JPH0543434B2 - - Google Patents
Info
- Publication number
- JPH0543434B2 JPH0543434B2 JP24271089A JP24271089A JPH0543434B2 JP H0543434 B2 JPH0543434 B2 JP H0543434B2 JP 24271089 A JP24271089 A JP 24271089A JP 24271089 A JP24271089 A JP 24271089A JP H0543434 B2 JPH0543434 B2 JP H0543434B2
- Authority
- JP
- Japan
- Prior art keywords
- flammable solvent
- flammable
- solvent
- cleaned
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002904 solvent Substances 0.000 claims description 94
- 238000004140 cleaning Methods 0.000 claims description 67
- 239000007788 liquid Substances 0.000 claims description 53
- 235000007586 terpenes Nutrition 0.000 claims description 15
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 claims description 14
- 239000003063 flame retardant Substances 0.000 claims description 14
- 150000003505 terpenes Chemical class 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 238000009835 boiling Methods 0.000 claims description 6
- 230000001804 emulsifying effect Effects 0.000 claims description 5
- 239000003350 kerosene Substances 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 5
- 239000004094 surface-active agent Substances 0.000 claims description 5
- 125000003158 alcohol group Chemical group 0.000 claims 1
- 125000002298 terpene group Chemical group 0.000 claims 1
- 238000007789 sealing Methods 0.000 description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 7
- 239000003921 oil Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- 239000002826 coolant Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 239000010730 cutting oil Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000003021 water soluble solvent Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1242710A JPH03106484A (ja) | 1989-09-19 | 1989-09-19 | 可燃性溶剤を用いた洗浄装置 |
| KR1019900008270A KR930009198B1 (ko) | 1989-09-19 | 1990-06-05 | 가연성 용제를 사용한 세정장치 |
| US07/849,804 US5246024A (en) | 1989-09-19 | 1992-03-11 | Cleaning device with a combustible solvent |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1242710A JPH03106484A (ja) | 1989-09-19 | 1989-09-19 | 可燃性溶剤を用いた洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03106484A JPH03106484A (ja) | 1991-05-07 |
| JPH0543434B2 true JPH0543434B2 (enExample) | 1993-07-01 |
Family
ID=17093095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1242710A Granted JPH03106484A (ja) | 1989-09-19 | 1989-09-19 | 可燃性溶剤を用いた洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106484A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4693582B2 (ja) * | 2005-10-12 | 2011-06-01 | 株式会社ＴａｎａーＸ | ウエハ収納用紙製容器 |
-
1989
- 1989-09-19 JP JP1242710A patent/JPH03106484A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03106484A (ja) | 1991-05-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |