JPH05504186A - マイクロバルブ - Google Patents

マイクロバルブ

Info

Publication number
JPH05504186A
JPH05504186A JP3502028A JP50202891A JPH05504186A JP H05504186 A JPH05504186 A JP H05504186A JP 3502028 A JP3502028 A JP 3502028A JP 50202891 A JP50202891 A JP 50202891A JP H05504186 A JPH05504186 A JP H05504186A
Authority
JP
Japan
Prior art keywords
cover
jet
microvalve
fluid
flexible tongue
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3502028A
Other languages
English (en)
Japanese (ja)
Inventor
メトナー，ミヒャエル
グラウアー，トーマス
Original Assignee
ローベルト　ボツシュ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ローベルト　ボツシュ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング filed Critical ローベルト　ボツシュ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング
Publication of JPH05504186A publication Critical patent/JPH05504186A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0007—Lift valves of cantilever type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0096—Fuel injection devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/212—System comprising plural fluidic devices or stages
    • Y10T137/2125—Plural power inputs [e.g., parallel inputs]
    • Y10T137/2147—To cascaded plural devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218—Means to regulate or vary operation of device
    • Y10T137/2202—By movable element
    • Y10T137/2213—Electrically-actuated element [e.g., electro-mechanical transducer]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/2224—Structure of body of device

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Fixing For Electrophotography (AREA)
JP3502028A 1990-02-07 1991-01-16 マイクロバルブ Pending JPH05504186A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4003619A DE4003619A1 (de) 1990-02-07 1990-02-07 Mikroventil
DE4003619.7 1990-02-07

Publications (1)

Publication Number Publication Date
JPH05504186A true JPH05504186A (ja) 1993-07-01

Family

ID=6399606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3502028A Pending JPH05504186A (ja) 1990-02-07 1991-01-16 マイクロバルブ

Country Status (5)

Country Link
US (1) US5271431A (enExample)
EP (1) EP0513018B1 (enExample)
JP (1) JPH05504186A (enExample)
DE (2) DE4003619A1 (enExample)
WO (1) WO1991012434A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002523773A (ja) * 1998-08-28 2002-07-30 アンテルユニヴェルシテール・ミクロ−エレクトロニカ・サントリュム・ヴェー・ゼッド・ドゥブルヴェ 間隙率を求める装置及び方法

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US5400824A (en) * 1991-01-21 1995-03-28 Robert Bosch Gmbh Microvalve
DE4101575A1 (de) * 1991-01-21 1992-07-23 Bosch Gmbh Robert Mikroventil
DE4220226A1 (de) * 1992-06-20 1993-12-23 Bosch Gmbh Robert Magnetostrikiver Wandler
DE4227998C2 (de) * 1992-08-24 1995-11-02 Fraunhofer Ges Forschung Mikrominiaturisierbare Ventilanordnung
US6230501B1 (en) 1994-04-14 2001-05-15 Promxd Technology, Inc. Ergonomic systems and methods providing intelligent adaptive surfaces and temperature control
US6533366B1 (en) 1996-05-29 2003-03-18 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
US6019437A (en) * 1996-05-29 2000-02-01 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
AT410018B (de) * 1998-02-06 2003-01-27 Sticht Walter Mehrwegventil
ATE256252T1 (de) 1998-05-08 2003-12-15 Festo Ag & Co Mikroventilbatterie
US7011378B2 (en) 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
US6523560B1 (en) 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
ATE393319T1 (de) 1998-09-03 2008-05-15 Ge Novasensor Inc Proportionale, mikromechanische vorrichtung
US6039224A (en) * 1998-12-17 2000-03-21 Aptar Group, Inc. Multiple-orifice dispensing system with improved seal
US6540203B1 (en) 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
US7219449B1 (en) 1999-05-03 2007-05-22 Promdx Technology, Inc. Adaptively controlled footwear
US6845962B1 (en) 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
US6694998B1 (en) 2000-03-22 2004-02-24 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US6494804B1 (en) 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
US6505811B1 (en) 2000-06-27 2003-01-14 Kelsey-Hayes Company High-pressure fluid control valve assembly having a microvalve device attached to fluid distributing substrate
US6581640B1 (en) 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
DE10202996A1 (de) * 2002-01-26 2003-08-14 Eppendorf Ag Piezoelektrisch steuerbare Mikrofluidaktorik
US8011388B2 (en) 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
KR20060128042A (ko) 2004-03-05 2006-12-13 알루미나 마이크로 엘엘씨 선택식 마이크로밸브 형성 접합방법
US7156365B2 (en) 2004-07-27 2007-01-02 Kelsey-Hayes Company Method of controlling microvalve actuator
DE112007003035T5 (de) * 2006-12-15 2009-11-05 Microstaq, Inc., Austin Mikroventilvorrichtung
DE112008000862T5 (de) 2007-03-30 2010-03-11 Microstaq, Inc., Austin Vorgesteuertes Mikroschieberventil
US8387659B2 (en) 2007-03-31 2013-03-05 Dunan Microstaq, Inc. Pilot operated spool valve
JP2011530683A (ja) 2008-08-09 2011-12-22 マイクラスタック、インク 改良型のマイクロバルブ・デバイス
US8113482B2 (en) 2008-08-12 2012-02-14 DunAn Microstaq Microvalve device with improved fluid routing
WO2010065804A2 (en) 2008-12-06 2010-06-10 Microstaq, Inc. Fluid flow control assembly
WO2010117874A2 (en) 2009-04-05 2010-10-14 Microstaq, Inc. Method and structure for optimizing heat exchanger performance
CN102575782B (zh) 2009-08-17 2014-04-09 盾安美斯泰克股份有限公司 微型机械装置和控制方法
WO2011094302A2 (en) 2010-01-28 2011-08-04 Microstaq, Inc. Process for reconditioning semiconductor surface to facilitate bonding
CN102792419B (zh) 2010-01-28 2015-08-05 盾安美斯泰克股份有限公司 高温选择性融合接合的工艺与构造
US8996141B1 (en) 2010-08-26 2015-03-31 Dunan Microstaq, Inc. Adaptive predictive functional controller
US8925793B2 (en) 2012-01-05 2015-01-06 Dunan Microstaq, Inc. Method for making a solder joint
US9140613B2 (en) 2012-03-16 2015-09-22 Zhejiang Dunan Hetian Metal Co., Ltd. Superheat sensor
US9188375B2 (en) 2013-12-04 2015-11-17 Zhejiang Dunan Hetian Metal Co., Ltd. Control element and check valve assembly
DE102015001102B4 (de) * 2015-01-30 2022-01-20 Illinois Tool Works Inc. Strömungsdetektor und Verfahren zur Überwachung eines Klebstoffflusses
US10323772B2 (en) * 2015-10-01 2019-06-18 Corporation For National Research Initiatives Three-way microvalve device and method of fabrication
DE102016216694A1 (de) 2016-09-05 2018-03-08 Zf Friedrichshafen Ag Magnetisch betätigbares Ventil

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002523773A (ja) * 1998-08-28 2002-07-30 アンテルユニヴェルシテール・ミクロ−エレクトロニカ・サントリュム・ヴェー・ゼッド・ドゥブルヴェ 間隙率を求める装置及び方法
JP2011237411A (ja) * 1998-08-28 2011-11-24 Imec 間隙率を求める装置及び方法

Also Published As

Publication number Publication date
EP0513018A1 (de) 1992-11-19
EP0513018B1 (de) 1994-08-31
DE4003619C2 (enExample) 1991-11-21
DE4003619A1 (de) 1991-08-14
WO1991012434A1 (de) 1991-08-22
DE59102744D1 (de) 1994-10-06
US5271431A (en) 1993-12-21

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