JPH05323067A - Manufacture of inclined function material - Google Patents
Manufacture of inclined function materialInfo
- Publication number
- JPH05323067A JPH05323067A JP4150040A JP15004092A JPH05323067A JP H05323067 A JPH05323067 A JP H05323067A JP 4150040 A JP4150040 A JP 4150040A JP 15004092 A JP15004092 A JP 15004092A JP H05323067 A JPH05323067 A JP H05323067A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- spraying
- gas
- hip
- inclined function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Pressure Welding/Diffusion-Bonding (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、成分を連続的あるいは
段階的に傾斜させた傾斜機能材料の製造方法に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a functionally gradient material in which components are graded continuously or stepwise.
【０００２】[0002]
【従来の技術】トカマク型等の強力な磁場によってプラ
ズマを閉じ込める形式の核融合炉では、プラズマが寸時
に消滅する現象（プラズマディスラプション）が起こる
とプラズマ中の電流の減衰に伴って周囲の導電性構造物
に渦電流が誘起され、磁場との相互作用によって強大な
電磁力が発生する。この電磁力は約２０ＭＴ（２０００
トン）にも達するため、前記構造物が破壊されるおそれ
があった。2. Description of the Related Art In a fusion reactor of a type such as a tokamak type in which plasma is confined by a strong magnetic field, when a phenomenon in which plasma is extinguished in a short time (plasma disruption) occurs, the ambient current is attenuated in the plasma. An eddy current is induced in the conductive structure, and a strong electromagnetic force is generated by the interaction with the magnetic field. This electromagnetic force is about 20 MT (2000
Since the number of tons is reached, the structure may be destroyed.
【０００３】これを防止するための対策の一つとして構
造物の一部に、絶縁性セラミクス等の高電気抵抗部を設
けて渦電流の回路を切り、電磁力を低減することが考え
られるが、セラミクスは信頼性の高い真空境界を形成す
る接続が困難であるため、中央部に電気絶縁性セラミク
ス、周囲に金属を配置し、その中間で成分を連続的ある
いは段階的に傾斜させた傾斜機能材料を製作し、該傾斜
機能材料を溶接、固相接合等の冶金的方法によって接合
し、ブランケットあるいは遮蔽体容器を形成することが
提案されている。（例えば、特願平２−３０５９４７号
公報。）その場合の傾斜機能材料の製造方法として、従
来は自己発熱反応法、焼結法、溶射法、物理・化学蒸着
法等が提案され、開発が進められてきた。As one of the measures to prevent this, it is considered that a part of the structure is provided with a high electric resistance part such as insulating ceramics to cut the eddy current circuit to reduce the electromagnetic force. Since ceramics are difficult to connect to form a highly reliable vacuum boundary, an electrically insulating ceramics is placed in the center and a metal is placed around it, and a gradient function in which the components are graded continuously or stepwise in the middle. It has been proposed to fabricate materials and join the functionally graded materials by a metallurgical method such as welding or solid phase joining to form a blanket or shield container. (For example, Japanese Patent Application No. 2-305947.) As a method for manufacturing a functionally gradient material in that case, a self-heating reaction method, a sintering method, a thermal spraying method, a physical / chemical vapor deposition method, etc. have been conventionally proposed and developed. It has been advanced.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら上記従来
の技術における傾斜機能材料の製造方法においては、そ
れぞれ以下に示すような不具合を有するものであった。 自己発熱反応法あるいは焼結法においては、高密度
で肉厚の構造物を製造することが可能であるが、構造物
が大型である場合、製造時に発生する熱応力の一層の緩
和と、加熱炉等の装置の大型化が必要になり、工業的あ
るいは経済的に解決すべき多くの課題を有するものであ
った。 溶射法は構造物を順次移動させることによって大面
積あるいは長尺等の大型の構造物の製造が可能である
が、溶射物の密度に限界があり一定値以上に成し得ない
ことから、真空・圧力境界における構造物に使用するこ
とは困難であった。また、構造物が厚肉を必要とする場
合、溶射部を厚肉にし得ないことから、他の部材と溶接
によって接合することが極めて困難であると言う不具合
を有していた。本発明はこのような不具合を解消し、低
い製造コストと高い信頼性の下で大面積の或いは長尺で
かつ厚肉の傾斜機能材料を製造する方法を提供すること
を目的としている。However, each of the above-mentioned conventional methods for producing a functionally gradient material has the following drawbacks. In the self-heating reaction method or the sintering method, it is possible to manufacture a dense and thick structure, but when the structure is large, the thermal stress generated during manufacturing is further relaxed and heating is performed. The apparatus such as a furnace needs to be upsized, and there are many problems to be solved industrially or economically. The thermal spraying method can manufacture a large structure such as a large area or a long structure by sequentially moving the structure, but there is a limit to the density of the thermal sprayed material, and it is impossible to achieve a certain value or more. -It was difficult to use for structures at pressure boundaries. Further, when the structure requires a large thickness, the sprayed portion cannot be made thick, and thus it is extremely difficult to join it to other members by welding. It is an object of the present invention to solve the above problems and provide a method for manufacturing a functionally graded material having a large area or a long length and a large thickness with a low manufacturing cost and high reliability.
【０００５】[0005]
【課題を解決するための手段】上記の目的は前記特許請
求の範囲に記載された傾斜機能材料の製造方法によって
達成される。すなわち、セラミクスと金属とによって形
成される傾斜機能材料の製造方法において、プラズマ溶
射法と熱間静水圧加圧法とを組み合わせ、プラズマ溶射
法によって成分を傾斜させた材料を製作し、該材料を熱
間静水圧加圧法によって加熱・圧縮する傾斜機能材料の
製造方法である。以下本発明の作用等について実施例に
基づいて説明する。The above object can be achieved by the method for producing a functionally gradient material described in the claims. That is, in the method for producing a functionally graded material formed of ceramics and metal, a plasma spraying method and a hot isostatic pressing method are combined to produce a material having a graded component by the plasma spraying method, and the material is thermally treated. It is a method for producing a functionally graded material that is heated and compressed by a hydrostatic pressure method. Hereinafter, the operation and the like of the present invention will be described based on Examples.
【０００６】[0006]
【実施例】図１は本発明に基づく傾斜機能材料の製造方
法の１実施例を示す系統図である。図１において１は傾
斜機能材料、２は溶射材料粉末、３は直流アーク、４は
陽極ノズル、５は陰極、６はガス、７は直流電源、８は
冷却水、９は圧力容器、１０はヒータ、１１はヒータ制
御装置、１２はポンプ、１３はタンク、１４は熱交換
器、１５は冷却水、１６は大気、１７は真空ポンプ、１
８はガス圧縮機、１９はガス集合装置である。FIG. 1 is a system diagram showing one embodiment of a method of manufacturing a functionally gradient material according to the present invention. In FIG. 1, 1 is a functionally gradient material, 2 is a thermal spray material powder, 3 is a DC arc, 4 is an anode nozzle, 5 is a cathode, 6 is a gas, 7 is a DC power supply, 8 is cooling water, 9 is a pressure vessel, 10 is a Heater, 11 heater control device, 12 pump, 13 tank, 14 heat exchanger, 15 cooling water, 16 atmosphere, 17 vacuum pump, 1
Reference numeral 8 is a gas compressor, and 19 is a gas collecting device.
【０００７】まず必要な性状、寸法を有するセラミクス
の板を設置する。次にセラミクスと金属の粉末を、その
混合比を最初セラミクスに近い性状に調整し、そのあと
連続的あるいは段階的に次第に金属の性状に近づけるよ
うにして調整しながら、前記セラミクスの板上に溶射し
て積層して行く。これによって一面がなセラミクスの性
状を有し、その裏面が金属の性状を有して内部は緩やか
にその成分を傾斜させた傾斜機能材料による板が形成さ
れる。First, a ceramic plate having required properties and dimensions is installed. Next, the ceramics and the metal powder are sprayed onto the ceramic plate while adjusting the mixing ratio first to a property close to that of the ceramics, and then continuously or step by step so as to gradually approach the properties of the metal. And then stack. As a result, a plate is formed of a functionally graded material, one surface of which has the property of ceramics, the other surface has the property of metal, and the inside of which has its components gently tilted.
【０００８】溶射は金属の表面層に使用目的に応じた特
性を保持させる手段として近年急速に開発が進められて
いる工法であり、自己発熱反応法あるいは焼結法が高密
度で厚肉の構造物を製造することが可能であるものの、
大型構造物の製造時には発生する熱応力の一層の緩和
と、装置の大型化が必要であったのに対して、装置の移
動によって自由に大面積あるいは長尺の製品を製作する
ことが可能であることに特徴があり、凡そ次のような種
類がある。[0008] Thermal spraying is a construction method that has been rapidly developed in recent years as a means for maintaining the characteristics of a metal surface layer according to the purpose of use. The self-heating reaction method or the sintering method has a high density and thick structure. Although it is possible to manufacture things,
While it was necessary to further alleviate the thermal stress generated when manufacturing large structures and to enlarge the equipment, it is possible to freely manufacture large-area products or long products by moving the equipment. There is one characteristic, and there are roughly the following types.
【０００９】先ず溶湯式溶射法は、主として低融点金属
を対象にし、電熱又は都市ガスを用いた溶解鍋で溶射材
料を溶かし、パイプで導いて圧縮空気とともに吹き付け
るものである。First, the molten metal spraying method mainly targets low-melting-point metals, and melts the sprayed material in a melting pot using electric heat or city gas, guides it with a pipe and blows it together with compressed air.
【００１０】次に溶線式、溶棒式、粉末式、爆燃式等の
ガス式溶射法は、酸素・燃料ガスによって種々の形状の
溶射材料を溶融させながら吹き付けて傾斜機能材料の板
を形成させるものである。Next, in the gas-type spraying method such as the wire-welding method, the melting-rod method, the powder method, and the detonation method, the sprayed material having various shapes is melted and sprayed with oxygen / fuel gas to form a plate of the functionally graded material. It is a thing.
【００１１】これに対してプラズマ溶射法、アーク溶射
法、高周波誘導式溶射法、線爆溶射法等の電気式溶射法
は、アークあるいは誘導加熱によって溶射材を溶融させ
て吹き付けるもので、前記溶湯式溶射法あるいはガス式
溶射法に較べて発生する温度が高くセラミクスの溶解に
適しており、なかでも特に本発明に使用したプラズマ溶
射法は発生する温度が10,000〜15,000℃と高く、一般に
耐熱性、耐酸性、耐磨耗性などに優れた材料は高融点材
料に多く見られるが、それらを含めて金属、合金はもと
より、高融点酸化物セラミクス、金属炭化物、硼化物、
窒化物等、殆どあらゆるものを溶射することが可能であ
る。On the other hand, electric spraying methods such as plasma spraying method, arc spraying method, high frequency induction spraying method, and line explosion spraying method are those in which a spraying material is melted and sprayed by an arc or induction heating. The temperature generated is higher than that of the thermal spraying method or the gas spraying method and is suitable for melting ceramics. Among them, the plasma spraying method used in the present invention has a high generating temperature of 10,000 to 15,000 ° C and generally has high heat resistance. Materials with excellent acid resistance, abrasion resistance, etc. are often found in high-melting-point materials, including those including metals, alloys, high-melting-point oxide ceramics, metal carbides, borides,
Almost any material such as nitride can be sprayed.
【００１２】第１図の上図において、タングステンの陰
極５と水冷銅ノズルの陽極ノズル４の内面の間に直流電
源７によって直流アーク３を発生させ、後方から送られ
て来た作動用ガス６をプラズマ化すると共に溶射材料粉
末２を送入し、溶融状態の溶射材料をジェット気流にの
せて吹き付ける。前記において説明したように、設置し
た必要な性状、寸法を有するセラミクスの板の上にセラ
ミクスと金属の粉末を、その混合比を最初セラミクスに
近い性状に調整し、そのあと連続的あるいは段階的に次
第にセラミクスの性状から金属の性状に近づけるように
調整しながら、前記セラミクスの板上に溶射して積層し
て行く。これによって一面がセラミクスの性状を有し、
その裏面が金属の性状を有して内部は緩やかにその成分
を傾斜させた傾斜機能材料１の板が形成されるが、形成
された傾斜機能材料１は溶射部の密度が小さくポーラス
状であるほか、その厚みもせいぜい数ｍｍ程度のもので
あるため、溶接による接合が困難であり真空・圧力境界
の構造物として使用することが困難であった。In the upper part of FIG. 1, a DC arc 3 is generated by a DC power supply 7 between the cathode 5 made of tungsten and the anode nozzle 4 of the water-cooled copper nozzle, and the working gas 6 sent from the rear side. And the thermal spraying material powder 2 is fed, and the thermal spraying material in a molten state is placed on a jet stream and sprayed. As explained above, the ceramics and the metal powder are placed on the ceramic plate having the necessary properties and dimensions, and the mixing ratio thereof is first adjusted to a property close to that of the ceramics, and then continuously or stepwise. Gradually, the properties of the ceramics are adjusted so as to be closer to those of the metal, and thermal spraying and lamination are performed on the ceramic plate. As a result, one side has the property of ceramics,
A plate of the functionally-graded material 1 having a metallic property on its back surface and having its components gently slanted inside is formed, but the formed functionally-functional material 1 has a small density of the sprayed portion and is porous. In addition, since its thickness is at most about several mm, it is difficult to join it by welding and it is difficult to use it as a structure at the vacuum / pressure boundary.
【００１３】本発明においては、上記手段によって形成
された傾斜機能材料１を図１の下部に示す熱間静水圧加
圧炉内に挿入し、高温・高圧ガスによる静水圧を負荷し
て高密度化を行うものである。熱間静水圧加圧法（以
下、単にＨＩＰという。）はヒータ制御装置１１で制御
されるグラファイトやモリブデン等のヒータ１０によっ
て加熱し、ガス集合装置１９から供給されるアルゴン等
の不活性ガスをガス圧縮機１８によって加圧したものを
供給して加圧し、断熱層内部を最高２０００気圧で２０
００℃まで昇温・昇圧する。又ヒータ１０の周外壁はポ
ンプ１２、タンク１３および熱交換器１４を通じて循環
される冷却水１５によって冷却されている。In the present invention, the functionally graded material 1 formed by the above means is inserted into the hot isostatic pressurizing furnace shown in the lower portion of FIG. It is to convert. The hot isostatic pressing method (hereinafter, simply referred to as HIP) is heated by a heater 10 such as graphite or molybdenum controlled by a heater control device 11, and an inert gas such as argon supplied from a gas collecting device 19 is gas. Compressed by the compressor 18, it is supplied and pressurized, and the inside of the heat insulating layer is kept at a maximum pressure of 2000 atm.
Raise the temperature to 00 ° C and pressurize. The outer peripheral wall of the heater 10 is cooled by the cooling water 15 circulated through the pump 12, the tank 13 and the heat exchanger 14.
【００１４】溶射によって形成した傾斜機能材料１の金
属側に所要の寸法、形状の金属板を配設し、該金属板と
傾斜機能材料１の金属側との間に高圧ガスが侵入しない
ようにシールを行ったのち真空排気を行い、熱間静水圧
加圧炉の炉内に挿入して載置し、的確な温度でＨＩＰ処
理を行うことにより、溶射部は押し潰されて空洞状部分
は消滅し、かつ拡散現象により組織が一体化して、等方
加圧により変形のない片面がセラミクス板、他面が金属
板で、その間が成分傾斜した密度の高い傾斜機能材１が
生産される。A metal plate having a required size and shape is disposed on the metal side of the functionally gradient material 1 formed by thermal spraying so that high-pressure gas does not enter between the metal plate and the metal side of the functionally gradient material 1. After sealing, vacuum evacuation is performed, the hot isostatic pressurizing furnace is inserted and placed in the furnace, and the HIP process is performed at an appropriate temperature. A highly functional functional material 1 is produced which disappears and the tissues are integrated due to the diffusion phenomenon, and one side which is not deformed by isotropic pressurization is a ceramic plate and the other surface is a metal plate, and a component is inclined between them.
【００１５】本発明に基づく傾斜機能材料の製造方法に
適合する材料として、例えばセラミクス材料は、代表的
なものとして、ＳｉＣ，Ｓｉ3 Ｎ4 ，Ａｌ2 Ｏ3 ，Ｚｒ
Ｏ2等があり、金属材料は、代表的なものとして、ステ
ンレス鋼、アルミニウム合金、チタン合金等がある。As a material suitable for the method for producing a functionally graded material according to the present invention, for example, a ceramic material is representative, SiC, Si 3 N 4 , Al 2 O 3 , Zr.
O 2 and the like, and typical metal materials include stainless steel, aluminum alloys, and titanium alloys.
【００１６】[0016]
【発明の効果】このように本発明によれば上記実施例に
おいて説明したように、大型（大面積、長尺）、厚肉
で、かつ密度の高い傾斜機能材構造物を製造することが
可能になり、真空境界や圧力境界を形成する大型構造物
に使用し得るとともに、溶接接合等が可能な信頼性の高
い傾斜機能材部品を提供することが可能になる。As described above, according to the present invention, as described in the above embodiment, it is possible to manufacture a functionally graded functional material structure having a large size (large area, long size), a large thickness, and a high density. Therefore, it is possible to provide a highly functional gradient material part that can be used for a large structure that forms a vacuum boundary or a pressure boundary and that can be welded and the like.
【図１】本発明に基づく傾斜機能材料の製造方法の１実
施例を示す系統図である。FIG. 1 is a system diagram showing one embodiment of a method of manufacturing a functionally gradient material according to the present invention.
１ 傾斜機能材料 ２ 溶射材料粉末 ３ 直流アーク ４ 陽極ノズル ５ 陰極 ６ ガス ７ 直流電源 ８ 冷却水 ９ 圧力容器 １０ ヒータ １１ ヒータ制御装置 １２ ポンプ １３ タンク １４ 熱交換器 １５ 冷却水 １６ 大気 １７ 真空ポンプ １８ ガス圧縮機 １９ ガス集合装置 1 Functionally Gradient Material 2 Thermal Spraying Material Powder 3 DC Arc 4 Anode Nozzle 5 Cathode 6 Gas 7 DC Power Supply 8 Cooling Water 9 Pressure Vessel 10 Heater 11 Heater Controller 12 Pump 13 Tank 14 Heat Exchanger 15 Cooling Water 16 Atmosphere 17 Vacuum Pump 18 Gas compressor 19 Gas collector
───────────────────────────────────────────────────── フロントページの続き (72)発明者 松崎 裕司 兵庫県明石市川崎町１番１号 川崎重工業 株式会社明石技術研究所内 (72)発明者 藤岡 順三 兵庫県明石市川崎町１番１号 川崎重工業 株式会社明石技術研究所内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Yuji Matsuzaki 1-1 Kawasaki-cho, Akashi-shi, Hyogo Kawasaki Heavy Industries Ltd. Akashi Technical Research Institute (72) Inventor Junzo Fujioka 1-1, Kawasaki-cho, Akashi-shi, Hyogo Kawasaki Heavy Industries Ltd. Akashi Technical Research Institute
Claims (1)
傾斜機能材料の製造方法において、プラズマ溶射法と熱
間静水圧加圧法とを組み合わせ、プラズマ溶射法によっ
て成分を傾斜させた材料を製作し、該材料を熱間静水圧
加圧法によって加熱・圧縮することを特徴とする傾斜機
能材料の製造方法。1. A method for producing a functionally graded material formed of ceramics and a metal, wherein a plasma spraying method and a hot isostatic pressing method are combined to produce a material whose components are graded by a plasma spraying method. A method for producing a functionally gradient material, comprising heating and compressing a material by a hot isostatic pressing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04150040A JP3113738B2 (en) | 1992-05-19 | 1992-05-19 | Manufacturing method of functionally graded material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04150040A JP3113738B2 (en) | 1992-05-19 | 1992-05-19 | Manufacturing method of functionally graded material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05323067A true JPH05323067A (en) | 1993-12-07 |
| JP3113738B2 JP3113738B2 (en) | 2000-12-04 |
Family
ID=15488192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04150040A Expired - Fee Related JP3113738B2 (en) | 1992-05-19 | 1992-05-19 | Manufacturing method of functionally graded material |
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| Country | Link |
|---|---|
| JP (1) | JP3113738B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022013285A1 (en) * | 2020-07-14 | 2022-01-20 | Soleras Advanced Coatings Bv | Manufacture and refill of sputtering targets |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5600244B2 (en) * | 2009-02-10 | 2014-10-01 | クリナップ株式会社 | Storage |
| JP5600243B2 (en) * | 2009-02-10 | 2014-10-01 | クリナップ株式会社 | Storage |
-
1992
- 1992-05-19 JP JP04150040A patent/JP3113738B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022013285A1 (en) * | 2020-07-14 | 2022-01-20 | Soleras Advanced Coatings Bv | Manufacture and refill of sputtering targets |
| BE1028482B1 (en) * | 2020-07-14 | 2022-02-14 | Soleras Advanced Coatings Bv | Manufacture and refill of sputtering targets |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3113738B2 (en) | 2000-12-04 |
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