186A JP3502028A JP50202891A JPH05504186A JP H05504186 A JPH05504186 A JP H05504186A JP 3502028 A JP3502028 A JP 3502028A JP 50202891 A JP50202891 A JP 50202891A JP H05504186 A JPH05504186 A JP H05504186A
Authority
JP
Japan
Prior art keywords
cover
jet
microvalve
fluid
flexible tongue
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3502028A
Other languages
English (en)
Japanese (ja)
Inventor
メトナー，ミヒャエル
グラウアー，トーマス
Original Assignee
ローベルト　ボツシュ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ローベルト　ボツシュ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング filed Critical ローベルト　ボツシュ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング
Publication of JPH05504186A publication Critical patent/JPH05504186A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0007—Lift valves of cantilever type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0096—Fuel injection devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/212—System comprising plural fluidic devices or stages
    • Y10T137/2125—Plural power inputs [e.g., parallel inputs]
    • Y10T137/2147—To cascaded plural devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218—Means to regulate or vary operation of device
    • Y10T137/2202—By movable element
    • Y10T137/2213—Electrically-actuated element [e.g., electro-mechanical transducer]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/2224—Structure of body of device

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Fixing For Electrophotography (AREA)
JP3502028A 1990-02-07 1991-01-16 マイクロバルブ Pending JPH05504186A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4003619.7 1990-02-07
DE4003619A DE4003619A1 (de) 1990-02-07 1990-02-07 Mikroventil

Publications (1)

Publication Number Publication Date
JPH05504186A true JPH05504186A (ja) 1993-07-01

Family

ID=6399606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3502028A Pending JPH05504186A (ja) 1990-02-07 1991-01-16 マイクロバルブ

Country Status (5)

Country Link
US (1) US5271431A (enExample)
EP (1) EP0513018B1 (enExample)
JP (1) JPH05504186A (enExample)
DE (2) DE4003619A1 (enExample)
WO (1) WO1991012434A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002523773A (ja) * 1998-08-28 2002-07-30 アンテルユニヴェルシテール・ミクロ−エレクトロニカ・サントリュム・ヴェー・ゼッド・ドゥブルヴェ 間隙率を求める装置及び方法

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5400824A (en) * 1991-01-21 1995-03-28 Robert Bosch Gmbh Microvalve
DE4101575A1 (de) * 1991-01-21 1992-07-23 Bosch Gmbh Robert Mikroventil
DE4220226A1 (de) * 1992-06-20 1993-12-23 Bosch Gmbh Robert Magnetostrikiver Wandler
DE4227998C2 (de) * 1992-08-24 1995-11-02 Fraunhofer Ges Forschung Mikrominiaturisierbare Ventilanordnung
US6230501B1 (en) 1994-04-14 2001-05-15 Promxd Technology, Inc. Ergonomic systems and methods providing intelligent adaptive surfaces and temperature control
US6533366B1 (en) 1996-05-29 2003-03-18 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
US6019437A (en) * 1996-05-29 2000-02-01 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
AT410018B (de) 1998-02-06 2003-01-27 Sticht Walter Mehrwegventil
KR100642025B1 (ko) 1998-05-08 2006-11-06 훼스토 악티엔 게젤샤프트 운트 코 마이크로밸브 어레이
JP4831446B2 (ja) 1998-09-03 2011-12-07 ゼネラル・エレクトリック・カンパニイ マイクロバルブ装置
US7011378B2 (en) * 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
US6523560B1 (en) 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
US6039224A (en) * 1998-12-17 2000-03-21 Aptar Group, Inc. Multiple-orifice dispensing system with improved seal
US6540203B1 (en) 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
US7219449B1 (en) 1999-05-03 2007-05-22 Promdx Technology, Inc. Adaptively controlled footwear
US6694998B1 (en) 2000-03-22 2004-02-24 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US6845962B1 (en) 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
US6494804B1 (en) 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
US6505811B1 (en) 2000-06-27 2003-01-14 Kelsey-Hayes Company High-pressure fluid control valve assembly having a microvalve device attached to fluid distributing substrate
US6581640B1 (en) 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
DE10202996A1 (de) * 2002-01-26 2003-08-14 Eppendorf Ag Piezoelektrisch steuerbare Mikrofluidaktorik
US8011388B2 (en) 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
JP5196422B2 (ja) 2004-03-05 2013-05-15 ドゥンアン、マイクロスタック、インク マイクロバルブ形成のための選択的ボンディング
US7156365B2 (en) 2004-07-27 2007-01-02 Kelsey-Hayes Company Method of controlling microvalve actuator
US8156962B2 (en) * 2006-12-15 2012-04-17 Dunan Microstaq, Inc. Microvalve device
DE112008000862T5 (de) 2007-03-30 2010-03-11 Microstaq, Inc., Austin Vorgesteuertes Mikroschieberventil
US8387659B2 (en) 2007-03-31 2013-03-05 Dunan Microstaq, Inc. Pilot operated spool valve
JP2011530683A (ja) 2008-08-09 2011-12-22 マイクラスタック、インク 改良型のマイクロバルブ・デバイス
US8113482B2 (en) 2008-08-12 2012-02-14 DunAn Microstaq Microvalve device with improved fluid routing
CN102308131B (zh) 2008-12-06 2014-01-08 盾安美斯泰克有限公司 流体流动控制组件
WO2010117874A2 (en) 2009-04-05 2010-10-14 Microstaq, Inc. Method and structure for optimizing heat exchanger performance
WO2011022267A2 (en) 2009-08-17 2011-02-24 Microstaq, Inc. Micromachined device and control method
US8956884B2 (en) 2010-01-28 2015-02-17 Dunan Microstaq, Inc. Process for reconditioning semiconductor surface to facilitate bonding
US9006844B2 (en) 2010-01-28 2015-04-14 Dunan Microstaq, Inc. Process and structure for high temperature selective fusion bonding
US8996141B1 (en) 2010-08-26 2015-03-31 Dunan Microstaq, Inc. Adaptive predictive functional controller
US8925793B2 (en) 2012-01-05 2015-01-06 Dunan Microstaq, Inc. Method for making a solder joint
US9140613B2 (en) 2012-03-16 2015-09-22 Zhejiang Dunan Hetian Metal Co., Ltd. Superheat sensor
US9188375B2 (en) 2013-12-04 2015-11-17 Zhejiang Dunan Hetian Metal Co., Ltd. Control element and check valve assembly
DE102015001102B4 (de) * 2015-01-30 2022-01-20 Illinois Tool Works Inc. Strömungsdetektor und Verfahren zur Überwachung eines Klebstoffflusses
US10323772B2 (en) * 2015-10-01 2019-06-18 Corporation For National Research Initiatives Three-way microvalve device and method of fabrication
DE102016216694A1 (de) 2016-09-05 2018-03-08 Zf Friedrichshafen Ag Magnetisch betätigbares Ventil

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2024183A (en) * 1935-03-28 1935-12-17 Alexis R Pribil Method of making chain links
GB1077308A (en) * 1964-09-15 1967-07-26 British Telecomm Res Ltd Improvements in fluid transducers
US3342198A (en) * 1965-01-15 1967-09-19 Sperry Rand Corp Fluid oscillator
US3266551A (en) * 1965-08-31 1966-08-16 Electronics Corp America Combustion control system
US3426800A (en) * 1965-10-15 1969-02-11 Bowles Eng Corp Bistable fluid valves
GB1099815A (en) * 1965-11-10 1968-01-17 Printing Packaging & Allied Tr Electrical control of fluid amplifier
US3417813A (en) * 1966-08-05 1968-12-24 W M Chace Fluidic thermostat
DE1774859B1 (de) * 1968-09-21 1972-05-04 Messerschmitt Boelkow Blohm Elektro-fluidischer signalumformer
US3557816A (en) * 1968-11-25 1971-01-26 Corning Glass Works Temperature sensitive fluidic device
US3556119A (en) * 1969-05-22 1971-01-19 Us Navy Electro-flueric valve
US3747644A (en) * 1971-10-15 1973-07-24 Bell Telephone Labor Inc Electric to fluidic transducer
US3771567A (en) * 1972-07-13 1973-11-13 Bell Telephone Labor Inc Electromechanically actuated fluid switch
SU579460A1 (ru) * 1974-12-30 1977-11-05 Ленинградский Ордена Ленина Политехнический Институт Им.М.И.Калинина Пьезоакустический преобразователь сигналов
US4203312A (en) * 1977-09-29 1980-05-20 Spiral Tubing Corporation Corrugated tubing with variable depth corrugations and method of making the same
US4326559A (en) * 1980-04-25 1982-04-27 The United States Of America As Represented By The Secretary Of The Army Fluidic force transducer
US4809730A (en) * 1983-03-10 1989-03-07 University Of New Hampshire Electrofluid converters
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
DE3621331A1 (de) * 1986-06-26 1988-01-14 Fraunhofer Ges Forschung Mikroventil
DE3919876A1 (de) * 1989-06-19 1990-12-20 Bosch Gmbh Robert Mikroventil

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002523773A (ja) * 1998-08-28 2002-07-30 アンテルユニヴェルシテール・ミクロ−エレクトロニカ・サントリュム・ヴェー・ゼッド・ドゥブルヴェ 間隙率を求める装置及び方法
JP2011237411A (ja) * 1998-08-28 2011-11-24 Imec 間隙率を求める装置及び方法

Also Published As

Publication number Publication date
DE4003619A1 (de) 1991-08-14
DE4003619C2 (enExample) 1991-11-21
EP0513018B1 (de) 1994-08-31
DE59102744D1 (de) 1994-10-06
EP0513018A1 (de) 1992-11-19
US5271431A (en) 1993-12-21
WO1991012434A1 (de) 1991-08-22

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