JPH0538052Y2 - - Google Patents

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Publication number
JPH0538052Y2
JPH0538052Y2 JP1987154100U JP15410087U JPH0538052Y2 JP H0538052 Y2 JPH0538052 Y2 JP H0538052Y2 JP 1987154100 U JP1987154100 U JP 1987154100U JP 15410087 U JP15410087 U JP 15410087U JP H0538052 Y2 JPH0538052 Y2 JP H0538052Y2
Authority
JP
Japan
Prior art keywords
film thickness
evaporation
evaporation source
monitor
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987154100U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158663U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987154100U priority Critical patent/JPH0538052Y2/ja
Publication of JPH0158663U publication Critical patent/JPH0158663U/ja
Application granted granted Critical
Publication of JPH0538052Y2 publication Critical patent/JPH0538052Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP1987154100U 1987-10-09 1987-10-09 Expired - Lifetime JPH0538052Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987154100U JPH0538052Y2 (enrdf_load_stackoverflow) 1987-10-09 1987-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987154100U JPH0538052Y2 (enrdf_load_stackoverflow) 1987-10-09 1987-10-09

Publications (2)

Publication Number Publication Date
JPH0158663U JPH0158663U (enrdf_load_stackoverflow) 1989-04-12
JPH0538052Y2 true JPH0538052Y2 (enrdf_load_stackoverflow) 1993-09-27

Family

ID=31430529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987154100U Expired - Lifetime JPH0538052Y2 (enrdf_load_stackoverflow) 1987-10-09 1987-10-09

Country Status (1)

Country Link
JP (1) JPH0538052Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326356U (enrdf_load_stackoverflow) * 1976-08-13 1978-03-06

Also Published As

Publication number Publication date
JPH0158663U (enrdf_load_stackoverflow) 1989-04-12

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