JPH04337241A - Metal vapor discharge light emitting tube - Google Patents

Abstract

PURPOSE:To prevent the reaction between a light emitting tube and a metal halogenide and its crystallization. CONSTITUTION:A porous glass layer, a gel layer or a fine grain layer is formed on the inner face of a tube body 1 made of quartz glass or high-silicate glass, and it is processed with ammonia to form a thin film made of oxynitride glass 6.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal vapor discharge arc tube with high efficiency, high color rendering, and long life, a metal vapor discharge lamp, a projection type display, and a method for manufacturing a metal vapor discharge arc tube.

0002

[Prior Art] In recent years, CRT (CATHOD RAY)
Various types of large-screen displays have been proposed as an alternative to TUBE, cathode ray tubes), but as a large-screen display that can display color with a large display capacity, an active display with a thin film transistor (TFT) formed in each pixel Particular attention is being paid to methods that apply matrix-type liquid crystal panels to projection-type displays.

[0003] In such displays, the light source is a key device, and metal vapor discharge lamps containing metal halides are superior in terms of luminous efficiency, color rendering properties, and the like. In order to obtain sufficient luminescence from metal halides, a high tube wall temperature is required, and the arc tube temperature during lighting is 1000°C.
It reaches close to ℃. Therefore, during lighting, the metal halide and the arc tube (quartz glass or high silicate glass) gradually react, causing crystallization (devitrification). As a result, the utilization efficiency of the luminous flux decreases, the projection display becomes dark, and the display quality deteriorates.

In order to solve this problem, there are methods of coating the inner surface of the arc tube with silicon nitride (Si3N4) (for example, Japanese Patent Publication No. 60-40665), and methods of coating the inner surface of the arc tube with CaO, M
A method has been proposed in which gO, Al2O3, TiO2, etc. are used alone or as a composite to form a eutectic layer or a compound layer with quartz glass (for example, Japanese Patent Publication No. 14434/1983).

[0005]

[Problems to be Solved by the Invention] However, these coatings have a coefficient of thermal expansion that is approximately 0 for the tube (in the case of quartz glass).
．． 55×10-6℃-1, about 0 for Vycor glass
．． 3 to 14 x 10-6 compared to 8 x 10-6℃-1)
C.-1 and poor adhesion to the tube, which caused problems such as cracking and peeling from the tube.

[0006]

[Means for Solving the Problem] In order to achieve this object, the present invention forms a thin film made of oxynitride glass on the inner surface of a tube made of quartz glass or high silicate glass as a metal vapor discharge luminous tube. It is something.

[0007]

[Operation] In the present invention, since the inner surface of the metal vapor discharge arc tube made of quartz glass or high silicate glass is covered with a thin film made of oxynitride glass, the metal halide sealed inside the arc tube (quartz glass or high silicate glass) and crystallization are prevented. Furthermore, the coefficient of thermal expansion of oxynitride glass is smaller than that of ordinary oxide glass or oxide, and since it is a homogeneous glass material, it firmly adheres to the arc tube.
It will not crack or peel off from the arc tube.

[0008] As described above, the reason why oxynitride glass does not crystallize due to the reaction between the metal halide and the arc tube during lighting is because nitrogen is substituted with oxygen in the glass framework structure. This is thought to be because the Si--N bonds penetrate into the glass structure and the formation of the Si--N bonds strengthens the network structure of the glass. As a result, the network structure of the glass becomes tight, making it possible to increase the glass transition temperature, increase the viscosity, make it difficult to crystallize, and make it difficult to react.

[0009] Therefore, the above-mentioned reaction prevention effect lasts for a long time, and the life of the metal vapor discharge arc tube can be greatly extended. As a result, it is possible to obtain a projection display with a bright screen and high display quality without deterioration in luminous flux utilization efficiency.

0010

[Example] (Example 1) (Fig. 1) is a sectional view showing an example of the metal vapor discharge arc tube of the present invention, where 1 is a tube body, 2
3 is a tungsten electrode, 3 is a molybdenum foil, 4 is a tungsten wire, 5 is a chip seal portion, and 6 is a thin film of oxynitride glass. (Fig. 3) is a schematic diagram showing a method of forming a thin film of oxynitride glass on the inner surface of a tube, in which 11 is a pipe-shaped glass tube, 12 is a porous glass layer or gel layer, and 13 is a reaction gas and a carrier gas. 14 is a gas exhaust section for exhausting the gas;
15 heating furnace.

First, a method for manufacturing a metal vapor discharge arc tube according to the present invention will be described. Glass tube 11 made of quartz glass (inner diameter 1
Na2O-B2O3-S on the inner surface of the
After applying iO2 glass and heating it at 580°C for 5 hours to separate the phases into a Na2O-B2O3 phase and a SiO2 phase, the Na2O-B2O3 phase was dissolved with acid to form the porous glass layer 12.

This is set in the heating furnace 15 as shown in FIG. 3, and after the glass tube 11 is evacuated, carrier gas and ammonia gas are introduced from the gas introduction part 13, and gas is exhausted from the gas exhaust part 14. At the same time, the porous glass layer 12 was treated with ammonia. Here, the ammonia treatment was carried out under the conditions that the heating furnace 15 was heated to 900° C. and maintained for 3 hours while flowing a mixed gas of nitrogen gas at 200 cc/min and ammonia gas at 400 cc/min as carrier gas. As a result, a thin film (1 micron thick) of oxynitride glass containing about 2% by weight of nitrogen could be formed on the inner surface of the glass tube 11.

The glass tube 11 thus obtained is (
It is processed into the shape of the tube 1 shown in Fig. 1), and inside it contains 3.0 mg of neodymium iodide (NdI3), 6.0 mg of desprosium iodide (DyI3), and cesium iodide (CsI).
)6.0mg and 40mg of mercury (Hg) are sealed together with argon gas, and the chip is sealed with the chip seal part 5 (
The metal vapor discharge arc tube shown in Figure 1) was completed. When the metal vapor discharge arc tube thus produced was subjected to a lighting test, the lamp voltage was 95V and the lamp current was 2.6A.

(FIG. 5) shows the above metal vapor discharge arc tube 10.
FIG. 2 is a cross-sectional view of a metal vapor discharge lamp incorporating a reflector. The metal vapor discharge arc tube 10 was fixed to a reflecting mirror with an inorganic adhesive (not shown). The reflecting mirror has the shape of a paraboloid of revolution, and the surface of the reflecting mirror 21 made of glass is coated with a multilayer interference film 22 to cut out infrared and ultraviolet rays emitted from the metal vapor discharge arc tube 10 and reflect only visible light. Ta.

The metal vapor discharge arc tube 10 was lit vertically with an arc length of 7 mm. When the prototype metal vapor discharge lamp was lit with a square wave at a lighting frequency of 250 Hz, the total luminous flux was 16,000 lm and the color temperature was about 7,300 K. Moreover, after lighting the metal vapor discharge lamp of the present invention for 5000 hours,
The lamp voltage fluctuation is less than 6%, and the lumen maintenance rate is 87
%Met.

The results are shown in sample number 1 in Table 1. Furthermore, under the conditions shown in Table 1, a thin film of oxynitride glass was similarly formed on the inner surface of the glass tube 11, and after the metal vapor discharge lamp was lit for 5000 hours, the luminous flux maintenance rate was at least 85%. Ta. Note that sample number 9 is shown as a conventional example for comparison with the present invention.

[0017]

[Table 1]

(FIG. 6) is a schematic diagram showing a projection type display of the present invention. The light from the light source 20 consisting of the metal vapor discharge lamp of the present invention is focused by a collimator lens 30, and is then condensed by a dichroic mirror 32 for blue (B), green (G), and red (R).
) were separated into three colors and made incident on each liquid crystal light valve 33. BGR images obtained from three liquid crystal light valves 33 were combined on a screen 35 using three wide-angle projection lenses 34 to obtain a full-color image. In the case of a projection display incorporating the metal vapor discharge lamp of the present invention, the screen brightness was 240 ft-L, making it possible to create a display with a bright screen and high display quality.

(Example 2) Silicon tetraethoxide S
100cc of i(OC2H5)4, 100c of methanol
c, 20 cc of water, and 7 cc of hydrochloric acid were mixed for about 2 hours and hydrolyzed to prepare a sol solution. This solution was applied to the inner surface of a glass tube 11 (inner diameter 10 mm, thickness 2 mm) made of quartz glass, aged at 30°C for 30 hours, and further heated at 60°C for 1 hour.
The gel layer 12 of dry gel was formed by drying for 00 hours.

The glass tube 11 thus obtained is (
It was processed into the shape of the tubular body 1 shown in FIG. 4) and set in the heating furnace 15 as shown in FIG. 4. After evacuation, gas introduction pipe 9
Ammonia gas was introduced through a, and the gel layer 12 was treated with ammonia while exhausting the gas through the gas exhaust pipe 9b. Here, the ammonia treatment was carried out under the conditions that the temperature of the heating furnace 15 was set to 500° C., and the temperature was maintained for 3 hours while flowing ammonia gas at 100 cc/min. Further, a porosity treatment was performed at 1250° C. for 2 hours in a mixed atmosphere of helium gas and chlorine gas. As a result, a thin film (thickness: 2 microns) of oxynitride glass containing about 2% by weight of nitrogen could be formed on the inner surface of the glass tube 11.

10 mg of sodium iodide (NaI) and thallium iodide (TlI) were added to the tube 1 thus obtained.
) 1 mg, indium iodide (InI) 0.6 mg, and mercury (Hg) 50 mg are sealed together with argon gas, and the gas introduction pipe 9a and the gas exhaust pipe 9b are chip-sealed to form the chip seal part 5 (Fig. 2 The metal vapor discharge arc tube 10 shown in ) was completed. When a lighting test was performed on the metal vapor discharge arc tube 10 manufactured in this way, the lamp voltage was 1
05V, and the lamp current was 2.38A.

Similar to Example 1, the metal vapor discharge luminous tube 10 was assembled into the reflector as shown in FIG. 5, and the arc length was 7 m.
It was lit vertically at m. When the prototype metal vapor discharge lamp is lit with a square wave with a lighting frequency of 250Hz, the total luminous flux is 2.
The light was 3000lm and the color temperature was about 5100K. Further, after the metal vapor discharge lamp of the present invention was lit for 5,000 hours, the fluctuation in lamp voltage was 5% or less, and the luminous flux maintenance rate was 89%.

The results are shown in sample number 1 in Table 2. Further, under the conditions shown in Table 2, metal vapor discharge lamps were manufactured in which thin films of various oxynitride glasses were formed on the inner surface of the glass tube 11, and after lighting the metal vapor discharge lamps for 5000 hours, the luminous flux maintenance rate was determined. was at least 85%.

[0024]

[Table 2]

As in Example 1, the metal vapor discharge lamp of the present invention was incorporated into a projection display. In the case of a projection display incorporating the metal vapor discharge lamp of the present invention, the screen brightness was 230 ft-L, making it possible to create a display with a bright screen and high display quality.

In the present invention, when a metal alkoxide solution is hydrolyzed to form a sol solution, silicon alkoxide, aluminum alkoxide, boron alkoxide, zirconium alkoxide, etc. can be used as the metal alkoxide. Further, the alkoxy group is preferably a lower alkoxy group, and for example, a methoxy group, an ethoxy group, a polypoxy group, etc. can be used.

(Example 3) A bubbler containing silicon tetrachloride (SiCl4) was maintained at a constant temperature, and argon gas was passed through the liquid as a carrier gas to vaporize the raw material. The vaporized gaseous raw material is passed through a rotating glass tube 11 (inner diameter 10
mm, thickness 2 mm), the glass tube 11 was heated with an oxyhydrogen burner to cause a hydrolysis reaction, thereby forming a porous glass layer or a fine particle layer on the inner surface of the tube (not shown).
. In order to remove OH groups and water molecules contained in the porous glass layer or the fine particle layer, dehydration treatment was performed by heat treatment in chlorine gas at 800° C. for 2 hours.

This is set in the heating furnace 15 as shown in FIG. 3, and after the glass tube 11 is evacuated, carrier gas and ammonia gas are introduced from the gas introduction part 13, and gas is exhausted from the gas exhaust part 14. At the same time, the porous glass layer 12 was treated with ammonia. Here, the ammonia treatment was carried out under the conditions that the heating furnace 15 was heated to 900° C. and maintained for 3 hours while flowing a mixed gas of nitrogen gas at 200 cc/min and ammonia gas at 400 cc/min as carrier gas. As a result, a thin film (1 micron thick) of oxynitride glass containing about 2% by weight of nitrogen could be formed on the inner surface of the glass tube 11.

The glass tube 11 thus obtained is (
It is processed into the shape of the tube 1 shown in Fig. 1), and inside it contains 3.0 mg of neodymium iodide (NdI3), 6.0 mg of desprosium iodide (DyI3), and cesium iodide (CsI).
)6.0mg and 40mg of mercury (Hg) are sealed together with argon gas, and the chip is sealed with the chip seal part 5 (
The metal vapor discharge arc tube shown in Figure 1) was completed. When the metal vapor discharge arc tube thus produced was subjected to a lighting test, the lamp voltage was 95V and the lamp current was 2.6A.

As shown in FIG. 5, a metal vapor discharge luminous tube 10
was fixed to a reflecting mirror with an inorganic adhesive (not shown). The metal vapor discharge arc tube 10 was lit vertically with an arc length of 7 mm. When the prototype metal vapor discharge lamp was lit with a square wave at a lighting frequency of 250 Hz, the total luminous flux was 16,000 lm and the color temperature was about 7,300 K. Furthermore, after lighting the metal vapor discharge lamp of the present invention for 5000 hours, the lamp voltage fluctuation was 6%.
The luminous flux maintenance rate was 87%.

[0031] The results are shown in sample number 1 in (Table 3). Furthermore, under the conditions shown in Table 3, thin films of various oxynitride glasses were similarly formed on the inner surface of the glass tube 11, and after the metal vapor discharge lamp was lit for 5000 hours, the luminous flux maintenance rate was at least 85% or more. Met.

[0032]

[Table 3]

As in Example 1, the metal vapor discharge lamp of the present invention was incorporated into a projection display. In the case of a projection display incorporating the metal vapor discharge lamp of the present invention, the screen brightness was 230 ft-L, making it possible to create a display with a bright screen and high display quality.

In the present invention, the porous glass layer or fine particle layer can be formed on the inner surface of the glass tube by a low-pressure plasma method in which a gaseous raw material is used as a starting material and synthesized in plasma under reduced pressure, or by a thermal plasma method using high frequency waves under normal pressure. It is also possible by law.

Further, in the metal vapor discharge arc tube, metal vapor discharge lamp, projection type display, and method for manufacturing a metal vapor discharge arc tube of the present invention, the shape of the metal vapor discharge arc tube, the inclusion material, the amount of the oxynitride, etc. The composition of the glass, its thickness, its formation method and conditions (temperature, time and atmosphere),
The configuration, display principle, etc. of the projection display are not limited to this embodiment.

[0036]

Effects of the Invention As explained above, the metal vapor discharge arc tube, metal vapor discharge lamp, projection type display, and method for manufacturing a metal vapor discharge arc tube of the present invention can be applied to metal vapor discharge arc tubes made of quartz glass or metal vapor discharge arc tubes. By forming a thin film made of oxynitride glass on the inner surface of the tube made of high silicate glass, the metal halide sealed inside the arc tube and the arc tube (silica glass or high silicate glass)
Reactions and crystallization with metal vapor discharge arc tubes are prevented, and the life of metal vapor discharge arc tubes can be greatly extended. As a result, it is possible to obtain a projection display with a bright screen and high display quality without deterioration in luminous flux utilization efficiency.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the metal vapor discharge arc tube of the present invention.

FIG. 2 is a sectional view showing an embodiment of the metal vapor discharge arc tube of the present invention.

FIG. 3 is a schematic diagram showing a method of forming a thin film of oxynitride glass on the inner surface of a tube.

FIG. 4 is a schematic diagram showing a method of forming a thin film of oxynitride glass on the inner surface of a tube.

FIG. 5 is a sectional view of the metal vapor discharge lamp of the present invention.

FIG. 6 is a schematic diagram showing a projection display of the present invention.

[Explanation of symbols]

1 tube body 2 tungsten electrode 3 molybdenum foil 4 tungsten wire 5 chip seal part 6 oxynitride glass thin film 9a gas introduction tube 9b gas exhaust tube 10 metal vapor discharge arc tube 11 glass tube 12 porous glass layer, gel layer, Or fine particle layer 1
3 Gas introduction part 14 Gas exhaust part 15 Heating furnace 20 Light source 21 Reflector 22 Multilayer interference film 30 Collimator lens 32 Dichroic mirror 33 Liquid crystal light valve 34 Liquid crystal light valve 35 Screen

Claims (6)

[Claims] 1. A metal vapor discharge arc tube characterized in that a thin film made of oxynitride glass is formed on the inner surface of a tube made of quartz glass or high silicate glass. 2. A metal vapor discharge lamp comprising the metal vapor discharge arc tube according to claim 1 and a reflecting mirror coated with a multilayer interference film. 3. A projection display comprising at least the metal vapor discharge lamp according to claim 2, a dichroic mirror, a liquid crystal light valve, a projection lens, a condenser lens, and a screen. 4. A porous glass layer is formed on the inner surface of a tube made of quartz glass or high silicate glass, and the porous glass layer is ammonia-treated with ammonia gas to form a thin film made of oxynitride glass. A method for manufacturing a metal vapor discharge luminous tube characterized by: 5. A solution containing a metal alkoxide as a main raw material is applied to the inner surface of a tube made of quartz glass or high silicate glass, and the solution is hydrolyzed to form a gel layer. A method for manufacturing a metal vapor discharge arc tube, comprising forming a thin film made of oxynitride glass by ammonia treatment with ammonia gas. 6. Forming a porous glass layer or a fine particle layer by heating and hydrolyzing a gaseous raw material made of a halide on the inner surface of a tube made of quartz glass or high silicate glass, and forming a porous glass layer or a fine particle layer. A method for manufacturing a metal vapor discharge arc tube, comprising forming a thin film made of oxynitride glass by ammonia treatment with ammonia gas.