JPH0546114B2 - - Google Patents

Info

Publication number
JPH0546114B2
JPH0546114B2 JP58221875A JP22187583A JPH0546114B2 JP H0546114 B2 JPH0546114 B2 JP H0546114B2 JP 58221875 A JP58221875 A JP 58221875A JP 22187583 A JP22187583 A JP 22187583A JP H0546114 B2 JPH0546114 B2 JP H0546114B2
Authority
JP
Japan
Prior art keywords
pulse
electrode
excimer laser
laser generator
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58221875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59171185A (ja
Inventor
Shuntaro Watabe
Hiroshi Sato
Kenji Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP22187583A priority Critical patent/JPS59171185A/ja
Publication of JPS59171185A publication Critical patent/JPS59171185A/ja
Publication of JPH0546114B2 publication Critical patent/JPH0546114B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/097Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Lasers (AREA)
  • Manipulation Of Pulses (AREA)
JP22187583A 1983-11-24 1983-11-24 エキシマレ−ザ発生装置 Granted JPS59171185A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22187583A JPS59171185A (ja) 1983-11-24 1983-11-24 エキシマレ−ザ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22187583A JPS59171185A (ja) 1983-11-24 1983-11-24 エキシマレ−ザ発生装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57213229A Division JPS59103392A (ja) 1982-12-04 1982-12-04 パルス整形回路

Publications (2)

Publication Number Publication Date
JPS59171185A JPS59171185A (ja) 1984-09-27
JPH0546114B2 true JPH0546114B2 (enrdf_load_stackoverflow) 1993-07-13

Family

ID=16773548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22187583A Granted JPS59171185A (ja) 1983-11-24 1983-11-24 エキシマレ−ザ発生装置

Country Status (1)

Country Link
JP (1) JPS59171185A (enrdf_load_stackoverflow)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516368Y2 (enrdf_load_stackoverflow) * 1971-03-09 1976-02-21
JPS49140636U (enrdf_load_stackoverflow) * 1973-04-04 1974-12-04
DE2932781C2 (de) * 1979-08-13 1985-10-31 Kraftwerk Union AG, 4330 Mülheim Vorrichtung zur Erzeugung schneller gepulster Kondensatorentladungen in einem Laser
JPS56593U (enrdf_load_stackoverflow) * 1980-03-12 1981-01-06
JPH0451996A (ja) * 1990-06-18 1992-02-20 Sharp Corp 洗濯機

Also Published As

Publication number Publication date
JPS59171185A (ja) 1984-09-27

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