JPH0532488Y2 - - Google Patents

Description

[Detailed description of the invention] [Field of industrial application] The present invention relates to work clothes for use in extremely low-dust atmosphere rooms, and is particularly designed to suppress dust generation from the human body and prevent chemical scattering in extremely low-dust atmospheres. This invention relates to a yoke that is used by being attached to low dust emitting work clothes for clean rooms to protect the human body.

[Prior art]

In general, during the development and manufacturing of semiconductor devices such as large-scale integrated circuit devices (LSI) and the development and dispensing of chemicals, various impurities may be mixed into semiconductor wafers or chemicals, or impurities may affect semiconductor devices or chemicals. To prevent this, work is carried out in a room with a low dust atmosphere (hereinafter referred to as a clean room).

The objects that are manufactured and developed in a clean room are
Super LSI equipped with millions of semiconductor elements or more
(VLSI) to separate and separate elements on the ppb order.
When dealing with refining chemicals, it is necessary to create an extremely low dust atmosphere. Specifically, an extremely low-dust atmosphere is required in which the number of floating particles of about 0.3 μm or larger is less than a few dozen pieces per cubic foot. It has been confirmed that such a clean room with an extremely low dust atmosphere can be achieved by using high-performance air filters (HEPA) and by adopting complete downflow air conditioning from the ceiling to below the floor. However, the dust emitted from human bodies working in this level of atmosphere has an extremely large impact. This is because small pieces of broken fibers from general clothing, sebum from the surface of the human body and dust attached to it, small pieces of dried and peeled skin, etc., are scattered in an extremely low-dust atmosphere. It has become essential for people working in extremely low-dust environments to wear low-dust-producing work clothes to prevent dust from scattering.

For example, as shown in Fig. 9, conventional general low-dust-producing work clothes for scattering prevention include hooded overalls (hereinafter referred to as dust-free clothes) 1 that integrate a head 1A and a body 1B. It comes from dust-free shoes 2. The material of the dust-free clothing 1 is not wool or cotton, which tend to generate small pieces, but is woven from chemical fibers such as polyester. A fastener 3 is provided on the front surface of the dust-free clothing 1 so that it can be easily attached and detached. This fastener 3 is
This causes dust to be generated.

That is, FIG. 10 (side view showing the positional relationship between work clothes and semiconductor wafer handling section during work)
As shown in FIG. 11 (a top view of the positional relationship between the work clothes and the semiconductor wafer handling section during work), dust 4 on the worker's chest is caused by the movement of the work clothes. leaking from the fastener 3;
It falls onto the semiconductor wafer (or sample) 6 on the workbench 5, and is the primary cause of contaminating the semiconductor wafer 6.

Therefore, the position of the fastener 3 on dust-free clothing has been improved in various ways, and the fastener 3 has been placed on the back and inseam.
There are some that can be attached and detached.

Further, FIG. 12 shows the splashing of the chemical solution and water when the chemical solution is used and washed with water.

In Figure 12, splashing of the chemical solution during cleaning 7
It extends to the face 11, centering on the chest 8, hands 9, and arms 10. For this reason, a face cover 12 is used to protect the face, and chemical-resistant gloves 13 are used for the hands and arms. For the chest, a chemical-resistant apron 14 as shown in FIG. 13 (front part) and FIG. 14 (rear part) is used.

[Problem that the invention attempts to solve]

However, when using the chemical-resistant apron 14, it not only restricts movement, but also requires tying and securing the string 15 at the back, making it difficult to wear. In addition, if the chemical liquid-resistant apron 14 is not used, the splashing of the chemical liquid may occur on the chest 8 of the dust-free clothing 1.
It often reaches the point where there is a hole. This is because the conventional dust-free clothing 1 had poor chemical resistance. On the other hand, when the dust-free clothing 1 is made resistant to chemical liquids, the air containing dust inside the dust-free clothing 1 tends to come out through the openings, causing dust generation.

In addition, in the improved dust-free clothing, since the fastener 3 for attachment and detachment is attached to the back and crotch,
The problem was that it was very difficult to wear.

The present invention has been made to solve the above problems.

The purpose of the present invention is to provide work clothes for clean rooms (dust-free clothes) that can suppress dust generation from the human body to an extremely low level.

Another object of the present invention is to provide clean room work clothes (dust-free clothes) that can protect the human body by preventing chemical damage to the front of the chest and abdomen during work.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Means for solving problems]

A brief overview of typical devices among the devices disclosed in this application is as follows.

That is, in a clean room work suit (dust-free suit) having a fastener or other fastener that can be opened and closed at a predetermined part on the front,
The device is characterized by the detachable provision of a yoke made of a material having at least one of the following properties: dust resistance and resistance to chemicals.

[Effect]

According to the above means, in clean room work clothes (dust-free clothes), on the front of the chest and abdomen,
By providing a removable yoke made of a material that has at least one of the following characteristics: dustproofness and chemical resistance, the product has the advantages of conventional clean room work clothes (dust-free clothes) and is easy to put on and take off. It is possible to increase the dustproof effect of clean room work clothes (dust-free clothing) and protect the human body in the event of chemical liquid splashing without causing major damage and without having to take the trouble of using a dust-proof or chemical-resistant apron. , workability and safety under special environments, and a cleaner atmosphere in a clean room can be achieved at the same time. Furthermore, since the yoke is detachably attached to clean room work clothes (dust-free clothes), only the yoke that is easily soiled can be replaced with another spare.

[Example of idea]

Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

In addition, in all the figures, parts having the same functions are given the same reference numerals, and repeated explanations thereof will be omitted.

Figure 1 is a front view of a dust-proof or chemical-proof yoke according to an embodiment of the present invention removably attached to conventional clean room work clothes (dust-free clothes). 3 is a right side view of FIG. 1, and FIG. 4 is a clean room work uniform for removably attaching a dust-proof or chemical-resistant yoke according to an embodiment of the present invention. It is a front view showing the structure of the chest and abdomen of (dust-free clothing).

FIG. 5 is a top plan view showing the configuration of a dustproof or chemical liquid resistant yoke according to an embodiment of the present invention. FIG. 6 is a front side plan view showing the configuration of a dustproof or chemical liquid resistant yoke according to an embodiment of the present invention. Back side plan view, The dustproof or chemical liquid resistant yoke of this example has the first
As shown in Figures to Figures 4, normal dust-free clothing 1 is
The head 1A and body part 1B are integrated, and the dust-free shoes 2 are also boots. The chest and abdomen of this dust-free clothing 1 are made of a material having at least one of dustproofness and chemical liquid resistance so as to cover the front fastener 3. A protective yoke (hereinafter simply referred to as yoke) 20 is detachably attached.

As shown in FIGS. 5 and 6, the yoke 20 is provided with detachable fasteners 21 on its left and right back surfaces, and as shown in FIG. It is designed to be detachably attached to fasteners 21A provided on the left and right surfaces of. In addition, on the upper shoulder of the yoke 20,
Magic tape (registered trademark) 22 is provided to detachably attach the yoke 20, and further,
There is a front hook (similar to a snap button) 2 on the upper shoulder of the side that is used less frequently to securely fasten it.
3 is provided. These Magic Tape (registered trademark) 22 and front hook 23 are designed to be detachably attached to the Magic Tape (registered trademark) 22A and front hook mating side 23A provided on the upper shoulder of normal dust-free clothing 1, respectively. It's summery.

In addition, the mounting position of the yoke 20 is 2 to 3 cm from the shoulder center line M, as shown in FIGS. 2 and 3.
It is set up later. In this way, the air 24 containing dust does not flow out to the front part, but flows out from behind the shoulders toward the back. Further, as described above, the front hook 23 is attached to the shoulder that is used less frequently and is firmly fixed.

The width of the yoke 20 is as shown in FIG.
It is widened to the base of both shoulders and arms (5th
(Indicated by W in the figure). The length of the yoke 20 is, for example, the length of the semiconductor wafer handling workbench 5 (85 cm above the floor as shown in FIG. 10) below the waist part.
It is effective to extend it to a point lower than (indicated by H in Figure 5).

The material of the yoke 20 is a material having at least one of dustproofness and chemical resistance. For example, the dust-proof yoke 20 is made of the same material as the dust-free clothing 1, for example, woven from chemical fiber such as polyester, and the chemical-resistant yoke 20 is made of a chemical-resistant film. or use chemical-resistant tie cloth. In addition, yoke 2 for dustproof and chemical liquid resistance
The material of 0 is the same material as dust-free clothing 1,
The material used is coated with a chemical-resistant film.

By using clean room work clothes having such a structure, the following advantages arise.

(1) The front part of the work clothes is doubled by the dust-free clothes 1 and the yoke 20, and the fastener 3 is made double by the yoke 20.
dust can be suppressed. Furthermore, the air 24 containing dust is removed from the gap 2 in the front part.
5, 26 and the gap 27 in the upper shoulder, the air cleanliness of the semiconductor wafer handling area is not impaired and the influence of dust from the human body can be reduced.

(2) By providing the dust-free clothing 1 with the common fasteners 21A (FIG. 4) on both sides, the yoke 20 can be replaced with another chemical-resistant yoke 20. Therefore, the dust-free clothing 1 can be shared. Thereby, there is no need to stock a large amount of dust-free clothes 1, and unused dust-free clothes 1 can be reused.

Further, the yoke 20 shown in FIGS. 5 and 6 above
Instead, an apron part 30A and a sleeve part 30B for passing the arms are provided as shown in FIG. 7 (front side plan view) and FIG. A provided yoke 30 may also be used. By configuring in this way, the apron portion 30
There is no need to provide attachment/detachment fasteners 21 on the left and right back surfaces of A, and the garment can be easily attached to the dust-free clothing 1 by simply passing the arm through the sleeve portion 30, and can be easily removed from the shoulder. I can do it.

At predetermined positions on the front yokes 20 and 30, a fifth
As shown in the figure, a marker recording section 31 is provided in which markers such as names and affiliations are written. By doing this, it is possible to easily manage the clothes after washing, and it is also possible to change the color of the yoke and the dust-free clothes, and it is also possible to change the type of the yoke. In other words, it is fashionable. Nowadays, clean rooms have become workplaces where young people work under special environments, and it is important to work in a fashionable style and have fun in order to increase effectiveness.

Further, the cause of dust generation in the dust-free clothing 1 (front fastener part) is a phenomenon of air vibration within the work clothing called pump effect. This air flow scatters a large amount of dust from the front fasteners of clothing, wrists, ankles, etc., which are highly dust-producing. For this reason, the wrists are covered with gloves and the ankles are covered with boots.

Although the present invention has been specifically explained above based on the embodiments, it goes without saying that the present invention is not limited to the above-mentioned embodiments, and can be modified in various ways without departing from the gist thereof.

[Effect of idea]

As explained above, according to the present invention, in clean room work clothes (dust-free clothes), the front of the chest and abdomen is made of a material that has at least one of the characteristics of dustproofness and chemical liquid resistance. By providing a removable yoke, the ease of putting on and taking off, which is an advantage of conventional clean room work clothes (dust-free clothes), is not significantly compromised, and it is also possible to use a dust-proof or chemical-resistant apron. It improves the dust-proofing effect of clean room work clothes (dust-free clothes) and protects the human body in the event of chemical liquid scattering, thereby improving workability, safety, and clean room performance in special environments. A cleaner atmosphere can be achieved at the same time. Furthermore, since the yoke is provided so as to be detachable from the clean room work clothes (dust-free clothes), only the yoke, which is easily soiled, can be replaced with another spare.

Furthermore, the width of the yoke is widened to the base of both shoulders and arms, and the length of the yoke is extended from both shoulders to below the waist, and
By installing the yoke at the back side (rear side) by a predetermined length from the shoulder center line, air containing dust from the human body does not flow out to the front part, and instead is directed from behind the shoulder center line towards the back. Since it flows out, the influence of dust generated from the human body can be reduced.

In addition, the dust-proof and chemical-resistant yoke can be easily produced by using the same material as clean room work clothes and simply coating the material with a dust-proof and chemical-resistant film. I can do it.

[Brief explanation of drawings]

Figure 1 is a front view of a dust-proof or chemical-proof yoke according to an embodiment of the present invention removably attached to conventional clean room work clothes (dust-free clothes);
The figures show a left side view of Fig. 1, Fig. 3 a right side view of Fig. 1, and Fig. 4 a diagram showing a structure for removably attaching a dust-proof or chemical-proof yoke according to an embodiment of the present invention. It is a front view showing the structure of the chest and abdomen of the dust-free clothing. FIG. 5 is a top plan view showing the configuration of a dustproof or chemical liquid resistant yoke according to an embodiment of the present invention, and FIG. 6 is a front side plan view showing the configuration of a dustproof or chemical liquid resistant yoke according to an embodiment of the present invention. The back side plan view, FIGS. 7 and 8 are the front side plan view and the back side plan view showing the configuration of other embodiments of the dustproof or chemical liquid resistant yoke, and FIGS. 9 to 14 are the conventional clean yoke. It is a figure for explaining the problem of room work clothes (dust-free clothes). In the figure, 1... Dust-free clothing, 3... Dust-free clothing fastener, 20, 30... Yoke, 21... Fastener for attachment and detachment, 22, 22A... Magic tape (registered trademark), 23, 23A... Front Hotsuku, 30
A...Apron part, 30B...Sleeve part, 31...Mark recording part.

Claims (1)

[Scope of Claim for Utility Model Registration] (1) Clean room work clothes that are equipped with fasteners or other fasteners that can be opened and closed at a predetermined part of the front, and that have at least one of dustproofness and chemical resistance on the chest and abdomen. A yoke made of a material having one characteristic is removably provided to cover the fastener, etc., and the width of the yoke is wide from both shoulders and the base of the arm, and the length of the yoke is from both shoulders to the waist. The yoke is attached to a predetermined length on the back side (rear side) of the shoulder center line. (2) The dust-proof or chemical-proof yoke is made of the same material as clean room work clothes;
Clean room work clothes according to item 1 of the utility model registration claim, characterized in that the material is coated with a dust-proof or chemical-resistant film.