JPH0550151U - Rolling bearing - Google Patents

Abstract

(57) [Summary] [Purpose] To confine the generated wear debris inside the bearing to prevent leakage to the outside. A shield plate 5 is attached to a shoulder portion of an outer ring 2, and an inner peripheral edge of the shield plate 5 is opposed to an outer peripheral surface of an inner ring 1 so as to form a non-contact sealed portion.
On the inner surface of the shield plate 5, a collecting means 7 for taking in abrasion powder of the solid lubricant 6 is provided. The collecting means 7 is, for example, a stack of three mesh rings 8 to 10 and takes in and retains a large amount of abrasion powder generated in the initial stage of rotation. Therefore, the abrasion powder is less likely to leak to the outside of the bearing.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a rolling bearing used in, for example, a high temperature atmosphere or a vacuum environment, and relates to a rolling bearing using a solid lubricant instead of lubricating oil.

[0002]

[Prior Art]

In conventional rolling bearings of this type, for example, the raceways of the rolling elements or the inner and outer rings are coated with a soft metal such as gold or silver or a solid lubricant composed of MoS ₂ , and the contact parts between the rolling elements and the inner and outer rings are covered. I try to lubricate.

It has been known that in this type of rolling bearing, the solid lubricant is abundantly worn in the initial stage of rotation and gradually reduced. Therefore, conventionally, in order to prevent the abrasion powder from being released to the outside at the initial stage of rotation, an annular shield plate is attached to one of the shoulders of the inner and outer rings instead of the lid.

[0004]

[Problems to be solved by the device]

 By the way, in the above-mentioned conventional rolling bearing, although the shield plate is intended to prevent the release of wear particles of the solid lubricant, the shield plate forms a non-contact sealing part, and the gap between the peripheral edge of the shield plate and the bearing ring is Due to the existence of a slight gap, a large amount of wear particles generated in the initial stage of rotation leaked little by little through the gap.

When such a conventional rolling bearing is used in a transport system such as a clean room for manufacturing a semiconductor device, it may become an obstacle in manufacturing a semiconductor device, such as contamination of the inside of the clean room by abrasion powder of the rolling bearing. Is pointed out.

On the other hand, it is possible to apply a contact type sealing device having a rubber lip, but it is pointed out that abrasion powder is generated due to the contact, which is also a pollution source, as described above.

The present invention was devised to solve such a problem, and an object thereof is to confine the generated abrasion powder inside the bearing to suppress leakage to the outside.

[0008]

[Means for Solving the Problems]

 In order to achieve such an object, the present invention provides a rolling bearing in which at least one of the rolling element surface, the raceway surface of the bearing ring, and the sliding contact surface of the cage with the rolling element is coated with a solid lubricant. In, the following configuration is adopted.

In the rolling bearing according to the present invention, an annular shield plate that forms a non-contact sealing portion with the other race is attached to the shoulder portion of one race, and the inner surface of this shield plate is also mounted. Is characterized in that it is provided with a collecting means for taking in the abrasion powder of the solid lubricant.

[0010]

[Action]

 Due to the use of a solid lubricant, it is inevitable that a large amount of wear powder will be generated in the initial stage of rotation, but since most of the wear powder will be taken in by the trapping means on the inner surface of the shield plate, wear powder will be generated. Less likely to leak to the outside.

[0011]

【Example】

 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

1 and 2 show an embodiment of the present invention. The drawing shows a deep groove ball bearing, where 1 is an inner ring, 2 is an outer ring, 3 is a ball, 4 is a cage, and 5 is a shield plate.

The inner ring 1, the outer ring 2, the balls 3, the cage 4, and the shield plate 5 are made of steel material such as stainless steel having corrosion resistance, ceramics, or the like. In the present embodiment, the balls 3 are solid such as Au or Ag. Lubricant 6 is coated. The solid lubricant 6 may be formed in a plurality of layers in consideration of adhesiveness to the ball 3, or the ball 3 itself may be formed of carbon as shown in Japanese Utility Model Laid-Open No. 63-22425. Good.

The shield plate 5 is attached to the shoulder portion of the outer ring 2, and its inner peripheral edge is opposed to the outer peripheral surface of the inner ring 1 so as to form a non-contact sealed portion. On the inner surface of the shield plate 5, there is provided a collecting means 7 for taking in abrasion powder of the solid lubricant 6. The collecting means 7 is composed of, for example, three mesh rings 8 to 10 stacked on each other, and is hooked on the cut-and-raised pieces 5a formed at several circumferential positions of the shield plate 5. The mesh rings 8 to 10 of the collecting means 7 are selected such that the fineness of the mesh becomes finer as they approach the shield plate 5, and the abrasion powder that has entered deep inside the collecting means 7 is selected. Has been devised to prevent the coming out again. In particular, when the deep groove ball bearing is used in a high temperature atmosphere, it is preferable that the material of the mesh rings 8 to 10 is glass fiber or the like, and the normal use without such a condition. If so, the material is not specified.

Next, the operation will be described.

Due to the use of the solid lubricant 6, it is inevitable that a large amount of abrasion powder is generated in the initial stage of rotation, but most of the abrasion powder is taken in by the collecting means 7 on the inner surface of the shield plate 5. In other words, the generated abrasion powder not only lubricates the contact portion between the balls 3 and the inner and outer races 1 and 2, but also rises and floats inside the bearing. The floating abrasion powder is the collecting means 7, which is the mesh ring. Since it enters the inside of 8-10, once it enters, it does not come out to the inside of the bearing, so that the abrasion powder that is floating gradually decreases. Therefore, the abrasion powder is prevented from leaking to the outside of the bearing.

Further, particularly in use in a vacuum atmosphere, when the bearing housing space is evacuated, air passes through each mesh from the inside of the bearing through the holes 5b formed by the cut-and-raised pieces 5a of the shield plate 5 to the outside of the bearing. Since it is discharged to, the initial wear powder at the time of start-up is easily collected by the inner coarse mesh. On the other hand, when the vacuum atmosphere is released, since the mesh outside the bearing of the shield plate 5 is a fine mesh, the flow of air from the outside of the bearing to the inside of the bearing is blocked through this hole 5b and collected by the collecting means 7. Abrasion powder does not flow out into the bearing.

As described above, according to the structure of this embodiment, the wear powder of the solid lubricant 6 that is inevitably generated can be confined inside the bearing so as not to be discharged to the outside.

The present invention is not limited to the above embodiment. For example, the collecting means 7 may be a gel-like semi-solid substance having adhesiveness instead of the mesh rings 8-10. Further, a portion along the radial direction of the shield plate 5 may be shortened, and the collecting means 7 as described above may be attached to the shortened portion. Further, the cage itself may be formed of a solid lubricant such as a fluorine resin or a PEEK material.

[0020]

[Effect of the device]

 As described above, according to the present invention, the wear powder of the solid lubricant that is inevitably generated can be confined inside the bearing so as not to be exposed to the outside, so that the rolling bearing can be used in, for example, a clean room where dust is disliked. It is effective when used in.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing a deep groove ball bearing according to an embodiment of the present invention.

FIG. 2 is an enlarged view of a main part of FIG.

[Explanation of symbols]

 1 Inner ring 2 Outer ring 3 Ball 5 Shield plate 6 Solid lubricant 7 Collection means

Claims (1)

[Scope of utility model registration request] 1. A rolling bearing in which at least one of a surface of a rolling element, a raceway surface of a bearing ring, and a sliding contact surface of a cage with a rolling element is coated with a solid lubricant, wherein An annular shield plate that forms a non-contact sealed portion with the other race is attached to the shoulder portion, and a collection means for collecting the abrasion powder of the solid lubricant is provided on the inner surface of the shield plate. The rolling bearing is characterized by being used.