JPH0535340Y2 - - Google Patents
Info
- Publication number
- JPH0535340Y2 JPH0535340Y2 JP12267387U JP12267387U JPH0535340Y2 JP H0535340 Y2 JPH0535340 Y2 JP H0535340Y2 JP 12267387 U JP12267387 U JP 12267387U JP 12267387 U JP12267387 U JP 12267387U JP H0535340 Y2 JPH0535340 Y2 JP H0535340Y2
- Authority
- JP
- Japan
- Prior art keywords
- superconducting ring
- lead wire
- superconducting
- coil
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 23
- 230000004907 flux Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 241000238366 Cephalopoda Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Description
【考案の詳細な説明】
＜産業上の利用分野＞
本考案はDC−スクイツド磁束計に関し、更に
詳しくは磁界検出のノイズ磁束の低減をはかつた
ものである。[Detailed Description of the Invention] <Industrial Field of Application> The present invention relates to a DC-Squid magnetometer, and more specifically, to reducing noise magnetic flux in magnetic field detection.
＜従来の技術＞
DC−スクイツド磁束計は、ジヨセフソン接合
を有する超伝導リングとピツクアツプコイル、イ
ンプツトコイル等を含んで構成されており、超伝
導リングに加わる外部磁界に対し磁束量子φ。
（2.07×10-15wb）を周期とした電圧信号を出力す
るもので、高感度で磁束測定を行うことが出来
る。<Prior art> A DC-Squid magnetometer is composed of a superconducting ring having a Josephson junction, a pick-up coil, an input coil, etc., and has a magnetic flux quantum φ in response to an external magnetic field applied to the superconducting ring.
It outputs a voltage signal with a period of (2.07×10 -15 wb) and can perform magnetic flux measurements with high sensitivity.
第３図はこの様なスクイツド磁束計を示す一般
的な構成図である。図において、１はジヨセフソ
ン接合部Ａ，Ｂを有する超伝導リング、２はこの
超伝導リング１に結合するインダクタンスL1の
インプツトコイル、２１，２２は超伝導材料で出
来たインプツトコイル２の端子、３はインダクタ
ンスLpのピツクアツプコイルで、インプツトコ
イル２とともに超伝導閉ループを構成するように
端子２１，２２を介して直列に接続されている。
３６は２つのジヨセフソン接合間にバイアス電流
を供給するためのバイアス電流源、７は超伝導リ
ング１からの出力電圧を増幅する増幅器である。
ここで、超伝導リング１、インプツトコイル２、
端子２１，２２、ピツクアツプコイル３はいずれ
もクライオスタツト８内に収納され、液体ヘリウ
ム温度に維持される。 FIG. 3 is a general configuration diagram showing such a Squid magnetometer. In the figure, 1 is a superconducting ring having Josephson junctions A and B, 2 is an input coil with an inductance L 1 coupled to this superconducting ring 1, and 21 and 22 are input coils 2 made of superconducting material. Terminal 3 is a pickup coil with inductance Lp, which is connected in series with input coil 2 via terminals 21 and 22 so as to form a superconducting closed loop.
36 is a bias current source for supplying a bias current between two Josephson junctions, and 7 is an amplifier for amplifying the output voltage from the superconducting ring 1.
Here, superconducting ring 1, input coil 2,
The terminals 21, 22 and the pick-up coil 3 are all housed in a cryostat 8 and maintained at liquid helium temperature.
第４図は薄膜積層プレーナ型と呼ばれる超伝導
リングおよびインプツトコイルの従来例を示す斜
視図で、これら超伝導リングおよびインプツトコ
イルは例えばシリコン基板にNbなどの超伝導金
属を蒸着・積層して形成する。 Figure 4 is a perspective view showing a conventional example of a superconducting ring and input coil called a thin film laminated planar type.These superconducting rings and input coils are made by depositing and laminating a superconducting metal such as Nb on a silicon substrate. to form.
この例では超伝導リングは中央部に孔３３を有
する矩形状の一辺の中央部が突出した凸状とさ
れ、孔３３から延長して前記突部を２分するよう
に絶縁溝３４が形成され、前記突部の先端とリー
ド線３８の先端の間にジヨセフソン接合が設けら
れている。なお、絶縁溝３４は超伝導金属で覆つ
ているが、これは超伝導リングに発生する磁束を
孔３３の中に集中させる為で有る。アース用リー
ド線３８の他端はアース接続用パツド３７に接続
されており、突部を有する辺の対辺の中央部には
バイアス用リード線３６の一端が接続され、その
他端にはバイアス電流接続用のパツド３５が接続
されている。なお、２は渦巻き状のインプツトコ
イル、３２はモジユレーシヨンコイルであり、超
伝導リング３１を含めてそれぞれが互いに絶縁し
て形成されている。第５図はこの様な超伝導リン
グのリード線と超伝導リングの位置関係を示すも
ので、各リード線に流れるバイアス電流に重畳す
るノイズ電流による磁場が超伝導リングをよぎら
ないのでノイズは発生しない。 In this example, the superconducting ring has a rectangular shape with a hole 33 in the center and has a convex shape with the center of one side protruding, and an insulating groove 34 is formed extending from the hole 33 and dividing the protrusion into two. , a Josephson junction is provided between the tip of the protrusion and the tip of the lead wire 38. Note that the insulating groove 34 is covered with a superconducting metal in order to concentrate the magnetic flux generated in the superconducting ring in the hole 33. The other end of the ground lead wire 38 is connected to the ground connection pad 37, one end of the bias lead wire 36 is connected to the center of the side opposite to the side having the protrusion, and the other end is connected to the bias current connection. A pad 35 for use is connected. Note that 2 is a spiral input coil, and 32 is a modulation coil, each of which including the superconducting ring 31 is formed insulated from each other. Figure 5 shows the positional relationship between the lead wires of such a superconducting ring and the superconducting ring.The magnetic field due to the noise current superimposed on the bias current flowing through each lead wire does not cross the superconducting ring, so noise is reduced. Does not occur.
＜考案が解決しようとする問題点＞
しかしながら、上記のような構成においてはバ
イアス電流接続用のパツドとアース接続用のパツ
ドが離れた位置に有るので、これらのパツドヘボ
ンデイング作業をする際の作業性が悪いという問
題が有る。また、作業性をよくするために２つの
パツドを近接して設けた場合、例えば第６図に示
すようにリード線は超伝導リングの側面を通つて
対辺まで導かれる。この場合リード線が超伝導リ
ングの近傍を通るとバイアス電流に重畳している
ノイズ電流の磁場が超伝導リングにカツプルして
精度低下の原因となる。このためリード線を超伝
導リングから遠ざけた経路を通つて対辺まで導く
ことが考えられるが基板の小形化という点で問題
である。<Problems to be solved by the invention> However, in the above configuration, the pad for bias current connection and the pad for ground connection are located at separate positions, so it is difficult to perform bonding work to these pads. There is a problem with bad sex. Further, when two pads are provided close to each other to improve workability, the lead wires are guided through the side surface of the superconducting ring to the opposite side, as shown in FIG. 6, for example. In this case, when the lead wire passes near the superconducting ring, the magnetic field of the noise current superimposed on the bias current couples to the superconducting ring, causing a decrease in accuracy. For this reason, it is conceivable to lead the lead wires to the opposite side through a path away from the superconducting ring, but this poses a problem in terms of miniaturization of the substrate.
本考案は上記従来技術の問題点に鑑みて成され
たもので、超伝導リングが形成される基板の小形
化および作業性を妨げることなくノイズ電流の磁
場が超伝導リングにカツプルすることのない超伝
導リングを提供することを目的とするものであ
る。 The present invention has been developed in view of the above-mentioned problems of the conventional technology, and it is possible to miniaturize the substrate on which the superconducting ring is formed and prevent the magnetic field of the noise current from coupling to the superconducting ring without hindering workability. The purpose is to provide a superconducting ring.
＜問題点を解決するための手段＞
上記問題点を解決するための本考案の構成は、
被測定磁束を検出するピツクアツプコイルと、こ
のピツクアツプコイルに接続され、このコイルと
ともに超伝導閉ループを形成するインプツトコイ
ルと、このインプツトコイルに結合する超伝導リ
ングを含んで構成されるDC−スクイド磁束計に
おいて、前記超伝導リングは、２つのジヨセフソ
ン接合を基板に形成されたアース接続用リード線
との間で形成し、前記超伝導リングにバイアス電
圧を供給するためのリード線を、前記超伝導リン
グの中央部を横切るとともに、前記アース用リー
ド線に重畳して形成したことを特徴とするもので
ある。<Means for solving the problems> The configuration of the present invention to solve the above problems is as follows:
A DC-Squid is composed of a pick-up coil that detects the magnetic flux to be measured, an input coil that is connected to the pick-up coil and forms a superconducting closed loop with this coil, and a superconducting ring that is coupled to this input coil. In the magnetometer, the superconducting ring forms two Josephson junctions with a ground connection lead wire formed on the substrate, and a lead wire for supplying a bias voltage to the superconducting ring is connected to the superconducting ring. It is characterized in that it is formed so as to cross the center of the conductive ring and overlap the grounding lead wire.
＜実施例＞
第１図は本考案の一実施例を示す要部斜視図で
ある。図において第４図と同一要素には同一符号
を付して示すが、従来例と異なる点はアース接続
用のリード線３８に重畳してバイアス電流源接続
用のリード線３６を形成したことにある。なお、
リード線３６は超伝導リングの中央部を横切つて
配置されている。また、図ではインプツトコイル
は省略して有り、リード線３６は図示しない絶縁
層に設けたコンタクトホール４０を介して超伝導
リングに接続される。また、リード線３６と３８
は絶縁層により絶縁されている。従つてバイアス
電流源IBはパツド３５から導入され、コンタクト
ホール４０を通じて超伝導リング３１を通りジヨ
セフソン接合部を通つてリード線３８を介してア
ース接続用パツド側に流れる。上記構成によれば
バイアス電流接続用のパツドとアース接続用のパ
ツドを近接して配置することが可能であり、ま
た、第４図の従来例においては超伝導リングに発
生する磁束を孔３３の中に集中させる為に絶縁溝
３４を超伝導金属で覆つているが、本考案におい
てはこの超伝導金属をバイアス用リード線３６に
代えて形成する。<Example> FIG. 1 is a perspective view of a main part showing an example of the present invention. In the figure, the same elements as in FIG. 4 are given the same reference numerals, but the difference from the conventional example is that the lead wire 36 for connecting the bias current source is formed to overlap the lead wire 38 for connecting to the ground. be. In addition,
A lead wire 36 is placed across the center of the superconducting ring. Further, the input coil is omitted in the figure, and the lead wire 36 is connected to the superconducting ring via a contact hole 40 provided in an insulating layer (not shown). In addition, lead wires 36 and 38
is insulated by an insulating layer. Therefore, the bias current source I B is introduced from the pad 35 and flows through the contact hole 40, through the superconducting ring 31, through the Josephson junction, and through the lead wire 38 to the ground connection pad side. According to the above configuration, it is possible to arrange the pad for bias current connection and the pad for ground connection in close proximity, and in addition, in the conventional example shown in FIG. The insulating groove 34 is covered with a superconducting metal in order to concentrate the bias inside, but in the present invention, this superconducting metal is formed instead of the bias lead wire 36.
第２図は第１図のＦ部を断面で示すもので、リ
ード線３６を流れる電流とリード線３８を流れる
電流が逆向きとなり、互いのリード線に発生する
磁場をキヤンセルしている状態を示している。な
お、本実施例において超伝導リングを矩形としそ
の一辺に突部を設けた形状としたが、矩形部分は
円で有つても楕円で有つても良い。 Fig. 2 shows a cross section of section F in Fig. 1, and shows a state in which the current flowing through the lead wire 36 and the current flowing through the lead wire 38 are in opposite directions, canceling out the magnetic fields generated in each lead wire. It shows. In this embodiment, the superconducting ring is rectangular and has a protrusion on one side, but the rectangular portion may be circular or elliptical.
＜考案の効果＞
以上実施例とともに具体的に説明したように本
考案によれば、超伝導リングが形成される基板の
小形化および作業性を妨げることなくノイズ電流
の磁場が超伝導リングにカツプルすることのない
DC−スクイツド磁束計を実現する事が出来る。<Effects of the invention> As specifically explained above in conjunction with the embodiments, according to the invention, the magnetic field of the noise current can be coupled to the superconducting ring without hindering the miniaturization of the substrate on which the superconducting ring is formed and the workability. nothing to do
A DC-Squid magnetometer can be realized.
第１図は本考案の一実施例を示す構成斜視図、
第２図は第１図の超伝導リングのＦ部の断面図、
第３図はDC−スクイツド磁束計の一般的な構成
図、第４図は超伝導リングの従来例を示す構成
図、第５図、第６図は超伝導リングとリード線に
発生するノイズ電流による磁場の関係を示す図で
ある。
２……インプツトコイル、３１……超伝導リン
グ、３６，３８……リード線、Ａ，Ｂ……ジヨセ
フソン接合部。
FIG. 1 is a perspective view showing an embodiment of the present invention;
Figure 2 is a cross-sectional view of the F section of the superconducting ring in Figure 1;
Figure 3 is a general configuration diagram of a DC-Squid magnetometer, Figure 4 is a configuration diagram showing a conventional example of a superconducting ring, and Figures 5 and 6 are noise currents generated in the superconducting ring and lead wire. FIG. 2... Input coil, 31... Superconducting ring, 36, 38... Lead wire, A, B... Josephson junction.
Claims (1)
このピツクアツプコイルに接続され、このコイル
とともに超伝導閉ループを形成するインプツトコ
イルと、このインプツトコイルに結合する超伝導
リングを含んで構成されるDC−スクイド磁束計
において、前記超伝導リングは、２つのジヨセフ
ソン接合を基板に形成されたアース接続用リード
線との間で形成し、前記超伝導リングにバイアス
電圧を供給するためのリード線を、前記超伝導リ
ングの中央部を横切るとともに、前記アース用リ
ード線に重畳して形成したことを特徴とするDC
−スクイツド磁束計。 A pick-up coil that detects the magnetic flux to be measured,
In a DC-SQUID magnetometer that includes an input coil that is connected to this pickup coil and forms a superconducting closed loop with this coil, and a superconducting ring that is coupled to this input coil, the superconducting ring is Two Josephson junctions are formed between the ground connection lead wire formed on the substrate, and a lead wire for supplying a bias voltage to the superconducting ring is connected to the superconducting ring, and the lead wire is connected to the superconducting ring. A DC characterized by being formed overlapping a grounding lead wire.
-Squid magnetometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12267387U JPH0535340Y2 (en) | 1987-08-11 | 1987-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12267387U JPH0535340Y2 (en) | 1987-08-11 | 1987-08-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6427671U JPS6427671U (en) | 1989-02-17 |
| JPH0535340Y2 true JPH0535340Y2 (en) | 1993-09-08 |
Family
ID=31370821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12267387U Expired - Lifetime JPH0535340Y2 (en) | 1987-08-11 | 1987-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0535340Y2 (en) |
-
1987
- 1987-08-11 JP JP12267387U patent/JPH0535340Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6427671U (en) | 1989-02-17 |
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