JPH05343945A - Surface acoustic wave filter - Google Patents
Surface acoustic wave filterInfo
- Publication number
- JPH05343945A JPH05343945A JP14907292A JP14907292A JPH05343945A JP H05343945 A JPH05343945 A JP H05343945A JP 14907292 A JP14907292 A JP 14907292A JP 14907292 A JP14907292 A JP 14907292A JP H05343945 A JPH05343945 A JP H05343945A
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- acoustic wave
- sound absorbing
- absorbing material
- wave filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、弾性表面波フィルタに
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface acoustic wave filter.
【0002】[0002]
【従来の技術】従来、弾性表面波フィルタはVHF,U
HF帯のある特定の周波数帯域のみを取り出すためのバ
ンドパスフィルタとして用いられる。図2は従来例の弾
性表面波フィルタの(a)正面図,(b)特性図を示
す。図2(a)において、電気信号により弾性表面波を
励振する交叉指状電極2aと、弾性表面波を吸収してこ
れを電気信号に変換する交叉指状電極2bと、交叉指状
電極間の静電結合、電磁結合を抑制するシールド電極3
と、不要方向に伝搬する弾性表面波を吸収する吸音材1
と、電気信号の入出力用のアルミ配線4とボンディング
パッド6とを有する。2. Description of the Related Art Conventionally, surface acoustic wave filters are VHF, U.
It is used as a bandpass filter for extracting only a specific frequency band of the HF band. FIG. 2 shows (a) a front view and (b) a characteristic view of a conventional surface acoustic wave filter. In FIG. 2A, an interdigital electrode 2a that excites a surface acoustic wave by an electric signal, an interdigital electrode 2b that absorbs the surface acoustic wave and converts it into an electric signal, and an interdigital electrode Shield electrode 3 that suppresses electrostatic coupling and electromagnetic coupling
And a sound absorbing material 1 for absorbing surface acoustic waves propagating in unnecessary directions
And an aluminum wiring 4 for inputting and outputting an electric signal and a bonding pad 6.
【0003】つぎに、この表面弾性波フィルタの動作を
説明する。アルミ配線4a,4bより電気信号を入力す
ると、交叉指状電極2aで弾性表面波が励振され左右に
伝搬する。左に伝搬した波は吸音材1により吸収され
る。右に伝搬した波の一部は、交叉指状電極2bにより
電気信号に変換され、アルミ配線6d,6eにより出力
される。電気信号に変換されなかった波はさらに右へ伝
搬し、吸音材1により吸収される。Next, the operation of this surface acoustic wave filter will be described. When an electric signal is input from the aluminum wirings 4a and 4b, a surface acoustic wave is excited by the interdigital electrode 2a and propagates left and right. The wave propagating to the left is absorbed by the sound absorbing material 1. A part of the wave propagating to the right is converted into an electric signal by the interdigital electrode 2b and output by the aluminum wirings 6d and 6e. The wave that has not been converted into an electric signal further propagates to the right and is absorbed by the sound absorbing material 1.
【0004】しかし、吸音材の手前にアルミ配線パター
ンが存在すると、例えば図示のアルミ配線Bで反射が起
きる。すると左へ戻る反射波が発生し、この反射波が通
常に伝搬する波と干渉し合い特性が劣化する。However, if an aluminum wiring pattern is present in front of the sound absorbing material, reflection occurs at, for example, the aluminum wiring B shown in the figure. Then, a reflected wave that returns to the left is generated, and this reflected wave interferes with a normally propagating wave to deteriorate the characteristics.
【0005】[0005]
【発明が解決しようとする課題】このように従来例の弾
性表面波フィルタでは、弾性表面波の伝搬路を横切って
いるアルミ配線で反射が起り、これによる反射波により
図2(b)に示すように通過帯域の周波数応答特性に乱
れが生じ、また帯域外減衰量は通常は40dB以上のと
ころ30dB程度と特性が劣化する問題がある。As described above, in the surface acoustic wave filter of the conventional example, the aluminum wiring that traverses the propagation path of the surface acoustic wave causes reflection, which is shown in FIG. 2 (b) by the reflected wave. As described above, there is a problem that the frequency response characteristic of the pass band is disturbed, and the out-of-band attenuation amount is usually about 30 dB at a value of 40 dB or more, which is a problem.
【0006】[0006]
【課題を解決するための手段】本発明の弾性表面波フィ
ルタは、圧電基板上に形成された弾性表面波を発生し吸
収する交叉指状電極と、前記交叉指状電極に電気信号を
入出力するためのパタン配線とボンディングパットと不
要方向へ伝搬する前記弾性表面波を吸収する吸音材とを
備える弾性表面波フィルタにおいて、前記吸音材は前記
弾性表面波の伝搬路を横切る方向のパタン配線の部分を
覆うように設けている。SUMMARY OF THE INVENTION A surface acoustic wave filter according to the present invention comprises an interdigital electrode formed on a piezoelectric substrate for generating and absorbing a surface acoustic wave, and an electric signal is input / output to / from the interdigital electrode. In a surface acoustic wave filter including a pattern wiring for bonding, a bonding pad, and a sound absorbing material that absorbs the surface acoustic wave propagating in an unnecessary direction, the sound absorbing material is a pattern wiring in a direction crossing a propagation path of the surface acoustic wave. It is provided to cover the part.
【0007】[0007]
【実施例】次に本発明の実施例ついて図面を参照して説
明する。図1は本実施例の(a)は正面図、(b)は特
性図である。図1(a)において、弾性表面波の伝搬路
上のアルミ配線で特にAで示した部分は吸音材1の場所
までアルミ配線4dを延長し、その延長部分を吸音材で
覆っている。Embodiments of the present invention will now be described with reference to the drawings. FIG. 1A is a front view and FIG. 1B is a characteristic view of the present embodiment. In FIG. 1A, the aluminum wiring on the propagation path of the surface acoustic wave, particularly the portion indicated by A, extends the aluminum wiring 4d to the location of the sound absorbing material 1, and the extended portion is covered with the sound absorbing material.
【0008】次にこの弾性表面波フィルタの動作につい
て説明する。アルミ配線4a,4bより電気信号を入力
すると、交叉指状電極2aで弾性表面波が励振され、左
右方向に伝搬する。左方向に伝搬した波は吸音材1によ
り吸収される。右方向に伝搬した波は、交叉指状電極2
bにより電気信号に変換され、アルミ配線6d,6eに
より出力される。電気信号に変換しきれなかった波はさ
らに右方向へ伝搬し、吸音材1によりほとんど吸収され
る。その時の特性図を図1(B)に示す。この吸音材1
は通常シリコン樹脂でアルミ配線部分の基盤に塗布され
るが、シリコン樹脂は他の吸音性材料を使用しても良
い。Next, the operation of this surface acoustic wave filter will be described. When an electric signal is input from the aluminum wirings 4a and 4b, a surface acoustic wave is excited by the interdigital electrode 2a and propagates in the left-right direction. The wave propagating to the left is absorbed by the sound absorbing material 1. The wave propagating to the right is generated by the interdigital electrode 2
It is converted into an electric signal by b and is output by the aluminum wirings 6d and 6e. The wave that has not been converted to an electric signal further propagates to the right and is almost absorbed by the sound absorbing material 1. The characteristic diagram at that time is shown in FIG. This sound absorbing material 1
Is usually applied to the base of the aluminum wiring portion with silicon resin, but other sound absorbing materials may be used for the silicon resin.
【0009】[0009]
【発明の効果】以上説明したように本発明では、弾性表
面波のアルミ配線上反射波を抑制しているので、図1
(b)に示すように通過帯域の周波数応答特性が平坦
で、かつ通域外減衰量が40dB以上と改善される効果
がある。また、吸音材を電気配線上に塗布することによ
り、吸音材の専用の場所を必要とせずチップサイズを小
さくできる効果がある。As described above, according to the present invention, the reflected wave of the surface acoustic wave on the aluminum wiring is suppressed.
As shown in (b), the frequency response characteristic of the pass band is flat, and the out-of-band attenuation amount is improved to 40 dB or more. In addition, by applying the sound absorbing material on the electric wiring, there is an effect that the chip size can be reduced without requiring a dedicated place for the sound absorbing material.
【図1】本発明の一実施例の弾性表面波フィルタの
(a)は正面図、(b)は特性図である。FIG. 1A is a front view and FIG. 1B is a characteristic view of a surface acoustic wave filter according to an embodiment of the present invention.
【図2】従来例の弾性表面波フィルタの(a)は正面
図、(b)は特性図である。FIG. 2A is a front view and FIG. 2B is a characteristic diagram of a surface acoustic wave filter of a conventional example.
1 吸音材 2 交叉指状電極 3 シールド電極 4 アルミ配線 6 ボンディングパッド 1 Sound Absorbing Material 2 Interdigitated Electrodes 3 Shield Electrode 4 Aluminum Wiring 6 Bonding Pad
Claims (2)
生し吸収する交叉指状電極と、前記交叉指状電極に電気
信号を入出力するためのパタン配線とボンディングパッ
トと不用方向へ伝搬する前記弾性表面波を吸収し阻止す
るための吸音材とを備える弾性表面波フィルタにおい
て、前記吸音材は前記弾性表面波の伝搬路を横切る方向
のパタン配線の部分を覆うように設けることを特徴とす
る弾性表面波フィルタ。1. A cross-finger electrode formed on a piezoelectric substrate for generating and absorbing surface acoustic waves, a pattern wiring for inputting and outputting an electric signal to the cross-finger electrode, a bonding pad, and propagating in an unnecessary direction. In a surface acoustic wave filter including a sound absorbing material for absorbing and blocking the surface acoustic wave, the sound absorbing material is provided so as to cover a portion of the pattern wiring in a direction traversing the propagation path of the surface acoustic wave. And a surface acoustic wave filter.
前記パタン配線を延長し延長部分を前記吸音材で覆うこ
とを特徴とする請求項1記載の弾性表面波フィルタ。2. The surface acoustic wave filter according to claim 1, wherein the pattern wiring in a direction traversing the propagation path of the surface acoustic wave is extended and the extended portion is covered with the sound absorbing material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14907292A JPH05343945A (en) | 1992-06-09 | 1992-06-09 | Surface acoustic wave filter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14907292A JPH05343945A (en) | 1992-06-09 | 1992-06-09 | Surface acoustic wave filter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05343945A true JPH05343945A (en) | 1993-12-24 |
Family
ID=15467081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14907292A Pending JPH05343945A (en) | 1992-06-09 | 1992-06-09 | Surface acoustic wave filter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05343945A (en) |
-
1992
- 1992-06-09 JP JP14907292A patent/JPH05343945A/en active Pending
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 19981013 |