JPH0536271U - Adsorber - Google Patents

Abstract

(57) [Abstract] [Purpose] In an adsorber provided on the discharge line of a helium gas compressor unit for a cryogenic refrigerator, the adsorber's oil adsorption separation performance by an activated carbon layer is improved. [Structure] An annular protrusion is provided on the inner wall surface of the adsorber main body container at the boundary between the lower glass fiber filled in the adsorber and the activated carbon, the annular projection protruding inward of the main body container and inclined in the direction of the internal gas flow.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a helium gas compressor unit applied to a cryogenic refrigerator such as a cryopump and a cryostat.

[0002]

[Prior Art]

 In a cryogenic small refrigerator, a GM cycle or an improved Solvay cycle is often used because of its reliability and cost. FIG. 3 is a system diagram of a conventional helium gas compressor unit utilizing these cycles. In the figure, 1 is a helium gas compressor unit, 2 is a compressor, 3 is a gas cooler, 4 is an oil separator, 5 is an adsorber, 6 is a surging bottle, 7 is an oil cooler for cooling the oil in the housing of the compressor 2, 8 is a relief valve.

Helium gas is compressed by a compressor 2, cooled by a gas cooler 3, oil mist is removed by an oil separator 4, and oil vapor is removed by an adsorber 5 and sent to an expander (not shown). The low-pressure gas leaving the expander enters the surge bottle 6 and is sucked into the compressor 2. Since the cryogenic refrigerator dislikes mixing of oil in helium gas, oil separation is performed in the oil separator 4 with good oil separation efficiency, and oil in helium gas that cannot be separated by the oil separator is separated by the adsorber 5 above. Adsorb and separate.

FIG. 4 is a vertical cross-sectional view of the conventional adsorber 5, and FIG. 5 is an enlarged view of a B portion in FIG. In the figure, 5A is a main body container of the adsorber, 11 is an inlet pipe provided in the lower part of the main body container, and 12 is an outlet pipe provided in the upper part of the main body container. Inside the main body container 5A, the following fillers are provided in layers from the bottom. 21 is punching metal, 22 is wire mesh, 23 is lower glass fiber, 24 is activated carbon, 25 is upper glass fiber, 26 is felt, 27 is sealing material, 28 is punching metal, 29 is wire mesh, and 30 is sintered metal. is there.

In this device, the helium gas flowing from the lower inlet pipe 11 rises inside the adsorber, and oil vapor is generated in the lower glass fiber 23, activated carbon 24, upper glass fiber 25, felt 26, etc. It is removed and discharged from the upper outlet pipe 12.

[0006]

[Problems to be solved by the device]

 In the above-mentioned adsorber, the glass fiber layer has a slight gap on the inner wall surface of the main body container. In addition, since activated carbon is granular, gaps are particularly noticeable in the portion in contact with the main body container.

The gas medium that has passed through the gap near the wall surface of the lower glass fiber 23 flows through the gap between the activated carbon 24 and the wall surface as it is. Therefore, the oil flowing together with the gas medium passing through this gap is It will be discharged without being adsorbed and separated in the bed.

The present invention is intended to solve the above-mentioned drawbacks of the prior art and to provide an adsorber that enables effective oil adsorption separation particularly in an activated carbon layer.

[0009]

[Means for Solving the Problems]

 The present invention solves the above-mentioned problems, and in an adsorber provided on the discharge line of a helium gas compressor unit for a cryogenic refrigerator, a boundary portion between the lower glass fiber filled in the adsorber and activated carbon is provided. The adsorber is characterized in that the inner wall surface of the adsorber main body container is provided with an annular projection that projects inward of the main body container and is inclined in the direction of the internal gas flow.

[0010]

[Action]

 In the adsorber according to the present invention, the gas is guided toward the center of the activated carbon layer by the annular projection protruding inward of the body and inclined in the direction of the internal gas flow, and the gas is introduced into the gap contacting the inner wall surface of the body of the activated carbon layer. Since it prevents the oil from passing through, it improves the oil adsorption separation performance of the adsorber by the activated carbon layer.

[0011]

【Example】

 FIG. 1 is a vertical sectional view of an adsorber of the present invention, and FIG. 2 is an enlarged view of a portion A of FIG. In the present embodiment, as shown in detail in FIG. 2, the inner glass flow is projected to the inner wall surface of the main body container 5A at the boundary between the lower glass fiber 23 and the layer of activated carbon 24, and the inner gas flow is projected. An annular protrusion 20 is provided which is inclined in the direction of. The structure other than the above is the same as the conventional adsorber.

In the present embodiment, the gas medium that has passed through the vicinity of the wall surface of the lower glass fiber 23 is guided from the wall surface toward the central portion by the annular projection 20, and flows into the inside of the granular activated carbon 24 layer and the oil flowing together with the gas. Are adsorbed and separated by the activated carbon 24. Therefore, the gas medium flowing through the gap near the inner wall of the main body container of the activated carbon layer can be reduced, and the oil flowing with the gas medium can be adsorbed and separated by the activated carbon 24, and the adsorption separation performance of the adsorber 5 can be improved. ..

[0013]

[Effect of the device]

 In the adsorber of the present invention, an annular protrusion is provided on the inner wall surface of the adsorber body container at the boundary between the lower glass fiber and the activated carbon, which is filled in the adsorber, and projects toward the inside of the body container and slopes in the direction of the internal gas flow. Therefore, it is possible to improve the oil adsorption separation performance of the adsorber by the activated carbon layer.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of an embodiment of the present invention.

FIG. 2 is an enlarged view of part A of FIG.

FIG. 3 is a system diagram of a general helium gas compressor unit.

FIG. 4 is a vertical sectional view of a conventional adsorber.

5 is an enlarged view of part B in FIG.

[Explanation of symbols]

 1 Helium gas compressor unit 2 Compressor 3 Gas cooler 4 Oil separator 5 Adsorber 5A Adsorber body container 6 Surging bottle 7 Oil cooler 8 Relief valve 11 Inlet pipe 12 Outlet pipe 20 Annular protrusion 21 Punching metal 22 Wire mesh 23 Lower glass fiber 24 Activated carbon 25 Upper glass fiber 26 Felt 27 Sealing material 28 Punching metal 29 Wire mesh 30 Sintered metal

Claims (1)

[Scope of utility model registration request] 1. An adsorber provided on a discharge conduit of a helium gas compressor unit for a cryogenic refrigerator, wherein an adsorber main body container inner wall surface at a boundary between a lower glass fiber filled in the adsorber and activated carbon is provided. An adsorber characterized by having an annular projection that protrudes inward of the main body container and is inclined in the direction of the internal gas flow.