JPH05340709A - Three-dimensional shape measuring instrument - Google Patents

Abstract

PURPOSE:To quickly and accurate measure the three-axis coordinate values of an arbitrary shape. CONSTITUTION:Numerous detection coils 2 are arranged on a flexible film 1 in a matrix-like state and the coils are connected to each other through conductive rubber 3. A prescribed one of the coils 2 is activated and alternating magnetic fields are successively generated in X, Y, and Z directions by means of a three-axis orthogonal source coil 5. Then the coordinate values of the coil 2 in the X, Y, and Z directions are found by processing the output of the coil 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional shape measuring apparatus suitable for measuring the coordinates of an object surface having an arbitrary shape.

[0002]

2. Description of the Related Art A method for measuring the shape of an object by applying electromagnetic coupling is disclosed in, for example, Japanese Patent Laid-Open No. 59-18539. Conventionally, when measuring the shape of an object by such electromagnetic coupling, a measurement point on the surface of the object is first determined and marked. Alternatively, a grid for determining measurement points is drawn on the surface of the object.
Then, a sensor is applied to the measurement point and an AC magnetic field is applied to the sensor from a predetermined reference position. At this time, the signal output from the sensor is calculated to obtain the three-dimensional (three-axis) coordinates of the measurement point.

[0003]

In the conventional apparatus, the sensor is applied to each measuring point and the three-dimensional coordinates of the measuring point are read, so that not only the measurement takes time but also However, there was a risk of making a mistake in measurement, such as making a mistake in the mounting position of the sensor. Furthermore, there is a problem that it is difficult to measure a complicated shape such that the tip of the sensor cannot reach or the back side of the object.

The present invention has been made in view of such circumstances, and makes it possible to accurately measure an arbitrary shape in a short time.

[0005]

A three-dimensional shape measuring apparatus according to the present invention comprises a sensor 4 as a detecting means in which a plurality of detecting coils 2 are arranged on a flexible film 1, and a detecting coil 2.
The coordinates of the three axes are calculated from the outputs of the three-axis orthogonal source coil 5 as a magnetic field generating means for generating an alternating magnetic field in the three-axis directions applied to the detector coil 2 and the output of the detection coil 2 when the alternating magnetic field is applied. An arithmetic unit 6 as an arithmetic means is provided.

The detection coils 2 can be arranged on the membrane 1 in a matrix. Also, this detection coil 2 is
It can be connected by a conductive rubber 3 on the membrane 1. Furthermore, the sensor 4 is composed of a plurality of laminated films 1
It can be configured by.

[0007]

In the three-dimensional shape measuring apparatus having the above structure, a plurality of detecting coils 2 are arranged on the flexible film 1. Therefore, simply by covering the measurement object with this film 1,
The coordinates of the three axes can be quickly and accurately obtained from the output of each detection coil.

[0008]

1 is a perspective view showing the construction of an embodiment of a three-dimensional shape measuring apparatus according to the present invention. As shown in the figure, the sensor 4 is composed of a film 1 having sufficient softness (flexibility) so as to come into contact with the surface of an object whose shape is to be measured without leaving a gap. Has been done. A large number of detection coils 2 are arranged in a matrix on the film 1, and the detection coils 2 are connected by a conductive rubber 3.

That is, as shown in FIG. 2, a large number of conductive rubbers 3x extending in the Y-axis direction (vertical direction in the drawing) are arranged in the film 1 in the X-axis direction (horizontal direction in the drawing). , A large number of conductive rubbers 3y extending in the X-axis direction are arranged in the Y-axis direction. And each detection coil 2 is made of conductive rubber 3x and 3
connected between y. As a result, by selectively driving any one of the plurality of conductive rubbers 3x and one of the plurality of conductive rubbers 3y, one of the conductive rubbers 3x connected to the intersecting point is selectively driven. The detection coil 2 can be activated.

The three-axis orthogonal source coils 5 have X,
Coils 5x, 5 for generating an AC magnetic field in the Y or Z axis direction
It has y or 5z. The triaxial orthogonal source coil 5 and the sensor 4 are connected to the arithmetic unit 6. Further, the arithmetic unit 6 is also connected to an output unit 7 which outputs the arithmetic result and is composed of, for example, a magnetic disk unit.

FIG. 3 shows a more detailed electrical structure of the embodiment shown in FIG. As shown in the figure, the arithmetic unit 6 has a control unit 11, and the oscillator 12 is controlled by the control unit 11 to sequentially drive the coils 5x, 5y, 5z of the triaxial orthogonal source coil 5, respectively. It is done like this. The drive circuit 13 is controlled by the control device 11 to select and drive any one set of the conductive rubbers 3x and 3y of the sensor 4. The output of the detection coil 2 of the sensor 4 is supplied to the processing device 15 via the amplifier 14. Processor 15
Is configured to process the signal input from the amplifier 14, calculate the three-dimensional coordinates (X, Y, Z) of the detection coil 2 that generated the output, and output the calculated output to the output device 7. Further, when the processing of the output of one detection coil 2 is completed, the processing device 15 outputs a processing completion signal to the control device 11 to start the control of the next detection coil 2.

Next, the operation will be described. Before starting the measurement, as shown in FIG. 4, the object 22 to be measured is placed on the measuring table 21, and the film 1 is covered on the object 22 to be measured. As described above, since the film 1 has a sufficient softness, it is adhered to the object to be measured 22 without leaving a gap. As a result, a large number of detection coils 2 are arranged at predetermined positions on the DUT 22.

Next, when a command to start the measurement is issued, the control device 11 outputs a control signal to the oscillator 12 to sequentially drive the coils 5x, 5y, 5z of the triaxial orthogonal source coil 5, respectively in the X-axis direction and the Y-axis. An AC magnetic field in the axial direction or the Z-axis direction is generated.

Further, the control device 11 controls the drive circuit 13 so that, for example, the leftmost one of the plurality of conductive rubbers 3x can be selected.
For example, the uppermost one of the books and the plurality of conductive rubbers 3y is selected, and the detection coil 2 located at the intersection is activated. Therefore, when the coil 5x in the X-axis direction of the triaxial orthogonal source coil 5 generates an AC magnetic field in the X-axis direction, the detection coil 2 generates an induced current by applying the AC magnetic field. The value of this induced current can be expressed as a function of the distance and angle between the coil 5x and the detection coil 2. Therefore, the processor 15 uses the amplifier 14 to detect the detection coil 2
Is supplied and the value is calculated to obtain the value of the X coordinate.

Next, the control device 11 drives the coil 5y in the Y-axis direction of the triaxial orthogonal source coil 5 via the oscillator 12. Then, the output of the detection coil 2 at that time is supplied to the processing device 15 via the amplifier 14 and processed in the same manner as in the case described above, and the coordinates in the Y-axis direction are obtained. The control device 11 further drives the coil 5z in the Z-axis direction of the triaxial orthogonal source coil 5 via the oscillator 12,
Generates an alternating magnetic field in the axial direction. Then, the output of the detection coil 2 in that case is supplied to the processing device 15 via the amplifier 14, and the coordinate in the Z-axis direction is detected.

When the processing unit 15 notifies the end of the calculation of the coordinate in the Z-axis direction, the control unit 11 causes the drive circuit 13 to operate.
Is controlled to change the target detection coil 2 to the detection coil at the next position. For example, in FIG. 1, the second conductive rubber 3x from the left and the uppermost conductive rubber 3y are selected. As a result, the uppermost second detection coil 2 from the left is activated. An alternating magnetic field in the X, Y, and Z-axis directions is applied to the detection coil 2 as well, and the 3
Axial coordinates are detected. In the same manner, the selection of the detection coil 2 is sequentially moved, and its three-dimensional coordinates are calculated.

As described above, the three coils 5x and 5 of the three-axis orthogonal source coil 5 are provided for one detection coil 2.
Since y and 5z are driven, the switching cycle of the detection coil 2 is the coil 5x, 5y, 5 of each axis of the three-axis orthogonal source coil 5.
It is three times the switching cycle of z.

The three-dimensional coordinates obtained by the processing device 15 are supplied to the output device 7 and stored therein.

When the calculation for all the detection coils 2 of the sensor 4 is completed as described above, the measurement process is terminated.

It should be noted that the smaller the detection coil 2 is, the more the number of coils per unit area is, so that the measurement resolution is improved. However, in order to improve the accuracy, it is necessary to reduce the loss of the coil as much as possible. Therefore, the detection coil 2 cannot be made too small.
Then, for example, as shown in FIG. 5, a plurality of (two in the embodiment of FIG. 5) films 1 can be laminated.

That is, in the embodiment of FIG. 5, the film 1a and the film 1b are laminated. The film 1a has a conductive rubber 3a.
The detection coils 2a connected by are arranged in a matrix. Further, the detection coils 2b connected by the conductive rubber 3b are arranged in a matrix on the film 1b. Detection coils 2a and 2 on the membrane 1a and membrane 1b
The arrangement intervals of b are the same. Then, the film 1a and the film 1
As shown in FIG. 5, b is arranged so that the detection coils 2a and 2b do not overlap each other when viewed from a plane.

In this way, the detection coils 2a, 2b
It is possible to arrange the coils in a matrix at a higher density without making the size so small. Therefore, the detection coils 2a and 2b are shared by the common drive circuit 1
By driving with 3x and 13y, finer coordinates can be obtained. The drive circuit 13x selects the position of the detection coils 2a and 2b in the X-axis direction, and the drive circuit 13y selects the position in the Y-axis direction.

However, when the detection coils 2 are stacked in the thickness direction of the film 1 as described above, the distance from the surface of the object 22 to be measured to the detection coil 2 is different between the films 1a and 1b, and thus the measurement data is obtained. A correction is required when processing the.

As described above, even when the object 22 to be measured is moving, it is possible to measure the change in its shape.

[0025]

As described above, according to the three-dimensional shape measuring apparatus of the present invention, since the plurality of detection coils are arranged on the flexible film, it is possible to swiftly and accurately detect an object having an arbitrary shape. It becomes possible to measure the coordinates of three axes.

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration of an embodiment of a three-dimensional shape measuring apparatus of the present invention.

FIG. 2 is an enlarged view showing a part of a film 1 in the embodiment shown in FIG.

FIG. 3 is a block diagram showing an electrical configuration of the embodiment shown in FIG.

FIG. 4 is a diagram illustrating a usage state of the sensor 4 of FIG.

5 is a plan view showing another configuration example of the sensor 4 of FIG.

[Explanation of reference numerals] 1 membrane 2 detection coil 3 conductive rubber 4 sensor 5 3-axis orthogonal source coil 6 arithmetic unit 7 output unit 11 control unit 12 oscillator 13 drive circuit 15 processing unit 21 measuring table 22 object to be measured

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Office reference number FI technical display location G06F 15/64 M 9073-5L

Claims (4)

[Claims] 1. A detection means in which a plurality of detection coils are arranged on a flexible film, a magnetic field generation means for generating an AC magnetic field in three axial directions applied to the detection coil, and the AC magnetic field. A three-dimensional shape measuring apparatus comprising: a calculation unit that calculates the coordinates of the three axes from the output of the detection coil when is applied. 2. The three-dimensional shape measuring apparatus according to claim 1, wherein the detection coils are arranged in a matrix on the film. 3. The three-dimensional shape measuring apparatus according to claim 1, wherein the detection coil is connected on the film by a conductive rubber. 4. The three-dimensional shape measuring apparatus according to claim 1, wherein the detecting means has a plurality of laminated films.