JPH0549428B2 - - Google Patents
Info
- Publication number
- JPH0549428B2 JPH0549428B2 JP62064807A JP6480787A JPH0549428B2 JP H0549428 B2 JPH0549428 B2 JP H0549428B2 JP 62064807 A JP62064807 A JP 62064807A JP 6480787 A JP6480787 A JP 6480787A JP H0549428 B2 JPH0549428 B2 JP H0549428B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- workpiece
- tool
- elastic bodies
- elastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005498 polishing Methods 0.000 claims description 63
- 239000004744 fabric Substances 0.000 description 6
- 239000008188 pellet Substances 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6480787A JPS63232953A (ja) | 1987-03-19 | 1987-03-19 | 研磨工具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6480787A JPS63232953A (ja) | 1987-03-19 | 1987-03-19 | 研磨工具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63232953A JPS63232953A (ja) | 1988-09-28 |
| JPH0549428B2 true JPH0549428B2 (pl) | 1993-07-26 |
Family
ID=13268883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6480787A Granted JPS63232953A (ja) | 1987-03-19 | 1987-03-19 | 研磨工具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63232953A (pl) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2941018B2 (ja) * | 1990-08-31 | 1999-08-25 | キヤノン株式会社 | 研磨工具 |
| WO1996024467A1 (en) * | 1995-02-10 | 1996-08-15 | Advanced Micro Devices, Inc. | Chemical-mechanical polishing using curved carriers |
| US20130224028A1 (en) * | 2012-02-28 | 2013-08-29 | Nathan D. Korn | Component blending tool assembly |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4842494A (pl) * | 1971-10-02 | 1973-06-20 | ||
| JPS5646952A (en) * | 1979-09-26 | 1981-04-28 | Hitachi Ltd | Dehumidifier*air conditioner |
-
1987
- 1987-03-19 JP JP6480787A patent/JPS63232953A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4842494A (pl) * | 1971-10-02 | 1973-06-20 | ||
| JPS5646952A (en) * | 1979-09-26 | 1981-04-28 | Hitachi Ltd | Dehumidifier*air conditioner |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63232953A (ja) | 1988-09-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |