JPH05337425A - Method and device for filling viscous paste - Google Patents

Abstract

PURPOSE:To prevent paste in a land part from scattering even if a squeezee for filling paste is separated from a mask by preventing the mask from being raised with that. CONSTITUTION:The filling device 10 is the one for filling viscous tungsten paste P into a through hole forming hole 2 of a green sheet 1. The filling device 10 has a roller squeezee R and the 1st scraper S1 for scraping the paste P. The filling device 10 also has the 2nd scraper S2 as a mask pressurizing member. The 2nd scraper S2 moves up and down independently of the roller squeezee R and the 1st scraper S1. And the 2nd scraper S2 presses a mask M in the position on the roller squeezee R side from the 1st scraper S1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for filling a high-viscosity paste into a base material having micropores, and a filling device used at that time.

[0002]

2. Description of the Related Art Conventionally, a case in which this type of method and apparatus is required is, for example, a case where a conductor circuit in a through hole is formed on a ceramic substrate through which minute through hole forming holes are formed. There is. As the paste to be filled, a paste containing a conductive metal such as tungsten as a main component is used. Then, in order to achieve low resistance of the conductor circuit, the paste is usually adjusted to have a high viscosity of 10,000 c.p. or more.

In this case, a filling device 40 as shown in FIG. 6, for example, is used for the paste filling work on the base material. The device 40 includes a surface plate 42 for closely disposing the mask M on the base material 41, and a support 43 that is movable relative to the mask M. Further, two squeegees 44 and 45 that can move up and down independently of each other are provided on the lower portion of the support body 43. One of them is a paste filling squeegee 44, and the other is a scraper 45 for scraping off the unfilled paste P and returning the paste P to the initial position.

In the filling method using the apparatus 40, first, the filling squeegee 44 is closely arranged on the base material 41 on which the mask M is arranged at one upper end of the base material 41, and the relative movement of the squeegee 44 is performed. The paste P is supplied to the front side in the direction. On the other hand, the scraper 45 is separated from the mask M. Then, by moving the squeegee 44 from the above position to the other upper end of the base material 41, the paste P
Is filled into the through hole forming hole 41a. next,
The filling squeegee 44 moves upward to separate from the mask M, and the separated scraper 45 moves downward to contact the mask M. Then, the scraper 45 moves in the opposite direction, whereby the paste P is returned to the initial position, and one filling operation is completed.

[0005]

However, since the paste P having high viscosity is used in the above method, the method shown in FIG.
~ As shown in Fig. 7 (c), when the filling squeegee 44 is separated from the mask M, the mask M slightly moves to the base material 41.
Will be lifted from.

When the mask M returns to its original position after switching to the scraper 45, the mask M
Results in crushing the land portion L of the paste P and scattering the paste P around the through-hole forming hole 41a. Therefore, if the space between the adjacent land portions L is small, the land portions L may adhere to each other,
It was not suitable.

As a solution to the above problem, for example, a method of pressing the mask M with the scraper 45 in advance and then separating the filling squeegee 44 from the mask M can be considered. However, in this method, since the position where the mask M is pressed is inappropriate, it is not possible to expect a sufficient effect even if the mask M is pressed with a large pressing force.

The present invention has been made in view of the above circumstances, and an object thereof is to prevent the mask from being lifted up when the squeegee for filling the paste is separated from the mask, so that the paste in the land portion is not lifted. An object of the present invention is to provide a filling method and a filling device for a high-viscosity paste capable of reliably preventing the scattering of the paste.

[0009]

In order to solve the above-mentioned problems, according to the present invention, a surface plate for closely disposing a mask on a base material having micropores, and a movable surface relative to the mask. And a paste filling squeegee provided on the support and vertically movable independently of each other and a paste scraping squeegee, at least independently of the paste filling squeegee. A mask pressing member that can move up and down and presses the mask at a position closer to the paste filling squeegee than the paste scraping squeegee is provided.

Further, in the present invention relating to the filling method, a state in which the base material having the fine holes and the paste filling squeegee are closely arranged via a mask, and the high-viscosity paste is supplied to the front side in the relative movement direction of the squeegee. In the filling method of the high-viscosity paste that moves the squeegee in the direction of,
When the squeegee separates from the mask, the mask is pressed on the rear side in the moving direction of the squeegee.

[0011]

According to the present invention, the position where the mask pressing member presses the mask when the paste filling squeegee separates from the mask is on the paste filling squeegee side of the paste scraping squeegee. Therefore, the lifting of the mask can be reliably prevented without applying a large pressing force.

It is preferable that the mask pressing member is a paste scraping squeegee provided on the side of the support opposite to the paste scraping squeegee with the paste filling squeegee interposed therebetween.

The reason is that the paste filling can be performed in two directions by arranging the pair of paste scraping squeegees symmetrically with respect to the paste filling squeegee. In this case, when one of the two paste scraping squeegees is used as a scraper, the other functions as a mask pressing member.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is embodied in an apparatus and method for filling a ceramic green sheet with a conductive metal paste will be described in detail with reference to the drawings.

In this embodiment, a ceramic green sheet 1 having a thickness is used as a base material, and through holes 2 for forming through holes are formed in the green sheet 1 by a drill as fine holes. The through hole forming hole 2 had an inner diameter of 0.2 mm.

As a high-viscosity paste filled in the through-hole forming holes 2 to form the through-hole conductor circuit 3, a paste P containing tungsten as a main component was prepared. Then, the viscosity of the paste P was adjusted to about 300,000 c.p. before being filled.

Further, in this embodiment, a mask M made of stainless steel (having a thickness of 0.05 m) is used as a mask for filling paste.
m, 200 mm square) was used. The mask M has an inner diameter of 0.20 mm corresponding to the position of the through hole forming hole 2.
A plurality of paste supply ports M1 are formed.

Next, the structure of the paste filling apparatus 10 of this embodiment will be described. As shown in FIG.
The filling device 10 includes a surface plate 5 for fixing the green sheet 1 substantially horizontally and placing the mask M closely on the green sheet 1. Above the surface plate 5, a pair of guide rods 4 are horizontally installed in parallel and supported. A movable block 6 as a support is slidably provided on both guide rods 4. The movable block 6 is driven in the longitudinal direction of the guide rod 4 (the direction of the double-headed arrow A) by a driving unit (not shown).

On the lower surface of the lower moving block 6, three fluid pressure cylinders 11, 12 and 13 are continuously provided along the longitudinal direction of the guide rod 4. Each cylinder 11, 1
Rods 11a, 12a and 13a are projectingly provided at the lower ends of the rods 2 and 13, and pipes (not shown) for supplying a pressure fluid are connected to them. The rods 11a, 12a, 13a can be independently expanded and contracted in the vertical direction by the pressure fluid supplied from the pipes.

In the apparatus 10, the switching of the pressure fluid supply direction is performed by a conventionally known control means such as a computer. As shown in FIG. 1, a roller squeegee R as a paste filling squeegee is fixed to the rod 12a of the cylinder 12 located at the center. The roller squeegee R is composed of a fixed frame 8 having a notch in a lower portion as a support, and a roller 7 rotatably supported by the fixed frame 8. Laura 7
Are arranged substantially at right angles to the moving direction indicated by the double-headed arrow A. The roller 7 is made of a metal material and has a length of 200 mm.

A first scraper S1 as a paste scraping squeegee is fixed to the lower end of the rod 13a of the cylinder 13 located on the right side of the roller squeegee R. On the other hand, a second scraper S2 as a mask pressing member is fixed to the lower end of the rod 11a of the cylinder 11 located on the left side of the roller squeegee R.

Hardened, rod-shaped urethane rubber is attached to the lower edges of the scrapers S1 and S2 over their entire length. The urethane rubbers are in parallel with the roller 7.

Next, a method of filling the paste P using the filling device 10 will be described. First, the masks M are arranged on the green sheet 1, and they are fixed on the surface plate 5. Next, as shown in FIG. 2A, the roller squeegee R
And the roller 7 at the lower end of the roller squeegee R is arranged in close contact with one end of the mask M (the left end in FIG. 1). At this time, both scrapers S1 and S2 are in the upwardly moved state, that is, in a position separated from the green sheet 1. The printing pressure of the roller squeegee R is set to ² kgf / cm ² , and both scrapers S
The printing pressures of 1 and S2 are set to 0.5 kgf / cm ² which is lower than the above value. The above state is the initial state when the paste P is filled.

Then, while the paste P is being supplied to the front side in the moving direction of the roller 7, the roller squeegee R is used as a mask M.
To the other end (right end in FIG. 1) (see FIG. 2 (b)). At this time, the roller 7 fills the paste P into the through-hole forming holes 2.

Further, as shown in FIG. 2 (c), the second scraper S2 is moved downward, and the urethane rubber disposed at the tip of the second scraper S2 is placed at a position closer to the center of the mask M than the first scraper S1. Contact the M surface. After that, Figure 2
As shown in (d), while the mask M is being pressed by the scraper S2, the roller squeegee R is moved upward to separate the roller 7 from the surface of the mask M.

Here, after the first scraper S1 is moved down, the second scraper S2 is moved up (FIG. 2 (e),
See Fig. 2 (f). Then, as shown in FIG. 2 (g), the first scraper S1 is moved to the left end. At this time,
The scraper S1 scrapes off the unfilled paste P and returns the paste P to the initial position.

After that, the roller squeegee R is moved downward (see FIG. 2 (h)), and then the first scraper S1 is moved upward (see FIG. 2 (i)) so that the initial stage of FIG. 2 (a) is reached. Return to the state. In addition, roller squeegee R, each scraper S1,
At least one of S2 is in contact with the mask M through a series of operations. The green sheet 1 is filled with the paste P by repeating this series of operations several times as necessary.

According to this embodiment, when the roller squeegee R separates from the mask M, the second scraper S2
However, the mask M is pressed toward the center of the mask M with respect to the first scraper S1.

As described above, since the mask M is pressed at an appropriate position, lifting of the mask M is surely prevented, and a gap is generated between the green sheet 1 and the mask M unlike the conventional device. There is no. Further, in the present apparatus 10, the lifting of the mask M can be surely prevented without applying a particularly large pressing force to the second scraper S2.

Therefore, the mask M does not crush the land portion L of the paste P and scatter the paste P around the through-hole forming hole 2, which is not an undesirable situation. Therefore, unlike the prior art, it is possible to reliably prevent a short circuit of the conductor circuit due to the adhesion of the adjacent land portions. By the way, according to the conventional method, the minimum diameter of the land portion L is limited to about 0.25 mm, whereas in the present embodiment, the minimum diameter can be set to 0.20 mm.

As described above, since the dispersion of the paste P is eliminated, the paste P can be sufficiently filled even if the formation pitch of the through-hole forming holes 2 is narrower than in the conventional case. Therefore, it is possible to realize a finer substrate than the conventional ceramic substrate.

Further, in this apparatus 10, since the pair of scrapers S1 and S2 are arranged symmetrically with respect to the roller squeegee R, it is possible to fill the paste P in both left and right directions. That is, if the paste P is filled when the roller squeegee R moves to the left, the second scraper S2 functions as a paste scraping squeegee, and the first scraper S1 functions as a mask pressing member.

The present invention is not limited to the above embodiment, but can be modified as follows.
For example, instead of (A) the above embodiment in which the vertical movement of the roller squeegee R and both scrapers S1 and S2 is independently performed, the vertical movements of both scrapers S1 and S2 may be synchronized. In this case, the series of filling operations is as shown in FIGS. 3 (a) to 3 (g). That is, from the initial state of FIG. 3A, the roller squeegee R is moved to the right end of the mask M, and the paste P is filled in the through hole forming hole 2 (FIG. 3B).
reference). Next, both scrapers S1 and S2 are moved down together, and the urethane rubber placed at their tips is masked by the mask M.
Abut the surface (see Fig. 3 (c)).

After that, as shown in FIG. 3D, the roller squeegee R is moved upward to separate the roller 7 from the surface of the mask M. Further, both scrapers S1 and S2 are moved to the left end to return the unfilled paste P to the initial position (see FIG. 3 (e)). After the roller squeegee R is moved downward (see FIG. 3 (f)), both scrapers S1 and S2 are moved upward (see FIG. 3 (g)) to restore the initial state of FIG. 3 (a). ..

The advantage of performing the filling operation as described above is that the switching control of the pressure fluid to each cylinder 11, 12, 13 is simplified. As another method for synchronizing the vertical movements of both scrapers S1 and S2,
For example, using one cylinder, both scrapers S1 and S2
May be moved up and down at the same time. The advantage of this method is that not only the control is simplified, but also mechanically.

(B) Also, one of the scrapers S1 and S
The above embodiment in which 2 functions as a mask pressing member may be modified as follows. For example, the rod 11a of the cylinder 11 may be extended and the tip of the rod 11a may be brought into direct contact with the mask M to function as a mask pressing member.

In this case, it is preferable to provide a wide pressing surface at the tip portion of the rod 11a so that the mask M can be pressed in a wider area. However, the shape and the like may be arbitrary.

(C) The mask pressing member 6 can be arranged at a position different from that of the above embodiment, as shown below. For example, in the paste filling device 20 of another example 1 shown in FIG. 4, the upper edge portion of the mask pressing plate 21 is fixed to the left side of the fixed frame 8 supporting the roller 7. The mask pressing plate 21 is driven independently of the fixed frame 8 by any driving means. As a result, the roller M
The lower end of the mask pressing plate 21 presses the mask M on the center side of.

In the paste filling device 30 of another example 2 shown in FIG. 5, the upper edge portion of the mask pressing plate 31 is fixed to the left side of the first scraper S1 and the lower edge portion is projected to the left side of the roller squeegee R. I am letting you. The mask pressing plate 31 is driven independently of the first scraper S1 by any driving means.

(D) Further, in addition to changing the configuration as in the first and second examples, it is of course possible to install the mask pressing member on the surface plate 5 side. (E) Instead of the roller squeegee R used in the above embodiment, a square squeegee may be adopted.

(F) In addition to the cylinders 11, 12, and 13, a cam mechanism, a belt mechanism, or the like can be used as a driving means for moving the roller squeegee R and both scrapers S1 and S2 up and down. Further, it is of course possible to use these in any combination.

(G) The present invention can be applied to the case where a conductor circuit is pattern-printed on the surface of the green sheet 1. In this case, the line thickening of the circuit pattern can be prevented, so that a finer substrate can be obtained.

(H) Further, the paste filling method and apparatus according to the present invention is not limited to the production of the ceramic substrate.
For example, it can be widely applied in other fields such as the construction field.

[0044]

As described above in detail, according to the method and apparatus for filling a high-viscosity paste of the present invention, even when the paste filling squeegee is separated from the mask, the mask does not lift up. Therefore, there is an excellent effect that it is possible to reliably prevent the paste from scattering in the land portion.

[Brief description of drawings]

FIG. 1 is a partial front sectional view showing a filling device 10 according to a first embodiment.

2 (a) to (i) are schematic explanatory views showing a method of filling a paste P using the apparatus 10 of FIG.

3A to 3G are schematic explanatory views showing another method of filling the paste P using the device 10. FIG.

FIG. 4 is a partial front cross-sectional view showing a paste filling device 20 of another example 1.

FIG. 5 is a partial front cross-sectional view showing a paste filling device 30 of a second example.

FIG. 6 is a partial front cross-sectional view showing a conventional paste filling device 40.

7A to 7C are explanatory views showing problems in the conventional paste P filling method.

[Explanation of symbols]

1 green sheet as a base material, 2 through hole forming holes as minute holes, 5 surface plate, 6 movable block as a support, 21 and 31 mask pressing plate as a mask pressing member, M mask, R paste filling Roller squeegee as squeegee, (first) scraper as S1 paste scraping squeegee, (second) scraper as S2 mask pressing member, and P paste.

Claims (3)

[Claims] 1. A surface plate (5) for closely arranging a mask (M) on a base material (1) having microscopic holes (2), and a support movable relative to the mask (M). High-viscosity paste filling device comprising a body (6), a paste filling squeegee (R) and a paste scraping squeegee (S1) provided on the support (6) and vertically movable independently of each other. A mask which can be moved up and down independently of at least the paste filling squeegee (R) and presses the mask (M) at a position closer to the paste filling squeegee (R) than the paste scraping squeegee (S1). Pressing member (S2, 21, 3
1) The high-viscosity paste filling device characterized by being provided. 2. The mask pressing member (S2) is a paste provided on the support (6) on the side opposite to the paste scraping squeegee (S1) via the paste filling squeegee (R). The filling device for a high-viscosity paste according to claim 1, which is a scraping squeegee. 3. A base material (1) having minute holes (2) and a paste filling squeegee (R) are closely arranged through a mask (M), and the front side of the relative movement direction of the squeegee (R). A method for filling a high-viscosity paste in which the squeegee (R) is moved in the above-mentioned direction with the high-viscosity paste (P) being supplied to the squeegee (R) when the squeegee (R) is separated from the mask (M). A method for filling a high-viscosity paste, characterized in that the mask (M) is pressed on the rear side in the moving direction of.