JPH0531796Y2 - - Google Patents

Info

Publication number
JPH0531796Y2
JPH0531796Y2 JP1983067446U JP6744683U JPH0531796Y2 JP H0531796 Y2 JPH0531796 Y2 JP H0531796Y2 JP 1983067446 U JP1983067446 U JP 1983067446U JP 6744683 U JP6744683 U JP 6744683U JP H0531796 Y2 JPH0531796 Y2 JP H0531796Y2
Authority
JP
Japan
Prior art keywords
cathode
electron beam
chip
electron
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1983067446U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59173250U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6744683U priority Critical patent/JPS59173250U/ja
Publication of JPS59173250U publication Critical patent/JPS59173250U/ja
Application granted granted Critical
Publication of JPH0531796Y2 publication Critical patent/JPH0531796Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
JP6744683U 1983-05-06 1983-05-06 把持型熱電子放射陰極 Granted JPS59173250U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6744683U JPS59173250U (ja) 1983-05-06 1983-05-06 把持型熱電子放射陰極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6744683U JPS59173250U (ja) 1983-05-06 1983-05-06 把持型熱電子放射陰極

Publications (2)

Publication Number Publication Date
JPS59173250U JPS59173250U (ja) 1984-11-19
JPH0531796Y2 true JPH0531796Y2 (cs) 1993-08-16

Family

ID=30197635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6744683U Granted JPS59173250U (ja) 1983-05-06 1983-05-06 把持型熱電子放射陰極

Country Status (1)

Country Link
JP (1) JPS59173250U (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007053128A (ja) * 2005-08-15 2007-03-01 Nikon Corp 電子銃及び電子線露光装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013163Y2 (ja) * 1978-08-10 1985-04-26 電気化学工業株式会社 熱電子陰極

Also Published As

Publication number Publication date
JPS59173250U (ja) 1984-11-19

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