JPH05333250A - Carrier holding structure for optical parts aligning device - Google Patents

Abstract

PURPOSE:To hold a carrier without damaging the carrier by applying a combined pressure by a sucking force and a pressing plate pressure. CONSTITUTION:The structure is constituted of a horizontal reference surface 36 and a vertical reference surface 35 vertical to the horizontal reference surface 36, and a corner with which the carrier is in contact is formed on both reference surfaces, and a vacuum sucking hole 37 having one open end on the corner of the horizontal reference surface 36 and the vertical reference surface 35 is formed on an L-shaped carrier holding table 38. A leaf spring type pressing plate 39 having one end part which is arranged keeping a distance from the upper surface of the carrier 32 arranged in contact with the corner is attached with the L-shaped carrier holding table 38, one end of a piston 40 is engaged with the pressing plate 39, and the piston 40 is stored in a cylinder which is communicated with the vacuum sucking hole 37, and the piston 40 is pulled by vacuum sucking, so that the carrier 32 is pressed on the L-shaped carrier holding table 38 by use of the pressing plate 39.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, an optical IC used for optical communication and optical information processing and an optical fiber held by a carrier, which are bonded and fixed with their optical axes aligned, or a laser diode, a photodiode and a carrier. Used for an optical component aligning device that adheres and fixes the held optical fiber by aligning the optical axes, and holds a carrier that holds the optical fiber by the optical component aligning device. It is about structure.

[0002]

2. Description of the Related Art In order to align the optical axes of an optical component and an optical fiber held by a carrier, it is necessary to have high measurement accuracy and positioning accuracy because the diameter of the optical fiber held by the carrier is small. In general, a microscope is used as the measuring means and a stage with a micrometer is used as the positioning means. The optical axis positions of the optical component and the optical fiber held by the carrier are set in the X-axis direction, the Y-axis direction, and the Z-axis direction.
In order to match the three axial directions, the optical device aligning device having the configuration shown in FIG. 2 has been conventionally used. Figure 2
Shows the case where the optical axes of the optical fibers held by the carriers are aligned at the input and output ends of the optical IC.

Stages 2 and 3 which are movable in the X-axis direction are installed on a base 1, and the stages 2 and 3 are highly accurate in the three directions of the X-axis direction, the Y-axis direction and the Z-axis direction, respectively. The movable aligning stages 4 and 5 are mounted. A fixed base 6 on which the optical IC 21 is installed is installed on the base 1 between the stage 2 and the stage 3.
The heights of the fixed base 6 and the centering stages 4 and 5 from the base 1 are set to be substantially equal. Optical fibers 22 and 2 held by carriers on the aligning stages 4 and 5, respectively.
3 is installed.

The plane image microscope 7 observes the optical IC 21 installed on the fixed table 6 and the optical fiber 22 (23) held by the carrier installed on the alignment stage 4 (5) from the Y-axis direction. is there. A stage 8 movable in the X-axis direction is installed on the base 1, a stage 9 movable in the Y-axis direction is mounted on the stage 8, and a microscope 7 is attached to the stage 9. The image of the microscope 7 is captured by the video camera 10 attached to the microscope 7 and displayed on the monitor 11 as an image.

The side image microscope 12 observes the optical IC 21 and the optical fiber 22 (23) held by the carrier from the Z-axis direction. A stage 13 movable in the Z-axis direction is added to a stage movable in the X-axis direction (not shown).
Is mounted, and the microscope 12 is attached to the stage 13. The image of the microscope 12 is captured by the video camera 14 attached to the microscope 12 and displayed as an image on a monitor (not shown).

The distances in the X-axis direction and the Y-axis direction between the optical IC 21 and the optical fiber 22 (23) held by the carrier are read from the monitor image of the microscope 7 and the monitor image of the microscope 12, and the read distances are read. The aligning stage 4 (5) is moved based on the above, and the optical axes of the optical IC 21 and the optical fiber 22 (23) held by the carrier are aligned. Figures 3 and 4
The conventional carrier holding structure is shown in FIG. In the conventional carrier holding structure shown in FIG. 3, the upper surface 3 of the carrier holding base 30 is
4, a part of the tip of the carrier 32 holding the optical fiber 31 is arranged so as to project from one side of the edge of the other set, in parallel to the edge of the other set of 4 and substantially in the center between them. A substantially central portion of the carrier fixing plate 33 is superposed on the upper surface of the carrier fixing plate 33, and both ends of the carrier fixing plate 33 are fixed to the upper surface of the carrier holding base 30 by using carrier fixing screws 34.

In another conventional carrier holding structure shown in FIG. 4, the optical fiber 3 near the corner where the vertical reference plane 35 and the horizontal reference plane 36 of the L-shaped carrier holding base 38 intersect.
A carrier holding table 38 is provided with a vacuum suction hole 37 having one end opened on both surfaces of a portion which is in contact with the carrier 32 holding 1. Carrier 32 holding optical fiber 31
Has a part of its tip protruding from the L-shaped carrier holding table 38, and is brought into contact with both sides of this corner so as to close the vacuum suction hole 37, and is pulled by a vacuum through the vacuum suction hole 37. It is held at a corner on the letter-shaped carrier holding table 38.

[0008]

As described above, in the conventional carrier holding structure shown in FIG.
Since No. 2 is fixed on the carrier holding base 30 by screwing, the carrier 32 or the optical component may be damaged if the optical component bonded and fixed to the carrier 32 comes into contact during alignment. Further, in this structure, since only the upper surface 34 is provided as the reference surface used at the time of centering, it is necessary to perform alignment including rotation in the direction of the thick arrow around the axis perpendicular to the upper surface 34, and workability is improved. It had the drawback of being bad.

Further, in another conventional carrier holding structure shown in FIG. 4, since two reference planes, a vertical reference plane 35 and a horizontal reference plane 36, are provided as reference planes used at the time of centering, The workability of the alignment is good, and even if the carrier 32 and the optical component that is adhesively fixed come into contact with each other, the suction holding force of the carrier 32 due to the evacuation is relatively weak due to the size of the vacuum suction hole 37 and the vacuum arrival speed. Since the carrier 32 can escape in the direction opposite to the optical component, the carrier 32 or the optical component is not damaged. However, the fact that "the suction holding force of the carrier 32 by vacuuming is relatively weak" is
Conversely speaking, it also means that the adhesive layer used at the adhesive interface when the end face of the carrier 32 and the optical component are adhered and fixed cannot be completely compressed, resulting in poor adhesion.

An object of the present invention is to provide a carrier holding structure which takes advantage of the conventional advantages and eliminates the drawbacks, has good workability in alignment, does not damage the carrier and optical parts, and avoids adhesion failure. is there.

[0011]

According to the present invention, an L-shaped carrier holding base is used for a carrier in an aligning device for aligning the optical axes of an optical fiber and an optical component held by the carrier and adhering and fixing them to each other. In the carrier holding structure of the optical device aligning device, the L-shaped carrier holding table is composed of a horizontal reference plane and a vertical reference plane perpendicular to the horizontal reference plane. A corner to be contacted is formed, and a vacuum suction hole having one end opened to the horizontal reference surface and the vertical reference surface of the corner is formed on the L-shaped carrier holding table, and the upper surface of the carrier arranged in contact with the corner is formed. One end of the holding member is opposed to the upper surface of the carrier and is biased in a direction away from the upper surface of the carrier. The holding piece is attached to the L-shaped carrier holding base, one end of the piston is engaged with the holding piece, and the piston is vacuumed. Housed in Chakuana and communicated with the cylinder, be pressing the carrier in the piston is pulled pressing piece by vacuuming the L-shaped carrier holder is to be able to.

[0012]

As described above, in the carrier holding structure of the present invention, the carrier is vacuum-adsorbed on the L-shaped carrier holding table provided at the corners of the horizontal reference surface and the vertical reference surface of the L-shaped carrier holding table. It is held by the suction force of the vacuum suction through the hole and is housed in a cylinder that communicates with the vacuum suction hole, is attached to one end of the piston that is pulled by the vacuum suction, and is pressed by a pressing piece that is biased away from the top surface of the carrier. Be done.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will now be described with reference to the drawings. The carrier holding structure of this invention is shown in FIG.
A carrier in an aligning device (not shown) in which an optical fiber 31 held by a carrier 32 and an optical component (not shown in the figure) are aligned with respect to their optical axes and are fixed to each other by adhesive bonding. In the carrier holding structure of the optical device aligning device (not shown) for holding 32 to the L-shaped carrier holding base 38, the L-shaped carrier holding base 38
Above the horizontal reference plane 36 and the vertical reference plane 3 perpendicular to it.
5, the corners on which the carrier is abutted are formed on both reference surfaces, and the vacuum suction holes 37 having one end opened to the horizontal reference surface 36 and the vertical reference surface 35 of the corners are L-shaped. A leaf spring type pressing piece 39 formed on the carrier holding base 38 and having one end opposed to the upper surface of the carrier 32 arranged in contact with this corner is attached to the L-shaped carrier holding base 38 to hold it. One end of a piston 40 is engaged with the substantially central portion of the piece 39, and the piston 40 is housed in a cylinder 41 that communicates with the vacuum suction hole 37. The piston 40 is pulled by vacuuming and the carrier 32 is held by the holding piece 39. Can be pressed against the L-shaped carrier holding table 38.

FIG. 1B shows a state before the vacuum suction holes 37 are evacuated. A holding piece 39 is disposed so as to face the upper surface 43 of the protruding portion 38a having the vertical reference surface 35 of the carrier holding table 38 on one side surface, and one end of the holding piece 39 is opposite to the vertical reference surface 35 of the protruding portion 38a. The side surface is bent so as to be in contact with the side surface to form a fixed portion 39a.
a is fixed to the carrier holding base 38 with a screw 44. The pressing piece 39 is extended in the direction of the vertical reference plane 35 from the position of the fixed portion 39a so as to be gradually separated from the upper surface 43 of the protrusion 38a, and is stepped so as to be separated from the upper surface 43 near the vertical reference surface 35. Is formed, and the free end of the step is a pressing portion 39b that faces the upper surface of the carrier 32 disposed on the horizontal reference surface 36. The upper surface 4 of the protruding portion 38a is larger than the upper surface 4 of the carrier 32 arranged on the horizontal reference surface 36.
3 is located below, and this step is larger than the step difference of the pressing piece 39.

A circular hole opened on the upper surface 43 of the projecting portion 38a of the carrier holding base 38 so as to face the pressing piece 39 is formed in the carrier holding 38 as a cylinder 41, and the cylinder 41 has a vacuum suction hole 37 from the bottom surface thereof. Communication hole 4
It is communicated with 6. A cylinder-shaped piston 40 is fitted in a cylinder 41 so as to be movable along its axis. A pin 40a is projected from the upper end of the piston 40, the pin 40a is passed through a small hole formed in the pressing piece 39, and the brim at the tip of the pin 40a is caught in the small hole.

In this state shown in FIG. 1B, since the upward restoring stress of the pressing piece 39 exceeds the moment of the force due to the piston 40 and gravity, the piston 40 is pulled upward in the cylinder 41, The distance between the surface of the pressing piece 39 on the opposite side of the fulcrum and the horizontal reference surface 36 does not interfere with the movement of the carrier 32. Carrier 32
Is installed so as to be in contact with the vertical reference surface 35 and the horizontal reference surface 36 and to close the vacuum suction hole 37. After the installation is completed, the vacuum suction hole 37 is evacuated, and the carrier 32 is attracted to the L-shaped carrier holding table 38 with an appropriate force, but the vacuum suction pressure and the moment of the force of the piston 40 hold down the pressing piece 39.
The piston is not pulled down until it overcomes the restoring stress, and therefore the pressing piece 39 does not press the carrier 32, and the carrier 32 is accurately positioned in contact with the horizontal reference surface 36 and the vertical reference surface 35. It When the vacuum suction pressure exceeds this limit, the piston 40 is pulled down, the pressing piece 39 is pulled downward, and the carrier 32 is pressed against the horizontal reference surface 36 by the pressing portion 39b, so that the carrier 32 is L-shaped carrier. Holding table 38
The holding force for holding at the corner is increased (Fig. 1C).

In the above embodiments, the leaf spring type holding piece 39 is used as the holding piece biased away from the upper surface of the carrier.
However, instead of the pressing piece 39, a rigid plate-like piece is used as the pressing piece. For example, the pressing piece and the carrier holding table 38
The pressing piece may be biased in a direction away from the upper surface of the carrier by interposing a coil spring between the upper surface 43 and the upper surface 43.

[0018]

As described above, according to the carrier holding structure of the present invention, the carrier is provided on the L-shaped carrier holding table at the corners of the horizontal reference surface and the vertical reference surface of the L-shaped carrier holding table. It is held by the suction force of the vacuum suction through the vacuum suction hole and is housed in the cylinder that communicates with the vacuum suction hole, engages with one end of the piston that is pulled by the vacuum suction, and is biased away from the upper surface of the carrier. It is held down with the presser foot. Therefore, the positioning of the carrier is facilitated by the two types of reference planes, that is, the horizontal reference plane and the vertical reference plane, and the carrier is held on the L-shaped holding table by the appropriate combined pressure of the vacuum suction force and the pressing force of the pressing piece. Therefore, the carrier or the optical component adhered and fixed thereto is not damaged, and the adhesion failure can be avoided.

[Brief description of drawings]

FIG. 1A is a perspective view of a carrier holding structure according to the present invention, B is a vertical cross-sectional view before vacuuming, and C is a vertical cross-sectional view after vacuuming.

FIG. 2 is a view showing an aligning device for optical components.

FIG. 3 is a perspective view of a conventional carrier holding structure.

FIG. 4 is a perspective view of another conventional carrier holding structure.

Claims (1)

[Claims] 1. A structure in which an L-shaped carrier holding base holds the carrier in an aligning device for aligning the optical axes of the optical fiber and the optical component held by the carrier and adhering and fixing them to each other. On the L-shaped carrier holding table, there are formed horizontal reference planes and vertical reference planes which are perpendicular to the horizontal reference planes, and corners on which the carrier is contacted are formed on both of these reference planes. A vacuum suction hole having one end opened to the surface and the vertical reference plane is formed in the L-shaped carrier holding table, and one end is kept at a distance from the upper surface of the carrier placed in contact with the corner. The pressing pieces facing each other and biased away from the upper surface of the carrier are attached to the L-shaped carrier holding base, one end of the piston is engaged with the pressing piece, and the piston is connected to the vacuum suction hole. Housed in has been in the cylinder,
A carrier holding structure for an optical device aligning device, wherein the piston is pulled by vacuuming and the carrier can be held by the L-shaped carrier holding base by the holding piece.