JPH0533474B2 - - Google Patents

Info

Publication number
JPH0533474B2
JPH0533474B2 JP4231484A JP4231484A JPH0533474B2 JP H0533474 B2 JPH0533474 B2 JP H0533474B2 JP 4231484 A JP4231484 A JP 4231484A JP 4231484 A JP4231484 A JP 4231484A JP H0533474 B2 JPH0533474 B2 JP H0533474B2
Authority
JP
Japan
Prior art keywords
slider
negative pressure
positive pressure
pressure generating
yaw angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4231484A
Other languages
Japanese (ja)
Other versions
JPS60187980A (en
Inventor
Norio Tagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4231484A priority Critical patent/JPS60187980A/en
Publication of JPS60187980A publication Critical patent/JPS60187980A/en
Publication of JPH0533474B2 publication Critical patent/JPH0533474B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00Head arrangements not specific to the method of recording or reproducing
    • G11B21/16Supporting the heads; Supporting the sockets for plug-in heads
    • G11B21/20Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier
    • G11B21/21Supporting the heads; Supporting the sockets for plug-in heads while the head is in operative position but stationary or permitting minor movements to follow irregularities in surface of record carrier with provision for maintaining desired spacing of head from record carrier, e.g. fluid-dynamic spacing, slider

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は負圧利用浮動ヘツドスライダに関し、
特にリジツド型の磁気デイスク装置に用いられる
超微小隙間で浮上する負圧利用浮動ヘツドスライ
ダに関するものである。
[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a floating head slider using negative pressure.
In particular, the present invention relates to a floating head slider using negative pressure that floats in an ultra-small gap used in a rigid magnetic disk device.

(従来技術とその問題点) 磁気デイスク装置用の浮動ヘツドスライダ(以
下単にスライダと記す)は装置の大容量化につれ
て浮揚量微小化の歩みもはやく、現在では空気の
分子平均自由行程の数倍程度のレベルまで微小化
されている。これまでに実用化されているスライ
ダは、周知のごとく、軽荷重で動的追従性の良好
なテーパードフラツト型の動圧気体軸受面を有す
る双胴形の正圧スライダである。しかしこの正圧
スライダはその空気膜剛性が押圧力にほぼ比例す
るため、コンタクトスタートストツプ方式を採用
しているスライダにおいてはその剛性を高めるこ
とにはある程度の限度がある。なぜなら押圧力を
高めることはスライダの面圧を大きくすることに
なるので、記録媒体と接触摺動する際の摩耗が問
題となるからである。このような点を克服するた
め、最近次世代のスライダとしてスライダの空気
膜潤滑面内にフオトリソグラフイ技術を使つて微
小なリセス面を設け、そこで負圧を発生させる負
圧利用浮動ヘツドスライダ(以下簡単に負圧スラ
イダと記す)が盛んに研究されている。この負圧
スライダは(1)正圧と負圧とのプツシユプル作用で
軽荷重でありながら高剛性の空気膜がえられるこ
と、(2)スライダの媒体周速度に対するスライダ浮
揚量変動が小さいことなどの長所をもつており、
将来の薄膜媒体を用いた大容量磁気デイスク装置
用のスライダとして最も有望である。
(Prior art and its problems) As the capacity of the floating head slider (hereinafter simply referred to as slider) for magnetic disk devices increases, the amount of floating head is becoming smaller and smaller, and currently it is several times the mean free path of a molecule of air. It has been miniaturized to a certain level. As is well known, the sliders that have been put into practical use so far are twin-barrel positive pressure sliders that have a tapered flat type dynamic pressure gas bearing surface that has a light load and good dynamic followability. However, since the air film rigidity of this positive pressure slider is approximately proportional to the pressing force, there is a certain limit to increasing the rigidity of the slider adopting the contact start/stop method. This is because increasing the pressing force increases the surface pressure of the slider, which poses a problem of wear during sliding contact with the recording medium. In order to overcome these problems, we have recently developed a next-generation slider, a floating head slider that utilizes negative pressure, which uses photolithography technology to create minute recesses within the air film lubricated surface of the slider to generate negative pressure. (hereinafter simply referred to as negative pressure sliders) are being actively researched. This negative pressure slider has the following features: (1) A highly rigid air film can be obtained despite a light load due to the push-pull action of positive pressure and negative pressure, and (2) Fluctuations in slider floating amount with respect to the slider's peripheral speed are small. It has the advantages of
This is the most promising slider for future large-capacity magnetic disk drives using thin-film media.

第1図a,bはそれぞれ従来提案されている負
圧スライダーの一例を示す正面図、、側面図であ
る。同図において、参照符号1は正圧発生面、参
照符号2はクロスレール面、参照符号3は正圧発
生面に設けたリセス溝部、参照符号4は負圧を発
生させるリバースステツプ面、参照符号5はスラ
イダ前縁のテーパ部に設けたリセス溝部である。
負圧スライダのコンタクトスタートストツプ時に
記録媒体との接触を防ぐため、クロスレール面2
にエツチングが施されており、正圧発生面1と段
差がつけられ同一平面上となつていないのが特徴
である。また記録媒体面のフラツタなどに対して
安定な浮揚特性を得るために正圧発生面1にもリ
セス溝部5を設けていることも特徴である。すな
わち負圧スライダの正圧発生分布をスライダ空気
流入端および空気流出端で高くし、スライダを4
点で支持するような形にするためである。従つて
この負圧スライダは静的にも動的にも極めて安定
に浮揚することになる。
FIGS. 1a and 1b are a front view and a side view, respectively, showing an example of a conventionally proposed negative pressure slider. In the figure, reference numeral 1 is a positive pressure generating surface, reference numeral 2 is a cross rail surface, reference numeral 3 is a recess groove provided on the positive pressure generating surface, and reference numeral 4 is a reverse step surface that generates negative pressure, reference numeral 4 is a reverse step surface that generates negative pressure. Reference numeral 5 denotes a recess groove provided in the tapered portion of the front edge of the slider.
In order to prevent the negative pressure slider from contacting the recording medium during contact start and stop, the cross rail surface 2
It is characterized in that it is etched and has a step with the positive pressure generating surface 1, so that it is not on the same plane. Another feature is that a recess groove 5 is also provided on the positive pressure generating surface 1 in order to obtain stable flotation characteristics against flutters on the recording medium surface. In other words, the positive pressure generation distribution of the negative pressure slider is made high at the slider air inflow end and air outflow end, and the slider is
This is to give it a shape that supports it at points. Therefore, this negative pressure slider floats extremely stably both statically and dynamically.

次に、最近OA用機器のフアイルとして小型大
容量磁気デイスク装置の開発が盛んである。例え
ば3.5インチあるいは5インチなどの小径の記録
媒体を用いるものである。このような装置形態に
おいて記録媒体の走行速度が大きくとれないの
で、低速度領域ですばやく境界潤滑領域から流体
潤滑領域に遷移する負圧スライダが有効である。
しかし一方ではそのような小形磁気デイスク装置
においては機構の信頼性を高めかつ低コスト化を
はかるため、回転形アクチユエイタが良く採用さ
れる。該回転形アクチユエイタの場合磁気ヘツド
にはアジマス角が付与されるため、浮動ヘツドス
ライダにはいわするヨー角が存在し、スライダに
対して潤滑気体が斜め流として流入することにな
る。従つて電磁変換特性の観点から負圧スライダ
を採用した場合もその浮揚量はヨー角に依存しな
いようにする必要がある。ところが第1図に示し
た負圧スライダでは、このヨー角に対して浮揚量
の減少が著しいという欠点がある。つまりヨー角
が大きくなると、負圧スライダで発生する正の負
荷容量が大幅に減少すると同時に、負の負荷容量
すなわち吸引力も若干増加するので、その相乗効
果で従来の正圧スライダに比較して大きく浮揚量
が減少することになる。従つて回転形アクチユエ
イタを採用している磁気デイスク装置に負圧スラ
イダを磁気ヘツドとして搭載すると、その機械的
信頼性よおび電磁変換特性に大きな問題が生じる
ことになる。
Next, recently there has been an active development of small, large-capacity magnetic disk devices as files for OA equipment. For example, a small diameter recording medium such as 3.5 inches or 5 inches is used. In this type of device, the running speed of the recording medium cannot be high, so a negative pressure slider that quickly transitions from the boundary lubrication region to the fluid lubrication region in the low speed region is effective.
On the other hand, however, rotary actuators are often employed in such small magnetic disk devices in order to increase the reliability of the mechanism and reduce costs. In the case of the rotary actuator, since the magnetic head is given an azimuth angle, the floating head slider has a so-called yaw angle, and the lubricating gas flows into the slider as an oblique flow. Therefore, from the viewpoint of electromagnetic conversion characteristics, even when a negative pressure slider is employed, it is necessary to ensure that its floating amount does not depend on the yaw angle. However, the negative pressure slider shown in FIG. 1 has a drawback in that the amount of levitation decreases significantly with respect to this yaw angle. In other words, as the yaw angle increases, the positive load capacity generated by the negative pressure slider is significantly reduced, and at the same time, the negative load capacity, that is, the suction force, also increases slightly. The amount of buoyancy will decrease. Therefore, if a negative pressure slider is mounted as a magnetic head in a magnetic disk device that employs a rotary actuator, major problems will arise in its mechanical reliability and electromagnetic conversion characteristics.

(発明の目的) 本発明は上記負圧スライダの持つている欠点を
解消するためになされたもので、その目的はヨー
角が記録媒体上で変化しても浮揚量の変動が小さ
くなるような負圧スライダを提供することにあ
る。
(Object of the Invention) The present invention has been made in order to eliminate the drawbacks of the negative pressure slider described above, and its purpose is to reduce fluctuations in the amount of lift even if the yaw angle changes on the recording medium. The purpose of the present invention is to provide a negative pressure slider.

(発明の構成) 本発明によれば、1対の正圧発生面と、その面
に設けたリセス溝部と、前記正圧発生面と段差を
有し該正圧発生面と同一平面上にないクロスレー
ル面と、空気流出部に前記正圧発生面と前記クロ
スレール面とで囲まれた逆ステツプ状のリセス部
を有する負圧利用浮動ヘツドスライダにおいて、
前記正圧発生面に設けたリセス溝部はその幅が空
気流入側から空気流出側に行くにつれ狭くなる末
狭まりな形状を有することを特徴とする負圧利用
浮動ヘツドスライダが得られる。
(Structure of the Invention) According to the present invention, a pair of positive pressure generating surfaces, a recess groove portion provided on the surfaces, and a step having a step with the positive pressure generating surfaces are not on the same plane as the positive pressure generating surfaces. A negative pressure floating head slider having a cross rail surface and a reverse step-shaped recess portion surrounded by the positive pressure generating surface and the cross rail surface in the air outflow portion,
A floating head slider utilizing negative pressure is obtained, wherein the recess groove provided in the positive pressure generating surface has a shape in which the width thereof becomes narrower as it goes from the air inflow side to the air outflow side.

(実施例) 以下第2図、第3図を用いて本発明について詳
細に説明する。
(Example) The present invention will be described in detail below with reference to FIGS. 2 and 3.

第2図a,bはそれぞれ本発明の負圧スライダ
の一実施例を示す平面図、側面図である。本実施
例は1対の正圧発生面1aに設けたリセス溝部3
aの溝部をスライダ長手方向に向つて可変なもの
とし、かつ空気流入端の方にあるリセス溝幅より
も空気流出端の方にある幅を小さくし、空気の流
れ方向に末狭まりの形状にしたものである。なお
クロスレース面2a、リバースステツプ面4a、
テーパ部に設けたリセス溝部5aはそれぞれ第1
図a,bに示したクロスレール面2、リバースス
テツプ面4、テーパ部に設けたリセス溝部5に対
応する。
FIGS. 2a and 2b are a plan view and a side view, respectively, showing an embodiment of the negative pressure slider of the present invention. In this embodiment, a recess groove 3 provided on a pair of positive pressure generating surfaces 1a is used.
The groove part a is variable in the longitudinal direction of the slider, and the width of the recess groove at the air outflow end is smaller than the width at the air inflow end, so that the recess groove width is narrower at the end in the air flow direction. This is what I did. Note that the cross race surface 2a, reverse step surface 4a,
The recess groove portions 5a provided in the tapered portion are each
This corresponds to the cross rail surface 2, reverse step surface 4, and recess groove portion 5 provided in the tapered portion shown in Figures a and b.

負圧スライダは、周知のごとく、記録媒体の走
行速度に対する浮き上がり特性が良好なため、コ
ンタクトスタートストツプ特性上からは小形磁気
デイスク装置に適している。しかし回転形アクチ
ユエイタを用いた小形磁気デイスク装置に対して
も良好な浮揚特性を示すかどうかを調べる必要が
ある。すなわちこのことは負圧スライダのヨー角
による浮揚量変動を明らかにすることを意味す
る。そこで第1図に示す負圧スライダに対してそ
の浮揚特性に及ぼすヨー角の影響を調べた。調査
方法はサブミクロン領域の浮揚量で作動する浮動
ヘツドスライダの浮揚特性を支配する修正レイノ
ルズ方程式を有限要素法などの手法により数値的
に解くことにより行つた。第3図はその計算結果
で、ヨー角による正圧スライダ、負圧スライダの
浮揚量減少を示す図である。同図において、縦軸
は最小浮揚量減少率(ヨー角がついたときの浮揚
量hmφとヨー角が零のときの浮揚量hm0との比)
を示している。同図から負圧スタイダの場合、こ
れまですでに実用化されているウインチエスタ形
の正圧スライダに比較してヨー角による最小浮揚
量減少が大きいことがわかる。すなわちこのこと
は負圧スライダの方がヨー角による浮揚量変動が
大きいことを示しており、回転形アクチユエイタ
を用いた装置に負圧スライダを搭載する場合には
その機械的信頼性が大きな問題となることがわか
る。この負圧スライダが従来の正圧スライダに比
して大きく浮揚量が減少する原因は、物理的には
正の負荷容量が大幅に減少するということと、負
圧の負荷容量がヨー角による若干増加するという
2つの効果による起こることである。しかし主た
る要因は、正の負荷容量の大幅な減少にあり、ヨ
ー角によるスライダ正圧力分布の変化をみると、
スライダトレーリングエツジ部で発生する正の動
圧が大きく降下している。従つてその圧力降下が
負荷容量減少の源になつている。これはヨー角に
より実効的にスライダトレーリングエツジ部のく
さび効果が減少し、またスライダの正圧発生面幅
が狭くなつたことに対応するものである。そのた
めこのトレーリングエツジ部での動圧降下を防ぐ
ためには、その部分の軸受面幅を広くすることが
必要となる。
As is well known, the negative pressure slider has good lifting characteristics with respect to the running speed of the recording medium, so it is suitable for small magnetic disk drives from the viewpoint of contact start/stop characteristics. However, it is necessary to investigate whether a small magnetic disk device using a rotary actuator exhibits good levitation characteristics. In other words, this means clarifying the fluctuation in the amount of levitation due to the yaw angle of the negative pressure slider. Therefore, the influence of the yaw angle on the levitation characteristics of the negative pressure slider shown in FIG. 1 was investigated. The investigation method was carried out by numerically solving the modified Reynolds equation, which governs the levitation characteristics of a floating head slider operating at a levitation amount in the submicron range, using techniques such as the finite element method. FIG. 3 is a diagram showing the calculation result, which shows the decrease in the floating amount of the positive pressure slider and the negative pressure slider depending on the yaw angle. In the figure, the vertical axis is the minimum levitation reduction rate (the ratio of the levitation amount hmφ when the yaw angle is set to the levitation amount hm0 when the yaw angle is zero)
It shows. From the figure, it can be seen that in the case of the negative pressure slider, the minimum lift amount decreases due to the yaw angle more than in the winch-estor type positive pressure slider that has already been put into practical use. In other words, this shows that the negative pressure slider has a larger fluctuation in the amount of levitation due to the yaw angle, and when a negative pressure slider is installed in a device using a rotary actuator, its mechanical reliability is a major problem. I know what will happen. The reason why the floating amount of this negative pressure slider is greatly reduced compared to the conventional positive pressure slider is that physically, the positive load capacity is significantly reduced, and the negative pressure load capacity is slightly affected by the yaw angle. This happens due to two effects: However, the main factor is a significant decrease in the positive load capacity, and looking at the change in the slider positive pressure distribution depending on the yaw angle,
The positive dynamic pressure generated at the slider trailing edge has dropped significantly. Therefore, the pressure drop becomes a source of load capacity reduction. This corresponds to the fact that the wedge effect of the slider trailing edge portion is effectively reduced by the yaw angle, and the width of the positive pressure generating surface of the slider is narrowed. Therefore, in order to prevent a drop in dynamic pressure at this trailing edge portion, it is necessary to widen the width of the bearing surface at that portion.

本実施例では、正圧発生面1aにあるリセス溝
部3aが空気流出端に行くにしたがい狭くなつて
いるので、実効的に正圧発生面幅が末広がりの形
状をもつていることと等価となる。従つて潤滑気
体が2次元的な斜め流としてスライダ面に流入し
たとしても、トレーリングエツジ部の大幅な動圧
降下はみられないものとなる。またヨー角による
負圧の変動は若干増加するもののほとんど一定で
あるため、結果的に従来の負圧スライダよりもヨ
ー角によるその負荷容量変動は小さいものとな
る。それ故回転形アクチユエイタを用いている磁
気デイスク装置において、負圧スライダに対して
記録媒体面上でそれぞれ異つたヨー角が付与され
たとしても浮揚量変動の小さい安定した浮揚特性
が得られることになる。
In this embodiment, the recess groove 3a in the positive pressure generating surface 1a becomes narrower toward the air outlet end, so this is effectively equivalent to having a shape in which the width of the positive pressure generating surface widens toward the end. . Therefore, even if the lubricating gas flows into the slider surface as a two-dimensional oblique flow, no significant drop in dynamic pressure at the trailing edge portion will be observed. Further, since the negative pressure fluctuation due to the yaw angle is almost constant although it increases slightly, the load capacity fluctuation due to the yaw angle is consequently smaller than that of the conventional negative pressure slider. Therefore, in a magnetic disk device using a rotary actuator, stable levitation characteristics with small fluctuations in levitation amount can be obtained even if different yaw angles are applied to the negative pressure slider on the surface of the recording medium. Become.

さらに本実施例では、正圧発生面1aの幅自体
は変化させていないので、負圧発生面であるリバ
ースステツプ面4aを十分広く設計することがで
きる。従つて十分な負圧を発生させることも可能
であり、非常に高い空気膜剛性をきわめて軽荷重
で得ることができるという効果もある。
Furthermore, in this embodiment, since the width of the positive pressure generating surface 1a itself is not changed, the reverse step surface 4a, which is the negative pressure generating surface, can be designed to be sufficiently wide. Therefore, it is also possible to generate sufficient negative pressure, and there is also the effect that extremely high air film rigidity can be obtained with an extremely light load.

なお本発明の思想を逸脱しない範囲内でどのよ
うな変形を行つても差支えなく、例えばリセス溝
部の末狭まりの割合や正圧発生面の形状はそれぞ
れの場合で最適化すれば良く、上記実施例が本発
明の範囲を何ら限定するものではないことはいう
までもない。
Note that any modification may be made without departing from the spirit of the present invention; for example, the rate of narrowing at the end of the recess groove and the shape of the positive pressure generating surface may be optimized in each case; It goes without saying that the examples do not limit the scope of the invention in any way.

(発明の効果) 以上詳細に説明したように本発明の負圧スライ
ダは、1対の正圧発生面に設けたリセス溝部の幅
を空気流入端から空気流出端に向かつて末狭まり
の形状にすることにより実効的に正圧発生面幅が
空気流出端に向かつて広くなつていくことになる
ので、正圧の降下が大幅に緩和され、従つてヨー
角による浮揚量減少が抑制される。また負圧発生
面であるリバースステツプ面の形状を変えていな
いので、負圧のヨー角による変動も少なく極めて
安定な浮揚特性を得ることができるという効果が
ある。
(Effects of the Invention) As described in detail above, in the negative pressure slider of the present invention, the width of the recess grooves provided on the pair of positive pressure generating surfaces is narrowed from the air inflow end toward the air outflow end. As a result, the width of the positive pressure generating surface becomes effectively wider toward the air outflow end, so that the drop in positive pressure is significantly alleviated, and therefore the decrease in the amount of levitation due to the yaw angle is suppressed. Furthermore, since the shape of the reverse step surface, which is the negative pressure generating surface, is not changed, there is an effect that extremely stable levitation characteristics can be obtained with little variation in negative pressure due to the yaw angle.

【図面の簡単な説明】[Brief explanation of drawings]

第1図a,bはそれぞれ従来提案されている負
圧スライダの一例を示す正面図、側面図、第2図
a,bはそれぞれ本発明の負圧スライダの一実施
例を示す正面図、側面図および第3図はヨー角に
よる正圧スライダ、負圧スライダの浮揚量減少を
示す図である。 図において、1,1a……正圧発生面、2,2
a……クロスレール面、3,3a……正圧発生面
に設けたリセス溝部、4,4a……リバースステ
ツプ面、5,5a……テーパ面に設けたリセス溝
部。
1A and 1B are a front view and a side view, respectively, showing an example of a conventionally proposed negative pressure slider, and FIGS. 2A and 2B are a front view and a side view, respectively, showing an embodiment of the negative pressure slider of the present invention. The figure and FIG. 3 are diagrams showing a reduction in the floating amount of the positive pressure slider and the negative pressure slider depending on the yaw angle. In the figure, 1, 1a... Positive pressure generating surface, 2, 2
a... Cross rail surface, 3, 3a... Recess groove provided on the positive pressure generating surface, 4, 4a... Reverse step surface, 5, 5a... Recess groove provided on the tapered surface.

Claims (1)

【特許請求の範囲】[Claims] 1 1対の正圧発生面と、その面に設けたリセス
溝部と、前記正圧発生面と段差を有し該正圧発生
面と同一平面上にないクロスレール面と、空気流
出部に前記正圧発生面と前記クロスレール面とで
囲まれた逆ステツプ状のリセス部を有する負圧利
用浮動ヘツドスライダにおいて、前記正圧発生面
に設けたリセス溝部はその幅が空気流入側から空
気流出側に行くにつれ狭くなる末狭まりな形状を
有することを特徴とする負圧利用浮動ヘツドスラ
イダ。
1 A pair of positive pressure generating surfaces, a recess groove provided on the surfaces, a cross rail surface having a step with the positive pressure generating surface and not on the same plane as the positive pressure generating surface, and a In a negative pressure floating head slider having a reverse step-shaped recess surrounded by a positive pressure generating surface and the cross rail surface, the recess groove provided in the positive pressure generating surface has a width that varies from the air inflow side to the air outflow side. A floating head slider utilizing negative pressure, characterized in that it has a shape that becomes narrower toward the side.
JP4231484A 1984-03-06 1984-03-06 Floating head slider using negative pressure Granted JPS60187980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4231484A JPS60187980A (en) 1984-03-06 1984-03-06 Floating head slider using negative pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4231484A JPS60187980A (en) 1984-03-06 1984-03-06 Floating head slider using negative pressure

Publications (2)

Publication Number Publication Date
JPS60187980A JPS60187980A (en) 1985-09-25
JPH0533474B2 true JPH0533474B2 (en) 1993-05-19

Family

ID=12632554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4231484A Granted JPS60187980A (en) 1984-03-06 1984-03-06 Floating head slider using negative pressure

Country Status (1)

Country Link
JP (1) JPS60187980A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62189685A (en) * 1986-02-17 1987-08-19 Nec Corp Negative pressure floating head slider
JP3642821B2 (en) * 1995-03-17 2005-04-27 富士通株式会社 Magnetic head slider
KR100555451B1 (en) * 1998-08-18 2006-04-21 삼성전자주식회사 Magnetic head of a hard disk drive

Also Published As

Publication number Publication date
JPS60187980A (en) 1985-09-25

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