JPH0874862A - Solid lubricating bearing - Google Patents
Solid lubricating bearingInfo
- Publication number
- JPH0874862A JPH0874862A JP6212356A JP21235694A JPH0874862A JP H0874862 A JPH0874862 A JP H0874862A JP 6212356 A JP6212356 A JP 6212356A JP 21235694 A JP21235694 A JP 21235694A JP H0874862 A JPH0874862 A JP H0874862A
- Authority
- JP
- Japan
- Prior art keywords
- cage
- bearing
- holding member
- rolling
- rolling element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/38—Ball cages
- F16C33/44—Selection of substances
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/32—Balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/38—Ball cages
- F16C33/3831—Ball cages with hybrid structure, i.e. with parts made of distinct materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/58—Raceways; Race rings
- F16C33/62—Selection of substances
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/66—Special parts or details in view of lubrication
- F16C33/6696—Special parts or details in view of lubrication with solids as lubricant, e.g. dry coatings, powder
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C19/00—Bearings with rolling contact, for exclusively rotary movement
- F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
- F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
- F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/30—Parts of ball or roller bearings
- F16C33/38—Ball cages
- F16C33/41—Ball cages comb-shaped
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、固体潤滑剤を使用した
軸受に係り、特に、半導体製造機器や宇宙用機器等の真
空環境中、または極高温や極低温中に用いられる軸受に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bearing using a solid lubricant, and more particularly to a bearing used in a vacuum environment such as semiconductor manufacturing equipment or space equipment, or in extremely high temperature or extremely low temperature.
【０００２】[0002]
【従来の技術】半導体製造機器や宇宙用機器等の真空環
境中、または極高温や極低温中で軸受を使用する際に
は、潤滑剤として油やグリースの使用できないため固体
潤滑剤が使用される。固体潤滑剤は、一般に金，銀，鉛
等の軟質金属や二硫化モリブデン等の層状構造化合物，
ポリテトラフルオロエチレン（ＰＴＦＥ）等の高分子材
料がある。しかし、軸受の転送面や転動体，保持器へ形
成する固体潤滑剤の膜厚は通常数μｍ以下であり、摩擦
回数の増加にともない摩耗して行くためにその寿命は油
潤滑に比べて短いという欠点がある。2. Description of the Related Art When a bearing is used in a vacuum environment such as semiconductor manufacturing equipment or space equipment, or in extremely high temperature or extremely low temperature, solid lubricant is used because oil or grease cannot be used as lubricant. It Solid lubricants are generally soft metals such as gold, silver and lead, and layered structure compounds such as molybdenum disulfide.
There are polymeric materials such as polytetrafluoroethylene (PTFE). However, the film thickness of the solid lubricant formed on the transfer surface of the bearing, the rolling elements, and the cage is usually less than a few μm, and the life of the solid lubricant is shorter than that of oil lubrication because it wears as the number of friction increases. There is a drawback that.
【０００３】従来、固体潤滑剤による潤滑作用を延長す
るための方法は保持器の転動体との摩擦面に固体潤滑剤
を浸透させて自己潤滑作用を与える方法や、保持器材料
を自己潤滑作用を有する高分子材料で構成する方法が提
案されており、その例は、特開昭63−43024 号，特開平
3−255224 号公報に開示されている。Conventionally, as a method for extending the lubricating action of a solid lubricant, a method of giving a self-lubricating action by infiltrating a solid lubricant into a friction surface of a cage with a rolling element, or a self-lubricating action of a cage material There is proposed a method of constructing a polymer material having a polymer, examples of which are disclosed in JP-A-63-43024,
It is disclosed in Japanese Patent Publication No. 3-255224.
【０００４】[0004]
【発明が解決しようとする課題】真空環境中や、極高
温，極低温などの潤滑油やグリースが使用できない環境
で軸受を使用する際には固体潤滑剤が使用される。固体
潤滑剤は、一般に金，銀，鉛等の軟質金属や二硫化モリ
ブデン等の層状構造化合物，ポリテトラフルオロエチレ
ン（ＰＴＦＥ）等の高分子材料がある。固体潤滑剤では
荷重を支える固体潤滑剤の材料内部でのせん断強度の弱
さが潤滑性を発生し、摩擦時には必然的に摩耗を伴う。
また、軸受の転送面や転動体，保持器に形成する固体潤
滑剤の膜厚は通常数μｍ以下であり、摩擦回数の増加に
ともない摩耗して行くためその寿命は油潤滑に比べて短
いという欠点がある。上記例では、固体潤滑剤を用いた
軸受の寿命を延長するため転がり軸受に対し、黄銅製保
持器の表面に空隙層を形成して固体潤滑剤を浸透させ自
己潤滑機能を付与したもの、あるいはセラミックス製の
転動体とセラミック製またはステンレス鋼の転送面の表
面に二硫化モリブデンのスパッタコーティングをし、保
持器をポリテトラフルオロエチレン製とすることにより
二硫化モリブデンの摩耗を抑えたものである。A solid lubricant is used when a bearing is used in a vacuum environment or in an environment where lubricating oil or grease cannot be used, such as extremely high temperature and extremely low temperature. The solid lubricant is generally a soft metal such as gold, silver or lead, a layered structure compound such as molybdenum disulfide, or a polymer material such as polytetrafluoroethylene (PTFE). In the case of a solid lubricant, the weak shear strength inside the material of the solid lubricant that bears the load causes lubricity, and inevitably wears during friction.
In addition, the film thickness of the solid lubricant formed on the transfer surface of the bearing, the rolling elements, and the cage is usually several μm or less, and the life of the solid lubricant is shorter than that of oil lubrication because it wears as the number of friction increases. There are drawbacks. In the above example, in order to prolong the life of the bearing using the solid lubricant, for the rolling bearing, a void layer is formed on the surface of the brass cage and the solid lubricant is permeated to impart a self-lubricating function, or The wear of molybdenum disulfide is suppressed by sputter-coating molybdenum disulfide on the surfaces of ceramic rolling elements and ceramic or stainless steel transfer surfaces, and by using polytetrafluoroethylene for the cage.
【０００５】しかし、特開昭63−43024 号公報の開示例
では黄銅製の保持器表面に設けた空隙層に固体潤滑剤を
浸透させているために、軸受動作時には摩耗粉が発生し
易いためクリーンな環境に適用するのは難しいという問
題があった。また、特開平3−255224号公報の開示例で
は、転動体の材質がセラミックス製であるためコストが
高い、保持器の材質にポリテトラフルオロエチレンを用
いているために真空中では放出ガス量が多く真空を汚染
するという問題があった。However, in the disclosed example of Japanese Patent Laid-Open No. 63-43024, since the solid lubricant is infiltrated into the void layer provided on the surface of the cage made of brass, wear powder is likely to be generated during the operation of the bearing. There was a problem that it was difficult to apply to a clean environment. Further, in the disclosed example of Japanese Patent Laid-Open No. 3-255224, the cost is high because the material of the rolling elements is made of ceramics, and since polytetrafluoroethylene is used as the material of the cage, the amount of released gas in a vacuum is There was a problem of contaminating the vacuum much.
【０００６】本発明の第一の目的は、動作時の摩耗，放
出ガスが少なく寿命の長い、かつ製造コストが安い固体
潤滑軸受を提供することにある。[0006] A first object of the present invention is to provide a solid lubrication bearing which has less wear and gas emissions during operation, has a long life, and is inexpensive to manufacture.
【０００７】本発明の第二の目的は、組立の容易な固体
潤滑軸受を提供することにある。A second object of the present invention is to provide a solid lubrication bearing which is easy to assemble.
【０００８】[0008]
【課題を解決するための手段】上記第一の目的は、転が
り軸受の外輪と内輪の転送面または転動体の少なくとも
一方に固体潤滑被膜を形成し、保持器は金属製のリング
をもみ抜き加工し、穴部に転動体の外径よりも大きな内
径を有する高分子材料からなる円筒型の保持部材をはめ
あいにより取り付けることにより達成される。A first object of the present invention is to form a solid lubricating coating on at least one of the transfer surfaces of the outer ring and the inner ring of a rolling bearing or the rolling elements, and the retainer is made of a metal ring to be machined. It is achieved by fitting a cylindrical holding member made of a polymer material having an inner diameter larger than the outer diameter of the rolling element into the hole by fitting.
【０００９】第二の目的は、保持器は金属製のリングを
転動体を保持可能にくし歯状くぼみに加工し、このくぼ
みに沿って高分子材料からなる保持部材をはめあいによ
り取り付けることにより達成される。The second object of the present invention is to achieve a cage by forming a ring made of metal into a comb-shaped recess capable of holding a rolling element, and attaching a holding member made of a polymeric material along the recess by fitting. To be done.
【００１０】[0010]
【作用】本発明の固体潤滑軸受は、転がり軸受の外輪と
内輪の転送面または転動体の少なくとも一方に固体潤滑
被膜を形成し、保持器には金属製のリングをもみ抜き加
工し、穴部に転動体の外径よりも大きな内径を有する高
分子材料からなる円筒型の保持部材をはめあいにより取
り付けている。したがって、軸受の寿命を延長すること
ができる。また、高分子材料からなる保持部材の表面積
は保持器全体の表面積と比較して非常に小さいので、全
体を高分子系の材料で構成した場合と比べて放出ガス量
を大幅に低減することができる。さらに、金属製の保持
器の形状をくし歯状くぼみに加工し、くぼみに沿って高
分子材料からなる板をはめあいにより転動体を保持可能
に取り付けた構造とすれば、保持器への固体潤滑剤の取
付、及び軸受の組立が容易となる。In the solid lubricated bearing of the present invention, the solid lubricating coating is formed on at least one of the transfer surfaces of the outer ring and the inner ring of the rolling bearing or the rolling element, and the cage is made by punching a metal ring to form a hole. Further, a cylindrical holding member made of a polymer material having an inner diameter larger than the outer diameter of the rolling element is attached by fitting. Therefore, the life of the bearing can be extended. Further, since the surface area of the holding member made of a polymer material is much smaller than the surface area of the entire cage, it is possible to significantly reduce the amount of released gas as compared with the case where the whole is made of a polymer material. it can. Furthermore, if the cage made of metal is processed into a comb tooth-shaped recess and a plate made of a polymer material is fitted along the recess so that the rolling element can be held by fitting, solid lubrication to the cage is possible. It becomes easy to attach the agent and assemble the bearing.
【００１１】[0011]
【実施例】以下、本発明の実施例を図に従って説明す
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the drawings.
【００１２】図１は、本発明の第一の実施例を示す断面
図であり、転がり軸受に適用した例である。図２は、本
発明の第一の実施例に用いた保持器の側面図である。図
３は、第一の実施例の転がり軸受の保持器に取り付けら
れたポリテトラフルオロエチレン製の保持部材の斜視図
である。図１中、１は外輪であり、２は内輪である。外
輪１の転送面と内輪２の転送面には、銀をイオンプレー
ティングにより付着させた固体潤滑膜７，８が形成され
ている。３は転送面に沿って転がり運動する転動体（ボ
ール）であり、表面には内，外輪の転送面同様銀をイオ
ンプレーティングすることによって固体潤滑被膜６が形
成されている。４は、転動体が回転運動中に一箇所に片
寄ることによって転がり運動が阻害されることを防止す
るための保持器である。保持器４は黄銅製のリングをも
み抜き加工して製作されたものである。保持器４に設置
された転動体を保持するための孔には、内径が転動体の
直径よりも大きいポリテトラフルオロエチレン製の円筒
形をした保持部材５がはめあいによって取り付けられて
いる。なお、図３に示すように、保持部材５には保持器
４に設けられた穴部に固定するために溝９が形成されて
いる。保持器４に保持部材５を取り付ける際には、保持
部材がポリテトラフルオロエチレンであり比較的柔らか
いことを利用して、変形させて取り付ければよい。な
お、軸受の動作中に保持器にかかる力は非常に弱いの
で、保持部材が脱落することはない。FIG. 1 is a sectional view showing a first embodiment of the present invention, which is an example applied to a rolling bearing. FIG. 2 is a side view of the cage used in the first embodiment of the present invention. FIG. 3 is a perspective view of a holding member made of polytetrafluoroethylene attached to the cage of the rolling bearing of the first embodiment. In FIG. 1, 1 is an outer ring and 2 is an inner ring. On the transfer surface of the outer ring 1 and the transfer surface of the inner ring 2, solid lubricating films 7 and 8 to which silver is attached by ion plating are formed. Reference numeral 3 is a rolling element (ball) that rolls along the transfer surface, and a solid lubricating coating 6 is formed on the surface by ion plating silver as in the transfer surfaces of the inner and outer rings. Reference numeral 4 is a retainer for preventing the rolling motion from being hindered by the rolling element being biased to one place during the rotational motion. The cage 4 is manufactured by punching a brass ring. A cylindrical holding member 5 made of polytetrafluoroethylene having an inner diameter larger than the diameter of the rolling element is attached to the hole for holding the rolling element provided in the cage 4 by fitting. As shown in FIG. 3, the holding member 5 is provided with a groove 9 for fixing to a hole provided in the cage 4. When the holding member 5 is attached to the holder 4, it may be deformed and attached by utilizing the fact that the holding member is polytetrafluoroethylene and is relatively soft. Since the force exerted on the cage during the operation of the bearing is very weak, the retaining member does not fall off.
【００１３】この様に構成された固体潤滑軸受におい
て、転送面と転動体には固体潤滑被膜を形成してあるの
で、真空中や極高温，極低温といった油やグリースを使
用できない環境であっても安定して動作することができ
る。また、保持器４にはポリテトラフルオロエチレン製
の保持部材５が取り付けてあり、転動体３は動作中にこ
の保持部材５と接触している。この保持部材の材質であ
るポリテトラフルオロエチレンは自己潤滑作用があるの
で、転動体との接触により転動体の固体潤滑剤を摩耗す
ることがなく軸受からの摩耗粉の発生を少なくすること
ができる。また、軸受の総回転数の増加にともない固体
潤滑被膜がなくなった際にも、ポリテトラフルオロエチ
レンから転動体への移着膜が潤滑性を発揮するため軸受
の寿命を延長することができる。したがって、クリーン
な環境が要求される場所での使用にも耐えることがで
き、軸受の寿命を延長することができる。更に、保持器
４の表面積のほとんどは金属材であり、保持器に取り付
けられた保持部材５の表面積は十分小さい。したがっ
て、放出ガスの大きいポリテトラフルオロエチレンの面
積を最小限に抑えることができるため、保持部材からの
放出ガスによる真空の汚染は少なく半導体製造装置等の
不純ガス分の影響が憂慮されるような装置へ使用するこ
ともできる。保持器への保持部材の取付は、保持器の設
けられた穴と保持部材のはめあいのみによって行われて
いるので、例えば、スパッタリング，蒸着，塗布乾燥
法，加熱圧着法等により被膜を形成した場合と比較して
容易でありコストを下げることができる。また、スパッ
タリング，蒸着等の処理により形成する膜に比べて厚い
ので長寿命である。In the solid-lubricated bearing thus constructed, since the solid lubricating coating is formed on the transfer surface and the rolling elements, it is not possible to use oil or grease in a vacuum, an extremely high temperature or an extremely low temperature. Can also work stably. A holding member 5 made of polytetrafluoroethylene is attached to the holder 4, and the rolling element 3 is in contact with the holding member 5 during operation. Since the material of this holding member, polytetrafluoroethylene, has a self-lubricating action, it is possible to reduce the generation of wear powder from the bearing without wearing the solid lubricant of the rolling element due to contact with the rolling element. . Further, even when the solid lubricating film disappears as the total number of rotations of the bearing increases, the transfer film from polytetrafluoroethylene to the rolling elements exhibits lubricity, so that the life of the bearing can be extended. Therefore, the bearing can be used even in a place where a clean environment is required, and the life of the bearing can be extended. Further, most of the surface area of the cage 4 is a metal material, and the surface area of the holding member 5 attached to the cage is sufficiently small. Therefore, the area of polytetrafluoroethylene, which emits a large amount of released gas, can be minimized, so that the vacuum gas is less contaminated by the released gas from the holding member and the influence of impurities such as semiconductor manufacturing equipment may be a concern. It can also be used in devices. Since the holding member is attached to the holder only by fitting the hole in the holder and the holding member, for example, when a coating is formed by sputtering, vapor deposition, coating drying method, thermocompression bonding method, etc. It is easier than the above and the cost can be reduced. Further, since it is thicker than a film formed by a process such as sputtering or vapor deposition, it has a long life.
【００１４】図４は、本発明の第二の実施例の転がり軸
受に用いた保持器の側面図である。これは軸受の保持器
１０をくし歯状とし、このくし歯部分にポリテトラフル
オロエチレン製の保持部材１１をくし歯に沿ってはめあ
いにより固定したものである。図５は、第二の実施例の
保持器に取り付けたポリテトラフルオロエチレン製の保
持部材の斜視図である。保持部材１１には、保持器１０
に設けられたくし歯状部分に取り付けるための溝１２が
設けられている。FIG. 4 is a side view of the cage used in the rolling bearing of the second embodiment of the present invention. In this, the cage 10 of the bearing has a comb tooth shape, and a holding member 11 made of polytetrafluoroethylene is fixed to the comb tooth portion by fitting along the comb tooth. FIG. 5 is a perspective view of a holding member made of polytetrafluoroethylene attached to the holder of the second embodiment. The holding member 11 includes a retainer 10
A groove 12 is provided for attachment to a comb tooth portion provided on the.
【００１５】この様に構成された保持器を有する固体潤
滑軸受において、転動体を保持する保持器の保持部分の
一方が開放されているので、軸受を組み立てる際の作業
性が改良される。特に大口径薄肉軸受の組立で、その効
果が顕著である。In the solid-lubricated bearing having the cage thus constructed, one of the holding portions of the cage for holding the rolling elements is open, so that the workability in assembling the bearing is improved. The effect is particularly remarkable when assembling a large diameter thin wall bearing.
【００１６】さらに図６に示すように、前述した第二の
実施例のポリテトラフルオロエチレン製の保持部材の開
放部分を転動体の直径よりも小さくしたものを数カ所、
あるいは全ての箇所に取り付ければ、転動体を保持する
保持器の保持部分の一方が開放されているので、軸受を
組み立てる際の作業性が改良されるという特徴を持ちつ
つ保持部材の開放部分の寸法は転動体の直径よりも小さ
いので、保持器は転送面に保持された転動体によって拘
束され、例えば、アンギュラタイプの転がり軸受に用い
た際にも安定して動作させることができる。Further, as shown in FIG. 6, the opening portion of the holding member made of polytetrafluoroethylene of the above-mentioned second embodiment having a smaller opening than the diameter of the rolling element is provided at several places,
Alternatively, if it is installed at all points, one of the holding parts of the cage that holds the rolling element is open, so the workability when assembling the bearing is improved, while the dimensions of the open part of the holding member Is smaller than the diameter of the rolling element, the cage is restrained by the rolling element held on the transfer surface, and can be stably operated even when used in an angular type rolling bearing, for example.
【００１７】本実施例で、転送面と転動体に付けた固体
潤滑剤は銀（Ａｇ）としたが、金（Ａｕ），鉛（Ｐｂ）
等の軟質金属を用いてもよい。また、その取付方法は、
本実施例ではイオンプレーティングによって行ったが、
蒸着等他の方法によってもよい。更に、固体潤滑剤は二
硫化モリブデン（ＭｏＳ2 ）や二硫化タングステン（Ｗ
Ｓ2 ）等の層状構造を有する化合物を用いることも可能
である。In this embodiment, the solid lubricant applied to the transfer surface and the rolling element is silver (Ag), but gold (Au) and lead (Pb) are used.
You may use soft metals, such as. Also, the mounting method is
In this embodiment, ion plating was used,
Other methods such as vapor deposition may be used. Furthermore, solid lubricants include molybdenum disulfide (MoS 2 ) and tungsten disulfide (W
It is also possible to use a compound having a layered structure such as S 2 ).
【００１８】保持器の材料として本実施例では黄銅を使
用したが、例えば、ステンレス鋼とすればより放出ガス
の少ない保持器とすることができる。保持器に取り付け
た保持部材の材料として、本実施例ではポリテトラフル
オロエチレンを用いたが、自己潤滑作用を有するその他
の高分子材料、例えば、ポリイミドやポリアミドイミド
等を用いてもよい。また、保持部材には保持器へ取り付
けるべき溝を設けた構成としたが、溝を設けなくとも保
持部材の寸法を保持器の穴部、またはくし歯状溝の寸法
よりも十分大きく設定し、両者の摩擦によって固定する
構成としてもよい。Although brass is used as the material of the cage in this embodiment, if stainless steel is used, for example, a cage that emits less gas can be used. Although polytetrafluoroethylene was used as the material of the holding member attached to the holder in this embodiment, other polymer materials having a self-lubricating action, such as polyimide and polyamideimide, may be used. In addition, although the holding member is provided with a groove to be attached to the retainer, even if the groove is not provided, the dimension of the holding member is set to be sufficiently larger than the dimension of the hole portion of the retainer or the comb-like groove, It may be configured to be fixed by friction between the two.
【００１９】なお、本実施例では軸受の転送面と転動体
の両方に固体潤滑剤を取り付けたが、いずれか一方のみ
であってもよい。In this embodiment, the solid lubricant is attached to both the transfer surface of the bearing and the rolling elements, but only one of them may be attached.
【００２０】[0020]
【発明の効果】本発明によれば、転がり軸受の転送面と
転動体の少なくとも一方に固体潤滑剤を形成し、金属製
の保持器の転動体との摺動部には自己潤滑作用を有する
ポリテトラフルオロエチレン製の保持部材をはめあいの
みによって取り付ける構成としているため、真空中や極
高温，極低温といった油やグリースを使用できない環境
であっても安定して動作することができる。また、保持
器に取り付けたポリテトラフルオロエチレン製の保持部
材は自己潤滑作用を有しているので、転動体との接触に
より転動体の固体潤滑剤を摩耗することがなく軸受から
の摩耗粉の発生を少なくすることができ、クリーンな環
境が要求される場所で使用することができる。また、転
送面や転動体表面に形成した固体潤滑被膜がなくなった
際にも、ポリテトラフルオロエチレンから転動体への移
着膜が潤滑性を発揮するため軸受を使用でき、長寿命の
軸受が得られる。更に、保持器に付けられた円筒体の表
面積は十分小さく、ポリテトラフルオロエチレンからの
放出ガスによる真空の汚染は少ない。保持部材は、保持
器の設けられた穴へはめあいのみによって行われている
ので、組立は容易でありコストを下げることができる。According to the present invention, the solid lubricant is formed on at least one of the transfer surface of the rolling bearing and the rolling element, and the sliding portion of the metal cage with the rolling element has a self-lubricating action. Since the holding member made of polytetrafluoroethylene is attached only by fitting, it is possible to stably operate even in an environment where oil or grease cannot be used, such as in a vacuum, an extremely high temperature or an extremely low temperature. Further, since the holding member made of polytetrafluoroethylene attached to the cage has a self-lubricating action, the solid lubricant of the rolling element is not abraded by the contact with the rolling element, and thus the abrasion powder from the bearing is prevented. It can be generated in a small amount and can be used in a place where a clean environment is required. In addition, even when the solid lubricating film formed on the transfer surface or rolling element surface is lost, the bearing film can be used because the transfer film from polytetrafluoroethylene to the rolling element exhibits lubricity, and a long-life bearing can be obtained. can get. Furthermore, the surface area of the cylinder attached to the cage is sufficiently small so that the pollution of the vacuum by the released gas from polytetrafluoroethylene is small. Since the holding member is formed only by fitting in the hole provided with the holder, the assembly is easy and the cost can be reduced.
【図１】本発明の第一の実施例を示す断面図。FIG. 1 is a sectional view showing a first embodiment of the present invention.
【図２】第一の実施例に用いた保持器の側面図。FIG. 2 is a side view of the cage used in the first embodiment.
【図３】第一の実施例の保持器に取り付けた保持部材の
斜視図。FIG. 3 is a perspective view of a holding member attached to the holder according to the first embodiment.
【図４】本発明の第二の実施例の転がり軸受に用いた保
持器の側面図。FIG. 4 is a side view of a cage used for the rolling bearing according to the second embodiment of the present invention.
【図５】第二の実施例の保持器に取り付けた保持部材の
斜視図。FIG. 5 is a perspective view of a holding member attached to the cage according to the second embodiment.
【図６】本発明の第三の実施例の保持器に取り付けた保
持部材の斜視図。FIG. 6 is a perspective view of a holding member attached to a holder according to a third embodiment of the present invention.
１…外輪、２…内輪、３…転動体、４…保持器、５…保
持部材、６，７，８…固体潤滑被膜。DESCRIPTION OF SYMBOLS 1 ... Outer ring, 2 ... Inner ring, 3 ... Rolling element, 4 ... Retainer, 5 ... Holding member, 6, 7, 8 ... Solid lubricating coating.
Claims (3)
持する保持器を有する転がり軸受において、前記外輪と
前記内輪の前記転送面または前記転動体の少なくとも一
方には軟質金属、または層状化合物からなる固体潤滑被
膜を形成し、保持器は金属製のリングをもみ抜き加工
し、穴部に前記転動体の外径よりも大きな内径を有する
高分子材料からなる円筒体をはめあいにより取り付けた
ことを特徴とする固体潤滑軸受。1. A rolling bearing having a retainer for holding rolling elements rolling on transfer surfaces of an outer ring and an inner ring, wherein at least one of the transfer surfaces of the outer ring and the inner ring or the rolling element is made of a soft metal, or A solid lubricating coating made of a layered compound is formed, the cage is made by punching out a metal ring, and a cylindrical body made of a polymer material having an inner diameter larger than the outer diameter of the rolling element is fitted into the hole by fitting. Solid lubrication bearings characterized by
体を保持可能なように金属製のリングをくし歯状くぼみ
に加工し、前記歯状くぼみに沿って高分子材料からなる
保持部材をはめあいにより取り付けた固体潤滑軸受。2. The holding member according to claim 1, wherein the cage is formed by forming a metal ring into a comb-shaped recess so that the rolling element can be held, and a retainer made of a polymer material along the tooth-shaped recess. Solid lubrication bearing mounted by fitting.
た高分子材料からなる前記保持部材の開口部すきまの複
数個を前記転動体の直径よりも小さくした固体潤滑軸
受。3. The solid lubricating bearing according to claim 2, wherein a plurality of opening clearances of the holding member made of a polymer material attached to the cage are smaller than a diameter of the rolling element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6212356A JPH0874862A (en) | 1994-09-06 | 1994-09-06 | Solid lubricating bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6212356A JPH0874862A (en) | 1994-09-06 | 1994-09-06 | Solid lubricating bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0874862A true JPH0874862A (en) | 1996-03-19 |
Family
ID=16621193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6212356A Pending JPH0874862A (en) | 1994-09-06 | 1994-09-06 | Solid lubricating bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0874862A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10259003A1 (en) * | 2002-12-16 | 2004-06-24 | Myonic Gmbh | Slide bearing, in particular to be used in dental tool, comprising parts permanently coated with lubricant of suitable kind |
| CN102877248A (en) * | 2012-09-13 | 2013-01-16 | 梁少奇 | Pressure-assisted weaving and dyeing compression roller capable of preventing pressure non-uniformity of middle edges |
| EP3207626A1 (en) * | 2014-10-17 | 2017-08-23 | Moog Inc. | Superconducting devices, such as slip-rings and homopolar motors/generators |
| US10871191B2 (en) * | 2017-03-03 | 2020-12-22 | Ntn Corporation | Rolling bearing and bearing structure including same |
| US11143233B2 (en) * | 2017-06-09 | 2021-10-12 | Jtekt Corporation | Rolling bearing and method for manufacturing rolling bearing |
-
1994
- 1994-09-06 JP JP6212356A patent/JPH0874862A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10259003A1 (en) * | 2002-12-16 | 2004-06-24 | Myonic Gmbh | Slide bearing, in particular to be used in dental tool, comprising parts permanently coated with lubricant of suitable kind |
| CN102877248A (en) * | 2012-09-13 | 2013-01-16 | 梁少奇 | Pressure-assisted weaving and dyeing compression roller capable of preventing pressure non-uniformity of middle edges |
| EP3207626A1 (en) * | 2014-10-17 | 2017-08-23 | Moog Inc. | Superconducting devices, such as slip-rings and homopolar motors/generators |
| US10446995B2 (en) | 2014-10-17 | 2019-10-15 | Moog Inc. | Superconducting devices, such as slip-rings and homopolar motors/generators |
| US10965077B2 (en) | 2014-10-17 | 2021-03-30 | Moog Inc. | Superconducting devices, such as slip-rings and homopolar motors/generators |
| EP3207626B1 (en) * | 2014-10-17 | 2021-06-02 | Moog Inc. | Superconducting devices, such as slip-rings and homopolar motors/generators |
| US10871191B2 (en) * | 2017-03-03 | 2020-12-22 | Ntn Corporation | Rolling bearing and bearing structure including same |
| US11143233B2 (en) * | 2017-06-09 | 2021-10-12 | Jtekt Corporation | Rolling bearing and method for manufacturing rolling bearing |
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