JPH05335819A - Microwave integrated circuit - Google Patents

Microwave integrated circuit

Info

Publication number
JPH05335819A
JPH05335819A JP13692292A JP13692292A JPH05335819A JP H05335819 A JPH05335819 A JP H05335819A JP 13692292 A JP13692292 A JP 13692292A JP 13692292 A JP13692292 A JP 13692292A JP H05335819 A JPH05335819 A JP H05335819A
Authority
JP
Japan
Prior art keywords
substrate
dielectric
dielectric resonator
support base
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13692292A
Other languages
Japanese (ja)
Inventor
Yoshizumi Kawaoka
良積 河岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP13692292A priority Critical patent/JPH05335819A/en
Publication of JPH05335819A publication Critical patent/JPH05335819A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a microwave integrated circuit able to integrate a frequency adjustment device without losing the internal air-tightness. CONSTITUTION:A dielectric resonator 14 is fitted to a dielectric board 11 via a support base 13 and the entire parts are enclosed by a cover 15 and a base 16. The support base is formed into a hollow cylinder and a tuning screw 19 is inserted from the rear side of the base 16. Thus, the internal circuit is kept in air-tight state.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、誘電体共振器を使用し
たマイクロ波集積回路の共振周波数調整機構に関するも
のである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resonance frequency adjusting mechanism for a microwave integrated circuit using a dielectric resonator.

【0002】[0002]

【従来の技術】一般に誘電体共振器は、空洞共振器、同
軸共振器に比べ、小型、軽量および安価であって、マイ
クロ波集積回路で構成した発振器、フィルタ−等の共振
回路に広く用いられている。誘電体共振器を用いた共振
回路は、図 に示すように、シ−ルド筐体を形成するケ
ース(1)とこのケース(1)の蓋となる基板(2)を
有し、基板(2)上に取り付けた誘電体基板(3)上に
誘電体共振器(4)を支持台(5)を介して取り付け、
誘電体基板(3)上に上記誘電体共振器(4)と磁界結
合するストリップ線路(6)を形成し、各ストリップ線
路(6)に図示せぬ入出力端子を接続したものである。
そして、発振器の場合は、誘電体共振器(4)と各スト
リップ線路(6)との距離で決まる磁界結合強度、およ
び図示せぬマイクロ波半導体素子からストリップ線路
(6)上の誘電体共振器(4)の磁界結合点までの距離
を前記半導体素子の負性抵抗特性に即して発振条件を満
足するように適正に設定すると、誘電体共振器(4)の
共振周波数で発振動作し、発振出力を前記出力端子から
取り出ことができるようになっている。
2. Description of the Related Art Generally, a dielectric resonator is smaller, lighter and cheaper than a cavity resonator and a coaxial resonator, and is widely used in a resonance circuit such as an oscillator and a filter formed by a microwave integrated circuit. ing. As shown in the figure, a resonance circuit using a dielectric resonator has a case (1) that forms a shield case and a substrate (2) that serves as a lid for the case (1). ), The dielectric resonator (4) is mounted on the dielectric substrate (3) mounted on the support substrate (5),
A strip line (6) magnetically coupled to the dielectric resonator (4) is formed on a dielectric substrate (3), and an input / output terminal (not shown) is connected to each strip line (6).
In the case of an oscillator, the magnetic field coupling strength determined by the distance between the dielectric resonator (4) and each strip line (6) and the dielectric resonator on the strip line (6) from a microwave semiconductor element (not shown). When the distance to the magnetic field coupling point of (4) is properly set so as to satisfy the oscillation condition in accordance with the negative resistance characteristic of the semiconductor element, the dielectric resonator (4) oscillates at the resonance frequency, The oscillation output can be taken out from the output terminal.

【0003】このような装置において、前記共振周波数
は、誘電体共振器(4)の寸法誤差、材料の特性ばらつ
きやマイクロストリップ線路(6)と誘電体共振器
(4)との位置関係のずれ、ケース(1)の内壁と誘電
体共振器(4)との位置関係のずれ、あるいは発振器の
場合使用する能動素子の特性のばらつき等によって必ず
しも設計値通りの一定の値が得られない。従って、共振
周波数を連続的に変化させることのできる何らかの機構
が必要になる。
In such a device, the resonance frequency is caused by a dimensional error of the dielectric resonator (4), a variation in material characteristics, and a shift in the positional relationship between the microstrip line (6) and the dielectric resonator (4). However, a constant value as a designed value cannot always be obtained due to a positional shift between the inner wall of the case (1) and the dielectric resonator (4), a variation in characteristics of active elements used in the case of an oscillator, or the like. Therefore, some mechanism that can continuously change the resonance frequency is required.

【0004】このような調整機構としては、例えば特開
昭62−200991号公報に記載されているように、
ケース(1)の天井部分にネジ孔(7)を設けてチュー
ニングスクリュ−(8)をネジ込み、ネジ込む量を変化
させて誘電体共振器(4)とチューニングスクリュー
(8)との距離を変えることにより発振周波数の微調整
を行う機構が採用されている。
Such an adjusting mechanism is disclosed in, for example, Japanese Patent Laid-Open No. 62-200991.
A screw hole (7) is provided in the ceiling part of the case (1) and the tuning screw (8) is screwed in, and the screwing amount is changed to adjust the distance between the dielectric resonator (4) and the tuning screw (8). A mechanism for finely adjusting the oscillation frequency by changing it is adopted.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、ネジ孔
(7)に挿入したチューニングスクリュ−(8)は、そ
れ自体にケース(1)内部を気密封止する作用はない。
そのため、チューニングスクリュ−(8)を設けると内
部の気密性が崩れ、これを補うために内部の素子を改め
て保護する必要が生じる。
However, the tuning screw (8) inserted in the screw hole (7) does not have a function of hermetically sealing the inside of the case (1).
Therefore, when the tuning screw (8) is provided, the airtightness of the inside is lost, and it is necessary to protect the internal element again in order to compensate for this.

【0006】これを行う従来手法として、ストリップ線
路(6)を保護するために表面をAuメッキやグラスコ
ートで被覆したり、能動素子を保護するためにパッケ−
ジ封止品を利用するかボンディング後に樹脂封止する等
の方法があるが、コスト高になる欠点がある。また、周
波数を調整後チュ−ニングスクリュ−(8)取り付け部
分を樹脂封止する方法や、内部回路の調整のみで周波数
を調整しチュ−ニングスクリュ−(8)を廃止する手法
も考えられるが、接続する負荷によっては共振周波数が
変動することがあるため、負荷接続後にも周波数を調整
できる手段が必要になる。
As a conventional method for doing this, the surface is coated with Au plating or glass coat to protect the strip line (6), and the package is used to protect active elements.
There are methods such as using a di-sealed product or resin-sealing after bonding, but there is a drawback that the cost becomes high. Further, a method of adjusting the frequency and then sealing the mounting portion of the tuning screw (8) with a resin, or a method of adjusting the frequency only by adjusting the internal circuit and eliminating the tuning screw (8) are possible. Since the resonance frequency may fluctuate depending on the load to be connected, means for adjusting the frequency is required even after the load is connected.

【0007】[0007]

【課題を解決するための手段】本発明は上述した従来の
課題に鑑み成され、誘電体共振器の支持台を中空の筒状
とし、筒の一方を誘電体共振器に接着して蓋をし、他方
の開口からチュ−ニングスクリュ−を挿入する構成とす
ることにより、内部回路の気密性を崩さない周波数調整
機構を提供するものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the related art, and the supporting base of the dielectric resonator is formed into a hollow cylindrical shape, and one of the cylinders is bonded to the dielectric resonator to form a lid. The tuning screw is inserted from the other opening to provide a frequency adjusting mechanism that does not impair the airtightness of the internal circuit.

【0008】[0008]

【作用】本発明によれば、筒状の支持台(13)の内部
にチュ−ニングスクリュ−(19)を挿入し、支持台
(13)の中空部分を誘電体共振器(14)で密閉する
構成としたので、内部回路が気密状態に保たれる。
According to the present invention, the tuning screw (19) is inserted into the cylindrical support base (13), and the hollow portion of the support base (13) is sealed with the dielectric resonator (14). The internal circuit is kept in an airtight state.

【0009】[0009]

【実施例】以下に本発明の一実施例を図1を参照しなが
ら詳細に説明する。図1を参照して、セラミック等の高
誘電率を有する板厚1.0〜2.0mmの誘電体基板
(11)の表面に、スクリーン印刷によってストリップ
線路(12)を形成し、発振器の場合はGaAsMES
FET等の図示せぬマイクロ波半導体素子をベアチップ
搭載してワイヤボンドする。誘電体基板(11)の中央
付近に中空円筒状の支持台(13)を接着し、支持台
(13)の上にセラミック製の誘電体共振器(14)を
接着してストリップ線路(12)と磁界結合させる。カ
バー(15)は、金属板を底の平らな容器状に加工した
ものであり、開口面以外は完全に密閉されている。この
カバー(15)は、金属製の基板(16)上に取り付け
た誘電体基板(11)を覆うように伏せて設置され、周
端辺をシ−ム溶接で密閉接合される。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to FIG. Referring to FIG. 1, in the case of an oscillator, a strip line (12) is formed by screen printing on the surface of a dielectric substrate (11) having a high dielectric constant such as ceramic and having a plate thickness of 1.0 to 2.0 mm. Is GaAs MES
A microwave semiconductor element (not shown) such as an FET is mounted on a bare chip and wire bonded. A hollow cylindrical support (13) is adhered near the center of the dielectric substrate (11), and a ceramic dielectric resonator (14) is adhered on the support (13) to form a strip line (12). Magnetically coupled with. The cover (15) is made by processing a metal plate into a flat-bottomed container, and is completely sealed except for the opening surface. The cover (15) is installed so as to cover the dielectric substrate (11) mounted on the metal substrate (16), and the peripheral edges are hermetically joined by seam welding.

【0010】支持台(13)の中空内部は、その両端部
を誘電体共振器(14)と誘電体基板(11)に接着す
ることによって、カバー(15)内部とは完全に隔離さ
れている。支持台(13)の中空内部に対応する誘電体
基板(11)には貫通孔(17)が設けられ、さらにこ
れと連続して基板(16)に雌ネジ(18)が切られて
いる。雌ネジ(18)と貫通孔(17)を通して支持台
(13)の内部に導体棒としての金属製のチュ−ニング
スクリュ−(19)が挿入され、チュ−ニングスクリュ
−(19)のネジ込む量を変化させることによりチュ−
ニングスクリュ−(19)の先端と誘電体共振器(1
4)との距離を変えて共振周波数の調整が行えるように
なっている。調整後は、チュ−ニングスクリュ−(1
9)にネジ込まれたナット(20)によってチュ−ニン
グスクリュ−(19)の位置を固定する。(21)はワ
ッシャである図2は、図1の装置を外部回路と接続した
例である。基板(16)の裏面に一体化された取り付け
ネジ(22)がテフロン製などの回路基板(23)の取
り付け穴に挿入され、ワッシャとナット(24)によっ
て装置が固定されている。誘電体基板(11)と基板
(16)を貫通して固定され、誘電体基板(11)表面
のストリップ線路(12)に電気接続された入出力端子
(25)は回路基板(23)の貫通孔に挿入され、回路
基板(23)の表面に形成された別のストリップ線路
(26)に半田付けされている。チュ−ニングスクリュ
−(19)は、回路基板(23)に設けた貫通孔を通し
て突出する。
The hollow inside of the support (13) is completely isolated from the inside of the cover (15) by adhering both ends to the dielectric resonator (14) and the dielectric substrate (11). .. A through hole (17) is provided in the dielectric substrate (11) corresponding to the hollow inside of the support base (13), and a female screw (18) is cut in the substrate (16) continuously with the through hole. A metallic tuning screw (19) as a conductor rod is inserted into the support base (13) through the female screw (18) and the through hole (17), and the tuning screw (19) is screwed in. By changing the amount,
The tip of the screw (19) and the dielectric resonator (1
The resonance frequency can be adjusted by changing the distance from 4). After adjustment, turn the tuning screw (1
The position of the tuning screw (19) is fixed by the nut (20) screwed into 9). (21) is a washer. FIG. 2 is an example in which the device of FIG. 1 is connected to an external circuit. A mounting screw (22) integrated on the back surface of the board (16) is inserted into a mounting hole of a circuit board (23) made of Teflon or the like, and the device is fixed by a washer and a nut (24). The input / output terminals (25) fixed through the dielectric substrate (11) and the substrate (16) and electrically connected to the strip line (12) on the surface of the dielectric substrate (11) penetrate the circuit substrate (23). It is inserted into the hole and soldered to another strip line (26) formed on the surface of the circuit board (23). The tuning screw (19) projects through a through hole provided in the circuit board (23).

【0011】上述のように構成した本願の第1の実施例
によれば、支持台(13)の中空内部にチュ−ニングス
クリュ−(19)を挿入して誘電体共振器(14)とチ
ュ−ニングスクリュ−(19)との距離を変えることに
より共振周波数を調整することができる。一方、支持台
(13)の一端を誘電体共振器(14)で完全に塞ぎ、
他端を誘電体基板(11)に接着してあるので、支持台
(13)の中空内部を外気にさらし、支持台(13)の
外部、つまりケース(15)の内部は外気から遮断でき
る。よって誘電体基板の表面に設置したストリップ線路
(12)とマイクロ波半導体素子等の保護すべき素子を
完全に気密状態に保つことができる。支持台の中空内部
で外気にさらされる誘電体共振器(14)は、特に気密
封止を要するような素子ではない。
According to the first embodiment of the present invention constructed as described above, the tuning screw (19) is inserted into the hollow inside of the support base (13), and the dielectric resonator (14) and the tuner are installed. -The resonance frequency can be adjusted by changing the distance from the screw (19). On the other hand, one end of the support base (13) is completely covered with the dielectric resonator (14),
Since the other end is bonded to the dielectric substrate (11), the hollow inside of the support base (13) is exposed to the outside air, and the outside of the support base (13), that is, the inside of the case (15) can be shielded from the outside air. Therefore, the strip line (12) installed on the surface of the dielectric substrate and the element to be protected such as the microwave semiconductor element can be kept completely in an airtight state. The dielectric resonator (14) that is exposed to the outside air inside the hollow inside of the support is not an element that requires hermetic sealing.

【0012】したがって、本発明の装置は、チュ−ニン
グスクリュ−(19)による周波数可変手段を設けると
同時に、内部素子を気密封止できるものである。また、
チュ−ニングスクリュ−(19)による共振周波数の調
整を、外部回路を接続した状態でも行えるものである。
さらに、外部回路の回路設計を行う場合、回路基板(2
3)を接続した状態で測定と調整を繰り返し、外部回路
のストリップ線路(26)の適正な設計値を割り出すと
いう手段がとられるが、この場合に本願の構成によれ
ば、チュ−ニングスクリュ−(19)と回路基板(2
3)のストリップ線路(26)が同じ方向を向いている
ので、従来例の装置を用いるよりは調整が容易であると
いう利点もある。
Therefore, the device of the present invention is capable of hermetically sealing the internal elements at the same time as providing the frequency varying means by the tuning screw (19). Also,
The tuning frequency (19) can be used to adjust the resonance frequency even when an external circuit is connected.
Furthermore, when designing the circuit of the external circuit, the circuit board (2
3) is connected and measurement and adjustment are repeated to determine an appropriate design value for the strip line (26) of the external circuit. In this case, according to the configuration of the present application, the tuning screw is used. (19) and circuit board (2
Since the strip line (26) of 3) is oriented in the same direction, there is also an advantage that adjustment is easier than using the conventional device.

【0013】尚、上記第1の実施例は基板(16)上に
チュ−ニングスクリュ−( )のナット(20)を設け
る例を説明したが、図3に示すように回路基板(23)
の上にナット(20)を設ける構成としてもよい。
In the first embodiment, the nut (20) of the tuning screw () is provided on the board (16), but as shown in FIG. 3, the circuit board (23) is provided.
The nut (20) may be provided on the upper part.

【0014】[0014]

【発明の効果】以上に説明したとおり、本発明によれ
ば、内部素子の気密性を保持したまま、チュ−ニングス
クリュ−(19)による周波数調整機構を組み込むこと
ができるという利点を有する。
As described above, according to the present invention, there is an advantage that the frequency adjusting mechanism by the tuning screw (19) can be incorporated while maintaining the airtightness of the internal elements.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例を説明するための断面図
である。
FIG. 1 is a sectional view for explaining a first embodiment of the present invention.

【図2】外部回路を接続した状態を説明するための断面
図である。
FIG. 2 is a cross-sectional view for explaining a state in which an external circuit is connected.

【図3】本発明の第2の実施例を説明するための断面図
である。
FIG. 3 is a sectional view for explaining a second embodiment of the present invention.

【図4】従来例を示す断面図である。FIG. 4 is a cross-sectional view showing a conventional example.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】支持台を介して誘電体共振器を取り付け、
この誘電体共振器と結合する共振回路を形成した誘電体
基板を板状の基板上に固着し、前記基板とこの基板に接
合される容器状のカバ−とで前記誘電体基板を内部に密
封したマイクロ波集積回路において、 前記支持台を筒状とし、前記支持台の一方の開口部が前
記誘電体共振器によって密閉され、他方の開口部に対応
する前記誘電体基板と前記基板に貫通孔が設けられ、こ
の貫通孔から前記支持体の内部に前記誘電体共振器との
距離を調整可能なる導体棒を挿入したことを特徴とする
マイクロ波集積回路。
1. A dielectric resonator is attached via a support base,
A dielectric substrate having a resonant circuit coupled to this dielectric resonator is fixed on a plate-shaped substrate, and the dielectric substrate is sealed inside by the substrate and a container-shaped cover bonded to the substrate. In the microwave integrated circuit described above, the support base has a cylindrical shape, one opening of the support base is sealed by the dielectric resonator, and the dielectric substrate corresponding to the other opening and the through hole in the substrate. And a conductor rod capable of adjusting a distance from the dielectric resonator is inserted into the support through the through hole.
【請求項2】前記導体棒は雄ネジであり、雌ネジが前記
誘電体基板に固着されていることを特徴とするマイクロ
波集積回路。
2. The microwave integrated circuit according to claim 2, wherein the conductor rod is a male screw, and a female screw is fixed to the dielectric substrate.
JP13692292A 1992-05-28 1992-05-28 Microwave integrated circuit Pending JPH05335819A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13692292A JPH05335819A (en) 1992-05-28 1992-05-28 Microwave integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13692292A JPH05335819A (en) 1992-05-28 1992-05-28 Microwave integrated circuit

Publications (1)

Publication Number Publication Date
JPH05335819A true JPH05335819A (en) 1993-12-17

Family

ID=15186715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13692292A Pending JPH05335819A (en) 1992-05-28 1992-05-28 Microwave integrated circuit

Country Status (1)

Country Link
JP (1) JPH05335819A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3713011A4 (en) * 2017-12-29 2020-11-25 Huawei Technologies Co., Ltd. Cavity filter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3713011A4 (en) * 2017-12-29 2020-11-25 Huawei Technologies Co., Ltd. Cavity filter
US11196136B2 (en) 2017-12-29 2021-12-07 Huawei Technologies Co., Ltd. Cavity filter

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