JPH05320903A - Vacuum deposition device - Google Patents

Abstract

PURPOSE:To leave a supplying and winding zone open and to facilitate paper traveling by providing a paper traveling belt pulley means, its driver, two paper traveling belts and a film fixing wire in the supplying and winding zone. CONSTITUTION:When a film 9 is ran out during vapor deposition and the end of the preceding film is not in the supplying and winding zone A, a gate valve 7 is opened, the zone A and a vapor deposition zone B are opened to the atmosphere, the zone A is operated, and the tip of fresh film is fixed to a wire 14. A driver is operated to drive a paper traveling belt pulley means 11', hence a paper traveling belt 5 is rotated, the wire 14 laid over the belt 5 and the tip of the fresh film are guided from the pulley means 11' along the pulley 11, passed through an opening 19, turned back at a cooling roll 3, passed through the opening 19 and returned to the zone A.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum vapor deposition apparatus for producing a vapor deposition film used for electronic parts, packaging materials and the like.

[0002]

2. Description of the Related Art Conventional examples of a vacuum vapor deposition apparatus for producing a vapor deposition film used for electronic parts, packaging materials, etc. are shown in FIGS.
It will be explained based on.

FIG. 6 is a sectional view showing the structure and operation of the first conventional example.

In FIG. 6, a vacuum chamber 8 is shown as a first conventional example.
Inside, a film supplying means 2 for supplying the film 9 while holding the original 2 ', a guide roll 6 for guiding the film 9 supplied from the film supplying means 2 to the cooling roll 3, and a film 9 for this film 9 are rolled. A cooling roll 3 which folds back along the surface, and a vapor deposition crucible 4 which is disposed below the cooling roll 3 to vaporize the vapor deposition substance and vaporize it on a film 9 located along the roll face of the cooling roll 3. ,
It has a guide roll 6 for guiding a vapor deposition film 9'deposited by the vapor deposition crucible 4 to a winding means 1 (described later) and a winding means 1 for winding the vapor deposition film 9 '. Reference numeral 17 is a workbench.

However, in the structure of the first conventional example described above, after the vapor deposition operation is completed, the original fabric 2'held by the film supplying means 2 is replaced with a new original fabric 2 ', and the vapor deposition film roll held by the winding means 1 is replaced. It is necessary to take out / replace work for taking out 1 ′ and replacing it with the winding core 1 ″, and at this time, work is performed by opening the inside of the vacuum container 5 to the atmosphere. Although the inside of the vacuum container 5 is evacuated, there is a problem that it takes a long time to evacuate because the entire interior of the vacuum container 5 is opened to the atmosphere.

The second conventional example has the configuration and operation shown in FIGS. 7 and 8 in order to solve this problem.

In FIG. 7, in the second conventional example, the opening 19
In the vacuum container 8 which is divided into a supply / winding zone A and a vapor deposition zone B by a partition wall 18 having a film, a film 9 from the original 2'is supplied to the supply / winding zone A in the opening 1 of the partition wall 18.
Film supply means 2 for supplying to the vapor deposition zone B through 9
A guide roll 6 for guiding the film 9 supplied from the original fabric 2'to the opening 19, and a winding means 1 for winding the vapor deposition film 9'which is vapor-deposited and folded back in the vapor deposition zone B through the opening 19 of the partition wall 18. And a guide roll 6 for guiding the vapor deposition film 9'to the winding means 1, and the film 9 supplied from the film supply means 2 to the vapor deposition zone B.
The cooling roll 3 which is folded back along the roll surface, the evaporation crucible 4 which is located below the cooling roll 3 and which evaporates the vapor deposition material and deposits it on the film 9 located along the cooling roll 3, and the above-mentioned folding back. Open the deposited film 9 '
When the original 2'is replaced, the gate valve 7 provided in the partition wall 18 is closed and the opening 19 extends to the supply / winding zone A at the previous time. With the film 15 and the previous vapor deposition film 15 ′ sandwiched, the airtightness of the opening 19 of the partition wall 18 is maintained, and the vacuum state of the vapor deposition zone B is maintained.
The end of the new film 16 is adhered to the end of the film with the adhesive tape 13, and the previous vapor deposition film 15 'is directly adhered to the winding core 1'held by the winding means 1 with the adhesive tape 13.
After this, when the supply / winding zone A side is evacuated to the same degree of vacuum as the vapor deposition zone B, the gate valve 7 can be opened to start the vapor deposition work.

[0008]

However, in the configuration of the second conventional example, if the film 9 is cut during the vapor deposition work,
Last time, the edge of the film 15 was not in the supply / winding zone A,
Since the above operation cannot be performed, both the supply / winding zone A side and the vapor deposition zone B side are opened to the atmosphere, the gate valve 7 is opened, the new film 16 is opened, and the opening 1 in which the gate valve 7 is opened.
9 through the guide roll 6 and then around the cooling roll 3 and folded back, through the guide roll 6 and again through the opening 19 in which the gate valve 7 is opened, through the guide roll 6, and the winding means 1 holds it. The work of sticking to the winding core 1 ″ is required. This work has a problem that it is very difficult to pass the film 16 through a narrow space and the work time is long.

The present invention solves the above-mentioned problems and separates the supply / winding zone and the vapor deposition zone of the vacuum container by partition walls,
It is an object of the present invention to provide a vacuum vapor deposition apparatus that can perform work by opening the supply / winding zone to the atmosphere while maintaining the vapor deposition zone in a vacuum state and that facilitates paper passing work.

[0010]

In order to solve the above-mentioned problems, a vacuum vapor deposition apparatus of the present invention is provided in a vacuum container divided into a supply / winding zone and a vapor deposition zone by a partition having an opening. A film supply means and a winding means are arranged in the winding zone, and a guide roll, a cooling roll for folding the film along the roll surface, and a vaporization material evaporation means are arranged in the vapor deposition zone. At the time of anti-replacement, the gate valve provided in the partition wall keeps the airtightness of the opening while sandwiching the film passing through the opening, and while maintaining the vacuum state of the vapor deposition zone, in the supply / winding zone. In a vacuum deposition device that can be replaced, the paper feed belt pulleys that rotate freely are provided at both ends of the cooling roll and both ends of the guide roll in the deposition zone.
In the winding zone, a paper passing belt pulley means for guiding the paper passing belt wound on the paper passing belt pulley in the vapor deposition zone through the opening and winding the paper passing belt pulley and a driving device therefor are provided. Attach the film mounting wire between the paper belts in a horizontal state, and at the time of passing the new film without the previous film, attach the leading end of the new film to this film mounting wire, and use the drive unit to drive the passing belt pulley means. And the leading edge of the new film is guided, passed through the opening, folded back by a cooling roll, and again reaches the supply / winding zone through the opening.

Further, in order to solve the above-mentioned problems, the vacuum vapor deposition apparatus of the present invention can obtain the same action and effect even if the paper passing belt has a wire shape.

[0012]

In the vacuum vapor deposition apparatus of the present invention, the inside of the vacuum container is divided into a supply / winding zone and a vapor deposition zone by a partition having an opening and a gate valve capable of maintaining the airtightness of the opening. It has the same configuration as the conventional example, and has the same operation and effect as the second conventional example, and as the configuration of the vacuum vapor deposition device of the present invention, in the vapor deposition zone, both ends of the cooling roll and both ends of the guide roll are Each of them is equipped with a freely rotating paper passing belt pulley, and in the feeding / winding zone, the paper passing belt hung on the paper feeding belt pulley of the cooling roll and the paper feeding belt pulley of the guide roll in the vapor deposition zone is opened in the partition wall. A paper passing belt pulley means for guiding and winding the paper passing through and a driving device therefor are provided, and two paper passing belts hung on the paper passing belt pulley and the paper passing belt pulley means. Attach the film attached wire lateral bridging state intercluster. This allows the gate valve to be opened to open the supply / winding zone and the vapor deposition zone to the atmosphere when the new film is passed without the previous film, and the tip of the new film is bonded to this film mounting wire. Attach using tape or the like, drive the paper passing belt pulley means and the paper passing belt by the drive device, and guide the leading end of the new film from the paper passing belt pulley means along the paper passing belt pulley. Through the opening of the partition wall, folded back by the cooling roll, again reaches the supply / winding zone through the opening of the partition wall, and affixes the leading end of the new film to the winding core to perform the paper feeding work. Since it can be finished, the paper passing work is extremely simple and easy.

After that, the supply / winding zone and the vapor deposition zone are closed from the atmosphere to recover the vacuum state, and then the vapor deposition work is started.

Further, in the vacuum vapor deposition apparatus of the present invention, the same action and effect can be obtained even if the paper passing belt has a wire shape.

Of course, it goes without saying that the gate valve can maintain the airtightness between the feeding / winding zone and the vapor deposition zone while sandwiching the paper passing belt or the wire-shaped paper passing belt.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the vacuum vapor deposition apparatus of the present invention will be described with reference to FIGS.

1 to 5, the present embodiment shows an opening 1
In the vacuum container 8 divided into the supply / winding zone A and the vapor deposition zone B by the partition wall 18 having the film 9, the film 9 from the original web 2 ′ held therein is opened in the supply / winding zone B. The film supplying means 2 for supplying the film to the vapor deposition zone B through the film and the film 9 supplied from the original 2 '
A guide roll 6 for guiding the film, a winding means 1 for winding the vapor deposition film 9'which is vapor-deposited and folded back in the vapor deposition zone B through an opening 19, and a guide roll 6 for guiding the vapor deposition film 9'to the wind-up means 1. In the vapor deposition zone A, a guide roll 6 for guiding the supplied film 9 to the cooling roll 3, a cooling roll 3 for folding back the guided film 9 along the roll surface, and this cooling roll 3 The evaporation crucible (evaporation material evaporating means) 4 for evaporating the evaporation material below and the evaporation film is deposited on the film 9 located along the cooling roll 3, and the folded evaporation film 9 ′ is guided to the opening 19. Arrange the guide roll 6 and
When replacing the original 2 ', the gate valve 7 provided on the partition 18
However, the film 9 passing through the opening 19 and the vapor deposition film 9 '
While maintaining the airtightness of the opening 19 of the partition wall 18 while sandwiching the and, while maintaining the vacuum state of the deposition zone B, supply /
In the vacuum vapor deposition apparatus having the same configuration as that of the second conventional example in which the winding zone A can be exchanged, the vacuum vapor deposition apparatus of the present invention has a vapor deposition zone B in which both ends of the guide roll 6 and the cooling roll 3 are arranged. Feeding belt pulleys 11 that rotate freely are provided at both ends (see FIGS. 3 and 4, the feeding belt pulley 11 has bearings 12 and rotates freely), and supply / winding zone A. Then, a paper passing belt pulley means 11 ′ for guiding the paper passing belt 5 hung on the paper passing belt pulley 11 of the cooling roll 3 and the paper passing belt pulley 11 of the guide roll 6 in the vapor deposition zone B through the opening 19 and winding it around. (See FIGS. 1 and 2) and its driving device 10
(See FIG. 2), the film attaching wire 14 is provided between the two paper passing belts 5 hung on the paper passing belt pulley 11 and the paper passing belt pulley means 11 '.
(See FIG. 5) is installed in a horizontal position, and when the new film 16 is fed without the previous film (see FIG. 5), the tip of the new film 16 is attached to the film mounting wire 14 with the adhesive tape 13 or the like. The sheet passing belt pulley means 11 ′ and the sheet passing belt 5 are driven by the driving device 10 attached by using the sheet feeding belt pulley means 11 ′ attached to the film attaching wire 14 of the sheet passing belt 5. ′ Through the paper passing belt pulley 11, through the opening 19, folded back by the cooling roll 3, and again,
The supply / winding zone A is reached through the opening 19.

Next, the operation of this embodiment will be described with reference to FIG.

The normal vapor deposition work of this embodiment and the paper-passing work at the time of replacing the original fabric when the end of the previous film is in the feeding / winding zone A are the same as those of the second conventional example, and therefore their explanations will be made. Will be omitted, and a paper passing operation in the state where the end of the previous film is not in the supply / winding zone A when the film 9 is cut during the vapor deposition operation will be described.

In FIG. 5, as in the case where the film 9 is cut during the vapor deposition work, the last end of the film is supplied.
In the paper-passing work without being in the winding zone A, the work in the feeding / winding zone A is performed with the gate valve 7 opened to open the feeding / winding zone A and the vapor deposition zone B to the atmosphere. Then, the tip of the new film 16 is attached to the film attaching wire 14 attached between the paper passing belts 5 with the adhesive tape 13. By driving the driving device 10 to drive the paper passing belt pulley means 11 ′, the paper passing belt 5 is rotated, so that the film attaching wire 14 attached between the paper passing belts 5 and the new film 16 attached to this. The leading end is guided from the paper passing belt pulley means 11 ′ along the paper passing belt pulley 11, passes through the opening 19, is folded back by the cooling roll 3 (not shown), and is again fed through the opening 19 in the feeding / winding zone. Return to A. Here, the front end of the new film 16 is separated from the film attaching wire 14 attached between the paper passing belts 5, and is attached to the take-up core 1 ″ held by the take-up means 1 with an adhesive tape or the like. Film attachment wire 14 attached between 5
Is stopped at a position where it does not interfere with the vapor deposition work, for example, at an intermediate portion of the pulley of the paper passing belt pulley means 11 ', the supply / winding zone A and the vapor deposition zone B are hermetically closed to the atmosphere and evacuated. Then, the vacuum state is restored and the vapor deposition work is started. This eliminates the manual work of passing the gate valve 7 and the work of passing around the cooling roll 3, which were extremely difficult in the past, and the work efficiency can be greatly improved.

Further, even if the paper passing belt is formed into a wire shape, its action. The effect does not change.

The vacuum vapor deposition apparatus of the present invention is not limited to the above-mentioned embodiment, but various modes are possible. For example, the paper passing belt pulley 11, the paper passing belt pulley means 11 ', the driving device 10, the paper passing belt 5, the film attaching wire 14 and the like can be freely designed according to the structure of the vacuum vapor deposition device.

[0023]

The vacuum vapor deposition apparatus of the present invention has the structure, action, and effect of the second conventional example in which the inside of the vacuum container is divided into a supply / winding zone and a vapor deposition zone by a partition having an opening capable of keeping airtight. In addition to that, the vapor deposition zone is provided with a freely rotating paper passing belt pulley, and the feeding / winding zone is provided with a paper passing belt pulley means and its driving device, and two paper passing belts hung on them. By installing a film attachment wire installed horizontally between the paper passing belts of a book, the end of the previous film is not in the supply / winding zone when the film is cut during the vapor deposition work. It is possible to significantly improve the work efficiency of the new film when it is passed, as compared with the second conventional example.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of a vacuum vapor deposition device of the present invention.

FIG. 2 is a partial detailed view of FIG.

FIG. 3 is a partial detailed view of FIG.

FIG. 4 is a partial detailed view of FIG.

5 is an operation diagram of FIG. 1. FIG.

FIG. 6 is a cross-sectional view of a first conventional example.

FIG. 7 is a sectional view of a second conventional example.

8 is an operation diagram of FIG. 7. FIG.

[Explanation of symbols]

 A supply / winding zone B vapor deposition zone 1 winding means 1 ′ vapor deposition film roll 1 ″ winding core 2 film feeding means 2 ′ original fabric 3 cooling roll 4 vapor deposition crucible 5 paper feed belt 6 guide roll 7 gate valve 8 vacuum Container 9 film 9'deposited film 10 drive device 11 paper passing belt pulley 11 'paper passing belt pulley means 12 bearing 13 adhesive tape 14 film attaching wire 15 previous film 15' previous evaporated film 16 new film 18 partition wall 19 opening

Claims (2)

[Claims] 1. A vacuum container divided into a supply / winding zone and a vapor deposition zone by a partition having an opening,
In the winding zone, a film supply means and a winding means are arranged, and in the vapor deposition zone, a guide roll, a cooling roll that folds the film back along the roll surface, and a vapor deposition material vaporizing means are arranged. At the time of replacement, with the gate valve provided in the partition wall sandwiching the film passing through the opening,
In a vacuum vapor deposition apparatus that can maintain the airtightness of the opening and maintain the vacuum state of the vapor deposition zone and replace it in the supply / winding zone, in the vapor deposition zone, both ends of the cooling roll and both ends of the guide roll A paper passing belt pulley that freely rotates is provided in each of the parts, and in the supply / winding zone, the paper passing belt that is hung on the paper passing belt pulley in the vapor deposition zone is introduced through the opening and wound around. A pulley means and a drive device therefor are provided, and a film attaching wire is attached horizontally between these two paper passing belts, so that the leading edge of the new film can be passed when the new film is passed without the previous film. Is attached to this film attachment wire, and the driving device drives the paper passing belt pulley means and the paper passing belt to guide the leading end of the new film. , Through the opening, folded by a cooling roll again, the vacuum deposition apparatus, characterized in that to reach the supply and take-up zone through the opening. 2. The vacuum vapor deposition device according to claim 1, wherein the paper passing belt has a wire shape.