JPH0534772B2 - - Google Patents

Info

Publication number
JPH0534772B2
JPH0534772B2 JP58227871A JP22787183A JPH0534772B2 JP H0534772 B2 JPH0534772 B2 JP H0534772B2 JP 58227871 A JP58227871 A JP 58227871A JP 22787183 A JP22787183 A JP 22787183A JP H0534772 B2 JPH0534772 B2 JP H0534772B2
Authority
JP
Japan
Prior art keywords
particle
field
charged
deflection
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58227871A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60121659A (ja
Inventor
Kazuo Hayashi
Hiroshi Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58227871A priority Critical patent/JPS60121659A/ja
Publication of JPS60121659A publication Critical patent/JPS60121659A/ja
Publication of JPH0534772B2 publication Critical patent/JPH0534772B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP58227871A 1983-12-02 1983-12-02 粒子分析器 Granted JPS60121659A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58227871A JPS60121659A (ja) 1983-12-02 1983-12-02 粒子分析器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58227871A JPS60121659A (ja) 1983-12-02 1983-12-02 粒子分析器

Publications (2)

Publication Number Publication Date
JPS60121659A JPS60121659A (ja) 1985-06-29
JPH0534772B2 true JPH0534772B2 (enrdf_load_stackoverflow) 1993-05-24

Family

ID=16867653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58227871A Granted JPS60121659A (ja) 1983-12-02 1983-12-02 粒子分析器

Country Status (1)

Country Link
JP (1) JPS60121659A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9813327D0 (en) * 1998-06-19 1998-08-19 Superion Ltd Apparatus and method relating to charged particles

Also Published As

Publication number Publication date
JPS60121659A (ja) 1985-06-29

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