JPH0531696A - Non-contact type work conveying device - Google Patents

Abstract

PURPOSE:To prevent occurrence of any accident of contact between a work surface and the outer peripheral edge of a suction pad by stopping work sucking operation when a relative inclination angle between the detected work suction surface of a suction pad and the sucked surface of a work exceeds a given value. CONSTITUTION:A pad support member M movement of which is controlled in a three-dimensional space is moved to a position above a work W and a relative inclination angle between the work sucking surfaces of suction pads 31 and 41 and the surface to be sucked of a work is detected by an inclination angle detecting means F. When the inclination angle exceeds a given value, work sucking operation is stopped by a suction stop means. When the inclination angle is below the given value, air for sucking the work is fed to the pad support member M and Bernoulli's type suction pads 31 and 41. The work W is sucked in a non-contact state by means of the suction pads 31 and 41. Horizontal movement of the sucked work W is regulated by work position regulating members 33c and 43c.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a non-contact type suction pad of Bernoulli type which conveys a plate-like work such as an IC substrate and a ceramic substrate supported on a work supporting surface and conveys it to a predetermined position. The present invention relates to a contact type transfer device.

[0002]

2. Description of the Related Art Conventionally, there has been known a non-contact type work transfer device which uses a suction pad (hereinafter, also referred to as "Bernoulli suction pad") for sucking a work according to the Bernoulli suction principle. In the suction pad, air is exhausted from the outer peripheral portion of the suction pad at high speed to suck the work by making the inside of the suction pad a negative pressure, and when the work approaches the suction pad, the pressure inside the suction pad rises and sucks. The work separates from the pad. Then, when the work separates from the suction pad, the inside of the suction pad becomes a negative pressure to suck the work. In this way, the suction pad that sucks the work according to the Bernoulli suction principle always sucks the work in a non-contact manner. Therefore, when the suction surface is tilted from the horizontal plane, the work sucked by such a suction pad slides along the tilted suction surface. Therefore,
A conventional suction pad of this type (for example, JP-A-62-15)
In Japanese Patent Publication No. 7792), a means for regulating the position of the sucked work is provided.

A work holding device provided with means for restricting the position of the work sucked by the conventional Bernoulli suction pad is provided with position adjusting members whose movements can be adjusted in different two axial directions, and has different shapes. This is dealt with by moving and adjusting the position regulating member. Therefore, conventionally, the position regulating member has to be moved and adjusted for each work having a different shape, which is troublesome.

Therefore, the present applicant has already invented a work holding device capable of holding works of different shapes at predetermined positions without constructing the position regulating member so as to be adjustable. An application has been filed (see Japanese Patent Application No. 2-098499). The previously-applied work holding device is a work in which a suction pad is supported in a tilted state so that the suctioned work moves in a predetermined direction, and the work position is regulated to the moving side of the suctioned work. A position regulating fixing member is provided. Therefore, the workpiece sucked by the suction pad always moves in a predetermined direction,
It is held at a position (that is, a predetermined position) where it abuts on the work position regulating fixing member. In this case, the position of the outer peripheral edge of the work is regulated on the side in contact with the work position regulating fixing member, but is not regulated on the other side. Therefore, when the size of the shape of the work is changed, the position of the outer peripheral edge of the work is fixed on the side in contact with the work position regulating fixing member, but on the other side (the side whose movement is not regulated). Change. Therefore, the above-mentioned Japanese Utility Model Application No. 2-0984
The work holding device described in Japanese Patent Publication No. 99 can hold works having different shapes at a predetermined position.

[0005]

The conventional Bernoulli suction pad normally has one exhaust port. Such a suction pad does not always have a uniform suction force on the work suction surface due to manufacturing errors or the like. When such a suction pad is brought close to a relatively lightweight work such as an insulating substrate of an electronic component, the work swings (while swinging) due to the imbalance of the suction force on the work suction surface of the suction pad. ) Adsorbed. The work surface may come into contact with the outer peripheral edge of the suction pad due to the shake of the work during the suction of the work. In this case, there is a problem that the work surface is easily scratched.

Particularly, in the work holding apparatus described in the above-mentioned Japanese Patent Application No. 2-098499 filed by the present applicant, the suction pad is inclined so that the suctioned work moves in a predetermined direction. Since it is supported, when the suction pad is made to approach the work surface in an attempt to adsorb the work, the work surface and the suction surface of the suction pad are not parallel but approach each other in a relatively inclined state. In this case, the shake of the work due to the imbalance of the suction force on the work suction surface of the suction pad tends to be relatively large. If the deflection of the work when picking up the work becomes large,
The work surface often comes into contact with the outer peripheral edge of the suction pad, and in this case, there is a problem that the work surface is more likely to be scratched.

In view of the above-mentioned circumstances, the present invention is a non-contact type work transfer device in which the relative inclination angle between the suction surface of the suction pad and the suction surface of the work is large (when the work is sucked by the suction pad, It is an object to prevent the suction operation from being performed in the case where a large shake occurs and a contact accident occurs between the work surface and the outer peripheral edge of the suction pad).

[0008]

Next, the structure of the present invention devised to solve the above problems will be described. The constituent elements of the present invention will be described with reference to the constituent elements of the embodiments described later. For simplification, the reference numerals of the constituent elements of the embodiment are enclosed in parentheses. The reason why the present invention is described in association with the reference numerals of the embodiments described later is to facilitate the understanding of the present invention and not to limit the scope of the present invention to the embodiments.

In order to solve the above problems, the first aspect of the present application
The non-contact type conveyance device of the invention has three pad support members (M).
A pad position control device that controls movement in a three-dimensional space, and a suction pad (31, 4) that suctions a work (W) by the Bernoulli suction principle supported by the pad support member (M).
1) and the suction pads (31, 41) when the work is sucked
A suction air supply control device that supplies air for suctioning a workpiece to the workpiece, and a workpiece position regulating member (33c, 43c) that regulates the horizontal movement of the workpiece (W) sucked by the suction pad (31, 41). In a non-contact type work transfer device (1) including: a tilt angle detection means for detecting a relative tilt angle between the work suction surface and the work suction surface of the suction pad (31, 41). And a suction stopping means for stopping the work suction operation when the tilt angle detected by the tilt angle detecting means is equal to or larger than a predetermined value.

In order to solve the above-mentioned problems, the non-contact type transfer device of the second invention of the present application is a pad position control device for controlling the movement of a pad support member (M) in a three-dimensional space, and the pad. Adsorption pads (31, 41) for adsorbing the work (W) by the Bernoulli adsorption principle supported by the support member (M), and the adsorption pad (3) when adsorbing the work.
1, 41) and an adsorption air supply control device for supplying air for adsorbing the workpiece, and a workpiece position regulating member () for regulating the horizontal movement of the workpiece (W) adsorbed by the adsorption pad (31, 41). 33c, 43c) in the non-contact type work transfer device (1), the suction pad (31, 4)
1) Inclination angle detecting means for detecting the magnitude of the relative inclination angle between the workpiece suction surface and the workpiece suction surface, and when the inclination angle detected by the inclination angle detection means is a predetermined value or more, A workpiece suction surface inclination angle adjusting device for adjusting an inclination angle of the workpiece suction surface with respect to the suction surface is provided.

[0011]

In the non-contact type work transfer device (1) of the first invention having the above-mentioned structure, the pad support member (M) whose movement is controlled in the three-dimensional space by the pad position control device is the work (W). Is moved to the upper position. Then, the inclination angle detecting means detects the magnitude of the relative inclination angle between the workpiece suction surface and the workpiece suction surface of the suction pad (31, 41). When the tilt angle detected by the tilt angle detection means is equal to or larger than a predetermined value, the work suction operation is stopped by the suction stopping means. When the inclination angle is less than the predetermined value, the suction stopping means does not operate,
The normal work suction operation is executed. That is, the pad support member (M) and the Bernoulli suction pads (31, 41) supported by the pad support member (M) are brought close to the work (W) by the pad position control device. Then, the suction air supply control device supplies air for suctioning the work to the suction pads (31, 41) at the time of suctioning the work. Then, the work (W) is adsorbed by the adsorption pads (31, 41) in a non-contact manner. The suction pads (31, 4)
The movement of the work (W) attracted to 1) in the horizontal direction is restricted by the work position restricting member. The suction pads (31, 41) that have sucked the work (W) in this way and the pad support member (M) that supports the suction pads (31, 41) are conveyed to a predetermined position by the pad position control device.

In the non-contact type work transfer device (1) of the second invention having the above-mentioned structure, the pad support member (M) whose movement is controlled in the three-dimensional space by the pad position control device.
Are moved to a position above the work (W). Then, the suction pad (31,
The magnitude of the relative inclination angle between the workpiece suction surface and the workpiece suction surface of 41) is detected. When the tilt angle detected by the tilt angle detecting means is equal to or larger than a predetermined value, the work suction surface tilt angle adjusting device adjusts the tilt angle of the work suction surface with respect to the work suction surface. When the tilt angle of the work suction surface is adjusted and the tilt angle becomes less than a predetermined value, a normal work suction operation is performed.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic perspective view of a non-contact type work transfer device 1 using an embodiment of the work detection device of the present invention. This non-contact type work transfer device 1 detects the position, shape, etc. of a work W transferred by a belt conveyor F as a work support surface by using optical sensors S1, S2, S3 (detailed later),
The work W is sucked, conveyed, and stored in a work storage jig G (described in detail later). Further, a state in which the relative inclination angle between the suction surface of the suction pad (described later) and the suction surface of the work W is large (when the work W is sucked by the suction pad, the work W largely shakes and the work surface and the suction pad are separated from each other). (A condition where a contact accident with the outer edge may occur)
In, a suction stopping means for stopping the work suction operation is provided. Further, in this embodiment, the adsorption stopping means is realized by a microcomputer (described later). These will be described in detail below.

In FIG. 1, a plate-shaped work W is supported and conveyed by a belt conveyor F as a work supporting surface, and is stopped in an area where the non-contact work conveyance device 1 is arranged. The non-contact type work transfer device 1 of the present embodiment is
It is configured to handle various works W having a rectangular shape and different sizes, and FIG. 1 shows a state where a work W represented by a rectangle ABCD is handled. The long edge AB of the work W is conveyed in a posture substantially along the conveyance direction X of the belt conveyor F.
In practice, the long edge AB is often stopped with a slight inclination with respect to the X direction, as exemplified by the stop position (the position shown in FIG. 1).

The non-contact type work transfer device 1 is provided with an X-direction transfer device 2 arranged along the belt conveyor F. This X-direction transport device 2 includes a motor case 3
And an X-direction guide case 4 extending in the X-direction. A pulse motor Mx for X-direction conveyance is housed in the motor case 3.

As shown in FIG. 2, the X-direction guide case 4 moves along the X-direction transfer belt 5 and the pair of guide rods 6 and 6 driven by the X-direction transfer pulse motor Mx. The X-direction slider 7 is housed. The slider 7 includes a pair of guide grooves 4a formed on the surface of the X-direction guide case 4 along the X-direction,
It is exposed from the surface 4a of the X-direction guide case 4, and the connecting plate 8 is connected to the exposed portion.

A Y-direction transfer device 9 (see FIG. 1) is connected to the connection plate 8, and the Y-direction transfer device 9 is transferred together with the connection plate 8 in the X-direction. The Y-direction transfer device 9 is configured substantially the same as the X-direction transfer device 2, and the motor case 1
0 and a Y-direction guide case 11 extending in the Y-direction are provided. A pulse motor My for transporting in the Y direction is housed in the motor case 10. Further, in the Y-direction guide case 11, a Y-direction conveyor belt (not shown) and a Y-direction slider (not shown) that is moved by a pair of guide rods are housed. The Z-direction transfer device 12 is connected to the Y-direction slider via a connection plate.

The Z-direction transport device 12 is also constructed in substantially the same manner as the X-direction transport device 2, and is provided with a motor case 13 and a Z-direction guide case 14 extending in the Z direction. A pulse motor Mz for Z-direction conveyance is housed in the motor case 13. A Z direction slider (not shown), which is moved by a Z direction conveyor belt and a pair of guide rods (not shown), is housed in the Z direction guide case 14. A Z-direction moving member 15 is connected to the Z-direction slider via a connecting plate.

The Z direction moving member 15 is provided with a pulse motor 16 having a rotary shaft 16a extending in the Z direction. The pad support member M of the work holding device H is connected to the lower end of the rotary shaft 16a of the pulse motor 16 via a connecting plate 17. This pad support member M is
The X-direction transfer device 2, the Y-direction transfer device 9, and the Z-direction transfer device 12 control the movement in the X, Y, and Z-axis directions, and the pulse motor 16 rotates the rotation axis (Z-axis).
The posture around 16a is rotationally controlled.

The pad support member M supports three photosensors S1 to S3. Each of the optical sensors S1 to S3 is configured to be turned on (ON) when the amount of light from directly below is a predetermined value or more, and turned off (OFF) when the light amount is less than the predetermined value. In the case of this embodiment, since the surface of the work W is brighter than the surface of the belt conveyor F, the respective optical sensors S1 to S3 are turned on when the work W is directly below. Therefore, when the peripheral edge of the work W comes directly below the photosensors S1 to S3, the photosensors S1 to S3 are turned on from OFF to ON.
Or since it changes from ON to OFF, the optical sensor S1 ～
The periphery of the position of the work W can be detected by the change in the output signal of S3.

In this embodiment, as described above, the optical sensors S1 to S3 for detecting the peripheral edge of the work W are used to detect the position, posture, etc. of the work W, and the pad support member M This is because a predetermined portion (suitable suction position) of the work W is sucked by the supported suction pad (described later).

Optical sensors S1 to S1 on the pad support member M
The arrangement of S3 is as shown in FIG. In FIG. 14, the rotary shaft 16 connected to the pad support member M
Straight lines connecting the center of a and the respective photosensors S1, S2 and S3 are indicated by L1, L2 and L3, and each straight line L
The angles formed by 1, L2 and L3 and the Y axis are θ1, θ2 and θ3. In the state of FIG. 14, the optical sensors S1 and S2 supported by the pad support member M are arranged along the X axis, and the distances in the X axis direction are a and Y.
The axial distance is zero.

In the state of FIG. 14, the position of the rotary shaft 16a connected to the pad support member M is set as a reference position Po, and an XY coordinate axis having the reference position Po as an origin is set. The position (coordinates) of the rotary shaft 16a is (0,0).

In FIG. 14, the optical sensors S1 ...
The XY coordinates of S3 shall be expressed as follows. S1 (X11, Y11) S2 (X21, Y21) S3 (X31, Y31)

In this case, each coordinate of the photosensors S1 to S3 is expressed by the following equation. X11 = L1 · sin θ1, Y11 = L1 · cos θ1 X21 = L2 · sin θ2, Y21 = L2 · cos θ2 = Y11 X31 = L3 · sin θ3, Y31 = L3 · cos θ3

The values of L1 to L3, θ1 to θ3, and a are stored in the ROM of the microcomputer U (see FIG. 10) described later.
Remembered in. The position, orientation, etc. of the work W can be detected by using an image input device such as a CCD camera and an image processing device, as disclosed in JP-A-62-185103. .

Next, the work holding device H will be described in detail with reference to FIGS. The right side of FIGS.
1, the left side is rearward R2, the lower side of FIG. 4 and the left side of FIG. 6 are left side Q1, and the upper side of FIG. 4 and the right side of FIG. 6 are right side Q2.

In FIG. 3, guide rod support walls 21 and 22 are erected at the rear end portion (the left end portion in FIG. 3) of the pad support member M and the portion slightly closer to the front end than the central portion. . A pair of left and right guide rods 23, 23 (see FIGS. 3 and 6) and a ball screw 24 are supported on these guide rod support walls 21, 22. The ball screw 24 penetrates the guide rod support wall 22 and extends forward. A motor support wall 25 is erected in front of the guide rod support wall 22, and a motor 26 is supported on the motor support wall 25. The output shaft of the motor 26 is connected to the ball screw 24 by a coupling 27.

A ball nut 28 fitted with the ball screw 24 is slidably connected to the guide rods 23, 23. And, the ball nut 28 is
When the ball screw 24 is rotationally driven, it moves in the front-rear direction (R1-R2 direction) along the guide rods 23, 23. The ball nut 28 includes
A Bernoulli-type suction pad 31 is supported via the connecting brackets 29 and 30 (see FIG. 6). A stopper 33 is supported on the suction pad 31 via a stopper support bracket 32. The stopper 33 includes a vertical guide wall 33a extending in the left-right direction (Q1 and Q2 directions) and a horizontal support groove 33b (see FIG. 5) formed at the lower end thereof.
Left end of the vertical guide wall 33a (end in Q1 direction in FIG. 4)
And a vertical stopper wall 33c that is connected to the and is protruded slightly forward (in the R1 direction).

The suction pad 31 is, as shown in FIG.
It is connected to an air supply source 38 via a connecting tube 35, a switching valve 36, a pressure reducing valve 37 and the like. The switching valve 3
6 is configured to be operated by the switching valve operating solenoid 36a.

As shown in FIGS. 3 and 4, a Bernoulli type suction pad 41 is supported on the front end portion of the pad support member M through connecting brackets 39 and 40. A stopper 43 is supported on the suction pad 41 via a stopper support bracket 42. The stopper 43 is connected to a vertical guide wall 43a extending in the left-right direction (Q1 and Q2 directions), a horizontal support groove 43b formed at its lower end, and a left end (lower end in FIG. 4) of the vertical guide wall 43a. It is composed of a vertical stopper wall 43c that protrudes slightly rearward (in the R2 direction). Then, the vertical stopper wall 33
The work position restricting member of this embodiment is constituted by c and 43c, and this work position restricting member restricts the movement of the work W in the Q1 direction.

The suction pad 41 is also the suction pad 31.
Similarly, through the connection tube 45 (see FIG. 3), the switching valve 36, the pressure reducing valve 37, and the air supply source 38 shown in FIG. 6 are sequentially connected.

The suction pads 31 and 41 are arranged such that the lower surfaces (suction surfaces) thereof are gradually inclined downward from the horizontal plane toward the left side (Q1 direction) in FIG. Therefore, the work W is attached to the suction pads 31 and 41.
When is absorbed, the work W is held in a posture in which the left side is lowered, so that the work W slides in the Q1 direction of FIGS.
The work W slid in the Q1 direction contacts the vertical stopper walls 33c and 43c and is positioned.

As shown in FIG. 4, the suction pads 31 and 41 respectively detect a workpiece suction detection sensor for detecting that the workpiece W is sucked at a predetermined position (a position where the workpiece W contacts the vertical stopper walls 33c and 43c). S4 and S5 are attached. As the workpiece suction detection sensors S4 and S5, a non-contact type optical sensor or a micro switch can be used. Also, the vertical guide walls 33a, 43a
Jig detecting sensors S6 and S7 for storage are attached to the outer sides of, respectively. As described above, the vertical guide wall 33
Since a is supported so that its position can be moved and adjusted together with the ball nut 28, the storage jig detection sensor S
The interval between 6 and S7 is variable. Since the position of the vertical guide wall 33a moves together with the suction pad 31 according to the shape, size, etc. of the work W to be handled, the interval between the storage jig detection sensors S6 and S7 depends on the type of work W. Determined.

Optical sensors S8 to S10 are arranged adjacent to the optical sensors S1 to S3, respectively. Optical sensor S8〜
S10 is a sensor for detecting the distance from each of the optical sensors S8 to S10 to the upper surface of the work W based on the amount of light reflected from the upper surface of the work W. Then, the respective distances to the work W upper surface detected by the respective optical sensors S8 to S10 are used to calculate the inclination between the work W upper surface and the suction pads 31 and 41 suction surfaces. The calculation of the inclination is performed by a microcomputer described later.

As shown in FIG. 4, the pad support member M is formed with a pair of elongated holes 51, 51 extending in the R1-R2 directions. A bracket 52 is fixed to the long holes 51, 51 by a suitable fixing means such as a bolt and a nut so that the position of the bracket 52 can be adjusted in the front-rear direction (R1-R2 direction in FIGS. 3 and 4). Incidentally, in the case where the bolt for fixing the bracket 52 coincides with the position of the guide rod support wall 22 (see FIG. 3), the guide rod support wall 22 has a bolt head receiving hole 22a (see FIG. 3). Are formed.
The position of the position-adjustable bracket 52 is adjusted in advance according to the shape and size of the work W expected to be handled. An air cylinder 53 as a transfer device is supported by the bracket 52, and the suction pad 3
It is possible to push the end surfaces of the works W adsorbed by 1, 41 and eject them in the lateral direction as shown in FIG.

As shown in FIG. 1, the belt conveyor F
Adjacent to the dummy work support 61 and jig support 6
2 are provided. The upper surface of the simulated work support 61 is formed in the same color as the upper surface of the belt conveyor F, and the light amount detected by the optical sensors S1 to S3 is substantially the same on both the upper surface of the conveyor F and the upper surface of the simulated work support 61. There is. On the upper surface of the simulated work support 61, the same work W as the work W (that is, the work to be handled) conveyed by the belt conveyor F is placed as the simulated work Wo. The simulated work Wo placed on the upper surface of the simulated work support table 61 has the optical sensor S1 when the operation of the non-contact type work transfer device 1 is started.
Used to perform ~ S3 and S8 ~ S10 output tests. That is, as shown in FIG. 7, the pad support member M is moved above the simulated work support base 61, and the sensor S1
It is tested whether .about.S3 and S8 to S10 detect a predetermined amount of reflected light from the upper surface of the simulated work support 61 and the upper surface of the simulated work Wo.

The storage jig G (see FIGS. 1, 8 and 9) placed on the jig support base 62 has a frame-shaped outer wall 63.
And the outer wall 63 is a pair of left and right side walls 6.
4, 65, and a bottom wall 66 and a top wall 67 that connect their lower ends and their upper ends. As shown in FIG. 9, the pair of left and right side walls 64, 65.
The front end faces of are formed as high reflectance light reflecting faces 64a and 65a. Various storage jigs G are prepared according to the shape, size, etc. of the work W to be stored, and the type corresponding to the work W handled by the non-contact type work transfer device 1 is the jig support. It is placed on the table 62. And
The distance between the light reflecting surfaces 64a and 65a is determined by the type of the storage jig G, that is, the type of work W to be handled. The distance between the light reflecting surfaces 64a and 65a and the distance between the storage jig detecting sensors S6 and S7 are set to the same value for the same type of work W.

Inside the pair of left and right side walls 64 and 65, a plurality of shelves 64b and 65b for mounting the work W are provided at predetermined intervals in the vertical direction. A work placement surface is formed by the upper surfaces of the pair of left and right shelves 64b and 65b, and one work W is placed on the work placement surface.
Are configured to be supported horizontally. The shelf 64
The numbers of b and 65b are set to the same value (for example, 10 stages) in all types of the storage jig G.
Then, the height of the upper surface (workpiece mounting surface) of each of the shelves 64b, 65b, that is, the height of the worktop surface of the first stage from the top,
The same value is set for the height of the workpiece mounting surface of the second stage, ... For all types of the storage jig G. And
As shown in FIG. 8, the work W sucked and conveyed by the suction pads 31 and 41 is horizontally moved from the front surface of the storage jig G by the air cylinder 53 as the transfer device, and is then moved to the left or right. It is designed to be transferred to the pair of shelves 64b and 65b. The transfer order is such that the shelves 64b and 65b on the first stage from the top are sequentially transferred to the lower shelves. Further, a fall prevention wall 68 is provided on the rear surface of the storage jig G so that the transferred work W does not fall backward.

FIG. 10 is a structural explanatory view of the control unit of the non-contact type work transfer device 1. The control unit of this embodiment includes a microcomputer U. In FIG. 10, the microcomputer U is
It is composed of an input / output interface I / O, a central processing unit CPU, a read only memory ROM, a random access memory RAM and the like. In the read-only memory ROM of the microcomputer U, the L1 to L3, θ1 to θ3, the value of the distance a between the optical sensors S1 and S2 shown in FIG. Programs and the like for performing the work suction flow shown in 11 to 13 are stored.

The microcomputer U has a keyboard K
Work command signal from B and the optical sensors S1, S2, S
A workpiece outer peripheral edge detection signal when the outer peripheral edge of the workpiece W is detected is inputted to the device 3. Also,
The microcomputer U is provided with the workpiece suction detection sensor S4,
An output signal of S5, that is, a signal for detecting that the work W is adsorbed to the adsorption pads 31 and 41 is input. Further, in the microcomputer U, the output signals of the storage jig detection sensors S6, S7, that is, the storage jig detection sensors S6, S7 are the side walls 64, 65 of the storage jig G.
A signal for detecting the state of facing the light reflecting surfaces 64a and 65a at the front end is input. Further, the microcomputer U is configured to receive a signal when each of the optical sensors S8, S9, and S10 detects the distance to the upper surface of the work W.

Further, the microcomputer U includes the pulse motors Mx, My, Mz, 16 and 26, the switching valve operating solenoid 3
6a, the air cylinder 53 and the buzzer 70 are output as drive signals, and each drive signal is a drive circuit 7
1 to 78 through the pulse motors Mx, My, Mz,
16, 26, the switching valve operating solenoid 36a, the air cylinder 53, the buzzer 70 and the like. The microcomputer U calculates the position of the pad support member M from the drive amount of each of the pulse motors Mx, My, Mz, 16 and detects the work outer peripheral edge detection signal from each of the optical sensors S1, S2, S3. The position (movement amount and rotation angle on the XY coordinate axis) of the pad support member M when is input is stored in the RAM as a work outer peripheral edge detection position signal U2s. The microcomputer U then stores the plurality of stored workpiece outer peripheral edge detection position signals U2s and R2.
The work position is calculated and output from the shape data of the work W stored in the OM (this will be described later in detail). Further, the microcomputer U determines the suction pads 31, 41 and the stopper 3 based on the position of the pad support member M and the driving amount of the pulse motor 26.
It is configured to calculate the positions of 3,43.

Next, the operation of the non-contact type work transfer device 1 having the above-mentioned structure will be described. When the work of adsorbing and conveying the work W conveyed by the belt conveyor and transferring the work W to the storage jig G is started, the flow shown in FIG. 11 is started. In step T1 of FIG. 11, the check flow of the optical sensors S1 to S3 and S8 to S10 is executed. The process of step T1 is performed by the subroutine shown in FIG.

In step T31 of FIG. 12, the pad support member M is moved above the simulated work support base 61 (see FIG. 7). Since the upper surface of the simulated work support 61 on which the simulated work Wo is placed has the same color as the belt conveyor F, when the respective optical sensors S1 to S3 are located outside the simulated work Wo, the respective optical sensors are located. S1 to S3 are in the OFF state. Next, at step T32, each optical sensor S1
~ Detects and acquires the voltage when S3 is OFF.

Next, at step T33, the pad support member M is moved above the simulated work Wo (see FIG. 7).
Since the simulated work Wo is the same as the actual work W, the optical sensors S1 to S3 are turned on. Next, in step T34, the ON-state voltage of each optical sensor S1 to S3 is detected and acquired. Next, in step T35, the above step T32
The OFF-state voltage acquired in step T34 is compared with the ON-state voltage acquired in step T34, and it is determined whether the voltage difference is equal to or more than a specified value. In the case of yes (YES), it moves to the next step T38. In this step T38, it is judged whether or not the respective optical sensors S8 to S10 detect the same distance from the simulated work Wo. In the case of yes (YES), since each of the optical sensors S1 to S3 and S8 to S10 is normal, the sensor check flow is ended and the process proceeds to step T2 in FIG.

Next, at the step T35, no (N
In the case of O), the process proceeds to step T36 in FIG. Step T
At 36, the microcomputer U outputs a warning from the buzzer 70 that any of the optical sensors S1 to S3 is abnormal. Next, at step T37, the keyboard KB (see FIG.
It is determined from the reference) whether the work continuation command signal 1 has been input. When the operator adjusts and repairs the abnormal portion of each of the optical sensors S1 to S3 according to the warning sound 1 of the buzzer 70 and the work continuation command signal 1 is input from the keyboard KB, the process returns to step T31. Next, if the answer is NO in step T38, the process proceeds to step T39. In step T39, the microcomputer U outputs a warning from the buzzer 70 that any one of the optical sensors S8 to S10 is abnormal. Next, at step T40, the keyboard KB
From FIG. 10, it is determined whether or not the work continuation command signal 2 is input. When the operator adjusts and repairs the abnormal portion of each of the optical sensors S8 to S10 according to the warning sound 2 of the buzzer 70 and the work continuation instruction signal 2 is input from the keyboard KB, the process returns to step T31. By providing such a sensor check flow (steps T31 to T40), it is possible to prevent occurrence of a functional failure due to dirt or inclination of the light emitting surface or the light receiving surface of each of the optical sensors S1 to S3 and S8 to S10.

Next, at step T2, the belt conveyor F (see FIG. 1) for supplying the work is started. Next, in step T3, the pad support member M is scanned in the Y direction to search for the work W on the belt conveyor F as the work support surface. This Y-axis direction scanning is performed by applying one driving pulse to the Y-direction carrying pulse motor My of the Y-direction carrying device 9. By applying this single drive pulse, the pad support member M moves in the Y-axis direction by a unit distance. Next, in step T4, it is determined whether the work W has been detected, that is, whether the optical sensor S1 or S2 has detected the outer periphery of the work W. This is determined by whether the optical sensor S1 or S2 is turned from OFF to ON. If no, go to step T5. In step T5, it is determined whether or not the scanning of the first row (first scanning up to the end of the belt conveyor F) is completed. If no, the process returns to step T3, and if yes, the process proceeds to step T6. In step T6, it is determined whether scanning of all columns has been completed. If yes, the process ends, and if no, move to step T7. Step T7
At, the pad support member M is moved 30 mm in the X direction and the process returns to step T3. Then, the pad support member M is scanned in the Y direction. However, the scanning direction of step T3 this time is opposite to the previous direction.

If YES in step T4, the process proceeds to step T8. In step T8, the position of the work W is measured. The process of step T8 is performed by the subroutine shown in FIG.

When the processing of the subroutine shown in FIG. 13 is started, scanning in the Y-axis direction is performed in step T41.
This Y-axis direction scanning is performed by applying one driving pulse to the Y-direction carrying pulse motor My of the Y-direction carrying device 9. By applying this single drive pulse, the pad support member M moves in the Y-axis direction by a unit distance.

Next, at step T42, the optical sensor S1
Alternatively, it is determined whether or not S2 has detected the outer peripheral edge of the work W. This is determined by whether the optical sensor S1 or S2 is turned from OFF to ON. If no (NO), the process returns to the step T41, and if yes (YES), the process moves to the next step T43.

In step T43, the movement amount Y1 is stored. The pad support member M and the work W at this time are as shown in FIG.
The positional relationship shown in FIG. In FIG. 15, the pad support member M is moved in parallel by Y1 in the Y direction from the state of FIG. The position P1 of the rotary shaft 16a
The coordinates of are as follows. P1 (0, Y1)

Each of the optical sensors S1 ...
The position (X-Y coordinate) of S3 is + the Y coordinate of FIG.
The position is Y1 and can be expressed as follows. S1 (X11, Y11 + Y1) S2 (X21, Y21 + Y1) S3 (X31, Y31 + Y1)

Next, in step T44, scanning in the Y-axis direction is performed. This step T44 is performed similarly to the step T41.

Next, at step T45, the optical sensor S2
Alternatively, it is determined whether S1 detects the outer peripheral edge of the work W. If no, return to step T44,
If yes (YES), move to next step T46.

In step T46, the movement amount Ya (the movement amount in step T44) is stored. At this time, the pad support member M and the work W have the positional relationship shown in FIG. In FIG. 16, the pad support member M is the same as in FIG.
From the state of FIG. 4, Y2 is moved in parallel in the Y direction (that is, the state of FIG. 15 is moved in the Y direction by Ya = Y2-Y1). The coordinates of the position P2 of the rotary shaft 16a are as follows. P2 (0, Y2) = P2 (0, Y1 + Ya)

Each of the optical sensors S1 to S1 in the state of FIG.
The position (X-Y coordinate) of S3 is + the Y coordinate of FIG.
The position is Y2 and can be expressed as follows. S1 (X11, Y11 + Y2) S2 (X21, Y21 + Y2) S3 (X31, Y31 + Y2) However, Y2 = Y1 + Ya.

Next, in step T47, θa is calculated. The θa is an angle θa formed by the direction of the line segment connecting the optical sensors S1 and S2 shown in FIG. 16 and the direction of the edge AB of the rectangular work W, and can be expressed by the following equation. θa = tan-1 (Ya / a) = tan-1 [(Y2-Y1) / a]

Next, at step T48, the pad support member M is rotated by θa about the P2. The rotation direction of θa is clockwise when S1 is first turned on in the optical sensors S1 and S2, and counterclockwise when S2 is first turned on. In the case of this embodiment, since the optical sensor S1 is turned on first,
Rotate clockwise. Then, this rotation is performed by rotating the pulse motor 16. After the rotation, the pad support member M and the work W have the positional relationship shown in FIG. 17 (the positional relationship in which the straight line connecting the optical sensors S1 and S2 and the edge AB of the work W are parallel).

Each of the photosensors S1 ...
The position of S3 (XY coordinate) can be expressed as follows. The coordinates of S1 are (L1 · sin (θ1−θa), L1 · cos (θ1−θa) + Y2) The coordinates of S2 are (L2 · sin (θ2−θa), L2 · cos (θ2−θa) + Y2) The coordinates of S3 are (L3.sin (.theta.3-.theta.a), L3.cos (.theta.3-.theta.a) + Y2), where Y2 = Y1 + Ya.

Next, in step T49, Y-axis direction scanning is performed. The scanning in step T49 is performed by the optical sensors S1 and S2.
Until the edge AB of the work W is detected. Therefore, in the case of the present embodiment, as can be seen from FIG. 17, scanning is performed in the −Y direction. Generally this step T49
The scanning direction is the -Y direction when the rotation direction of θa in step T48 is clockwise as in the present embodiment, and the θa direction is
When the rotating direction of is counterclockwise, scanning is performed in the + Y direction. By scanning in such a direction, the optical sensors S1 and S2 can simultaneously detect the edge AB of the work W.

Next, at step T50, the optical sensor S2
Then, it is determined whether or not S1 has detected the outer peripheral edge of the work W. If no (NO), the process returns to the step T49, and if yes (YES), the process moves to the next step T51.

At step T51, the movement amount Yb (movement amount at step T49) is stored. At this time, the pad support member M and the work W have the positional relationship shown in FIG. 18 (the positional relationship in which the optical sensors S1 and S2 simultaneously detect the edge AB of the work W). In FIG. 18, the pad support member M is moved in parallel by Yb in the Y direction from the state of FIG. The coordinates of the position P3 of the rotary shaft 16a can be expressed as follows. P3 (0, Y3) = P3 (0, Y2 + Yb) = P3 (0, Y1 + Ya + Yb) However, Yb = Y3-Y2 is negative (minus).

Each of the optical sensors S1 ...
The position (XY coordinate) of S3 can be expressed as follows by replacing Y2 in the formula representing the position in the case of the state of FIG. 17 with Y3. The coordinates of S1 are (L1 · sin (θ1−θa), L1 · cos (θ1−θa) + Y3) The coordinates of S2 are (L2 · sin (θ2−θa), L2 · cos (θ2−θa) + Y3) The coordinates of S3 are (L3.sin (.theta.3-.theta.a), L3.cos (.theta.3-.theta.a) + Y3), where Y3 = Y2 + Yb.

Next, in step T52, the θa direction scanning is performed. This θa direction scanning is performed by the X
The driving pulse is simultaneously applied to the direction conveyance pulse motor Mx and the Y direction conveyance pulse motor My of the Y-axis direction conveyance device 9. Based on θa calculated in the step T47, y = tan θa · x, that is, y: x = tan θa: 1 by an amount corresponding to the ratio represented by X-direction conveyance pulse motor Mx and Y-direction conveyance pulse When a driving pulse is applied to the motor My at the same time, the pad support member M is rotated by θ with respect to the X axis.
It can be moved in the direction rotated by a (the direction along the edge AB). When the θa scanning is performed in this manner, the optical sensors S1 and S2 move along the edge AB of the work W while being positioned on the edge AB.

Next, at step T53, the optical sensor S3
Determines whether the outer peripheral edge of the work W (edge BC in FIG. 18) is detected. In the case of no (NO), the above step T
Return to 52, and if yes, go to the next step T
Move to 54.

At step T54, the movement amount X1 (the movement amount in the X-axis direction at step T52) is stored. At this time, the pad support member M and the work W have the positional relationship shown in FIG. In FIG. 19, the pad support member M
From the state shown in FIG. 18, X1 in the X direction and tan in the Y direction.
Translated by θa · X1. And the rotary shaft 1
The coordinates of the position P4 of 6a are as follows. P4 (X1, Y3 + X1 · tan θa)

Each of the optical sensors S1 ...
The position of S3 (X-Y coordinate) is + to the X coordinate of FIG.
The position is + X1 · tan θ to the X1 and Y coordinates, and can be expressed as follows. The coordinates of S1 are (L1 · sin (θ1−θa) + X1, L1 · cos (θ1−θa) + Y3 + X1 · tan θa) The coordinates of S2 are (L2 · sin (θ2−θa) + X1, L2 · cos (θ2− θa) + Y3 + X1 · tan θa) The coordinates of S3 are (L3 · sin (θ3−θa) + X1, L3 · cos (θ3−θa) + Y3 + X1 · tan θa)

Next, at step T55 shown in FIG.
Performs −θa direction scanning. This -.theta.a direction scanning is performed in the same manner as the .theta.a direction scanning in step T52, but with its direction reversed. Next, in step T56, it is determined whether the optical sensor S3 has detected the outer peripheral edge of the work W. If no, the process returns to the step T55, and if yes, the process proceeds to the next step T57.

In step T57, the above step T54
Similarly, the movement amount Xa (the movement amount in the X-axis direction at the step T55) is stored. At this time, the pad support member M and the work W are in the positional relationship shown in FIG. This FIG.
In the above, when the X coordinate of the rotary shaft 16a is X2, the pad support member M is moved from the state of FIG. 19 to Xa in the X direction.
(= X2-X1), which means that it has moved Xa · tan θa in the Y direction. The coordinates of the position P5 of the rotary shaft 16a are as follows. P5 (X2, Y3 + tan θa · X2) where X2 = X1 + Xa (Xa is negative, that is, negative).

Each of the optical sensors S1 ...
The position of S3 (XY coordinate) is + to the X coordinate of FIG.
The position is + tanθaX2 on the X2 and Y coordinates, and can be expressed as follows. The coordinates of S1 are (L1 · sin (θ1−θa) + X2, L1 · cos (θ1−θa) + Y3 + X2 · tan θa) The coordinates of S2 are (L2 · sin (θ2−θa) + X2, L2 · cos (θ2− θa) + Y3 + X2 ・ tanθa) The coordinates of S3 are (L3 ・ sin (θ3−θa) + X2, L3 ・ cos (θ3−θa) + Y3 + X2 ・ tanθa)

Next, in step T58, the length LAB of the work W (the length of the edge AB) is calculated. The rotating shaft 16a
Since the distance between the coordinates P4 and P5 is the same as the length of the edge AB, the length LAB of the edge AB can be expressed as LAB = | X2-X1 | / cos θa = | Xa | / cos θa.

In step T58, the length of one edge of the work W is calculated. Thereby, the type of the work W can be discriminated. Next, in step T59, the type of the work W, that is, the shape is specified from the length of one edge of the work W. This specification is performed by referring to the work shape data stored in the ROM of the microcomputer U. Next, in step T60, the position of the work W is calculated.
That is, the RO of the microcomputer U is changed according to the length of the edge AB.
From the shape data of the work W stored in M, the length of the other edge corresponding to the length of the one edge (that is, the edge AB) can be obtained, and the points A, B, C, D are thereby obtained. Each coordinate of is calculated.

Next, in step T9 of FIG.
The position on the XY coordinates where the pad support member M adsorbs the work W (the work adsorption position on the XY coordinates) and the distance between the adsorption pad 31 and the adsorption pad 41 are calculated. Next, in step T10, the pad support member M is moved to the workpiece suction position on the XY coordinates. At this time, the suction pad 3
The intervals of 1,41 are also adjusted at the same time.

Next, in step T11, the distance to the upper surface of the work W is detected by the tilt detecting optical sensors S8 to S9. Next, in step T12, the inclination angle of the work is calculated. Next, in step T13, it is determined whether the calculated tilt angle is within a predetermined range. If no, go to Step T14. In step T14, the belt conveyor F for supplying the work is stopped. Then step T15
At, a warning sound is output. Next, at step T16, it is judged whether or not the work continuation signal is inputted. If the answer is NO in step T16, the process returns to step T15.

When the warning sound is output in step T15, the operator checks the state of the work W on the belt conveyor F, and if dust or foreign matter is present on the lower surface of the work W, Get rid of them. Then, the keyboard KB is instructed to continue the work. Then,
If the answer in step T16 is YES, the process returns to step T2.

If YES in step T13, the process proceeds to step T17 to calculate the amount of lowering of the pad support member M. That is, the pad support member M before descending in step T17 is normally held within a range of about 10 to 50 mm between the suction surfaces of the suction pads 31 and 41 and the work W upper surface. In order to adsorb, it is necessary to bring the distance closer to within 3 mm. Therefore, the amount of fall of the pad support member M is calculated from the distance measured in step T11.

Next, at step T18, the switching valve 3
6 is operated to blow out air from the outer peripheral edges of the suction pads 31 and 41. Next, in step T19, the pad support member M is moved in the Z-axis direction. Then step T20
At, it is determined whether or not the work W is adsorbed. If no, go to step T21. In step T21, it is determined whether the predetermined time has been exceeded. If no, go back to step T20; if yes, go to step T20.
Go to 8.

When it is detected by the work suction detection sensors S4, S5 that the work W is normally suctioned by the suction pads 31, 41, the result in step T20 is YES. When the work W is adsorbed, the adsorbing surfaces of the suction pads 31 and 41 are gradually inclined downward from the horizontal plane toward the left side (left Q1 side) as described above. W slides to the left Q1 side. Then, the long edge AB of the work W abuts on the vertical stopper walls 33c and 43c as the work position restricting members, and the position in the left-right direction is restricted.

If YES in step T20, the position where the work W is attracted is stored in step T22. Next, in step T23, the motor 26 is driven to move the ball nut 28 in the forward R1 direction, and the work W is held by the concave groove 33b of the vertical guide wall 33a and the concave groove 43b of the guide wall 43a.

Next, at step T24, the switching valve 3
6 is operated to stop the supply of air to the suction pads 31 and 41. At this time, the work W is the suction pad 31,
Instead of 41, the stoppers 33, 43 are held by the horizontal recessed grooves 33b, 43b. in this way,
When the work W that has been sucked and held by the suction pads 31 and 41 is sandwiched and held by the stoppers 33 and 43, the amount of air (clean air) used can be reduced and noise can be prevented.

Next, in step T25, the pad support member M is moved to the front surface of the storage jig G. Then step T
At 26, it is judged whether or not the storage jig G is suitable for the size of the work W currently handled.
This judgment is made by setting the pad support member M to the storage jig G.
Whether the storage jig detection sensors S6 and S7 are both turned on (that is, the storage jig detection sensors S6 and S7 are moved to the storage jig). The light reflecting surfaces 64a at the front ends of the side walls 64, 65 of G,
65a). If the result in step T26 is NO, the process moves to step T14 and the belt conveyor F is stopped. When a warning sound is output in the next step T15, the worker
The storage jig G is replaced with a jig corresponding to the shape of the work W. Then, the keyboard KB is instructed to continue the work. Then, the result in step T16 is YES, and the process returns to step T2.

If YES in step T26, the air cylinder 53 is operated in step T27, and as shown in FIG. 8, the work W is placed in one of the shelves 64b and 65b of the storage jig G. It is transferred to the set of shelves 64b and 65b. The number of shelves 64b and 65b of the storage jig G and the height of each of the shelves 64b are predetermined, and the work W is set to 1
The shelves used each time the sheets are transferred are stored in the microcomputer U.
Then, when the work W is transferred, it is sequentially transferred from the upper shelf to the lower shelf. Further, when the work W is transferred, if the clamping force by the vertical guide walls 33a and 43a is slightly relaxed, the transfer by the air cylinder 53 can be performed smoothly, and even if this is done, the work W falls due to the concave grooves 33b and 43b. There is nothing to do.

Next, at step T28, the next predicted work arrival position is calculated. That is, the flow shown in FIG. 11 is performed while slowly driving the belt conveyer F, and the works W on the belt conveyer F are regularly lined up and conveyed according to a certain rule. Therefore, the estimated arrival position of the next workpiece W to be attracted is calculated from the attraction position of the workpiece W stored in step T22. Next, at step T29, the pad support member M is moved to the next expected work arrival position. Then, the process proceeds to step T8.

The above-described embodiment of the non-contact transfer device to which the present invention is applied is the optical sensor S for detecting the position of the peripheral edge of the work W.
1 to S3 and S8 to S10, and a control device for calculating the position of the work from the peripheral position of the work W and controlling the position of the pad support member M and the suction operation of the suction pads 31 and 41. It is possible to recognize the position of the work W appropriately placed on the workpiece W and to hold the work W by suction corresponding to the position, and to convey the work W without a predetermined highly accurate positioning port. Will be possible. Further, by attaching a low-priced and small-sized sensor such as a commercially available optical sensor or ultrasonic sensor to the pad support member M for recognizing the work, the work can be recognized, which is different from the conventional one using a TV camera or the like. In comparison, it can be manufactured at low cost and the degree of freedom in design can be increased.

Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the present invention described in the claims. It is possible to make small design changes.

For example, a work for adjusting the inclination angle of the work suction surface with respect to the work suction surface when the magnitude of the relative tilt angle between the work suction surface and the work suction surface of the suction pad is a predetermined value or more. It is possible to provide a suction surface inclination angle adjusting device. It is also possible to use a wired logic instead of using the microcomputer. Further, in the above-mentioned embodiment, the functions of the optical sensors S1 to S3 and S8 to S10 were checked by the simulated work Wo. Here, the length of the long edge of the simulated work Wo is determined by the steps T41 to T58. It is also possible to omit the long edge calculating means of the work W on the belt conveyor F by performing the calculation in the same manner as. Furthermore, after the step T58 of calculating the work length, the pad support member M is moved in the direction orthogonal to the θa direction, and the optical sensor S1 is moved.
Alternatively, in S2, the length of the short edge AD of the work W can be calculated by a procedure substantially similar to steps T52 to T58, and the shape of the work W can be detected by this. By doing so, it is not necessary to store the shape data of the work W in the ROM of the microcomputer U. The present invention can also be applied to works of various shapes other than rectangular.

Further, depending on the shape of the work,
A work position regulating member can be configured from one stopper,
It is also possible to construct the work position regulating member from three or more stoppers. For example, when the work shape is a square, the forward movement restriction vertical wall that restricts the forward movement of the work W and the left movement restriction vertical wall that restricts the leftward movement are arranged so as to form a right angle in a plan view. It is also possible to configure the work position restricting member with one stopper. In this case, the suction pad may be arranged so that the work suction surface inclines downward from the horizontal plane as it goes to the front left side. In this case, the two perpendicular edges of the outer periphery of the square work are positionally regulated by the front and left and right movement regulation vertical walls of the one stopper. Also,
The number of optical sensors can be other than three,
Various arrangements of the photosensors can be adopted. Further, when parallel scanning and rotational scanning along the work supporting surface are sequentially performed by the optical sensor supported by the pad supporting member, various scanning orders and combinations can be adopted. . For example, in the case of detecting the center position of a circular work, if the positions of three different points on the circumference are detected, the center position can be calculated from the positions of those three points. Using only one optical sensor, after detecting two points on the circumference by scanning in the Y-axis direction, by scanning in the X-axis direction from a point midway between the two points, other points on the circumference can be detected. By detecting, it is possible to detect three different points on the circumference. Further, instead of using three optical sensors for detecting the distance to the upper surface of the work W, for example, only one optical sensor is used, and the one optical sensor is moved above the work W to detect a plurality of positions on the upper surface of the work W. It is also possible to calculate the tilt angle by measuring the distance.

In the above embodiment, the optical sensor is used for each sensor, but the present invention is not limited to this, and an ultrasonic sensor may be used. That is, since the distance between the belt conveyor F and the work W is closer to the sensor by the plate thickness of the work W, when the distance to the object is measured by the ultrasonic sensor, the distance measured at the periphery of the work W is It becomes closer, and it becomes possible to detect the peripheral edge of the work W.

[0089]

According to the non-contact type transporting apparatus of the present invention having the above-mentioned structure, when the tilt angle detected by the tilt angle detecting means is equal to or more than the predetermined value, the work suction operation is stopped by the suction stopping means. Alternatively, the tilt angle of the work suction surface with respect to the work suction surface is adjusted by the device for adjusting the work suction surface tilt angle. Therefore, when the work is picked up by the suction pad, a large shake occurs on the work, and a contact accident occurs between the work surface and the outer peripheral edge of the suction pad, that is, when the inclination angle is large, the suction operation is not executed. . Therefore, it is less likely that the workpiece swings when the workpiece is attracted or the workpiece surface comes into contact with the outer peripheral edge of the suction pad, and the possibility that the workpiece surface is scratched is reduced.

[Brief description of drawings]

FIG. 1 is an overall perspective view of an embodiment of a non-contact conveyance device to which a work position detection device of the present invention is applied.

FIG. 2 is an explanatory view of the same embodiment as II-II of FIG.
It is a line sectional view.

FIG. 3 is a front view of a main part of the embodiment.

FIG. 4 is an explanatory view of the same embodiment, IV-IV of FIG. 3;
It is a line sectional view.

FIG. 5 is an enlarged explanatory view of a work holding portion in the embodiment.

FIG. 6 is an explanatory view of the same embodiment, and VI-VI of FIG.
It is a line sectional view.

FIG. 7 is an explanatory diagram of a transfer device and a simulated work support base of the same embodiment.

FIG. 8 is an explanatory diagram of a transfer device and a storage jig of the same embodiment.

FIG. 9 is an explanatory view of a storage jig of the same embodiment.

FIG. 10 is an explanatory diagram of a configuration of a control unit of the non-contact transfer device of the embodiment.

FIG. 11 is a diagram showing a processing flow of the control unit shown in FIG.

12 is a diagram showing a detailed flow of step T1 shown in FIG.

13 is a diagram showing a detailed flow of step T8 shown in FIG.

FIG. 14 is a diagram for explaining the operation of the suction processing, and is a diagram showing a state in which the sensor support member (pad support member) M is at the reference position.

FIG. 15 is a diagram for explaining the action of the suction processing, and is a diagram showing a state in which the sensor support member (pad support member) M has moved from the reference position in FIG. 14;

FIG. 16 is a diagram for explaining the action of the suction processing, and is a diagram showing a state in which the sensor support member (pad support member) M has moved from the position shown in FIG. 15;

FIG. 17 is a diagram for explaining the operation of the suction processing, and is a diagram showing a state in which the sensor support member (pad support member) M has moved from the position shown in FIG. 16;

FIG. 18 is a view for explaining the action of the suction processing, and shows a state in which the sensor support member (pad support member) M has moved from the position shown in FIG. 17;

FIG. 19 is a diagram for explaining the operation of the suction processing, and is a diagram showing a state in which the sensor support member (pad support member) M has moved from the position shown in FIG.

FIG. 20 is a diagram for explaining the operation of the suction processing, and is a diagram showing a state in which the sensor support member (pad support member) M has moved from the position shown in FIG. 19;

[Explanation of symbols]

M ... Pad support member, Si (i = 1,2, ...) ... Sensor, W ...
Work, 1 ... Non-contact work transfer device, 31, 41 ...
Adsorption pads, 33c, 43c ... Vertical stopper wall as work position regulating member, 53 ... Transfer device (air cylinder)

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display part // B65H 1/28 321 7716-3F

Claims (2)

[Claims] 1. A pad position control device for controlling movement of a pad support member in a three-dimensional space, a suction pad for adsorbing a work by the Bernoulli adsorption principle supported by the pad support member, and the adsorption pad when adsorbing the work. In a non-contact type work transfer device, comprising: an adsorption air supply control device that supplies air for adsorbing a workpiece to the suction pad; and a work position regulating member that regulates horizontal movement of the workpiece adsorbed to the suction pad, Inclination angle detecting means for detecting the magnitude of the relative inclination angle between the workpiece suction surface and the workpiece suction surface of the suction pad is provided, and the workpiece is detected when the inclination angle detected by the inclination angle detecting means is equal to or greater than a predetermined value. A non-contact type work transfer device, which is provided with suction stopping means for stopping a suction operation. 2. A pad position control device for controlling movement of a pad supporting member in a three-dimensional space, a suction pad for sucking a work by the Bernoulli suction principle supported by the pad supporting member, and the suction pad when sucking the work. In a non-contact type work transfer device, comprising: an adsorption air supply control device that supplies air for adsorbing a workpiece to the suction pad; and a work position regulating member that regulates horizontal movement of the workpiece adsorbed to the suction pad, Inclination angle detecting means for detecting the magnitude of the relative inclination angle between the workpiece suction surface and the workpiece suction surface of the suction pad, and when the inclination angle detected by the inclination angle detection means is a predetermined value or more, A non-contact type work transfer device, comprising: a work suction surface inclination angle adjusting device for adjusting an inclination angle of the work suction surface with respect to the suction surface.