JPH05340766A - Cylindrical scale for optical encoder and its manufacture - Google Patents
Cylindrical scale for optical encoder and its manufactureInfo
- Publication number
- JPH05340766A JPH05340766A JP15354192A JP15354192A JPH05340766A JP H05340766 A JPH05340766 A JP H05340766A JP 15354192 A JP15354192 A JP 15354192A JP 15354192 A JP15354192 A JP 15354192A JP H05340766 A JPH05340766 A JP H05340766A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- resin
- cylindrical
- resin layer
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Transform (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は光学エンコーダ用の円
柱状スケールおよびその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cylindrical scale for an optical encoder and a manufacturing method thereof.
【０００２】[0002]
【従来の技術】円柱状のスケールを回転させて、その回
転量等を検出するロータリーエンコーダは、モーターの
回転制御等に広く用いられている。光学エンコーダに用
いられる円柱状スケールは、周面に格子パターンを形成
されているが、格子パターンにおける格子ピッチが細か
いほど、回転量等の検出精度を高めることができる。2. Description of the Related Art A rotary encoder that rotates a cylindrical scale and detects the amount of rotation of the scale is widely used for controlling the rotation of a motor. The cylindrical scale used in the optical encoder has a lattice pattern formed on the peripheral surface. The finer the lattice pitch in the lattice pattern, the higher the detection accuracy of the rotation amount and the like.
【０００３】格子パターンに発散性の単色光を照射し、
格子パターンによる回折光同士を干渉させることによ
り、格子パターンを影絵的に拡大した「影絵パターン」
を発生せしめ、格子パターンの移動に伴う影絵パターン
の移動を光学的に検出して極めて高精度の移動量検出を
行う一連の方法が知られている（例えば、特開平２−５
７９１３号公報）。Irradiating the lattice pattern with divergent monochromatic light,
"Shadow pattern", which expands the grid pattern like a shadow by interfering diffracted light from each other.
Is known, and a series of methods for optically detecting the movement of the shadow pattern accompanying the movement of the lattice pattern to detect the movement amount with extremely high accuracy are known (for example, Japanese Patent Laid-Open No. 2-5).
7913).
【０００４】影絵パターンを利用した移動量検出では、
格子パターンのピッチはμｍオーダーの細かさでもよ
い。このような極めて細かいピッチの格子パターンを形
成する方法として、従来から「マグネティック・リソグ
ラフィ」が知られている。マグネティック・リソグラフ
ィにより格子パターンを形成するには、格子パターンを
形成する移動体の表面に「磁性膜」を薄層状に形成し、
この磁性膜に磁気ヘッドを用いて格子パターンを書き込
み、磁化のパターンとして格子パターンに対応する磁気
潜像を形成し、磁気潜像に「磁性コロイド流体」を塗布
して格子パターンを可視化し、磁性膜上に定着する。
「磁性膜」は樹脂液中にＦｅ2Ｏ3等の磁性剤の微粒子
（磁性粒子）を分散させた「磁性液体」を塗布乾燥して
形成される。「磁性コロイド流体」は、強磁性体の微粉
末（粒径が上記磁気潜像のピッチに比して十分に小さ
い）を界面活性剤中に分散させたコロイド流体であり、
上記磁気潜像は、磁性コロイド流体中の強磁性体の微粉
末により可視化される。In the movement amount detection using the shadow picture pattern,
The pitch of the lattice pattern may be as fine as μm. “Magnetic lithography” has been conventionally known as a method for forming such a lattice pattern having an extremely fine pitch. To form a lattice pattern by magnetic lithography, a "magnetic film" is formed in a thin layer on the surface of a moving body that forms the lattice pattern,
A magnetic head is used to write a lattice pattern on this magnetic film, a magnetic latent image corresponding to the lattice pattern is formed as a magnetization pattern, and the magnetic latent image is coated with "magnetic colloid fluid" to visualize the lattice pattern. Settles on the membrane.
The “magnetic film” is formed by applying and drying a “magnetic liquid” in which fine particles (magnetic particles) of a magnetic agent such as Fe 2 O 3 are dispersed in a resin liquid. "Magnetic colloidal fluid" is a colloidal fluid in which fine powder of ferromagnetic material (particle size is sufficiently smaller than the pitch of the magnetic latent image) is dispersed in a surfactant,
The magnetic latent image is visualized by fine powder of a ferromagnetic substance in a magnetic colloid fluid.
【０００５】ところで、ロータリーエンコーダに用いら
れる円柱状スケールとしてはモーターの回転軸自体やモ
ーター回転軸に金属中空シリンダーを嵌装固定したもの
等が一般的であるが、このような金属製の円柱状回転体
の周面に磁性液体を均一に塗布するのが難しく、均一な
厚さの磁性膜の形成が困難であるという問題がある。磁
性膜の厚さに「むら」があると、形成された格子パター
ンのピッチや、格子パターンのコントラストにむらが生
じてしまい、回転量検出に誤差を生じることになる。By the way, as a cylindrical scale used in a rotary encoder, a rotary shaft of a motor or a rotary shaft of a motor in which a metal hollow cylinder is fitted and fixed is generally used. There is a problem that it is difficult to apply the magnetic liquid uniformly on the peripheral surface of the rotating body, and it is difficult to form a magnetic film having a uniform thickness. If there is "unevenness" in the thickness of the magnetic film, the pitch of the formed grid pattern and the contrast of the grid pattern become uneven, which causes an error in rotation amount detection.
【０００６】[0006]
【発明が解決しようとする課題】この発明は、上記の如
き問題を解決するべくなされたものであって、精度良い
格子パターンを有する、光学エンコーダ用の円柱状スケ
ールとその製造方法の提供を目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a cylindrical scale for an optical encoder having a precise grating pattern and a method for manufacturing the same. And
【０００７】[0007]
【課題を解決するための手段】この発明の円柱状スケー
ルの製造方法は以下の如く構成される（請求項１）。即
ち、軸の回りに回転する「金属製の円柱状回転体」の周
面を「樹脂層」により被覆する。そして、この樹脂層の
円柱面状周面に「磁性液体」を塗布乾燥して磁性膜を形
成し、この磁性膜に対して、マグネティック・リソグラ
フィにより所望の格子パターンを形成する。この製造過
程において、磁性液体として、「樹脂層の材料樹脂と親
和性の良い樹脂液中に磁性粒子を分散させた」もの用い
る。The method of manufacturing a cylindrical scale according to the present invention is constructed as follows (claim 1). That is, the peripheral surface of the “metal cylindrical rotating body” that rotates around the axis is covered with the “resin layer”. Then, "magnetic liquid" is applied and dried on the peripheral surface of the resin layer to form a magnetic film, and a desired lattice pattern is formed on the magnetic film by magnetic lithography. In this manufacturing process, as the magnetic liquid, one in which magnetic particles are dispersed in a resin liquid having a good affinity with the material resin of the resin layer is used.
【０００８】上記樹脂層を形成する際、「磁性液体の塗
布後、塗布された磁性液体の乾燥途上において、金属製
の円柱状回転体に、その軸方向へ直流電流を通じる」こ
とにより、磁性液体中の磁性体が樹脂層の最大曲率方向
へ配向した磁性膜を形成するようにすることができる
（請求項２）。金属製の円柱状回転体の周面を被覆する
樹脂層の形成には種々の方法が可能であるが、「金型を
用いた樹脂成形法」は樹脂層形成方法として好適である
（請求項３）。また、金属製の円柱状回転体の周面を被
覆する樹脂層の材料としては、ポリカーボネート樹脂や
ＡＢＳ樹脂、塩化ビニール樹脂等を挙げることができる
が、樹脂成形法で樹脂層を形成する場合、「アクリル樹
脂」は、成形性が良く特に好適である。When the resin layer is formed, by applying a direct current in the axial direction of the metallic cylindrical rotary member after the magnetic liquid is applied and during the drying of the applied magnetic liquid, the magnetic property is improved. The magnetic substance in the liquid can form a magnetic film oriented in the maximum curvature direction of the resin layer (claim 2). Various methods can be used to form the resin layer that covers the peripheral surface of the metal cylindrical rotating body, but the “resin molding method using a mold” is suitable as the resin layer forming method (claim 3). Further, examples of the material of the resin layer that coats the peripheral surface of the metal cylindrical rotating body include polycarbonate resin, ABS resin, vinyl chloride resin, and the like. When the resin layer is formed by a resin molding method, “Acrylic resin” is particularly preferable because of its good moldability.
【０００９】樹脂層をアクリル樹脂で形成した場合、磁
性液体の材料樹脂としては「ウレタン樹脂またはエポキ
シ樹脂」が好適である（請求項４）。When the resin layer is formed of acrylic resin, "urethane resin or epoxy resin" is suitable as the material resin of the magnetic liquid (claim 4).
【００１０】この発明の「光学エンコーダ用の円柱状ス
ケール」は、上記請求項１または２または３または４記
載の方法で製造される円柱状スケールである（請求項
５）。The "cylindrical scale for optical encoder" of the present invention is a cylindrical scale manufactured by the method according to claim 1 or 2 or 3 or 4 (claim 5).
【００１１】[0011]
【作用】上記のように、この発明では金属製の円柱状回
転体の周面を樹脂層で被覆し、この樹脂層上に、樹脂層
材料と親和性の良い樹脂を有する磁性液体を塗布する。
また、請求項２記載の方法では、樹脂層上に塗布された
磁性液体が磁性膜として乾燥する以前に、円柱状回転体
の軸方向へ電流が通ぜられる。この電流により円柱状回
転軸の回りに同心的に発生する磁界が、磁性液体中の磁
性粒子を樹脂層表面の最大曲率方向へ配向するので、形
成される樹脂膜は磁性粒子の充填度の高いものになる。As described above, according to the present invention, the peripheral surface of the metal cylindrical rotating body is covered with the resin layer, and the magnetic liquid having the resin having a good affinity with the resin layer material is applied onto the resin layer. ..
In the method according to the second aspect, an electric current is passed in the axial direction of the cylindrical rotating body before the magnetic liquid coated on the resin layer is dried as a magnetic film. The magnetic field concentrically generated around the cylindrical rotation axis by this current orients the magnetic particles in the magnetic liquid in the direction of maximum curvature of the resin layer surface, so that the formed resin film has a high filling degree of magnetic particles. It becomes a thing.
【００１２】なお、金属製の円柱状回転体の周面を被覆
する樹脂層の材料としては、前述のように、アクリル樹
脂以外にポリカーボメート樹脂やＡＢＳ樹脂、塩化ビニ
ール樹脂等を用いることができるが、磁性体液の樹脂と
して、ウレタン樹脂やエポキシ樹脂を用いた場合、樹脂
層への磁性体液の塗布性は、アクリル樹脂の場合に比し
て若干劣り、僅かに塗布むらを生じる傾向がある。As the material of the resin layer covering the peripheral surface of the metal cylindrical rotating body, as described above, other than the acrylic resin, a polycarbomate resin, an ABS resin, a vinyl chloride resin or the like can be used. However, when a urethane resin or an epoxy resin is used as the resin of the magnetic substance liquid, the coating property of the magnetic substance liquid on the resin layer is slightly inferior to that of the acrylic resin, and a slight coating unevenness tends to occur.
【００１３】[0013]
【実施例】以下、具体的な実施例を説明する。図１は、
請求項１，３，４に記載した製造方法の１実施例を説明
する図である。図１（Ａ）に示すように、格子パターン
を形成すべき金属製の円柱状回転体１を金型３の円柱状
の孔の中心部に位置させ、金型内壁と円柱状回転体１と
の間の空間に、樹脂材料としてアクリル樹脂を注入し
て、図１（Ｂ）に示すように樹脂層７を形成する。EXAMPLES Specific examples will be described below. Figure 1
It is a figure explaining 1 Example of the manufacturing method described in Claim 1, 3, 4. As shown in FIG. 1 (A), a metallic cylindrical rotating body 1 on which a lattice pattern is to be formed is located at the center of a cylindrical hole of a mold 3, and the inner wall of the mold and the cylindrical rotating body 1 are connected to each other. Acrylic resin is injected into the space between them as a resin material to form a resin layer 7 as shown in FIG.
【００１４】この樹脂層７の円柱状周面に、「ウレタン
樹脂に磁性粒子を分散させた」磁性液を塗布・乾燥し
て、図１（Ｃ）のように薄層状の磁性膜９を形成する。
この磁性膜９の周面に、マグネティック・リソグラフィ
により、図１（Ｄ）に示すような所望の格子パターン１
０を形成すれば、所望の円柱状スケールが得られる。A magnetic liquid in which magnetic particles are dispersed in urethane resin is applied to the cylindrical peripheral surface of this resin layer 7 and dried to form a thin magnetic film 9 as shown in FIG. 1 (C). To do.
A desired lattice pattern 1 as shown in FIG. 1D is formed on the peripheral surface of the magnetic film 9 by magnetic lithography.
If 0 is formed, a desired cylindrical scale is obtained.
【００１５】図２に示す例は変形例で、金属製の円柱状
回転体は、金属回転軸１に、金属製の中空シリンダー１
１を嵌め込み固定したものであり、この中空シリンダー
１１の周面に樹脂層７Ａと磁性膜９Ａを形成し、磁性膜
９Ａ上にマグネティック・リソグラフィにより格子パタ
ーン１０Ａを形成してなる円柱状スケールである。The example shown in FIG. 2 is a modified example, in which a metal cylindrical rotating body has a metal rotating shaft 1 and a metal hollow cylinder 1
1 is fitted and fixed, and is a cylindrical scale in which a resin layer 7A and a magnetic film 9A are formed on the peripheral surface of the hollow cylinder 11, and a lattice pattern 10A is formed on the magnetic film 9A by magnetic lithography. ..
【００１６】図３（Ａ）（Ｂ）には、請求項２記載の製
造方法の実施例の特徴部分を示す。金属製の円柱状回転
体１の周面は樹脂層７で被覆され、この樹脂層７の円柱
状周面には磁性液体９０が塗布されている。磁性液体９
０は、まだ磁性膜として乾燥しておらず、磁性粒子が樹
脂内部で動き得る状態である。3 (A) and 3 (B) show characteristic portions of the embodiment of the manufacturing method according to claim 2. The peripheral surface of the metallic cylindrical rotating body 1 is covered with the resin layer 7, and the magnetic liquid 90 is applied to the cylindrical peripheral surface of the resin layer 7. Magnetic liquid 9
0 is a state where the magnetic film is not yet dried and the magnetic particles can move inside the resin.
【００１７】この状態において、円柱状回転体１の軸方
向へ、直流電流：ｉ（樹脂層７の外径が１５ｍｍ、長さ
が２５ｍｍの場合で１００〜数１００Ａ）を通ずると、
円柱状回転体１と同心的な磁界：Ｈが発生し（図３
（Ｂ））、この磁界：Ｈが磁性液体９０中の磁性粒子に
作用して、上記磁性粒子を磁界の方向、即ち樹脂層７の
円柱状周面の最大曲率方向へ配向する。この状態で磁性
液体９０を乾燥して磁性膜とすれば、磁性膜は磁性粒子
の充填度の高いものになる。In this state, when a direct current: i (100 to several hundreds of amperes when the resin layer 7 has an outer diameter of 15 mm and a length of 25 mm) is passed in the axial direction of the cylindrical rotating body 1,
A magnetic field H, which is concentric with the cylindrical rotating body 1, is generated (see FIG. 3).
(B)), this magnetic field: H acts on the magnetic particles in the magnetic liquid 90 to orient the magnetic particles in the direction of the magnetic field, that is, in the direction of maximum curvature of the cylindrical peripheral surface of the resin layer 7. When the magnetic liquid 90 is dried in this state to form a magnetic film, the magnetic film has a high degree of filling with magnetic particles.
【００１８】上記磁界：Ｈによる磁性粒子の配向を行わ
ない場合は、磁性膜に磁気ヘッドにより書き込み磁界：
Ｈｃを作用させるときのヒステリシスは図３（Ｃ）に示
す如きものであるが、磁界：Ｈで磁性粒子の配向を行っ
た場合のヒステリシスは図３（Ｄ）に示すようになり、
残留磁束密度：Ｂｒが大きくなる。このため磁性粒子の
配向を行った磁性膜では、配向を行わない磁性膜と比べ
て、同じ書き込み条件で格子パターンを書き込んでも磁
化が効率良く行われるため、これを磁性コロイド流体で
可視化した格子パターンのコントラストが極めて高く、
格子パターンのピッチが１μｍ程度と細かくても良好な
格子パターン形成が可能である。When the magnetic particles are not oriented by the magnetic field: H, the magnetic field is written on the magnetic film by the magnetic head:
The hysteresis when Hc is applied is as shown in FIG. 3 (C), but the hysteresis when magnetic particles are oriented in a magnetic field: H is as shown in FIG. 3 (D).
Residual magnetic flux density: Br increases. For this reason, in a magnetic film in which magnetic particles are oriented, magnetization is performed more efficiently even when a lattice pattern is written under the same writing conditions than in a magnetic film in which no orientation is performed. Has a very high contrast,
Good grid pattern formation is possible even if the pitch of the grid pattern is as small as about 1 μm.
【００１９】なお、図１〜３の実施例において、金属製
の円柱状回転体１は、モーターの回転軸である。In the embodiments shown in FIGS. 1 to 3, the metallic cylindrical rotating body 1 is the rotating shaft of the motor.
【００２０】[0020]
【発明の効果】以上のように、この発明によれば、光学
エンコーダ用の新規な円柱状スケールと、その製造方法
を提供できる。この発明の製造方法は、上記の如く、金
属製の円柱状回転体の周面に直接磁性膜を形成するので
なく、磁性膜の樹脂と親和性の良い樹脂材料による樹脂
層を先ず形成し、この樹脂層上に磁性膜を形成するの
で、均一な厚みを持った、良好な磁性膜を容易且つ確実
に形成でき、良好な格子パターンを実現できる。また請
求項２記載の方法では、磁性膜中の磁性粒子が配向され
て高充填度になるので、極めて細かいピッチの格子パタ
ーンを高コントラストに形成できる。請求項３記載の方
法のように、樹脂層を樹脂成形で形成すると、樹脂層の
形成が容易で大量生産に適するため、円柱状スケールの
生産コストを低減化できる。また請求項４記載の方法で
は、樹脂層と磁性液体の親和性が極めて良いので、均一
な厚みの磁性層を容易に形成できる。As described above, according to the present invention, it is possible to provide a novel cylindrical scale for an optical encoder and a manufacturing method thereof. As described above, the manufacturing method of the present invention does not directly form the magnetic film on the circumferential surface of the metal cylindrical rotating body, but first forms a resin layer of a resin material having a good affinity with the resin of the magnetic film, Since the magnetic film is formed on this resin layer, a good magnetic film having a uniform thickness can be easily and surely formed, and a good lattice pattern can be realized. Further, in the method according to the second aspect, since the magnetic particles in the magnetic film are oriented and have a high packing degree, it is possible to form a lattice pattern having an extremely fine pitch with high contrast. When the resin layer is formed by resin molding as in the method described in claim 3, the resin layer can be easily formed and is suitable for mass production, so that the production cost of the cylindrical scale can be reduced. Further, in the method according to the fourth aspect, since the affinity between the resin layer and the magnetic liquid is extremely good, a magnetic layer having a uniform thickness can be easily formed.
【００２１】これら請求項１〜４記載の方法で形成され
る円柱状スケール（請求項５）は、細かいピッチの格子
パターンが正確且つ高コントラストに形成されているの
で、影絵パターン等の利用による回転量検出を極めて高
精度に行うことができる。In the cylindrical scale (claim 5) formed by the method according to any one of claims 1 to 4, since the lattice pattern with a fine pitch is formed accurately and with high contrast, it is rotated by using a shadow pattern or the like. Quantity detection can be performed with extremely high accuracy.
【図１】この発明の円柱状スケールの製造方法の１実施
例を説明するための図である。FIG. 1 is a diagram for explaining one embodiment of a method for manufacturing a cylindrical scale of the present invention.
【図２】この発明の製造方法で製造された円柱状スケー
ルの１例を示す図である。FIG. 2 is a diagram showing an example of a cylindrical scale manufactured by the manufacturing method of the present invention.
【図３】請求項２記載の製造方法を説明するための図で
ある。FIG. 3 is a diagram for explaining the manufacturing method according to claim 2;
１ 金属製の円柱状回転体 ７ 樹脂層 ９ 磁性膜 １０ 格子パターン 1 Metal Cylindrical Rotating Body 7 Resin Layer 9 Magnetic Film 10 Lattice Pattern
───────────────────────────────────────────────────── フロントページの続き (72)発明者 町田 晴彦 東京都新宿区中落合４丁目10番７号 (72)発明者 山口 友行 東京都大田区中馬込１丁目３番６号・株式 会社リコー内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Haruhiko Machida 4-10-7 Nakaochiai, Shinjuku-ku, Tokyo (72) Inventor Tomoyuki Yamaguchi 1-3-3 Nakamagome, Ota-ku, Tokyo Ricoh Co., Ltd. Within
Claims (5)
の周面を樹脂層により被覆し、 上記樹脂層の材料樹脂と親和性の良い樹脂液中に磁性粒
子を分散させてなる磁性液体を、上記樹脂層の円柱面状
周面に塗布乾燥させて、磁性膜を形成し、 この磁性膜に対し、マグネティック・リソグラフィによ
り所望の格子パターンを形成することを特徴とする、光
学エンコーダ用の円柱状スケールの製造方法。1. A cylindrical rotating body made of metal, which rotates around an axis, is coated with a resin layer on the peripheral surface thereof, and magnetic particles are dispersed in a resin liquid having a good affinity with the material resin of the resin layer. An optical encoder, characterized in that a magnetic liquid is applied to the cylindrical peripheral surface of the resin layer and dried to form a magnetic film, and a desired lattice pattern is formed on the magnetic film by magnetic lithography. For manufacturing cylindrical scales for automobiles.
いて、金属性の円柱状回転体に、その軸方向へ直流電流
を通じ、磁性液体中の磁性体が樹脂層の最大曲率方向へ
配向した磁性膜を形成することを特徴とする、光学エン
コーダ用の円柱状スケールの製造方法。2. The manufacturing method according to claim 1, wherein, after the magnetic liquid is applied, a direct current is passed through the metallic cylindrical rotary member in the axial direction during the drying of the applied magnetic liquid. 2. The method for producing a cylindrical scale for an optical encoder, comprising forming a magnetic film in which the magnetic substance is oriented in the maximum curvature direction of the resin layer.
て、 金属製の円柱状回転体の周面を被覆する樹脂層を、金型
を用いた樹脂成形法で形成することを特徴とする、光学
エンコーダ用の円柱状スケールの製造方法。3. The manufacturing method according to claim 1, wherein the resin layer covering the peripheral surface of the metal cylindrical rotating body is formed by a resin molding method using a mold. A method for manufacturing a cylindrical scale for an optical encoder.
において、 金属製の円柱状回転体の周面を被覆する樹脂層の材料を
アクリル樹脂とし、磁性液体の材料樹脂をウレタン樹脂
またはエポキシ樹脂とすることを特徴とする、光学エン
コーダ用の円柱状スケールの製造方法。4. The manufacturing method according to claim 1, 2 or 3, wherein the material of the resin layer coating the peripheral surface of the metal cylindrical rotating body is acrylic resin, and the material resin of the magnetic liquid is urethane resin or epoxy. A method for manufacturing a cylindrical scale for an optical encoder, which is characterized by using a resin.
方法で製造される、光学エンコーダ用の円柱状スケー
ル。5. A cylindrical scale for an optical encoder manufactured by the method according to claim 1, 2, 3 or 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15354192A JP3181980B2 (en) | 1992-06-12 | 1992-06-12 | Columnar scale for optical encoder and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15354192A JP3181980B2 (en) | 1992-06-12 | 1992-06-12 | Columnar scale for optical encoder and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05340766A true JPH05340766A (en) | 1993-12-21 |
| JP3181980B2 JP3181980B2 (en) | 2001-07-03 |
Family
ID=15564776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15354192A Expired - Fee Related JP3181980B2 (en) | 1992-06-12 | 1992-06-12 | Columnar scale for optical encoder and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3181980B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104807485A (en) * | 2014-01-23 | 2015-07-29 | 丛森 | Novel resin code disc production process |
| US11878001B2 (en) | 2017-07-31 | 2024-01-23 | Novartis Ag | Use of mavoglurant in the reduction of cocaine use or in preventing relapse into cocaine use |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100544206B1 (en) * | 2004-07-20 | 2006-01-23 | 삼성전자주식회사 | Method and apparatus for preventing of overheating for a fixing unit |
-
1992
- 1992-06-12 JP JP15354192A patent/JP3181980B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104807485A (en) * | 2014-01-23 | 2015-07-29 | 丛森 | Novel resin code disc production process |
| CN104807485B (en) * | 2014-01-23 | 2017-05-17 | 丛森 | Novel resin code disc production process |
| US11878001B2 (en) | 2017-07-31 | 2024-01-23 | Novartis Ag | Use of mavoglurant in the reduction of cocaine use or in preventing relapse into cocaine use |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3181980B2 (en) | 2001-07-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100419886C (en) | Pattern drawing apparatus, method of manufacturing a master disk for manufacturing information recording media, and method of manufacturing an information recording medium | |
| JPH0689465A (en) | Method for generating fine surface shape | |
| JPH0257913A (en) | Measuring method of amount of rotation | |
| JPH04113222A (en) | Coating-type magnetic recording body and magnetic encoder | |
| US3753252A (en) | Disk pack assembly and method of making | |
| JPH05340766A (en) | Cylindrical scale for optical encoder and its manufacture | |
| JP2007179722A (en) | Circumferentially patterned disk for longitudinal and perpendicular recording, and method of manufacturing the same | |
| JPH075924B2 (en) | Metal fine particle aggregate and manufacturing method thereof, magnetic recording medium using metal fine particle aggregate and manufacturing method thereof | |
| JPH0131613B2 (en) | ||
| JP2017053648A (en) | Magnetic scale and manufacturing method thereof | |
| US4721646A (en) | Magnetic recording medium | |
| JPS5832233A (en) | Magnetic recording medium | |
| JPH0514331B2 (en) | ||
| US20070020386A1 (en) | Encapsulation of chemically amplified resist template for low pH electroplating | |
| JP2524198B2 (en) | Flexible magnetic disk | |
| JP3016563B2 (en) | Lattice cylinder fabrication method | |
| JP2919567B2 (en) | Diffraction grating fabrication method | |
| JPH02312016A (en) | Production of magnetic drum | |
| JPH02292719A (en) | Magnetic drum and production thereof | |
| JP2655887B2 (en) | Lattice fabrication method | |
| JPH0394117A (en) | Production of magnetic recording medium for magnetic type rotary encoder | |
| JP3034584B2 (en) | Absolute encoder | |
| JPH04301217A (en) | Production of magnetic recording medium | |
| JPS58166535A (en) | Magnetic recording medium carrier | |
| JPH02312015A (en) | Magnetic drum and its production |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 7 Free format text: PAYMENT UNTIL: 20080420 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 8 Free format text: PAYMENT UNTIL: 20090420 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 8 Free format text: PAYMENT UNTIL: 20090420 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 9 Free format text: PAYMENT UNTIL: 20100420 |
|
| LAPS | Cancellation because of no payment of annual fees |