JPH0534421B2 - - Google Patents

Info

Publication number

JPH0534421B2

JPH0534421B2 JP59092775A JP9277584A JPH0534421B2 JP H0534421 B2 JPH0534421 B2 JP H0534421B2 JP 59092775 A JP59092775 A JP 59092775A JP 9277584 A JP9277584 A JP 9277584A JP H0534421 B2 JPH0534421 B2 JP H0534421B2

Authority

JP

Japan

Prior art keywords

magnetic flux

flux density

amorphous

magnetostriction

thin film

Prior art date

1984-05-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 239000010409 thin film Substances 0.000 claims description 15
• 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 3
• 230000004907 flux Effects 0.000 description 17
• 239000000463 material Substances 0.000 description 17
• 238000004544 sputter deposition Methods 0.000 description 7
• 229910045601 alloy Inorganic materials 0.000 description 6
• 239000000956 alloy Substances 0.000 description 6
• 230000007423 decrease Effects 0.000 description 5
• 229910020641 Co Zr Inorganic materials 0.000 description 4
• 229910020520 Co—Zr Inorganic materials 0.000 description 4
• XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
• 238000002425 crystallisation Methods 0.000 description 4
• 230000008025 crystallization Effects 0.000 description 4
• 238000000034 method Methods 0.000 description 4
• 239000010941 cobalt Substances 0.000 description 3
• 229910017052 cobalt Inorganic materials 0.000 description 3
• GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
• 230000003247 decreasing effect Effects 0.000 description 3
• 239000000203 mixture Substances 0.000 description 3
• 238000005260 corrosion Methods 0.000 description 2
• 230000007797 corrosion Effects 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 229910052742 iron Inorganic materials 0.000 description 2
• 230000005415 magnetization Effects 0.000 description 2
• 230000035699 permeability Effects 0.000 description 2
• 229910001020 Au alloy Inorganic materials 0.000 description 1
• 239000000654 additive Substances 0.000 description 1
• 238000000137 annealing Methods 0.000 description 1
• 229910002056 binary alloy Inorganic materials 0.000 description 1
• 230000015556 catabolic process Effects 0.000 description 1
• 239000002131 composite material Substances 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 238000006731 degradation reaction Methods 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 229910052737 gold Inorganic materials 0.000 description 1
• JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
• 239000007791 liquid phase Substances 0.000 description 1
• 239000000696 magnetic material Substances 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000007769 metal material Substances 0.000 description 1
• 239000012071 phase Substances 0.000 description 1
• 238000007747 plating Methods 0.000 description 1
• 238000005498 polishing Methods 0.000 description 1
• 238000010791 quenching Methods 0.000 description 1
• 230000000171 quenching effect Effects 0.000 description 1
• 239000002994 raw material Substances 0.000 description 1
• 238000006467 substitution reaction Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• 238000005382 thermal cycling Methods 0.000 description 1
• 238000003852 thin film production method Methods 0.000 description 1
• 238000007740 vapor deposition Methods 0.000 description 1