JPH05325893A - Metal vapor discharge lamp, manufacture of metal vapor discharge lamp, and projection type display - Google Patents
Metal vapor discharge lamp, manufacture of metal vapor discharge lamp, and projection type displayInfo
- Publication number
- JPH05325893A JPH05325893A JP4129149A JP12914992A JPH05325893A JP H05325893 A JPH05325893 A JP H05325893A JP 4129149 A JP4129149 A JP 4129149A JP 12914992 A JP12914992 A JP 12914992A JP H05325893 A JPH05325893 A JP H05325893A
- Authority
- JP
- Japan
- Prior art keywords
- metal vapor
- vapor discharge
- discharge lamp
- glass
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Crystal (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Projection Apparatus (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、金属蒸気放電灯、金属
蒸気放電灯の製造方法及び投射型ディスプレーに関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal vapor discharge lamp, a method of manufacturing a metal vapor discharge lamp and a projection type display.
【０００２】[0002]
【従来の技術】近年、ＣＲＴ（CATHOD RAY TUBE、陰極
線管）にかわる大画面のディスプレイとして、種々のも
のが提案されているが、大表示容量でカラー表示ができ
る大画面のディスプレイとして、各画素ごとに薄膜トラ
ンジスター（ＴＦＴ）を形成したアクティブマトリック
ス方式の液晶パネルを投射型ディスプレイに応用する方
式がとりわけ注目されている。2. Description of the Related Art In recent years, various types of large-screen displays have been proposed as an alternative to CRT (CATHOD RAY TUBE, cathode ray tube), but each pixel is used as a large-screen display capable of color display with a large display capacity. A method of applying an active matrix type liquid crystal panel, in which a thin film transistor (TFT) is formed for each of them, to a projection display has been particularly noted.
【０００３】このようなディスプレイでは、とりわけ光
源がキーデバイスであり、例えば、発光効率、演色性等
の点から金属ハロゲン化物を封入した金属蒸気放電灯が
優れていることが知られている。金属ハロゲン化物の充
分な発光を得るためには、高い管壁温度が必要であり点
灯時の発光管温度は１０００℃近くに達する。このため
点灯中徐々に金属ハロゲン化物と発光管(石英ガラスあ
るいは高珪酸ガラス)とが反応して結晶化（失透）を起
こす。この結果、光束の利用効率が低下して投射型ディ
スプレーが暗くなり表示品質が悪くなるという問題があ
る。In such displays, it is known that the light source is a key device, and for example, a metal vapor discharge lamp in which a metal halide is enclosed is excellent in terms of luminous efficiency, color rendering properties, and the like. In order to obtain sufficient light emission of the metal halide, a high tube wall temperature is required, and the arc tube temperature during lighting reaches nearly 1000 ° C. Therefore, during lighting, the metal halide gradually reacts with the arc tube (quartz glass or high silicate glass) to cause crystallization (devitrification). As a result, there is a problem that the utilization efficiency of the luminous flux is lowered, the projection display becomes dark, and the display quality deteriorates.
【０００４】このことを解決するために、発光管内面に
窒化珪素（Si3N4）を被覆する方法（例えば特公昭６０
ー４０６６５号公報参照)や、発光管内面にCaO、MgO、A
l2O3、TiO2等を単独または複合物として石英ガラスとの
共融層または化合物層を形成する方法（例えば特公昭５
４ー１４４３４号公報参照）が提案されている。In order to solve this, a method of coating the inner surface of the arc tube with silicon nitride (Si 3 N 4 ) (for example, Japanese Patent Publication No. 60).
No. 40665), and CaO, MgO, A on the inner surface of the arc tube.
A method of forming a eutectic layer or a compound layer with quartz glass by using l 2 O 3 , TiO 2 or the like alone or as a composite (for example, Japanese Patent Publication No.
No. 4-14434) is proposed.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、これら
の被覆物は、熱膨張係数が管体より大きく、また管体と
の密着性が悪いために、ひび割れたりや管体から剥離し
たりするという寿命性が悪いという課題がある。However, these coatings have a coefficient of thermal expansion larger than that of the tubular body and have poor adhesion to the tubular body, so that they have a life of cracking or peeling from the tubular body. There is a problem of poor sex.
【０００６】本発明は、このような従来の金属蒸気放電
灯の課題を考慮し、光束の利用効率が高く、しかも寿命
性が良い、金属蒸気放電灯、金属蒸気放電灯の製造方法
及び投射型ディスプレーを提供することを目的とする。In view of the above problems of the conventional metal vapor discharge lamp, the present invention has a high luminous flux utilization efficiency and a long life, a metal vapor discharge lamp manufacturing method and a projection type. Intended to provide a display.
【０００７】[0007]
【課題を解決するための手段】本発明は、金属蒸気放電
発光管として、ガラスバルブ内面の表面粗さが１ミクロ
ンより小さい発光管を用いるものである。The present invention uses an arc tube having a surface roughness of the inner surface of the glass bulb of less than 1 micron as the metal vapor discharge arc tube.
【０００８】また、本発明は、そのような金属蒸気放電
灯を光源とし、液晶ライトバルブを利用した投射型ディ
スプレーである。The present invention is also a projection type display using such a metal vapor discharge lamp as a light source and utilizing a liquid crystal light valve.
【０００９】また、本発明は、電極を加熱封止したガラ
スバルブに少なくとも２つ以上設けられた細管から、エ
ッチング流体をガラスバルブの内部に導入して、そのガ
ラスバルブの内面を平滑化したあと、エッチング流体を
そのガラスバルブから除去する金属蒸気放電灯の製造方
法である。According to the present invention, the etching fluid is introduced into the glass bulb from at least two thin tubes provided in the glass bulb whose electrodes are heat-sealed to smooth the inner surface of the glass bulb. , A method of manufacturing a metal vapor discharge lamp in which an etching fluid is removed from its glass bulb.
【００１０】[0010]
【作用】発光管は、点灯中徐々に金属ハロゲン化物と発
光管(石英ガラスまたはホウ珪酸ガラス)とが反応して結
晶化（失透）を起こして発光管の外に出てくる光束が減
少する。ガラスの結晶化は、まず結晶核が生成し、次に
この結晶核がさらに成長して大きくなるという過程によ
ってガラスの結晶化が進行するものと考えられる。した
がってガラスが結晶化する速度は、結晶核の生成速度と
それによって生じた結晶相の成長速度によって決まる。
その結晶核の生成は、ガラスの表面、異種物質との界面
で起こりやすく、ガラスの表面状態に関係しているとい
える。[Function] The arc tube gradually reacts with the metal halide and the arc tube (quartz glass or borosilicate glass) during lighting, causing crystallization (devitrification) and reducing the luminous flux that goes out of the arc tube. To do. Crystallization of glass is considered to proceed by crystallization of glass by the process in which crystal nuclei are first generated and then the crystal nuclei further grow and grow. Therefore, the rate at which glass crystallizes is determined by the rate at which crystal nuclei are generated and the rate at which the crystal phase produced thereby grows.
It can be said that the formation of the crystal nuclei easily occurs on the surface of the glass or the interface with a different substance and is related to the surface state of the glass.
【００１１】他方、金属蒸気放電灯に用いられている金
属蒸気放電発光管は以下の方法で製造していた。ガラス
管をガスバーナで高温に加熱軟化させた状態で金型を用
いたブロー成形によって所望の形状で両端が開いたバル
ブに成形する。次に発光物質の封入と排気を行うための
細管をガスバーナで高温に加熱軟化させた状態でバルブ
に取り付ける。これらのいわゆるガラス細工のあとには
ガラスの微小な飛散物がバルブ表面に付着しているので
フッ酸などのエッチング液で取り除く。その後、バルブ
の開放端に電極とモリブデン箔と外部リード線を挿入し
た状態でバルブをガスバーナで高温に加熱軟化させて、
金型でプレス成形することによって気密封止（いわゆる
ピンチシール）する。細管から水銀や発光物質の金属ハ
ロゲン化物を封入したあと、バルブ内の高真空排気、ア
ルゴンガスの導入後細管を封じ切る。通常この様な製造
工程を経ている。On the other hand, the metal vapor discharge arc tube used in the metal vapor discharge lamp was manufactured by the following method. The glass tube is heated and softened to a high temperature by a gas burner and blow-molded using a mold to form a bulb having a desired shape and open at both ends. Next, a thin tube for enclosing and exhausting the luminescent material is attached to the bulb while being heated and softened to a high temperature by a gas burner. After these so-called glass work, fine glass particles are attached to the surface of the bulb, and are removed with an etching solution such as hydrofluoric acid. After that, with the electrode, molybdenum foil and external lead wire inserted in the open end of the valve, heat the valve to a high temperature with a gas burner and soften it.
Airtight sealing (so-called pinch sealing) is performed by press molding with a die. After sealing mercury or a metal halide of a luminescent substance from the thin tube, the tube is closed after high vacuum exhaust in the bulb and introduction of argon gas. Usually, such a manufacturing process is performed.
【００１２】ところで、上述のような電極の気密封止後
でもバルブ内面にガラスの微小な飛散物が付着している
ことが多い。しかし、従来の内径が数ミリ程度の大きさ
の１ヶの細管ではエッチング作用を有した流体をバルブ
内部に導入することができないために、上記飛散物を取
り除くことができなかった。その結果、残存したガラス
の微小な飛散物が結晶の核となって結晶化が促進され、
短時間で結晶化していたのである。[0012] By the way, in many cases, even after the airtight sealing of the electrodes as described above, minute scattered particles of glass adhere to the inner surface of the bulb. However, since the conventional thin tube having an inner diameter of about several millimeters cannot introduce a fluid having an etching action into the inside of the valve, the scattered matter cannot be removed. As a result, the remaining minute scattered particles of glass serve as crystal nuclei to promote crystallization,
It was crystallized in a short time.
【００１３】そこで、このことを防止するには、金属蒸
気放電発光管のガラスバルブ内面の表面粗さを１ミクロ
ンより小さくすることが有効であることを見いだした。
すなわち、電極の気密封止後バルブ内面に付着している
ガラスの微小な飛散物を、ガラスバルブに少なくとも２
つ以上設けた細管から、エッチング流体をガラスバルブ
の内部に導入して取り除くことによって、ガラスバルブ
の内面を平滑化する。したがって、発光管内面に結晶の
核となる微小な飛散物が存在しなくなるので、ガラスの
結晶化（失透）を防止することができる。In order to prevent this, it has been found that it is effective to make the surface roughness of the inner surface of the glass bulb of the metal vapor discharge arc tube smaller than 1 micron.
That is, after airtightly sealing the electrodes, at least 2 minute particles of glass adhering to the inner surface of the bulb are attached to the bulb.
The inner surface of the glass bulb is smoothed by introducing and removing the etching fluid into the glass bulb from one or more thin tubes. Therefore, since minute scattered matter serving as crystal nuclei do not exist on the inner surface of the arc tube, crystallization (devitrification) of glass can be prevented.
【００１４】本発明により、長時間発光管を点灯させて
も発光管は結晶化（失透）しにくくなり、光束の低下が
起こりにくくなり、明るい画面、高い表示品質を長時間
維持した投射型ディスプレーが可能となる。According to the present invention, even when the arc tube is turned on for a long time, the arc tube is less likely to be crystallized (devitrification), the luminous flux is less likely to be lowered, and the bright screen and high display quality are maintained for a long time. Display becomes possible.
【００１５】[0015]
【実施例】以下、本発明の実施例について図面を参照し
て説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１６】（実施例１）図１〜図９は本発明の金属蒸
気放電灯に用いられる金属蒸気放電発光管の色々な実施
例を示す断面図であり、バルブ管体１には、電極２、Ｍ
ｏ箔３、外部リード線４、細管５ａ、５ｂ、５ｃ、気密
封止部６、チップシール部７ａ、７ｂ、７ｃが設けられ
ている。(Embodiment 1) FIGS. 1 to 9 are sectional views showing various embodiments of a metal vapor discharge arc tube used in a metal vapor discharge lamp according to the present invention. , M
A foil 3, an external lead wire 4, thin tubes 5a, 5b, 5c, an airtight sealing portion 6, and chip sealing portions 7a, 7b, 7c are provided.
【００１７】まず、本発明の金属蒸気放電発光管の製造
方法を図１及び図５の図面を利用して説明する。石英ガ
ラスからなるガラス管（内径１０mm、厚み２mm）の内部
に不活性ガスをフローしながら、プロパンー酸素炎で約
５０秒火炎加工し、金型で所定の形状にブロー成形し
て、楕円形状のバルブ管体１にした。発光物質の封入と
排気を行うための細管５ａ、５ｂとバルブ管体１とをプ
ロパンー酸素炎によって加熱軟化させた状態で、図１の
ように２つの細管５ａ、５ｂをバルブ管体１に取り付け
る。バルブ管体１の内側表面に付着していたガラスの微
小な飛散物を、２０％フッ酸で取り除いた。バルブ管体
１の開放端に電極２とＭｏ箔３と外部リード線４を挿入
した状態で不活性ガスをフローしながら、バルブ管体１
をガスバーナで高温に加熱軟化させて、金型でプレス成
形することによって気密封止部６（いわゆるピンチシー
ル部）を形成した。それから、２つの細管５ａ、５ｂか
ら、バルブ管体１に２０％フッ酸を導入してバルブ表面
に付着していたガラスの微小な飛散物を取り除いた。バ
ルブ管体１を高純度純水で繰り返し洗浄してフッ酸を完
全に取り除いた。一方の細管（例えば５ａ）だけを開い
た状態で残し、他方の細管５ｂはレーザー光を照射して
局部的に加熱溶融して細管を熔断してチップシール部７
ｂでチップシールした。細管５ａからヨウ化ネオジウム
（ＮｄＩ3）３．０mg、ヨウ化デスプロシウム（Ｄｙ
Ｉ3）６．０mg、ヨウ化セシウム（ＣｓＩ）６．０mg、
水銀（Ｈｇ）４０mgをアルゴンガスとともに封入し、チ
ップシール部７ａでチップシールして、図５に示した金
属蒸気放電発光管１１を完成させた。このように作製し
た金属蒸気放電発光管１１の点灯試験を行なうと、ラン
プ電圧が９５Ｖ、ランプ電流が２．６Ａであった。First, a method for manufacturing a metal vapor discharge arc tube according to the present invention will be described with reference to FIGS. 1 and 5. While flowing an inert gas into a glass tube made of quartz glass (inner diameter: 10 mm, thickness: 2 mm), flame-process with a propane-oxygen flame for about 50 seconds, blow mold into a predetermined shape with a mold, and form an elliptical shape. The valve tube body 1 was used. Two thin tubes 5a, 5b are attached to the valve tube body 1 as shown in FIG. 1 in a state where the thin tubes 5a, 5b for enclosing and exhausting the luminescent substance and the valve tube body 1 are heated and softened by a propane-oxygen flame. .. The minute glass particles scattered on the inner surface of the valve tube 1 were removed with 20% hydrofluoric acid. While the electrode 2, the Mo foil 3, and the external lead wire 4 are inserted into the open end of the valve tube body 1, while flowing the inert gas, the valve tube body 1
Was heated and softened to a high temperature by a gas burner, and press-molded with a die to form an airtightly sealed portion 6 (so-called pinch seal portion). Then, 20% hydrofluoric acid was introduced into the valve tube body 1 from the two thin tubes 5a and 5b to remove the minute scattered particles of glass adhering to the valve surface. The valve tube body 1 was repeatedly washed with pure water to remove hydrofluoric acid completely. Only one thin tube (for example, 5a) is left open, and the other thin tube 5b is irradiated with a laser beam to locally heat and melt the thin tube to cut the thin tube to seal the tip seal portion 7.
The chip was sealed with b. From the thin tube 5a, neodymium iodide (NdI 3 ) 3.0 mg, desprosium iodide (Dy)
I 3 ) 6.0 mg, cesium iodide (CsI) 6.0 mg,
40 mg of mercury (Hg) was enclosed together with argon gas and chip-sealed at the chip-sealing portion 7a to complete the metal vapor discharge arc tube 11 shown in FIG. When the lighting test of the metal vapor discharge arc tube 11 thus produced was performed, the lamp voltage was 95 V and the lamp current was 2.6 A.
【００１８】さらに同様な方法で、気密封止したあとの
バルブ管体１内側表面に付着していたガラスの微小な飛
散物を２０％フッ酸で取り除く時間を変えることによっ
て、図１０に示した種々の表面粗さの金属蒸気放電発光
管１１を作製した。Further, in the same manner as above, by changing the time for removing the minute scattered particles of glass adhering to the inner surface of the valve tube body 1 after hermetically sealing with 20% hydrofluoric acid, the results are shown in FIG. Metal vapor discharge arc tubes 11 having various surface roughnesses were produced.
【００１９】次に、このような金属蒸気放電発光管１１
を図９のように、反射鏡１４に組み込むことにより金属
蒸気放電灯１５を作製した。なお反射鏡１４は、回転放
物面の形状でガラス製の反射鏡１４ａの表面に多層干渉
膜１４ｂをコーティングして、金属蒸気放電発光管１１
から放射される赤外線及び紫外線をカットし、可視光の
み反射させるようにしている。Next, such a metal vapor discharge arc tube 11 will be described.
As shown in FIG. 9, a metal vapor discharge lamp 15 was produced by incorporating it in a reflecting mirror 14. The reflection mirror 14 has a shape of a paraboloid of revolution, and a multi-layer interference film 14b is coated on the surface of the reflection mirror 14a made of glass, so that the metal vapor discharge arc tube 11
Infrared rays and ultraviolet rays emitted from are cut off and only visible light is reflected.
【００２０】金属蒸気放電灯１５は、アーク長７mmで垂
直に点灯させた。試作した金属蒸気放電灯１５を点灯周
波数２５０Hzの矩形波で点灯させると、いずれも全光束
が約１６０００lm、色温度が約７３００Ｋであり、また
基準光学系で照度を測定し、５０００時間に対する照度
の経時変化を照度維持率変化として測定した。その結果
を図１０に示した。ここに、○印は本発明の場合であ
り、×印は従来の場合である。The metal vapor discharge lamp 15 was lit vertically with an arc length of 7 mm. When the prototyped metal vapor discharge lamp 15 was lit with a rectangular wave with a lighting frequency of 250 Hz, the total luminous flux was about 16000 lm, the color temperature was about 7300 K, and the illuminance was measured with a reference optical system to obtain the illuminance for 5000 hours. The change over time was measured as the change in illuminance maintenance rate. The results are shown in Fig. 10. Here, the mark ◯ indicates the case of the present invention, and the mark x indicates the conventional case.
【００２１】図１０から明らかなように、本発明の金属
蒸気放電灯１５は５０００時間点灯した後の照度維持率
が○印に示したように少なくとも５０％以上あった。こ
れに対して、×印に示したように、ガラスバルブの内面
の表面粗さが１ミクロンより大きい従来の金属蒸気放電
灯は、結晶化が進行して、５０００時間点灯した後、照
度維持率は３０〜４０％であった。As is apparent from FIG. 10, the metal vapor discharge lamp 15 of the present invention had an illuminance retention rate after lighting for 5000 hours of at least 50% or more as indicated by the mark. On the other hand, as indicated by the cross mark, the conventional metal vapor discharge lamp having a surface roughness of the inner surface of the glass bulb larger than 1 micron has a illuminance maintenance rate after crystallization for 5000 hours. Was 30-40%.
【００２２】また、本発明の他の実施例である、図２〜
図４及び図６〜図８（図２〜図４にこの順で対応する）
のものも、図１、図５と同様の結果が得られた。Further, another embodiment of the present invention, shown in FIGS.
4 and 6 to 8 (corresponding to FIGS. 2 to 4 in this order)
The same results as those shown in FIGS. 1 and 5 were obtained.
【００２３】図１２は、本発明の投射型ディスプレイを
示す模式図である。本発明の金属蒸気放電灯１５からな
る光源から投射された光線２１はコリメータレンズ２２
で集光され、ダイクロイックミラー２３により青
（Ｂ）、緑（Ｇ）、赤（Ｒ）の３色に分離してそれぞれ
の液晶ライトバルブ２４に入射される。３枚の液晶ライ
トバルブ２４から得られたＢＧＲの画像をそれぞれ３本
の広角の投射レンズ２５を用いてスクリーン２６上で合
成してフルカラーの映像を得た。本発明の金属蒸気放電
灯１５を組み込んだ投射型ディスプレイの場合、スクリ
ーン輝度はいずれも２４０ｆｔ−Ｌであり、明るい画
面、高い表示品質、長寿命のディスプレーにすることが
できた。FIG. 12 is a schematic view showing the projection type display of the present invention. A light beam 21 projected from a light source composed of the metal vapor discharge lamp 15 of the present invention has a collimator lens 22.
The light is condensed by the dichroic mirror 23 and is separated into three colors of blue (B), green (G), and red (R) by the dichroic mirror 23 and is incident on the respective liquid crystal light valves 24. BGR images obtained from the three liquid crystal light valves 24 were combined on a screen 26 using three wide-angle projection lenses 25 to obtain a full-color image. In the case of the projection type display incorporating the metal vapor discharge lamp 15 of the present invention, the screen brightness was 240 ft-L, and a bright screen, high display quality, and a long-life display could be obtained.
【００２４】（実施例２）高珪酸ガラスからなるガラス
管（内径１０mm、厚み２mm）の内部に不活性ガスをフロ
ーしながら、水素ー酸素炎で約２０秒火炎加工し、金型
で所定の形状のバルブ管体１にした。(Example 2) While flowing an inert gas into a glass tube (inner diameter: 10 mm, thickness: 2 mm) made of high silicate glass, flame processing was performed for about 20 seconds with a hydrogen-oxygen flame, and a predetermined mold was used. The shaped valve tube body 1 is used.
【００２５】発光物質の封入と排気を行うための細管５
ａ、５ｂとバルブ管体１とをプロパンー酸素炎によって
加熱軟化させた状態で、図１のように２つの細管５ａ、
５ｂをバルブ管体１に取り付ける。バルブ管体１表面に
付着していたガラスの微小な飛散物を、２０％フッ酸で
取り除いた。バルブ管体１の開放端に電極２とＭｏ箔３
と外部リード線４を挿入した状態で不活性ガスをフロー
しながら、バルブ管体１をガスバーナで高温に加熱軟化
させて、金型でプレス成形することによって気密封止部
６を形成した。アルゴンガスでＣＦ4ガスを３０％に希
釈した反応性ガスを２０ＳＣＣＭの流量で、一方の細管
５ａからバルブ管体１に導入して他方の細管５ｂから排
気することによって、バルブ管体１表面に付着していた
ガラスの微小な飛散物を取り除いた。バルブ管体１を高
純度アルゴンガスで繰り返し洗浄して反応性ガスを完全
に取り除いた。一方の細管（例えば５ａ）だけを開いた
状態で残し、他方の細管５ｂはレーザー光を照射して局
部的に加熱溶融して細管を熔断してチップシール部７ｂ
でチップシールした。その中にヨウ化ナトリウム（Ｎａ
Ｉ）１０mg、ヨウ化タリウム（ＴｌＩ）１mg、ヨウ化イ
ンジウム（ＩｎＩ）０．６mg、水銀（Ｈｇ）５０mgをア
ルゴンガスとともに封入し、チップシール部７ａでチッ
プシールして、図５に示した金属蒸気放電発光管１１を
完成させた。このように作製した金属蒸気放電発光管１
１の点灯試験を行なうと、ランプ電圧が１０５Ｖ、ラン
プ電流が２．３８Ａであった。A thin tube 5 for enclosing and exhausting the luminescent material
a and 5b and the valve tube body 1 are heated and softened by a propane-oxygen flame, two thin tubes 5a as shown in FIG.
5b is attached to the valve tube 1. The minute glass particles scattered on the surface of the valve tube body 1 were removed with 20% hydrofluoric acid. Electrode 2 and Mo foil 3 at the open end of valve tube 1
While flowing the inert gas with the external lead wire 4 inserted, the valve tube body 1 was heated and softened to a high temperature by a gas burner, and press-molded with a mold to form the hermetically sealed portion 6. By introducing a reactive gas obtained by diluting CF 4 gas to 30% with argon gas into the valve tube body 1 from one thin tube 5a and exhausting it from the other thin tube 5b at a flow rate of 20 SCCM, the surface of the valve tube body 1 is The minute scattered particles of glass that had adhered were removed. The valve tube body 1 was repeatedly washed with high-purity argon gas to completely remove the reactive gas. Only one thin tube (for example, 5a) is left open, and the other thin tube 5b is irradiated with a laser beam to locally heat and melt the thin tube to melt the thin tube to seal the tip seal portion 7b.
I made a chip seal with. Sodium iodide (Na
I) 10 mg, thallium iodide (TlI) 1 mg, indium iodide (InI) 0.6 mg, and mercury (Hg) 50 mg were enclosed together with argon gas, and the tip was sealed with the tip seal part 7a, and the metal shown in FIG. The vapor discharge arc tube 11 was completed. Metal vapor discharge arc tube 1 produced in this way
When the lighting test of No. 1 was performed, the lamp voltage was 105 V and the lamp current was 2.38 A.
【００２６】なお金属蒸気放電灯１５は、アーク長７mm
で垂直に点灯させた。試作した金属蒸気放電灯１５を点
灯周波数２５０Hzの矩形波で点灯させると、いずれも全
光束が２３０００lm、色温度が約５１００Ｋであり、ま
た基準光学系で照度を測定し、５０００時間に対する照
度の経時変化を照度維持率変化として測定し、その結果
を図１１に示した。ここに、○印は本発明の場合であ
り、×印は従来の場合である。The metal vapor discharge lamp 15 has an arc length of 7 mm.
I lit it vertically. When the prototype metal vapor discharge lamp 15 was lit with a rectangular wave with a lighting frequency of 250 Hz, the total luminous flux was 23000 lm, the color temperature was about 5100 K, and the illuminance was measured by the reference optical system. The change was measured as a change in illuminance maintenance rate, and the result is shown in FIG. Here, the mark ◯ indicates the case of the present invention, and the mark x indicates the conventional case.
【００２７】本発明の金属蒸気放電灯は５０００時間点
灯した後の照度維持率が図１１の○印に示したように少
なくとも５０％以上あった。これに対して、図１１の×
印に示したように、金属蒸気放電灯のガラスバルブの内
面の表面粗さが１ミクロンより大きい従来の金属蒸気放
電灯の場合は、結晶化が進行して、５０００時間点灯し
た後、照度維持率は３０〜４０％であった。In the metal vapor discharge lamp of the present invention, the illuminance retention rate after lighting for 5000 hours was at least 50% or more, as indicated by the mark ◯ in FIG. On the other hand, × in FIG.
As shown by the mark, in the case of the conventional metal vapor discharge lamp in which the surface roughness of the inner surface of the glass bulb of the metal vapor discharge lamp is larger than 1 micron, the crystallization progresses and the illuminance is maintained after lighting for 5000 hours. The rate was 30-40%.
【００２８】また図２〜４、図６〜８示したような位置
に細管５ａ、５ｂ、５ｃを設けた場合も図１、図５と同
様の結果が得られた。さらに反応性ガスとして、Ｃ
2Ｆ6、ＣＨＦ3、ＳＦ6、を用いた場合も同様の結果が得
られた。When the thin tubes 5a, 5b and 5c are provided at the positions shown in FIGS. 2 to 4 and 6 to 8, the same results as in FIGS. 1 and 5 are obtained. Further, as a reactive gas, C
Similar results were obtained when 2 F 6 , CHF 3 , and SF 6 were used.
【００２９】実施例１と同様に投射型ディスプレイに本
発明の金属蒸気放電灯を組み込んだ。本発明の金属蒸気
放電灯を組み込んだ投射型ディスプレイの場合、スクリ
ーン輝度はいずれも２３０ｆｔ−Ｌであり、明るい画
面、高い表示品質、長寿命のディスプレーにすることが
できた。In the same manner as in Example 1, the projection type display was incorporated with the metal vapor discharge lamp of the present invention. In the case of the projection display incorporating the metal vapor discharge lamp of the present invention, the screen brightness was 230 ft-L, and a bright screen, high display quality, and a long-life display could be obtained.
【００３０】なお、本発明の金属蒸気放電灯、投射型デ
ィスプレーにおいて、金属蒸気放電灯の形状や封入物や
封入量、エッチング流体の種類や流量や導入方法、反射
鏡への多層干渉膜のコーティングの位置、投射型ディス
プレイの構成や表示原理等は、本実施例に限定されるも
のではない。In the metal vapor discharge lamp and projection type display of the present invention, the shape and inclusions of the metal vapor discharge lamp, the amount of enclosure, the type and flow rate of the etching fluid, the introduction method, and the coating of the multilayer interference film on the reflecting mirror. The position, the configuration of the projection type display, the display principle, etc. are not limited to those in this embodiment.
【００３１】[0031]
【発明の効果】以上説明したように、本発明は、ガラス
バルブ内面の表面粗さが１ミクロンより小さくすること
により、灯内面に結晶の核となる微小な飛散物が存在し
なくなるので、ガラスの結晶化（失透）を防止出来、金
属蒸気放電灯の寿命を大幅に延ばすことができる。この
結果、照度の経時変化が少ない、明るい画面、高い表示
品質の投射型ディスプレーを提供することが出来る。As described above, according to the present invention, since the surface roughness of the inner surface of the glass bulb is less than 1 micron, fine scattered matter which becomes the nucleus of the crystal does not exist on the inner surface of the lamp. Can be prevented from being crystallized (devitrification), and the life of the metal vapor discharge lamp can be greatly extended. As a result, it is possible to provide a projection display having a bright screen and a high display quality with little change in illuminance over time.
【図１】本発明の一実施例にかかるの金属蒸気放電灯の
製造過程の一部を示す断面図である。FIG. 1 is a sectional view showing a part of a manufacturing process of a metal vapor discharge lamp according to an embodiment of the present invention.
【図２】本発明の別の実施例にかかるの金属蒸気放電灯
の製造過程の一部を示す断面図である。FIG. 2 is a sectional view showing a part of a manufacturing process of a metal vapor discharge lamp according to another embodiment of the present invention.
【図３】本発明の別の一実施例にかかるの金属蒸気放電
灯の製造過程の一部を示す断面図である。FIG. 3 is a cross-sectional view showing a part of a process of manufacturing a metal vapor discharge lamp according to another embodiment of the present invention.
【図４】本発明の別の一実施例にかかるの金属蒸気放電
灯の製造過程一部を示す断面図である。FIG. 4 is a cross-sectional view showing a part of a process of manufacturing a metal vapor discharge lamp according to another embodiment of the present invention.
【図５】本発明の一実施例にかかる金属蒸気放電灯の一
部を示す断面図である。FIG. 5 is a sectional view showing a part of a metal vapor discharge lamp according to an embodiment of the present invention.
【図６】本発明の別の実施例にかかる金属蒸気放電灯の
一部を示す断面図である。FIG. 6 is a sectional view showing a part of a metal vapor discharge lamp according to another embodiment of the present invention.
【図７】本発明の別の実施例にかかる金属蒸気放電灯の
一部を示す断面図である。FIG. 7 is a sectional view showing a part of a metal vapor discharge lamp according to another embodiment of the present invention.
【図８】本発明の別の実施例にかかる金属蒸気放電灯の
一部を示す断面図である。FIG. 8 is a sectional view showing a part of a metal vapor discharge lamp according to another embodiment of the present invention.
【図９】本発明の金属蒸気放電灯の一実施例を示す断面
図である。FIG. 9 is a sectional view showing an embodiment of the metal vapor discharge lamp of the present invention.
【図１０】本発明の金属蒸気放電灯の一実施例による５
０００時間後の照度維持率変化を示すグラフである。FIG. 10 is a schematic diagram of a metal vapor discharge lamp according to an embodiment of the present invention;
It is a graph which shows the illuminance maintenance rate change after 000 hours.
【図１１】本発明の金属蒸気放電灯の別の実施例による
５０００時間後の照度維持率変化を示すグラフである。FIG. 11 is a graph showing changes in illuminance maintenance rate after 5000 hours according to another example of the metal vapor discharge lamp of the present invention.
【図１２】本発明の一実施例の投射型ディスプレイを示
す模式図である。FIG. 12 is a schematic view showing a projection type display according to an embodiment of the present invention.
１ バルブ管体 ２ 電極 ３ Ｍｏ箔 ４ 外部リード線 ５ａ、５ｂ、５ｃ 細管 ６ 気密封止部 ７ａ、７ｂ、７ｃ チップシール部 １１ 金属蒸気放電灯 １４ 反射鏡 １４ａ ガラス製反射鏡 １４ｂ 多層干渉膜 １５ 金属蒸気放電灯 ２１ 光線 ２２ コリメータレンズ ２３ ダイクロイックミラー ２４ 液晶ライトバルブ ２５ 投射レンズ ２６ スクリーン DESCRIPTION OF SYMBOLS 1 Valve tube body 2 Electrode 3 Mo foil 4 External lead wire 5a, 5b, 5c Capillary tube 6 Airtight sealing part 7a, 7b, 7c Chip sealing part 11 Metal vapor discharge lamp 14 Reflecting mirror 14a Glass reflecting mirror 14b Multilayer interference film 15 Metal vapor discharge lamp 21 Light beam 22 Collimator lens 23 Dichroic mirror 24 Liquid crystal light valve 25 Projection lens 26 Screen
───────────────────────────────────────────────────── フロントページの続き (72)発明者 大村 秀明 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 竹内 延吉 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Hideaki Omura Inventor Hideaki Omura 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.
Claims (3)
表面粗さが１ミクロンより小さいことを特徴とする金属
蒸気放電灯。1. A metal vapor discharge lamp characterized in that the surface roughness of the inner surface of the glass bulb of the metal vapor discharge arc tube is smaller than 1 micron.
し、液晶ライトバルブを利用したことを特徴とする投射
型ディスプレー。2. A projection display comprising the metal vapor discharge lamp according to claim 1 as a light source and a liquid crystal light valve.
とも２つ以上設けられた細管から、エッチング流体を前
記ガラスバルブの内部に導入して、そのガラスバルブの
内面を平滑化したあと、前記エッチング流体をそのガラ
スバルブから除去することを特徴とする金属蒸気放電灯
の製造方法。3. An etching fluid is introduced into the inside of the glass bulb from at least two thin tubes provided in a glass bulb whose electrodes are heat-sealed to smooth the inner surface of the glass bulb and then the etching. A method of manufacturing a metal vapor discharge lamp, characterized in that fluid is removed from the glass bulb.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4129149A JPH05325893A (en) | 1992-05-21 | 1992-05-21 | Metal vapor discharge lamp, manufacture of metal vapor discharge lamp, and projection type display |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4129149A JPH05325893A (en) | 1992-05-21 | 1992-05-21 | Metal vapor discharge lamp, manufacture of metal vapor discharge lamp, and projection type display |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05325893A true JPH05325893A (en) | 1993-12-10 |
Family
ID=15002355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4129149A Pending JPH05325893A (en) | 1992-05-21 | 1992-05-21 | Metal vapor discharge lamp, manufacture of metal vapor discharge lamp, and projection type display |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05325893A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4900495A (en) * | 1988-04-08 | 1990-02-13 | E. I. Du Pont De Nemours & Co. | Process for producing anti-static yarns |
| EP1143483A1 (en) * | 2000-04-08 | 2001-10-10 | Schott Glas | Transparent cover for a lamp radiation source |
| JP2005055633A (en) * | 2003-08-04 | 2005-03-03 | Asahi Techno Glass Corp | Glass reflecting mirror for projector and its manufacturing method |
| DE102004021336A1 (en) * | 2004-04-30 | 2005-11-24 | Mitsubishi Heavy Industries, Ltd. | Optical characteristic recovery method of optical element e.g. light transmissive window of ultraviolet lamp, involves forming vacuum region of activity energy existence, at side of photo-irradiation surface of optical system |
| US7190512B2 (en) | 2004-04-29 | 2007-03-13 | Mitsubishi Heavy Industries, Ltd. | Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus |
-
1992
- 1992-05-21 JP JP4129149A patent/JPH05325893A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4900495A (en) * | 1988-04-08 | 1990-02-13 | E. I. Du Pont De Nemours & Co. | Process for producing anti-static yarns |
| EP1143483A1 (en) * | 2000-04-08 | 2001-10-10 | Schott Glas | Transparent cover for a lamp radiation source |
| JP2001354445A (en) * | 2000-04-08 | 2001-12-25 | Carl Zeiss:Fa | Transparent cover for radiation source of lamp |
| US6629768B2 (en) | 2000-04-08 | 2003-10-07 | Schott Glas | Lamp with an unpolished surface and radiant source lamps with a transparent cover for the radiant source |
| JP2005055633A (en) * | 2003-08-04 | 2005-03-03 | Asahi Techno Glass Corp | Glass reflecting mirror for projector and its manufacturing method |
| US7190512B2 (en) | 2004-04-29 | 2007-03-13 | Mitsubishi Heavy Industries, Ltd. | Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus |
| US7440206B2 (en) | 2004-04-29 | 2008-10-21 | Mitsubishi Heavy Industries, Ltd. | Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus |
| US7453630B2 (en) | 2004-04-29 | 2008-11-18 | Mitsubishi Heavy Industries, Ltd. | Optical properties apparatus, the restoration method, and an optical system used in the apparatus |
| US7733563B2 (en) | 2004-04-29 | 2010-06-08 | Mitsubishi Heavy Industries, Ltd. | Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus |
| US7813036B2 (en) | 2004-04-29 | 2010-10-12 | Mitsubishi Heavy Industries, Ltd. | Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus |
| DE102004021336A1 (en) * | 2004-04-30 | 2005-11-24 | Mitsubishi Heavy Industries, Ltd. | Optical characteristic recovery method of optical element e.g. light transmissive window of ultraviolet lamp, involves forming vacuum region of activity energy existence, at side of photo-irradiation surface of optical system |
| DE102004021336B4 (en) * | 2004-04-30 | 2008-11-27 | Mitsubishi Heavy Industries, Ltd. | Apparatus and method for improving optical properties and optical system used in the apparatus |
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