JPH0533959Y2 - - Google Patents
Info
- Publication number
- JPH0533959Y2 JPH0533959Y2 JP15263886U JP15263886U JPH0533959Y2 JP H0533959 Y2 JPH0533959 Y2 JP H0533959Y2 JP 15263886 U JP15263886 U JP 15263886U JP 15263886 U JP15263886 U JP 15263886U JP H0533959 Y2 JPH0533959 Y2 JP H0533959Y2
- Authority
- JP
- Japan
- Prior art keywords
- platinum
- solid electrolyte
- electrode
- oxygen sensor
- platinum electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 70
- 229910052697 platinum Inorganic materials 0.000 claims description 35
- 229910052760 oxygen Inorganic materials 0.000 claims description 25
- 239000001301 oxygen Substances 0.000 claims description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 24
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 18
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 17
- 229910052721 tungsten Inorganic materials 0.000 claims description 17
- 239000010937 tungsten Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000007784 solid electrolyte Substances 0.000 claims description 16
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 14
- 229910000679 solder Inorganic materials 0.000 claims description 9
- 238000003780 insertion Methods 0.000 claims description 8
- 230000037431 insertion Effects 0.000 claims description 8
- 238000005219 brazing Methods 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は内燃機関などの排ガス中の酸素濃度を
検知する酸素センサの電極取付け構造に関するも
のである。[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to an electrode mounting structure for an oxygen sensor that detects the oxygen concentration in exhaust gas from an internal combustion engine or the like.
従来から、ジルコニア焼結体などのイオン伝導
固体質（固体電解質板）に一対の電極を設け、一
方の電極側には被測定ガス中の酸素分圧を、他方
の電極側には大気の酸素分圧を印加し、これら被
測定ガスの酸素分圧と基準となる大気の酸素分圧
との差によつて生じる起電力（又は電気抵抗）に
よつて酸素濃度を測定する酸素センサは一般に広
く利用されている。
Conventionally, a pair of electrodes is provided on an ion-conducting solid material (solid electrolyte plate) such as a zirconia sintered body, and one electrode measures the oxygen partial pressure in the gas to be measured, and the other electrode measures atmospheric oxygen. Oxygen sensors, which apply a partial pressure and measure the oxygen concentration by the electromotive force (or electrical resistance) generated by the difference between the oxygen partial pressure of the gas to be measured and the reference atmospheric oxygen partial pressure, are generally widely used. It's being used.
また、上記の如き酸素センサにおいて固体電解
質表面や電極近傍には排ガス中に存在するカーボ
ン粉末や未燃焼粒子等が付着し易く、測定誤差を
生じたり特性の劣化を招く原因をなしていた。 Furthermore, in the above oxygen sensor, carbon powder, unburned particles, etc. present in the exhaust gas tend to adhere to the solid electrolyte surface or near the electrodes, causing measurement errors and deterioration of characteristics.
そのため、酸素センサには、表面に付着した汚
染物質の除去や、低温におけるガス感応性の向上
など双方の目的を果たすため、酸素センサ自体を
800℃程度に加熱するためのヒータを併設したも
のが使用されている。 Therefore, in order to achieve both purposes, such as removing contaminants attached to the surface and improving gas sensitivity at low temperatures, the oxygen sensor itself is
A device equipped with a heater for heating to around 800℃ is used.
すなわち、第３図にて要部横断面図（本考案実
施例としての第５図Ｙ−Ｙ線断面に相当）に示す
ように、固体電解質としてのジルコニアセラミツ
クの板状体Ｊの両面に白金電極P1，P2をメタラ
イズ手法などにより設けて構成したセンサ部Ｓに
対し、アルミナセラミツク体中に白金ペーストを
印刷手法により所定のパターンが埋設されてなる
セラミツクヒータＨを積層一体化し焼結して製作
した酸素センサが使用されていた。 That is, as shown in the cross-sectional view of the main part in FIG. 3 (corresponding to the Y--Y line cross section in FIG. A ceramic heater H, in which a predetermined pattern is embedded in an alumina ceramic body by printing platinum paste, is laminated and integrated with the sensor part S, which is constructed by providing electrodes P 1 and P 2 by a metallization method or the like, and then sintered. An oxygen sensor manufactured by the manufacturer was used.
ところが、上記の如き、セラミツクヒータを一
体的に備えた酸素センサでは、センサＳとヒータ
Ｈとを一体的に焼結して構成されたものであるこ
とから、固体電解質としてのジルコニアセラミツ
クがともに焼結する温度雰囲気中で焼結する必要
がある。しかも固体電解質であるジルコニアセラ
ミツク板の両面には白金電極を設けるが、これに
は一般に白金ペーストを印刷手法により所定のパ
ターンにプリントしたものをセラミツクの焼結と
併せて高温度で焼付けている。 However, in the oxygen sensor integrally equipped with a ceramic heater as described above, since the sensor S and the heater H are integrally sintered, the zirconia ceramic as the solid electrolyte is sintered. It is necessary to sinter in an atmosphere at a temperature that is suitable for sintering. Moreover, platinum electrodes are provided on both sides of the zirconia ceramic plate, which is a solid electrolyte, by printing platinum paste into a predetermined pattern and baking it at high temperature in conjunction with sintering the ceramic.
このように、セラミツクヒータもセンサと同時
焼結し、一体化するものであるため白金電極の焼
付と同一条件で焼成できる白金ペーストでもつて
ヒータの発熱抵抗パターンも構成する必要があ
る。 In this way, since the ceramic heater is also sintered and integrated with the sensor at the same time, it is necessary to construct the heating resistance pattern of the heater using a platinum paste that can be fired under the same conditions as the platinum electrode.
したがつてセンサを為す白金電極だけでなく、
ヒータの発熱抵抗体をも白金を用いることからコ
スト的に非常に高価なものとなる。また発熱抵抗
体が白金より成る場合、抵抗温度係数が小さいた
め発熱温度のコントロールが難しく、かつ消費電
力が大きいという欠点があつた。 Therefore, in addition to the platinum electrode that forms the sensor,
Since platinum is also used for the heating resistor of the heater, the cost becomes very high. Furthermore, when the heating resistor is made of platinum, the temperature coefficient of resistance is small, making it difficult to control the heating temperature and consuming large amounts of power.
さらに、センサとヒータを同時に一体焼結する
ものであるため、一度の焼結で済むため、生産性
が良いように考えられるが、実際の生産において
良品が得られる率、すなわち歩留りが悪いという
不都合があつた。 Furthermore, since the sensor and heater are sintered at the same time, it is thought that productivity is good because only one sintering is required, but in actual production, the rate of obtaining good products, that is, the yield rate, is low. It was hot.
そこで、本出願人は特願昭61−154722号におい
て、固体電解質に白金電極を付設して成るセンサ
と、アルミナセラミツク体中にタングステンペー
ストで形成した発熱抵抗体を内蔵したヒータとを
それぞれ別途製作しておき、所定の特性を備え
た、良品のみをガラス付によつて接着一体化して
酸素センサを提供した。
Therefore, in Japanese Patent Application No. 61-154722, the present applicant separately fabricated a sensor consisting of a solid electrolyte with a platinum electrode attached, and a heater with a built-in heating resistor made of tungsten paste in an alumina ceramic body. Then, only non-defective products with predetermined characteristics were bonded and integrated with glass to provide an oxygen sensor.
該酸素センサ１は第４図乃至第６図に示す如く
先端に被測定ガスを導入するための導入孔２と、
後端には基準ガスとしての大気を導入する大気導
入孔３が各々形成されている。このうち導入孔２
は、ジルコニア焼結体から成る固体電解質板４の
片面に設けた白金電極５が形成された空間５ａ
に、他方の大気導入孔３は同じく固体電解質４の
他の面に設けた白金電極６が形成された空間６ａ
にそれぞれ連通するように構成されている。この
場合、固体電解質板４の片面に形成された白金電
極６が露出した空間６ａを形成する外壁部材７は
固体電解質板４と同じものでもよいが、アルミナ
セラミツクで作製したものを接合部３においてガ
ラス付けしたものであつてもよい。 As shown in FIGS. 4 to 6, the oxygen sensor 1 has an introduction hole 2 at its tip for introducing the gas to be measured;
Air inlet holes 3 for introducing air as a reference gas are formed at the rear end. Of these, introduction hole 2
is a space 5a in which a platinum electrode 5 provided on one side of a solid electrolyte plate 4 made of a zirconia sintered body is formed.
The other air introduction hole 3 is also a space 6a in which a platinum electrode 6 provided on the other surface of the solid electrolyte 4 is formed.
are configured to communicate with each other. In this case, the outer wall member 7 forming the space 6a in which the platinum electrode 6 formed on one side of the solid electrolyte plate 4 is exposed may be the same as the solid electrolyte plate 4, but it may be made of alumina ceramic at the joint portion 3. It may be made of glass.
このように構成されたセンサＳに対し、タング
ステン又はタングステン−モリブデンなどのペー
ストを用い印刷手法によりアルミナセラミツク体
９中に発熱抵抗体１０を埋設したヒータＨの片面
を上記センサＳの一面にガラス付によつて全面的
にガラス接着させる。 For the sensor S configured in this manner, one side of the heater H, in which a heating resistor 10 is embedded in an alumina ceramic body 9 by a printing method using a paste such as tungsten or tungsten-molybdenum, is attached to one side of the sensor S with glass. The entire surface is bonded to the glass.
そして、白金電極５，６は後端からリード５
ｂ，６ｂによつて各々導出され、また発熱抵抗体
１０には同じく後端に備えたリード１０ａから導
通されるようになつている。 Then, the platinum electrodes 5 and 6 are connected to the lead 5 from the rear end.
b and 6b, respectively, and electrically connected to the heating resistor 10 from a lead 10a also provided at the rear end.
さて、この従来技術における白金電極５，６と
リード５ｂ，６ｂとの取付け構造は第７図又は第
８図に示す如く、ジルコニア焼結体からなる固体
電解質板４上の白金電極５，６上にニツケル
（Ni）金属リード５ｂ，６ｂを銀ロウ１１，１２
を介して固着している。 Now, the mounting structure of the platinum electrodes 5, 6 and the leads 5b, 6b in this prior art is as shown in FIG. 7 or 8, as shown in FIG. Then nickel (Ni) metal leads 5b and 6b are soldered with silver solder 11 and 12.
It is fixed through.
しかしながら、固体電解質板４であるジルコニ
ア焼結体面に対し白金電極５，６の固着力が非常
に弱く、またジルコニア焼結体面に対する銀ロウ
１１，１２の固着力も弱いため取り付け後の引張
り強度（第７図矢印Ａ方向に引張つてリードが白
金電極から外れた時の強度）が僅か0.5Kg程度で
ある。この程度の引張り強度では取り付け工程時
に金属リード５ｂ，６ｂが容易に外れてしまい信
頼性に乏しく耐久性が悪い欠点があつた。
However, the adhesion force of the platinum electrodes 5 and 6 to the surface of the zirconia sintered body that is the solid electrolyte plate 4 is very weak, and the adhesion force of the silver solder 11 and 12 to the surface of the zirconia sintered body is also weak, so the tensile strength after attachment ( The strength when the lead comes off the platinum electrode when pulled in the direction of arrow A in Figure 7 is only about 0.5 kg. With this level of tensile strength, the metal leads 5b, 6b easily come off during the attachment process, resulting in poor reliability and poor durability.
上記事情に鑑み、前記金属リードの白金電極側
に対向してタングステンメタライズ層を有するア
ルミナ質外壁材を設け、前方金属リード、白金電
極及びタングステンメタライズ層を一体的に銀ロ
ウ付けするようにした酸素センサの電極取付け構
造が提供される。
In view of the above circumstances, an alumina outer wall material having a tungsten metallized layer is provided opposite the platinum electrode side of the metal lead, and the front metal lead, platinum electrode, and tungsten metallized layer are integrally soldered with silver. A sensor electrode mounting structure is provided.
以下、図に基づいて本考案の一実施例を詳細に
説明する。本考案における酸素センサの全体構成
は前記第４図〜第６図に示した構造と同じである
ので説明を省略する。第１図及び第２図に示す要
部拡大縦断面図及びＺ−Ｚ線断面図に基づき、こ
の酸素センサの電極取付け構造を説明する。（第
１図および第２図中、第４図および第６図と同一
部分については同一符号でもつて説明する。）
固体電解質板４であるジルコニア焼結体と、前
記アルミナ質外壁部材７との間にリード差込孔１
３，１４を設けている。このリード差込孔１３，
１４内において固体電解質４上に白金電極５，６
を配置し、前記アルミナ質外壁部材７側にタング
ステンメタライズ層１５，１６を形成し、このタ
ングステンメタライズ層１５，１６と白金電極
５，６間にニツケル（Ni）金属リード５ｂ，６
ｂを差込んだ状態で銀ロウ１１，１２をこの孔１
３，１４内に充填することにより、前記白金電極
５，６にリード５ｂ，６ｂを接続するようにして
いる。即ち、前記金属リード５ｂ，６ｂの白金電
極５，６に対向してタングステンメタライズ層１
５，１６を有するアルミナ質外壁部材７を設け、
これら金属リード、白金電極及びタングステンメ
タライズ層を一体的に銀ロウ付けするようにして
いる。
Hereinafter, one embodiment of the present invention will be described in detail based on the drawings. The overall structure of the oxygen sensor according to the present invention is the same as the structure shown in FIGS. 4 to 6, so the explanation will be omitted. The electrode mounting structure of this oxygen sensor will be explained based on an enlarged longitudinal cross-sectional view of a main part and a cross-sectional view taken along the Z-Z line shown in FIGS. 1 and 2. (In FIGS. 1 and 2, the same parts as in FIGS. 4 and 6 will be explained using the same reference numerals.) Lead insertion hole 1 between
3 and 14 are provided. This lead insertion hole 13,
Platinum electrodes 5 and 6 are placed on the solid electrolyte 4 in
Tungsten metallized layers 15 and 16 are formed on the alumina outer wall member 7 side, and nickel (Ni) metal leads 5b and 6 are placed between the tungsten metallized layers 15 and 16 and the platinum electrodes 5 and 6.
With b inserted, silver solder 11, 12 is inserted into this hole 1.
By filling the insides of the platinum electrodes 5 and 6, the leads 5b and 6b are connected to the platinum electrodes 5 and 6. That is, the tungsten metallized layer 1 is placed opposite the platinum electrodes 5 and 6 of the metal leads 5b and 6b.
5, 16, an alumina outer wall member 7 is provided,
These metal leads, platinum electrodes, and tungsten metallized layer are integrally soldered with silver.
上記構造のものについて第１図矢印Ｂ方向に引
張り強度試験を行つた結果、約６Kgでニツケル
（Ni）金属リード５ｂ，６ｂが切断され、白金電
極５，６との接着部分は剥離していなかつた。 As a result of performing a tensile strength test on the structure described above in the direction of arrow B in Fig. 1, the nickel (Ni) metal leads 5b and 6b were cut at approximately 6 kg, and the bonded parts with the platinum electrodes 5 and 6 did not peel off. Ta.
即ち、金属リード５ｂ，６ｂは銀ロウ１１，１
２を介してアルミナ質外壁部材７のタングステン
メタライズ層１５，１６に強固に固着した状態で
白金電極５，６に接触しているためと考えられ
る。銀ロウは白金電極に対しては接着力が弱いが
タングステンメタライズ層に対しては強固に接合
する。またタングステンはジルコニアに対してメ
タライズ性が悪いが、アルミナに対しては強固に
固着する。以上の理由で引張り強度が向上したも
のと考えられる。 That is, the metal leads 5b and 6b are connected to silver solder 11 and 1.
This is thought to be due to the fact that the tungsten metallized layers 15 and 16 of the alumina outer wall member 7 are firmly fixed to the platinum electrodes 5 and 6 through the alumina outer wall member 7. Silver solder has weak adhesion to platinum electrodes, but strongly bonds to tungsten metallized layers. Furthermore, tungsten has poor metallization properties with respect to zirconia, but it firmly adheres to alumina. It is thought that the tensile strength was improved for the above reasons.
本考案はジルコニア質固体電解質板とアルミナ
質外壁部材との間に金属リード差込孔を設けると
共に、このリード差込孔内の固体電解質板上に白
金電極を配設する一方、このリード差込孔内のア
ルミナ質外壁部材側にタングステンメタライズ層
を形成し、該タングステンメタライズ層と白金電
極との間に金属リードを差込んだ状態で銀ロウを
このリード差込孔内に充填することにより、白金
電極に金属リードを接続するようにしたものであ
り、したがつて、前記金属リードが白金電極に接
続された状態でアルミナ質外壁部材のタングステ
ンメタライズ層に銀ロウを介して強固に固着させ
ることができ、耐久性に優れた信頼性の高い酸素
センサを提供することができる。
In the present invention, a metal lead insertion hole is provided between the zirconia solid electrolyte plate and the alumina outer wall member, and a platinum electrode is placed on the solid electrolyte plate in this lead insertion hole. By forming a tungsten metallized layer on the alumina outer wall member side of the hole, and filling the lead insertion hole with silver solder with a metal lead inserted between the tungsten metallized layer and the platinum electrode, A metal lead is connected to the platinum electrode, and therefore, the metal lead is firmly fixed to the tungsten metallized layer of the alumina outer wall member via silver solder while being connected to the platinum electrode. This makes it possible to provide a highly durable and reliable oxygen sensor.
第１図は本考案の酸素センサ電極取付け部を示
す要部拡大縦断面図（第４図Ｒ−Ｒ線拡大断面図
に対応）、第２図は本考案の酸素センサの電極取
付部を示す要部拡大横断面図（第４図Ｓ−Ｓ線拡
大断面図に対応）、第３図は従来のヒータ付酸素
センサの要部横断面図である。第４図は本考案実
施例及び従来例によるヒータ付酸素センサの全体
平面図、第５図は第４図におけるヒータ付酸素セ
ンサのＸ−Ｘ線断面図、第６図は第５図における
Ｙ−Ｙ線断面図、第７図および第８図は従来の酸
素センサの電極取付部を示す要部拡大縦断面図で
ある。
１……ヒータ付酸素センサ、２……導入孔、３
……大気導入孔、４……固体電解質、５，６……
白金電極、Ｈ……ヒータ、Ｓ……センサ、１１，
１２……銀ロウ、１３，１４……リード差込孔、
１５，１６……タングステンメタライズ層。
Fig. 1 is an enlarged vertical sectional view of the main part showing the oxygen sensor electrode mounting part of the present invention (corresponding to the enlarged sectional view taken along line R-R in Fig. 4), and Fig. 2 shows the electrode mounting part of the oxygen sensor of the present invention. FIG. 3 is an enlarged cross-sectional view of a main part (corresponding to the enlarged cross-sectional view taken along the line SS in FIG. 4), and FIG. 3 is a cross-sectional view of a main part of a conventional oxygen sensor with a heater. FIG. 4 is an overall plan view of an oxygen sensor with a heater according to an embodiment of the present invention and a conventional example, FIG. 5 is a sectional view taken along the line X--X of the oxygen sensor with a heater in FIG. 4, and FIG. -Y line sectional view, and FIGS. 7 and 8 are enlarged longitudinal sectional views of main parts showing the electrode attachment part of a conventional oxygen sensor. 1...Oxygen sensor with heater, 2...Introduction hole, 3
...Air introduction hole, 4...Solid electrolyte, 5,6...
Platinum electrode, H...heater, S...sensor, 11,
12...Silver solder, 13,14...Lead insertion hole,
15, 16...Tungsten metallized layer.
Claims (1)
材との間に金属リード差込孔を設け、このリード
差込孔内の固体電解質板上に白金電極を配設する
一方、このリード差込孔内のアルミナ質外壁部材
側にタングステンメタライズ層を形成し、該タン
グステンメタライズ層と白金電極との間に金属リ
ードを差込んだ状態で銀ロウを充填して、白金電
極に金属リードをロウ付け接続したことを特徴と
する酸素センサの電極取付け構造。 A metal lead insertion hole is provided between the zirconia solid electrolyte plate and the alumina outer wall member, and a platinum electrode is placed on the solid electrolyte plate in this lead insertion hole. A tungsten metallized layer is formed on the outer wall member side, and a metal lead is inserted between the tungsten metallized layer and the platinum electrode, filled with silver solder, and the metal lead is connected to the platinum electrode by brazing. Characteristic oxygen sensor electrode mounting structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15263886U JPH0533959Y2 (en) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15263886U JPH0533959Y2 (en) | 1986-10-03 | 1986-10-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6358749U JPS6358749U (en) | 1988-04-19 |
| JPH0533959Y2 true JPH0533959Y2 (en) | 1993-08-27 |
Family
ID=31070798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15263886U Expired - Lifetime JPH0533959Y2 (en) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533959Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6514899B2 (en) * | 2014-03-26 | 2019-05-15 | 日本特殊陶業株式会社 | Gas sensor and gas detection element |
-
1986
- 1986-10-03 JP JP15263886U patent/JPH0533959Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6358749U (en) | 1988-04-19 |
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