JPH0546401B2 - - Google Patents
Info
- Publication number
- JPH0546401B2 JPH0546401B2 JP62213690A JP21369087A JPH0546401B2 JP H0546401 B2 JPH0546401 B2 JP H0546401B2 JP 62213690 A JP62213690 A JP 62213690A JP 21369087 A JP21369087 A JP 21369087A JP H0546401 B2 JPH0546401 B2 JP H0546401B2
- Authority
- JP
- Japan
- Prior art keywords
- asphalt
- mixer
- aggregate
- support frame
- measuring tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010426 asphalt Substances 0.000 claims description 75
- 239000000203 mixture Substances 0.000 claims description 34
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000002347 injection Methods 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 description 12
- 238000005303 weighing Methods 0.000 description 6
- 239000000843 powder Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 239000004575 stone Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Road Paving Machines (AREA)
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は道路舗装材料であるアスフアルト合材
を製造する装置に関し、特にアスフアルトプラン
トでアスフアルト合材の配合構成に基いて混合し
た加熱骨材を配合別に骨材サイロに貯蔵し、必要
時に所望の骨材サイロから加熱骨材を取り出して
アスフアルト合材を製造する装置に関するもので
ある。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an apparatus for manufacturing asphalt mixture, which is a road paving material, and in particular, a device for manufacturing asphalt mixture, which is a road paving material, and in particular, for producing heated aggregate mixed based on the composition of asphalt mixture in an asphalt plant. The present invention relates to an apparatus for manufacturing asphalt mixture by storing heated aggregates in aggregate silos according to their composition and extracting heated aggregates from a desired aggregate silo when necessary.
[従来の技術]
アスフアルトプラントにおいては一時的に集中
するアスフアルト合材の出荷に対処するため、或
いは骨材を加熱乾燥するドライヤの断続運転を極
力少なくして燃費の節減をはかる等の理由により
アスフアルトプラントで混合調整されたアスフア
ルト合材を一時貯蔵するアスフアルト合材サイロ
を並設している。[Prior art] Asphalt plants use asphalt in order to cope with the temporary concentration of shipments of asphalt mixture, or to reduce fuel consumption by minimizing the intermittent operation of the dryer that heats and dries the aggregate. Asphalt mixture silos are installed side by side to temporarily store the asphalt mixture mixed and adjusted at the plant.
[発明が解決しようとする問題点]
しかしながら、アスフアルト合材サイロにおい
て、アスフアルト合材を長時間貯蔵することはア
スフアルト合材中に含まれるアスフアルト分の酸
化劣化、またはアスフアルトの低沸点分の揮発離
脱と言う問題があり、それらの問題に対処するた
めに種々の工夫が施されているものの、初期の品
質を維持することは難しいと考えられる。そこで
本発明においては製品の品質に影響を与えるアス
フアルト分を除いて配合構成された加熱骨材を貯
蔵し、出荷時にアスフアルトを添加して混合調整
することにより高品質のアスフアルト合材を製造
できるようにし、更に複数基の骨材サイロの設置
した時の混合調整機構を工夫して装置の低コスト
化を図れるようにした装置を提供することを目的
とするものである。[Problems to be solved by the invention] However, in an asphalt mixture silo, storing the asphalt mixture for a long time may cause oxidative deterioration of the asphalt contained in the asphalt mixture or volatilization of the low boiling point of asphalt. Although various efforts have been made to address these problems, it is considered difficult to maintain the initial quality. Therefore, in the present invention, a high-quality asphalt mixture can be manufactured by storing heated aggregates that have been formulated without asphalt, which affects the quality of the product, and adding asphalt at the time of shipment to adjust the mixture. In addition, it is an object of the present invention to provide an apparatus that can reduce the cost of the apparatus by devising a mixing adjustment mechanism when a plurality of aggregate silos are installed.
[問題点を解決するための手段]
本発明は上記の点に鑑み、上記目的を達成する
ために、上部に投入口を、下部に排出口を有し、
保温構造とした複数基の加熱骨材を貯蔵する骨材
サイロの排出口下位に走行用レールを配設し、該
走行用レール上に走行用レールに沿つて走行自在
とした支持フレームを配設し、該支持フレーム上
に計量手段を装備したミキサとアスフアルト計量
槽を配設すると共に、ミキサ内部の上位にアスフ
アルト噴射ノズルを下方に向けて適宜間隔で配設
した配管を内装し、該配管をポンプを介在させて
アスフアルト計量槽の排出部に連結し、支持フレ
ーム上に載置したミキサ及びアスフアルト計量槽
を所定の骨材サイロの下位に移動させて払い出し
た骨材にアスフアルトを添加して所望のアスフア
ルト合材を製造するように構成したことを特徴と
するアスフアルト合材製造装置を提供するもので
ある。[Means for solving the problems] In view of the above points, in order to achieve the above object, the present invention has an input port at the top and a discharge port at the bottom,
A running rail is installed below the discharge port of a plurality of aggregate silos with a heat-retaining structure that stores heated aggregate, and a support frame that can freely run along the running rail is installed on the running rail. A mixer equipped with a measuring means and an asphalt measuring tank are arranged on the support frame, and piping with asphalt injection nozzles facing downward and arranged at appropriate intervals is installed inside the mixer, and the piping is connected to the mixer. The mixer is connected to the discharge part of the asphalt measuring tank via a pump, and the mixer and asphalt measuring tank placed on the support frame are moved to the lower part of a predetermined aggregate silo, and asphalt is added to the discharged aggregate. The present invention provides an asphalt mixture manufacturing apparatus characterized in that it is configured to manufacture asphalt mixture.
[作用]
本発明によれば、公知のアスフアルトプラント
でアスフアルト合材の配合構成に基いて混合した
加熱骨材を配合別に骨材サイロに予め貯蔵してお
き、出荷時に支持フレーム上に載置した計量装置
を装備するミキサ及びアスフアルト計量槽を所定
の骨材サイロの下位に移動させ、ミキサによつて
前記骨材サイロに貯蔵されている加熱骨材を1バ
ツチ分計量し、アスフアルト計量槽でアスフアル
トを所定量計量し、ミキサ内の上位に設けられた
アスフアルト噴射ノズルから前記アスフアルト計
量槽で計量したアスフアルトをポンプの駆動によ
り配管を通して圧送して噴射し、混合調整して所
望のアスフアルト合材として出荷するのである。[Function] According to the present invention, in a known asphalt plant, heated aggregates mixed based on the composition of asphalt mixture are stored in advance in aggregate silos according to their composition, and placed on a support frame at the time of shipment. A mixer equipped with a measuring device and an asphalt measuring tank are moved to a lower level of a predetermined aggregate silo, the heated aggregate stored in the aggregate silo is measured by the mixer for one batch, and the asphalt is weighed in the asphalt measuring tank. A predetermined amount of asphalt is measured, and the asphalt measured in the asphalt measuring tank is pumped from an asphalt injection nozzle installed in the upper part of the mixer through piping and injected, mixed and adjusted, and shipped as a desired asphalt mixture. That's what I do.
[実施例] 本発明の一実施例を図面に基いて説明する。[Example] An embodiment of the present invention will be described based on the drawings.
アスフアルト合材製造装置は、加熱骨材を一時
貯蔵する骨材サイロ1、該骨材サイロ1上方へ加
熱骨材を搬送する搬送装置2、骨材サイロ1下方
に配設したミキサ3及びアスフアルト計量装置4
から構成されている。 The asphalt mixture manufacturing device includes an aggregate silo 1 for temporarily storing heated aggregate, a conveying device 2 for conveying the heated aggregate above the aggregate silo 1, a mixer 3 disposed below the aggregate silo 1, and asphalt weighing. Device 4
It consists of
骨材サイロ1は架台5上に載置され、上部に材
料投入口6を、下部に材料排出口7を有し、アス
フアルト合材の配合構成に基づいて混合した加熱
骨材を配合別に一時貯蔵するものであり、加熱保
温構造としてあり、適宜数個並設する。 The aggregate silo 1 is placed on a pedestal 5, has a material input port 6 at the top and a material discharge port 7 at the bottom, and temporarily stores heated aggregates mixed based on the composition of asphalt mixture according to their composition. It has a heating and insulation structure, and several of them are installed in parallel as appropriate.
搬送装置2はチヤンネル型鋼内面を摺動面とし
た案内レール8を一対所定間隔を設けて相対向さ
せ、公知のアスフアルトプラントAのミキサ9の
下方位置から水平に引き出し、骨材サイロ下部か
ら上部の材料投入口6に渡り架設し、該案内レー
ル8の摺動面と摺接して回転するローラ10を回
転自在に配設した加熱骨材搬送用バケツト11に
ワイヤロープ等の昇降用索条12の一端を締結
し、回転自在に配設した滑車13を順次介して昇
降用索条12の他端をウインチ14に締結してあ
り、ウインチ14の正逆転に伴なう昇降用索条1
2の巻き込み、繰り出しによつて加熱骨材搬送用
バケツト11を昇降させ、ミキサ9下方位置から
骨材サイロ1の材料投入口6の直上位置間を往復
移動させている。 The conveying device 2 has a pair of guide rails 8 whose sliding surfaces are channel-shaped steel inner surfaces facing each other at a predetermined interval, and is pulled out horizontally from the lower position of the mixer 9 of the known asphalt plant A, and is moved from the lower part of the aggregate silo to the upper part. A lifting rope 12 such as a wire rope is connected to a bucket 11 for transporting heated aggregates, which is installed across the material input port 6 and rotatably equipped with a roller 10 that rotates in sliding contact with the sliding surface of the guide rail 8. One end of the lifting cable 12 is fastened, and the other end of the lifting cable 12 is fastened to a winch 14 via a rotatably arranged pulley 13 in order.
The bucket 11 for conveying heated aggregates is raised and lowered by rolling in and feeding out the heated aggregate 2, and reciprocated between a position below the mixer 9 and a position directly above the material input port 6 of the aggregate silo 1.
ミキサ3は前記公知アスフアルトプラントAの
ミキサ9と略同構造のもので相反する方向に回転
する二本の平行な混練軸に対し半径方向に放射状
にアームを枢着し、該アームの先端部に混合羽根
を配設し、駆動モータ15によつて材料を混合す
るものであり、計量フレーム16上に載置されて
おり、該ミキサ3を載置した計量フレーム16は
支持フレーム17にロードセル18を介して垂下
され、骨材サイロ1からミキサ3に投入される加
熱骨材重量を検出できるようにしてある。 The mixer 3 has approximately the same structure as the mixer 9 of the known asphalt plant A, and has an arm pivoted in a radial direction to two parallel kneading shafts rotating in opposite directions, and has an arm attached to the tip of the arm. It is equipped with mixing blades and mixes materials by a drive motor 15, and is placed on a weighing frame 16. The weighing frame 16 on which the mixer 3 is mounted has a load cell 18 on a support frame 17. The weight of the heated aggregate suspended from the aggregate silo 1 to the mixer 3 can be detected.
アスフアルト計量装置4は、ミキサ3側部の支
持フレーム17に立設した支持枠19にアスフア
ルト計量槽20を槓杵21を介してその作用点を
ロードセル22で垂下支持し、アスフアルトタン
ク(図示せず)に連結した供給管23に配設した
三方弁24の切換えによつて投入口25より投入
される溶融アスフアルト量を計量できるようにな
つている。26はミキサ3内部の上位に内装した
配管であつて、複数個のアスフアルト噴射ノズル
27を下方に向けて適宜間隔で配設してあり、該
配管26はポンプ28を介在させてその先端部を
アスフアルト計量槽20の下部排出部に連結して
ある。 The asphalt measuring device 4 has an asphalt measuring tank 20 suspended from a support frame 19 erected on a support frame 17 on the side of the mixer 3 through a hammer 21 and a load cell 22 at its point of action. ) The amount of molten asphalt introduced from the inlet 25 can be measured by switching a three-way valve 24 disposed on a supply pipe 23 connected to the inlet 25. Reference numeral 26 denotes a pipe installed in the upper part of the mixer 3, in which a plurality of asphalt injection nozzles 27 are arranged downward at appropriate intervals. It is connected to the lower discharge part of the asphalt measuring tank 20.
支持フレーム17下部の前後左右には車輪29
が設けられており、複数個の骨材サイロ1を設置
した場合に骨材サイロ1間に掛け渡したレール3
0上をミキサ3及びアスフアルト計量装置4を搭
載した支持フレーム17が移動自在となつており
加熱骨材の払い出しを行なう骨材サイロ1の材料
排出口7下位に移動するよう制御している。 Wheels 29 are provided at the front, rear, left and right of the lower part of the support frame 17.
is provided, and when multiple aggregate silos 1 are installed, a rail 3 that spans between the aggregate silos 1 is provided.
A support frame 17 on which a mixer 3 and an asphalt measuring device 4 are mounted is movable above the silo 1 and is controlled to move below the material discharge port 7 of the aggregate silo 1 from which heated aggregate is discharged.
しかして、公知のアスフアルトプラントAのド
ライヤ(図示せず)で加熱した骨材を振動篩31
により粒径別に篩い分けて貯蔵する貯蔵ビン32
よりアスフアルト合材として通常頻繁に使用され
る配合、例えば密粒度、粗粒度等の骨材配合構成
に基いて1バツチ分の加熱骨材を骨材計量槽33
で累積計量し、ミキサ9に投入するとともに石粉
計量槽34で計量した所定量の石粉をミキサ9に
投入して混合し、加熱骨材搬送用バケツト11に
排出して骨材サイロ1に搬送するものであるが、
加熱骨材搬送用バケツト11への排出時、及び搬
送時に骨材の微粒分や石粉が飛散して公害上好ま
しくない場合はアスフアルト計量槽35で適宜量
のアスフアルトを計量し添加して微粒粉が飛散し
ないようにしておくことが好ましい。 Thus, the aggregate heated by a dryer (not shown) of a known asphalt plant A is passed through a vibrating sieve 31.
A storage bin 32 in which particles are sieved by particle size and stored.
One batch of heated aggregate is added to the aggregate measuring tank 33 based on the mix of aggregates commonly used as asphalt mix, for example, dense grain size, coarse grain size, etc.
A predetermined amount of stone powder measured in the stone powder measuring tank 34 is added to the mixer 9 and mixed, and then discharged into a heated aggregate transport bucket 11 and transported to the aggregate silo 1. Although it is a thing,
If fine aggregate particles or stone powder are scattered during discharge into the heated aggregate transport bucket 11 or during transportation, which is unfavorable in terms of pollution, an appropriate amount of asphalt is measured and added in the asphalt measuring tank 35 to form fine powder. It is preferable to prevent it from scattering.
加熱骨材搬送用バケツト11に積み込まれた加
熱骨材は骨材サイロ1上部へと搬送され配合別に
骨材サイロ1に貯蔵される。この繰り返しによつ
て骨材サイロ1には配合別の加熱骨材が貯蔵され
ることになり、例えば骨材サイロ1の一方には密
粒度、骨材サイロ1の他方には粗粒度の骨材構成
の加熱骨材を貯蔵する。 The heated aggregate loaded into the heated aggregate transport bucket 11 is transported to the upper part of the aggregate silo 1 and stored in the aggregate silo 1 according to its composition. By repeating this process, heated aggregates of different compositions are stored in the aggregate silo 1. For example, one of the aggregate silos 1 stores dense-grained aggregates, and the other of the aggregate silos 1 stores coarse-grained aggregates. Store the heated aggregate of the composition.
そして密粒度アスコンを必要とするならば、密
粒度配合の加熱骨材を貯蔵する骨材サイロ1の材
料排出口7下方へミキサ3及びアスフアルト計量
装置4を搭載する支持フレーム17をレール30
上を走行移動させ、1バツチ分の加熱骨材をミキ
サ3に投入して計量し、アスフアルト計量槽20
で所定量のアスフアルトを計量してポンプ28の
駆動によりアスフアルト噴射ノズル27よりアス
フアルトを噴射し、混合調整することにより密粒
度アスコンを製造し、所望バツチ分出荷する。ま
た、粗粒度アスコンを必要とするならば、粗粒度
配合の加熱骨材を貯蔵する骨材サイロ1の材料排
出口7下方へミキサ3及びアスフアルト計量装置
4を搭載する支持フレーム17をレール30上を
走行移動させ、前記と同様に粗粒度アスコンを製
造出荷するものである。 If dense-grain asphalt asphalt is required, the support frame 17 on which the mixer 3 and asphalt weighing device 4 are mounted is mounted on the rail 30 below the material discharge port 7 of the aggregate silo 1 that stores heated aggregate with a dense-grain mixture.
One batch of heated aggregate is put into the mixer 3, weighed, and transferred to the asphalt measuring tank 20.
A predetermined amount of asphalt is weighed, the asphalt is injected from the asphalt injection nozzle 27 by driving the pump 28, and mixed and adjusted to produce dense-grained asphalt and shipped in desired batches. If coarse-grained asphalt is required, the support frame 17 on which the mixer 3 and asphalt weighing device 4 are mounted is placed on the rail 30 below the material discharge port 7 of the aggregate silo 1 that stores heated aggregate with a coarse-grained mixture. This is to manufacture and ship coarse-grained ascon in the same way as described above.
なお、本発明装置のミキサ3は計量機を兼ねた
構造としているが、これは装置の機高を極力低く
するためのものであり、ミキサ3上位に計量槽を
配置した構造としても良い。 Although the mixer 3 of the apparatus of the present invention has a structure that also serves as a weighing machine, this is to lower the height of the apparatus as much as possible, and a structure in which a measuring tank is disposed above the mixer 3 may also be used.
[発明の効果]
以上のように本発明装置にあつては、アスフア
ルトプラントで加熱混合した骨材を配合別に保温
貯蔵し、出荷時に支持フレーム17上に載置した
計量装置を装備するミキサ3及びアスフアルト計
量装置4を適宜所定の骨材サイロ1下位に移動さ
せ、ミキサ3で加熱骨材を1バツチ分計量し、ア
スフアルト計量装置4で計量した所定量のアスフ
アルトをミキサ3内に噴射して混合調整するよう
にしたので、高品質のアスフアルト合材を製造出
荷することができる。更に、骨材サイロが複数基
であつてもミキサやアスフアルト計量装置が一基
で済み、装置のコストを下げることができて経済
的負担を軽くすることができる。[Effects of the Invention] As described above, in the apparatus of the present invention, the mixer 3 and the mixer 3 are equipped with a measuring device that stores the heated aggregates heated and mixed in an asphalt plant according to their composition and is placed on the support frame 17 at the time of shipment. The asphalt measuring device 4 is appropriately moved to the lower part of a predetermined aggregate silo 1, one batch of heated aggregate is measured by the mixer 3, and a predetermined amount of asphalt weighed by the asphalt measuring device 4 is injected into the mixer 3 and mixed. Since this adjustment has been made, it is possible to manufacture and ship high-quality asphalt composite material. Furthermore, even if there are a plurality of aggregate silos, only one mixer and asphalt measuring device is required, which makes it possible to lower the cost of the device and lighten the economic burden.
第1図は本発明の一実施例を示す概略構成図で
あり、第2図は第1図の骨材サイロ下部の一部切
欠きした概略拡大図である。
1……骨材サイロ、3……ミキサ、4……アス
フアルト計量装置、6……材料投入口、7……材
料排出口、26……配管、27……噴射ノズル、
28……ポンプ。
FIG. 1 is a schematic configuration diagram showing one embodiment of the present invention, and FIG. 2 is a partially cutaway schematic enlarged view of the lower part of the aggregate silo in FIG. 1. 1... Aggregate silo, 3... Mixer, 4... Asphalt measuring device, 6... Material input port, 7... Material discharge port, 26... Piping, 27... Injection nozzle,
28...Pump.
Claims (1)
構造とした複数基の加熱骨材を貯蔵する骨材サイ
ロの排出口下位に走行用レールを配設し、該走行
用レール上に走行用レールに沿つて走行自在とし
た支持フレームを配設し、該支持フレーム上に計
量手段を装備したミキサとアスフアルト計量槽を
配設すると共に、ミキサ内部の上位にアスフアル
ト噴射ノズルを下方に向けて適宜間隔で配設した
配管を内装し、該配管をポンプを介在させてアス
フアルト計量槽の排出部に連結し、支持フレーム
上に載置したミキサ及びアスフアルト計量槽を所
定の骨材サイロの下位に移動させて払い出した骨
材にアスフアルトを添加して所望のアスフアルト
合材を製造するように構成したことを特徴とする
アスフアルト合材製造装置。1. A running rail is installed below the discharge port of an aggregate silo that has an input port at the top and a discharge port at the bottom and has a heat-retaining structure and stores multiple heated aggregates, and a running rail is installed on the running rail. A support frame that can run freely along a running rail is provided, a mixer equipped with a measuring means and an asphalt measuring tank are arranged on the support frame, and an asphalt injection nozzle is directed downward at an upper part inside the mixer. The mixer and asphalt measuring tank mounted on the support frame are installed in the interior with piping arranged at appropriate intervals, and the pipes are connected to the discharge part of the asphalt measuring tank through a pump, and the mixer and asphalt measuring tank placed on the support frame are connected to the lower part of the specified aggregate silo. 1. An asphalt mixture manufacturing apparatus, characterized in that it is configured to add asphalt to aggregates moved and discharged to produce a desired asphalt mixture.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21369087A JPS6458704A (en) | 1987-08-26 | 1987-08-26 | Asphalt plied timber production unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21369087A JPS6458704A (en) | 1987-08-26 | 1987-08-26 | Asphalt plied timber production unit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6458704A JPS6458704A (en) | 1989-03-06 |
JPH0546401B2 true JPH0546401B2 (en) | 1993-07-13 |
Family
ID=16643371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21369087A Granted JPS6458704A (en) | 1987-08-26 | 1987-08-26 | Asphalt plied timber production unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6458704A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4533523B2 (en) * | 2000-10-30 | 2010-09-01 | 日工株式会社 | Method for producing asphalt mixture |
CN103628388B (en) * | 2013-12-06 | 2015-10-28 | 东华大学 | A kind of equipment and method preparing the matrix pitch of building the road |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6043481A (en) * | 1983-08-19 | 1985-03-08 | 旭硝子株式会社 | Sputtering method and device |
JPS6052241A (en) * | 1983-08-31 | 1985-03-25 | Hitachi Ltd | Machining device |
-
1987
- 1987-08-26 JP JP21369087A patent/JPS6458704A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6043481A (en) * | 1983-08-19 | 1985-03-08 | 旭硝子株式会社 | Sputtering method and device |
JPS6052241A (en) * | 1983-08-31 | 1985-03-25 | Hitachi Ltd | Machining device |
Also Published As
Publication number | Publication date |
---|---|
JPS6458704A (en) | 1989-03-06 |
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