JPH0538876U - Workpiece presence / absence detection device for suction transport nozzle - Google Patents

Abstract

(57) [Abstract] [Purpose] A suction transfer nozzle with excellent responsiveness, which prevents malfunctions and detection errors, does not require the suction transfer nozzle and work to be fixed, and has a configuration that allows easy adjustment of detection timing. Provided is a work presence / absence detection device. [Structure] A light receiving element (8) is arranged directly above a suction port (1a) of a suction transfer nozzle (1), and a light emitting element (7) is arranged directly below a moving path of the suction port in a transfer path of the nozzle. To do.
The light emitting element and the light receiving element form an optical sensor (6). A pressure sensor (5) is provided in the vacuum suction pipe line from the vacuum source to the suction port. The work detection signal is output by either the detection signal of the optical sensor for shielding the work or the detection signal of the set pressure of the pressure sensor. Since the non-translucent work is detected by the optical sensor, the responsiveness is excellent. Since the translucent work is detected by the pressure sensor, it is not necessary to fix the nozzle and the work, and the detection timing can be easily adjusted.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention is, for example, in a die bonding apparatus, when a chip-like work such as a semiconductor chip, a filter glass or a glass chip is transferred to an enclosure such as a lead frame or a substrate for die-bonding, the suction port of a suction transfer nozzle is used. The present invention relates to a work presence / absence detection device for a suction / transport nozzle for confirming whether or not there is a workpiece that should have been vacuum-sucked.

[0002]

[Prior Art]

 Conventionally, the structure shown in FIG. 2 or FIG. 3 is generally adopted as a detection means for detecting whether or not there is a work that should have been vacuum-sucked by such a suction conveyance nozzle. That is, FIG. 2 uses a pressure sensor (5) as the work presence / absence detection means, and connects the suction conveyance nozzle (1) fixed to the nozzle fixing holder (2) to the pipe (3) and the filter (4). In the vacuum suction pipe line connected to the vacuum source (not shown) via the pipe, the detection port (5a) of the pressure sensor (5) is connected to the filter (4) via the pipe (3), and the vacuum supply port (5b). ) Is connected to the vacuum source via piping (3). The pressure sensor (5), which is supplied with power via the power terminals (T1) and (T2), detects that the preset pressure has been reached, so that the work is adsorbed to the suction transfer nozzle (1). Considering that the workpiece is detected, a work detection signal is output from the output terminal (T3) to the control circuit. A control circuit (not shown) controls by this work detection signal to die-bond the suction work to the envelope when the suction transfer nozzle (1) transfers it to a predetermined bonding position. On the other hand, when the work is not picked up and the work detection signal is not output, even if the suction carrying nozzle is carried to the bonding position, the bouncing operation is not performed and the work is idly fed.

On the other hand, FIG. 3 uses an optical sensor (6) configured by combining a light emitting element (7) consisting of a semiconductor light emitting element or a lamp and a light receiving element (8). The same parts as those in FIG. 2 are designated by the same reference numerals. The light receiving element (8) is disposed directly above the suction port of the suction transfer nozzle (1) so as to face the suction port, and its connection terminals (T4) and (T5) are connected to a control circuit to suction transfer. The pipe (3) is branched and connected from the middle of the path from the nozzle (1) to the light receiving element (8) and is connected to the vacuum source. Then, after the work piece is vacuum-sucked by the suction transfer nozzle (1) by driving the vacuum source, the light emitting element (7) is passed when the suction port of the suction transfer nozzle (1) passes directly above the light emitting element (7). The light is blocked by the work and is not received by the light receiving element (8), and the work detection signal is output from the light receiving element (8).

[0004]

[Problems to be solved by the device]

 However, the detection means by the pressure sensor (5) described above includes the inner diameter of the suction transfer nozzle (1) and the size of the work to be transferred, the inner diameter and length of the pipe (3), the suction transfer nozzle (1) and the transfer. Pressure fluctuations tend to occur due to the adhesiveness with the work to be adsorbed and the clogging of the filter (4). Therefore, if the pressure fluctuates near the set pressure for work detection, it takes time for the pressure sensor (5) to determine the presence or absence of the work and output the work detection signal, and the responsiveness is poor. However, it is necessary to adjust the detection timing which is delicate and difficult, and the erroneous detection of the work is likely to occur accordingly.

On the other hand, the detection means using the optical sensor (6) has an advantage that the response is good because the presence / absence of the work can be immediately discriminated by the presence / absence of light reception, but the transparency of the filter glass or the like, that is, the light transmission property. In the case of a high work, even if the work is completely adsorbed, the light transmitted through this work will be received by the light receiving element (8). Will not be output, and a malfunction will occur. Further, even when the work is attracted in a shifted state, the light is received by the light receiving element (8) and the work detection signal is not output, so that the work to be transported and the suction transport nozzle are fixed.

Therefore, the present invention provides a suction transfer nozzle having excellent responsiveness, preventing the occurrence of malfunctions and detection errors, eliminating the need to fix the suction transfer nozzle and the workpiece, and easily adjusting the detection timing. It is a technical subject to provide a work presence detection device.

[0007]

[Means for Solving the Problems]

 In the present invention, as a technical means for achieving the above-mentioned problems, a work presence / absence detection device for a suction / transport nozzle is configured as follows. That is, in the work presence detection device of the suction transfer nozzle that detects the presence or absence of the suction work at the suction port when the chip-shaped work is vacuum-sucked to the suction port at the tip of the suction transfer nozzle and is transported to a predetermined location. , The light-receiving element located directly above the suction port and the light-emitting element located directly below the moving path of the suction port on the transport path of the nozzle are arranged in a direction that constitutes an optical sensor, and a vacuum is provided. A pressure sensor is inserted and connected to the vacuum suction pipe line from the source to the suction port, and either the detection signal by the light shielding of the work of the optical sensor or the detection signal by the detection of the set pressure of the pressure sensor is performed. It is characterized in that a signal output circuit that outputs a work detection signal by output is provided.

[0008]

[Action]

 At the pickup position, after the suction port of the suction transfer nozzle is pressed against a predetermined work and vacuum suctioned and the work is vacuum-sucked at the suction port, the suction transfer nozzle is moved toward the bonding position. The optical sensor is configured when the suction port passes directly above the light emitting element. Now, when a non-translucent work is adsorbed to the adsorption port, the optical sensor does not receive the light and the detection signal is immediately output, and this detection signal indicates whether the pressure sensor outputs. Despite the above, the work detection signal is output from the signal output circuit. Therefore, the responsiveness of the work detection is good regardless of the pressure fluctuation in the air pipe, and the detection timing of this optical sensor can be easily adjusted.

On the other hand, when the adsorbed work is translucent, or when the work is misaligned and adsorbed, the light-receiving element is positioned when the suction port of the nozzle is located right above the light-emitting element. Although the optical sensor does not output a detection signal after receiving the light, the signal processing circuit determines that a work is present based on the detection signal output from the pressure sensor and outputs a work detection signal. At this time, when the pressure fluctuation occurs in the vacuum suction pipe line, the response time is slightly delayed, but it is possible to prevent a malfunction that determines that there is no work despite the presence of the work. Moreover, in the case of a translucent work, it is not necessary to fix the suction conveyance nozzle and the work to be picked up. Therefore, the pressure sensor only needs to adjust the detection timing for the translucent work, which facilitates the adjustment. If no work is adsorbed, no detection signal is output from either the optical sensor or the pressure sensor, so that it can be immediately determined that no work is present.

[0010]

【Example】

 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a schematic configuration of an embodiment of the present invention, in which the same or equivalent parts as those in FIGS. 2 and 3 are designated by the same reference numerals. The difference from FIGS. 2 and 3 is that the configuration including the optical sensor 6 of FIG. 3 is combined with the configuration including the pressure sensor (5) of FIG. ) The binarization circuit (9) for binarizing the output, and the signal which is the logical sum of the output signal of this binarization circuit (9) and the output signal of the pressure sensor (5) is controlled as the work detection signal. It is only a configuration in which an AND gate circuit (10) for outputting to the circuit (11) is additionally provided.

Next, the operation of the above embodiment will be described. First, both sensors (5) and (6) are adjusted prior to actual operation. The suction transfer nozzle (1) is moved without adsorbing the work so that the suction port (1a) is positioned directly above the light emitting element (7), and this state is maintained to hold the binarization circuit (9). The voltage supplied to the light emitting element (7) and the light receiving sensitivity of the light receiving element (8) are adjusted so that the output of is zero. At the same time, adjust the pressure sensor (5) so that the output is "0" and the off state.

Next, it is confirmed that the output of the pressure sensor (5) becomes “1” by adsorbing the work to the adsorption port (1a) of the adsorption conveyance nozzle (1), The landing port (1a) is positioned right above the light emitting element (7) and it is confirmed that the output of the binarization circuit (9) becomes "1". Then, in the actual operation, at the pickup position, the suction transfer nozzle (1) is moved downward to press the suction port (1a) thereof against a predetermined work, and the suction source (1) is vacuum-sucked to drive the suction port (1a). After the work is vacuum-sucked by 1a), the suction transfer nozzle (1) is transferred toward the bonding position. In the process, when the non-translucent work is adsorbed to the suction port (1a) at the time when the suction port (1a) of the nozzle (1) passes right above the light emitting element (7), Since the light receiving element (8) of the optical sensor (6) does not receive the light, the output of the binarization circuit (9) maintains "1". That is, a detection signal indicating that a work is present is output. The AND gate circuit (10) immediately outputs a work detection signal of "1" regardless of whether or not the detection signal of the pressure sensor (5) whose response time is slower than this detection signal is output. Therefore, the responsiveness of the work detection is good regardless of the pressure fluctuation in the vacuum pipeline, and the adjustment of the detection timing of the optical sensor (6) is easy because it is determined by the light amount.

On the other hand, when the adsorbed work is translucent, or when the work is misaligned and adsorbed, the suction port (1a) of the nozzle (1) is the true of the light emitting element (7). When it is positioned above, the light is received by the light receiving element (8) and the output of the binarization circuit (9) changes to "0", that is, the detection signal is not output from the optical sensor (6). As the output of the pressure sensor (5) changes to "1", the AND gate circuit (10) outputs a work detection signal of "1". At this time, if a pressure fluctuation occurs in the vacuum suction pipe line, the response time is slightly delayed, but it is possible to reliably prevent a malfunction that determines that there is no work despite the presence of the work. Moreover, it is not necessary to fix the suction conveyance nozzle (1) and the work to be picked up to the translucent work. Therefore, the pressure sensor (5) only needs to adjust the detection timing for the light-transmissive work, which facilitates the adjustment. Further, when the work is not adsorbed, the control circuit (11) immediately determines that there is no work because the detection signal of "1" is not output from either the optical sensor (6) or the pressure sensor (5). Determine.

[0014]

[Effect of the device]

 As described above, according to the work presence / absence detection device for the suction / transport nozzle of the present invention, the work detection device is provided with the optical sensor and the pressure sensor, and outputs the work detection signal by ORing the detection signals of both sensors. Therefore, with respect to a non-translucent work, the presence / absence of the work is detected by the presence / absence of a detection signal from the optical sensor, so that the responsiveness is excellent. On the other hand, since the presence or absence of the work is detected for the translucent work by the detection signal of the pressure sensor, it is possible to reliably prevent the malfunction in which the detection signal is not output despite the existence of the work. Further, since the detection timing of the pressure sensor may be adjusted so as to correspond only to the non-translucent work, the delicate and difficult adjustment work becomes unnecessary. Furthermore, since no detection signal is output from both sensors, it is determined that there is no work, so erroneous detection is eliminated.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an embodiment of the present invention.

FIG. 2 is a schematic configuration diagram of a conventional device.

FIG. 3 is a schematic configuration diagram of another conventional device.

[Explanation of symbols]

 1 Adsorption / Transfer Nozzle 1a Adsorption Port 5 Pressure Sensor 6 Optical Sensor 7 Light Emitting Element 8 Light Receiving Element 10 AND Gate Circuit (Signal Output Circuit)

Claims (1)

[Scope of utility model registration request] 1. A work presence / absence detection device for a suction transfer nozzle for detecting the presence or absence of a suction work at the suction port when a chip-shaped work is vacuum-sucked to a suction port at the tip of the suction transfer nozzle and is transported to a predetermined location. In, the light receiving element located directly above the suction port and the light emitting element located directly below the moving path of the suction port on the transport path of the nozzle are arranged in a direction that constitutes an optical sensor, A pressure sensor is inserted and connected to a vacuum suction pipe line that reaches the suction port, and a work is output by a signal output of either a detection signal of the optical sensor for shielding the work or a detection signal of the pressure sensor for detecting a set pressure. A work presence / absence detection device for a suction and conveyance nozzle, comprising a signal output circuit for outputting a detection signal.