JPH0531602A - Cutting tool member made of surface covered tungsten carbide group super hard alloy - Google Patents

Cutting tool member made of surface covered tungsten carbide group super hard alloy

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Publication number
JPH0531602A
JPH0531602A JP20645091A JP20645091A JPH0531602A JP H0531602 A JPH0531602 A JP H0531602A JP 20645091 A JP20645091 A JP 20645091A JP 20645091 A JP20645091 A JP 20645091A JP H0531602 A JPH0531602 A JP H0531602A
Authority
JP
Japan
Prior art keywords
layer
content
cutting tool
hard coating
coating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20645091A
Other languages
Japanese (ja)
Other versions
JP2864801B2 (en
Inventor
Akira Osada
晃 長田
Rutsukusu Beruno
ベルノ・ルツクス
Dantsuingaa Mihiyaeru
ミヒヤエル・ダンツインガー
Haubunaa Roorando
ローランド・ハウブナー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
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Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP20645091A priority Critical patent/JP2864801B2/en
Publication of JPH0531602A publication Critical patent/JPH0531602A/en
Application granted granted Critical
Publication of JP2864801B2 publication Critical patent/JP2864801B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

PURPOSE:To arrange that the bad effect of C1 dissolving solidly together with Al may be ignored and Al solid solution hard covered layer hardness and toughness may not be reduced, by limiting Al content contained in an Al solid solution hard covered layer to be formed at a WC group super hard alloy base body surface at 1X10<-5> to 1X10<-3> atom% in the whole formation. CONSTITUTION:At the surface of a tungsten carbide group super hard alloy base body, a hard covered layer which consists of a single layer of one kind or plural layers of more than two kinds out of a Ti carbide, a nitride and a carbon-nitride and whose average layer thickness is 0.5-20mum, is formed. In this instance, the hard covered layer contains 1X10<-5> to 1X10<-3> atom% Al in the whole formation, and also the Al content becomes maximum at a surface bordering on the base body and becomes less toward the outer surface and becomes minimum at the outer surface.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、高速連続切削に使用
した場合は勿論のこと、一段と苛酷な条件でのフライス
切削などに使用した場合にも硬質被覆層の剥離を起しに
くく、優れた耐摩耗性と耐欠損性を示す表面被覆炭化タ
ングステン基超硬合金製切削工具部材に関するものであ
る。
BACKGROUND OF THE INVENTION This invention is excellent not only when it is used for high-speed continuous cutting but also when it is used for milling cutting under more severe conditions, because the hard coating layer hardly peels off. The present invention relates to a surface-coated tungsten carbide-based cemented carbide cutting tool member exhibiting wear resistance and fracture resistance.

【0002】[0002]

【従来の技術】一般に、炭化タングステン(以下、WC
で示す)基超硬合金基体の表面に、化学蒸着法(CVD
法)によりTiの炭化物、窒化物、および炭窒化物(以
下、それぞれTiC、TiNおよびTiCNで示す)の
うち1種の単層または2種以上の複層からなる硬質被覆
層を形成してなる表面被覆WC基超硬合金製切削工具部
材、あるいは、CVD法によりTiC、TiNおよびT
iCNのうち1種の単層または2種以上の複層からなる
下部層と炭酸化チタン、炭窒酸化チタン、窒化チタンお
よび酸化アルミニウム(以下、それぞれTiCO、Ti
CNO、TiNおよびAl2 3 で示す)のうち1種の
単層または2種以上の複層からなる上部層で構成された
硬質被覆層を形成してなる表面被覆WC基超硬合金製切
削工具部材、は知られている。
2. Description of the Related Art Generally, tungsten carbide (hereinafter referred to as WC
Is shown on the surface of the base cemented carbide substrate.
Method) to form a hard coating layer composed of a single layer of Ti carbide, a nitride, and a carbonitride of Ti (hereinafter, respectively represented by TiC, TiN, and TiCN) or a multilayer of two or more species. Surface-coated WC-based cemented carbide cutting tool member or TiC, TiN and T by CVD method
Among iCN, a lower layer composed of one kind of single layer or two or more kinds of multilayers and titanium carbonate, titanium oxycarbonitride, titanium nitride and aluminum oxide (hereinafter referred to as TiCO, Ti
CNO, TiN, and Al 2 O 3 ) (a CW, TiN, and Al 2 O 3 ) surface-coated WC-based cemented carbide cutting formed by forming a hard coating layer composed of an upper layer composed of one single layer or two or more multiple layers Tool members are known.

【0003】また、上記WC基超硬合金基体の表面に、
TiC、TiNおよびTiCNのうちの1種の単層また
は2種以上の複層をCVD法により形成する際に、反応
ガス中にAlCl3 をTiCl4 に対して0.1:1〜
5:1の割合で添加し、Alが固溶したTiC、TiN
およびTiCNのうち1種の単層または2種以上の複層
からなる硬質被覆層(以下、これらの硬質被覆層をAl
固溶硬質被覆層という)を形成してなる表面被覆切削工
具部材も知られている(特開昭62−146264号公
報参照)。
On the surface of the WC-based cemented carbide substrate,
When a single layer of TiC, TiN and TiCN or a multi-layer of two or more layers is formed by the CVD method, AlCl 3 in the reaction gas is 0.1: 1 to TiCl 4 .
TiC and TiN with a solid solution of Al added at a ratio of 5: 1
And a hard coating layer composed of one kind of TiCN or two or more kinds of multilayers (hereinafter, these hard coating layers are referred to as Al.
A surface-coated cutting tool member formed by forming a solid solution hard coating layer) is also known (see JP-A-62-146264).

【0004】上記AlCl3 を添加して形成されるAl
固溶硬質被覆層は、従来のTiC、TiN、TiCNな
どの硬質被覆層よりも被覆時間が短くなるために硬質層
被覆切削工具のコスト低下に寄与し、さらに硬質被覆層
の結晶粒も微細化されて基体に対する付着力も向上する
ところから耐剥離性に優れた表面被覆切削工具部材を提
供することができ、最近、特に注目されはじめている。
Al formed by adding AlCl 3
The solid solution hard coating layer contributes to the cost reduction of the hard layer coated cutting tool because the coating time is shorter than the conventional hard coating layers such as TiC, TiN, TiCN, etc., and the crystal grains of the hard coating layer are also made finer. Since the adhesion to the substrate is also improved, a surface-coated cutting tool member having excellent peeling resistance can be provided, and recently it has begun to be particularly noticed.

【0005】[0005]

【発明が解決しようとする課題】しかし、上記AlCl
3 を反応ガス中に添加する割合を増加させると、硬質被
覆層に含まれるCl含有量も増加し、そのため硬質被覆
層の硬度および靭性が低下し、かかるClを含有したA
l固溶硬質被覆層を形成した切削工具を苛酷な条件で切
削に適用すると、摩耗が急激に進行するために使用に耐
えられなくなるという課題があった。
However, the above-mentioned AlCl
Increasing the proportion of 3 added to the reaction gas also increases the Cl content contained in the hard coating layer, thereby decreasing the hardness and toughness of the hard coating layer.
l When a cutting tool having a solid solution hard coating layer is applied to cutting under severe conditions, there is a problem that it cannot be used due to rapid wear.

【0006】[0006]

【課題を解決するための手段】そこで、本発明者等は、
かかる課題を解決すべく研究を行った結果、
Therefore, the present inventors have
As a result of research to solve such problems,

【0007】(a)基体表面に形成するAl固溶硬質被
覆層に含まれるAl含有量を全体組成で1×10-5〜1
×10-3原子%に制限すると、Alとともに固溶するC
lの悪影響は無視することができ、Al固溶硬質被覆層
の硬度および靭性を低下せしめることはない、
(A) The Al content in the Al solid solution hard coating layer formed on the surface of the substrate is 1 × 10 -5 to 1 in terms of the total composition.
When it is limited to × 10 -3 atomic%, C which forms a solid solution with Al
The adverse effect of 1 can be neglected, and the hardness and toughness of the Al solid solution hard coating layer are not reduced.

【0008】(b)Al固溶硬質被覆層のAl含有量を
基体との界面部分で最大とし、硬質被覆層の表面に向っ
てAl含有量を減少せしめ、表面におけるAl含有量を
最小とし、さらに好ましくはその最小値は最大値の1/5
以下とすると、硬質被覆層の基体との界面部分の結晶粒
は微細化して基体に対する付着力は向上し、硬質被覆層
表面のAlおよびCl含有量が極めて少なくなるため
に、その部分の硬度および靭性はTiC、TiN、Ti
CNなどの硬質被覆層とほぼ同等またはそれ以上の水準
に維持され、したがって基体に上記濃度分布のAl固溶
硬質被覆層を形成すると硬度および靭性の優れた硬質被
覆層を強固に付着させることができる、などの知見を得
たのである。
(B) The Al content of the solid solution hard coating layer is maximized at the interface with the substrate, the Al content is reduced toward the surface of the hard coating layer, and the Al content on the surface is minimized. More preferably, the minimum value is 1/5 of the maximum value.
In the following, the crystal grains at the interface portion of the hard coating layer with the substrate are refined to improve the adhesion to the substrate, and the Al and Cl contents on the surface of the hard coating layer are extremely small, so that the hardness and Toughness is TiC, TiN, Ti
It is maintained at a level almost equal to or higher than that of a hard coating layer such as CN. Therefore, when an Al solid solution hard coating layer having the above concentration distribution is formed on a substrate, a hard coating layer excellent in hardness and toughness can be firmly adhered. I got the knowledge that I can.

【0009】この発明は、かかる知見にもとづいてなさ
れたものであって、全体組成でAl:1×10-5〜1×
10-3原子%含有するAl固溶硬質被覆層をWC基超硬
合金基体表面に被覆してなる表面被覆WC基超硬合金製
切削工具部材であって、上記Al固溶硬質被覆層のAl
含有量は基体との界面において最大となり、表面に向っ
て減少し表面で最小となり、さらに好ましくはその最小
値が最大値の1/5 以下となっている表面被覆WC基超硬
合金製切削工具部材に特徴を有するものである。
The present invention has been made on the basis of such findings, and the overall composition is Al: 1 × 10 −5 to 1 ×.
A surface-coated WC-based cemented carbide cutting tool member obtained by coating the surface of a WC-based cemented carbide substrate with an Al-dissolved hard coating layer containing 10 -3 atomic%, wherein
The content is maximum at the interface with the substrate, decreases toward the surface, becomes minimum at the surface, and more preferably the minimum value is 1/5 or less of the maximum value. Surface-coated WC-based cemented carbide cutting tool. It is characterized by members.

【0010】硬質被覆層に全体組成でAlを1×10-5
〜1×10-3原子%含有させるには、蒸着反応ガス中に
AlCl3 ガスをTiCl4 ガスに対してもモル比で、 AlCl3 /TiCl4 =10-4〜10-2 となるように添加し、かつAlCl3 ガス添加量を反応
時間とともに減少させることにより達成される。
Al is added to the hard coating layer in a total composition of 1 × 10 -5
In order to contain 1 to 10 × 10 −3 atomic%, the AlCl 3 gas in the vapor deposition reaction gas should be in a molar ratio with respect to TiCl 4 gas such that AlCl 3 / TiCl 4 = 10 −4 to 10 −2. This is achieved by adding AlCl 3 gas and decreasing the amount of AlCl 3 gas added with the reaction time.

【0011】上記Al固溶硬質被覆層の平均層厚は0.
5〜20μmの範囲内にあることが好ましく、その層厚
が0.5μm未満では所望の耐摩耗性が得られず、一
方、その層厚が20μmを越えると、硬質被覆層に欠け
やチッピングが生じるので好ましくない。
The average layer thickness of the Al solid solution hard coating layer is 0.
It is preferable that the thickness is in the range of 5 to 20 μm. If the layer thickness is less than 0.5 μm, desired wear resistance cannot be obtained. On the other hand, if the layer thickness exceeds 20 μm, the hard coating layer may be chipped or chipped. It is not preferable because it occurs.

【0012】さらに、上記Al固溶硬質被覆層を下部層
とし、上記下部層と上部層で構成された硬質被覆層をW
C基超硬合金製基体の表面に形成して切削工具部材を製
造することもできるが、この時形成される上部層の平均
層厚は0.1〜10μmの範囲内にあることが好まし
く、その層厚が0.1μm未満では所望の耐摩耗性を確
保することができず、一方、その層厚が10μmを越え
ると上部層に欠けやチッピングが生じるので好ましくな
い。
Further, the Al solid solution hard coating layer is used as a lower layer, and the hard coating layer composed of the lower layer and the upper layer is W.
The cutting tool member can be manufactured by forming it on the surface of a C-based cemented carbide substrate, but the average layer thickness of the upper layer formed at this time is preferably within the range of 0.1 to 10 μm, If the layer thickness is less than 0.1 μm, desired abrasion resistance cannot be ensured, while if the layer thickness exceeds 10 μm, chipping or chipping occurs in the upper layer, which is not preferable.

【0013】また、上記Al固溶硬質被覆層に含まれる
Al含有量が全体組成で1×10-5原子%未満では緻密
化による耐摩耗性、強度および基体に対する密着性を向
上させるに十分な効果が得られず、一方、1×10-3
子%を越えるとAl固溶硬質被覆層に多量のClも含ま
れるようになり、AlおよびClによる硬度および靭性
の低下を伴う特性劣化が顕著に現われはじめるので好ま
しくない。したがって、Al固溶硬質被覆層のAl含有
量は1×10-5〜1×10-3原子%に定めた。
If the Al content contained in the Al solid solution hard coating layer is less than 1 × 10 -5 atomic% in the total composition, it is sufficient to improve wear resistance due to densification, strength and adhesion to the substrate. No effect can be obtained. On the other hand, when it exceeds 1 × 10 −3 atomic%, a large amount of Cl is included in the Al solid solution hard coating layer, and the characteristic deterioration accompanied by a decrease in hardness and toughness due to Al and Cl is remarkable. It is not preferable because it begins to appear in. Therefore, the Al content of the Al solid solution hard coating layer is set to 1 × 10 −5 to 1 × 10 −3 atom%.

【0014】また、上記Al固溶硬質被覆層のAl含有
量は、基体との界面において最大値をとり、表面に向っ
て減少し、表面で最小値をとるような濃度分布となるこ
とが必要であり、上記Al固溶硬質被覆層の表面におけ
るAl含有量の最小値は、基体との界面におけるAl含
有量の最大値の1/5 以下とすることにより一層すぐれた
効果が得られるのである。
Further, the Al content of the Al solid solution hard coating layer should have a concentration distribution in which it takes a maximum value at the interface with the substrate, decreases toward the surface, and takes a minimum value at the surface. The minimum value of the Al content on the surface of the Al solid solution hard coating layer is 1/5 or less of the maximum value of the Al content at the interface with the substrate, so that a more excellent effect can be obtained. .

【0015】[0015]

【実施例】この発明の表面被覆WC基超硬合金製切削工
具部材を実施例にもとづいて具体的に説明する。
EXAMPLES The surface-coated WC-based cemented carbide cutting tool member of the present invention will be specifically described based on Examples.

【0016】表1に示される配合組成とほぼ同一組成を
有し、JIS・SNG432に相当する形状をもったス
ローアウエイチップを作製し、これらスローアウエイチ
ップをWC基超硬合金基体A〜Eとして用意した。
Throwaway chips having substantially the same composition as shown in Table 1 and having a shape corresponding to JIS SNG432 were prepared, and these throwaway chips were used as WC-based cemented carbide substrates A to E. I prepared.

【0017】[0017]

【表1】 [Table 1]

【0018】実施例1 上記WC基超硬合金基体Aを通常の化学蒸着装置に装入
し、上記化学蒸着装置内部を、温度:1030℃、圧
力:100Torrに保持し、基本反応ガス:4%TiCl
4 −5%CH4 −残りH2 を流しながら、同時にAlC
3 ガスをTiCl4 ガスに対して、反応開始時にモル
比でAlCl3 /TiCl4 =8×10-3となるように
添加し、上記AlCl3 ガス量を反応時間とともに減少
させ、反応終了時のAlCl3 ガス添加量がモル比でA
lCl3 /TiCl4 =8×10-4となるように供給
し、平均層厚:8μmのAl固溶TiC層からなる硬質
被覆層を形成することにより本発明被覆切削工具1を作
製した。
Example 1 The above WC-based cemented carbide substrate A was loaded into a normal chemical vapor deposition apparatus, the inside of the chemical vapor deposition apparatus was maintained at a temperature of 1030 ° C. and a pressure of 100 Torr, and a basic reaction gas was 4%. TiCl
4 -5% CH 4 - under a stream of remaining H 2, at the same time AlC
l 3 gas was added to TiCl 4 gas at a molar ratio of AlCl 3 / TiCl 4 = 8 × 10 −3 at the start of the reaction, and the amount of AlCl 3 gas was decreased with the reaction time. AlCl 3 gas addition amount of A is A
The coated cutting tool 1 of the present invention was produced by supplying the liquid so as to be 1Cl 3 / TiCl 4 = 8 × 10 −4 and forming a hard coating layer made of an Al solid solution TiC layer having an average layer thickness of 8 μm.

【0019】得られた本発明被覆切削工具1の上記硬質
被覆層に含まれるAlの全体組成、最内面および最外面
におけるAl含有量をIMAによる深さ方向分析により
測定し、それらの測定結果を表2に示した。
The overall composition of Al contained in the hard coating layer of the obtained coated cutting tool 1 of the present invention, the Al content in the innermost surface and the outermost surface were measured by the depth direction analysis by IMA, and the measurement results are shown. The results are shown in Table 2.

【0020】実施例2 上記WC基超硬合金基体Eを通常の化学蒸着装置に装入
し、上記化学蒸着装置内部を、温度:1030℃、圧
力:100Torrに保持し、基本反応ガスとして4%Ti
Cl4 −5CH4 −残りH2 を流し、続けて上記化学蒸
着装置内部を、温度:980℃、圧力:100Torrに保
持し、基本反応ガス:4%TiCl4 −8%N2 −残り
2 を流しながら、同時にAlCl3 ガスも添加して流
し、上記AlCl3 ガスとTiCl4 ガスに対して、反
応開始時にモル比でAlCl3 /TiCl4 =1×10
-2となるように添加し、反応時間とともに減少させ、反
応終了時のAlCl3 ガス量がモル比でAlCl3 /T
iCl4 =5×10-3となるように供給し、平均層厚:
3μmのAl固溶TiC層(第1層)および平均層厚:
1μmのAl固溶TiN層(第2層)からなる硬質被覆
層を形成し、本発明被覆切削工具2を作製した。
Example 2 The above WC-based cemented carbide substrate E was charged into a normal chemical vapor deposition apparatus, the inside of the chemical vapor deposition apparatus was maintained at a temperature of 1030 ° C. and a pressure of 100 Torr, and 4% as a basic reaction gas. Ti
Cl 4 -5CH 4 - flowing the remainder H 2, the inner the chemical vapor deposition device in succession, temperature: 980 ° C., pressure: held in 100 Torr, the basic reaction gas: 4% TiCl 4 -8% N 2 - remaining H 2 AlCl 3 gas is also added and made to flow at the same time while flowing, and AlCl 3 / TiCl 4 = 1 × 10 in molar ratio with respect to the above AlCl 3 gas and TiCl 4 gas at the start of the reaction.
-2 so that the amount of AlCl 3 gas at the end of the reaction is AlCl 3 / T in a molar ratio.
It was supplied so that iCl 4 = 5 × 10 −3, and the average layer thickness:
3 μm Al solid solution TiC layer (first layer) and average layer thickness:
A hard coating layer composed of an Al solid solution TiN layer (second layer) having a thickness of 1 μm was formed to prepare a cutting tool 2 coated with the present invention.

【0021】得られた本発明被覆切削工具2の硬質被覆
層に含まれるAlの全体組成、最内面におけるAl含有
量(第1層の最内面におけるAl含有量)および最外面
におけるAl含有量(第2層の最外面におけるAl含有
量)をIMAによる深さ方向分析により測定し、それら
の測定結果を表2に示した。
The overall composition of Al contained in the obtained hard coating layer of the coated cutting tool 2 of the present invention, the Al content in the innermost surface (Al content in the innermost surface of the first layer) and the Al content in the outermost surface ( The Al content in the outermost surface of the second layer) was measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0022】実施例3 上記WC基超硬合金基体Bを通常の化学蒸着装置に装入
し、上記化学蒸着装置内部を、温度:1030℃、圧
力:100Torrに保持し、基本反応ガス:4%TiCl
4 −5%CH4 −残りH2 を流し、続けて上記化学蒸着
装置内部を温度:1000℃、圧力:100Torrに保持
し、基本反応ガス:4%TiCl4 −3%CH4 −4%
2 −残りH2 を流し、さらに続けて、温度:1030
℃、圧力:100Torrの条件で、基本反応ガス:4%T
iCl4−5%CH4 −残りH2 を、温度:980℃、
圧力:100Torrに保持し、基本反応ガス:4%TiC
4 −8%H2 −残りH2 を流し、同時にAlCl3
スをTiCl4 ガスに対して、反応開始時にモル比でA
lCl3 /TiCl4 =7×10-3となるように添加
し、上記AlCl3 ガス供給量を反応時間とともに減少
させ、反応終了時のAlCl3 ガス添加量がモル比でA
lCl3 /TiCl4 =1×10-3となるように供給
し、 平均層厚:1μmのAl固溶TiC層(第1層)、 平均層厚:1μmのAl固溶TiCN層(第2層)、 平均層厚:6μmのAl固溶TiC層(第3層)、 平均層厚:1μmのAl固溶TiN層(第4層) からなる硬質被覆層を形成し、本発明被覆切削工具3を
作製した。
Example 3 The above WC-based cemented carbide substrate B was loaded into a normal chemical vapor deposition apparatus, the inside of the chemical vapor deposition apparatus was maintained at a temperature of 1030 ° C. and a pressure of 100 Torr, and a basic reaction gas was 4%. TiCl
4 -5% CH 4 - flowing the remainder H 2, followed by the chemical vapor deposition apparatus internal temperature: 1000 ° C., pressure: held in 100 Torr, the basic reaction gas: 4% TiCl 4 -3% CH 4 -4%
N 2 -The rest of H 2 is flown and further continued, temperature: 1030
Basic reaction gas: 4% T under conditions of ℃, pressure: 100 Torr
iCl 4 -5% CH 4 -remaining H 2 at a temperature of 980 ° C.
Pressure: 100 Torr, basic reaction gas: 4% TiC
l 4 -8% H 2 -remaining H 2 was flown, and at the same time, AlCl 3 gas was mixed with TiCl 4 gas at a molar ratio of A at the start of the reaction.
lCl 3 / TiCl 4 = 7 × 10 −3, and the amount of AlCl 3 gas supplied was decreased with the reaction time. The amount of AlCl 3 gas added at the end of the reaction was A
lCl 3 / TiCl 4 = 1 × 10 −3 , the average layer thickness: 1 μm of Al solid solution TiC layer (first layer), the average layer thickness: 1 μm of Al solid solution TiCN layer (second layer) ), An average layer thickness: 6 μm of Al solid solution TiC layer (third layer), an average layer thickness: 1 μm of Al solid solution TiN layer (fourth layer). Was produced.

【0023】得られた本発明被覆切削工具3の硬質被覆
層に含まれるAlの全体組成、最内面におけるAlの含
有量(第1層の最内面におけるAl含有量)および最外
面におけるAl含有量(第4層の最外面におけるAl含
有量)をIMAによる深さ方向分析により測定し、それ
らの測定結果を表2に示した。
The overall composition of Al contained in the hard coating layer of the obtained coated cutting tool 3 of the present invention, the Al content in the innermost surface (Al content in the innermost surface of the first layer) and the Al content in the outermost surface. (Al content in the outermost surface of the fourth layer) was measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0024】実施例4 上記WC基超硬合金基体Dを用い、実施例2に示される
温度および圧力で基本反応ガスを流しながら、同時にA
lCl3 ガスをTiCl4 ガスに対してモル比で、 反応開始時:AlCl3 /TiCl4 =1×10-3、 反応終了時:AlCl3 /TiCl4 =1×10-4 となるように反応時間とともに減少するように供給し、 平均層厚:2μmのAl固溶TiN層(第1層)、 平均層厚:5μmのAl固溶TiC層(第2層)、 平均層厚:2μmのAl固溶TiN層(第3層) を形成し、本発明被覆切削工具4を作製した。
Example 4 Using the above-mentioned WC-based cemented carbide substrate D, the basic reaction gas was made to flow at the temperature and pressure shown in Example 2 while at the same time A
The reaction is carried out so that lCl 3 gas and TiCl 4 gas are in a molar ratio such that the reaction starts: AlCl 3 / TiCl 4 = 1 × 10 −3 , and the reaction ends: AlCl 3 / TiCl 4 = 1 × 10 −4. Supplying so as to decrease with time, average layer thickness: 2 μm Al solid solution TiN layer (first layer), average layer thickness: 5 μm Al solid solution TiC layer (second layer), average layer thickness: 2 μm Al A solid solution TiN layer (third layer) was formed, and a cutting tool 4 coated with the present invention was produced.

【0025】得られた本発明被覆切削工具4の硬質被覆
層に含まれるAlの全体組成、最内面におけるAl含有
量(第1層の最内面におけるAl含有量)および最外面
におけるAl含有量(第3層の最外面におけるAl含有
量)をIMAによる深さ方向分析により測定し、それら
の測定結果を表2に示した。
The overall composition of Al contained in the hard coating layer of the obtained coated cutting tool 4 of the present invention, the Al content in the innermost surface (Al content in the innermost surface of the first layer) and the Al content in the outermost surface ( The Al content in the outermost surface of the third layer) was measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0026】実施例5 上記WC基超硬合金基体Cを用い、実施例3に示される
温度および圧力で基本反応ガスを流しながら、同時にA
lCl3 ガスをTiCl4 ガスに対してモル比で、 反応開始時:AlCl3 /TiCl4 =5×10-4、 反応終了時:AlCl3 /TiCl4 =1×10-4 となるように反応時間とともに減少するように供給し、 平均層厚:1μmのAl固溶TiC層(第1層)、 平均層厚:0.5μmのAl固溶TiN層(第2層)、 平均層厚:5μmのAl固溶TiCN層(第3層) 平均層厚:1μmのAl固溶TiN層(第4層) からなる硬質被覆層を形成し、本発明被覆切削工具5を
作製した。
Example 5 Using the above-mentioned WC-based cemented carbide substrate C, while flowing a basic reaction gas at the temperature and pressure shown in Example 3, at the same time A
The reaction is carried out so that lCl 3 gas and TiCl 4 gas are in a molar ratio such that the reaction start time is AlCl 3 / TiCl 4 = 5 × 10 −4 and the reaction end time is AlCl 3 / TiCl 4 = 1 × 10 −4. Supplying so as to decrease with time, average layer thickness: 1 μm Al solid solution TiC layer (first layer), average layer thickness: 0.5 μm Al solid solution TiN layer (second layer), average layer thickness: 5 μm Al solid-solved TiCN layer (third layer) having an average layer thickness of 1 μm was formed as a hard coating layer, and a coated cutting tool 5 of the present invention was produced.

【0027】得られた本発明被覆切削工具5の硬質被覆
層に含まれるAlの全体組成、最内面におけるAl含有
量(第1層の最内面におけるAl含有量)および最外面
におけるAl含有量(第4層の最外面におけるAl含有
量)をIMAによる深さ方向分析により測定し、それら
の測定結果を表2に示した。
The overall composition of Al contained in the hard coating layer of the obtained coated cutting tool 5 of the present invention, the Al content in the innermost surface (Al content in the innermost surface of the first layer) and the Al content in the outermost surface ( The Al content in the outermost surface of the fourth layer) was measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0028】実施例6 上記WC基超硬合金基体Bを用い、実施例3に示される
温度および圧力で基本反応ガスを流しながら、同時にA
lCl3 ガスをTiCl4 ガスに対してモル比で、 反応開始時:AlCl3 /TiCl4 =5×10-3、 反応終了時:AlCl3 /TiCl4 =5×10-4 となるように反応時間とともに減少するように供給し、 平均層厚:2μmのAl固溶TiC層(第1層)、 平均層厚:1μmのAl固溶TiCN層(第2層)、 平均層厚:5μmのAl固溶TiC層(第3層) からなる硬質被覆層を形成し、本発明被覆切削工具6を
作製した。
Example 6 Using the above WC-based cemented carbide substrate B, while flowing a basic reaction gas at the temperature and pressure shown in Example 3, A
The reaction is carried out such that lCl 3 gas and TiCl 4 gas are in a molar ratio such that the reaction starts: AlCl 3 / TiCl 4 = 5 × 10 −3 , and the reaction ends: AlCl 3 / TiCl 4 = 5 × 10 −4. Supplying so as to decrease with time, average layer thickness: 2 μm Al solid solution TiC layer (first layer), average layer thickness: 1 μm Al solid solution TiCN layer (second layer), average layer thickness: 5 μm Al A hard coating layer made of a solid solution TiC layer (third layer) was formed to prepare a cutting tool 6 coated with the present invention.

【0029】得られた本発明被覆切削工具6の硬質被覆
層に含まれるAlの全体組成、最内面におけるAl含有
量(第1層の最内面におけるAl含有量)および最外面
におけるAl含有量(第3層の最外面におけるAl含有
量)をIMAによる深さ方向分析により測定し、それら
の測定結果を表2に示した。
The overall composition of Al contained in the hard coating layer of the obtained coated cutting tool 6 of the present invention, the Al content in the innermost surface (Al content in the innermost surface of the first layer) and the Al content in the outermost surface ( The Al content in the outermost surface of the third layer) was measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0030】実施例7 上記WC基超硬合金基体Aを用い、実施例1に示される
温度および圧力で基本反応ガスを流しながら、同時にA
lCl3 ガスをTiCl4 ガスに対してモル比で、 反応開始時:AlCl3 /TiCl4 =1×10-2、 反応終了時:AlCl3 /TiCl4 =1×10-3 となるように反応時間とともに減少するように供給し、
平均層厚:6μmのAl固溶TiC層(単層)からなる
硬質被覆層を形成し、本発明被覆切削工具7を作製し
た。
Example 7 Using the above-mentioned WC-based cemented carbide substrate A, the basic reaction gas was flowed at the temperature and pressure shown in Example 1, and at the same time A
The reaction is carried out so that lCl 3 gas and TiCl 4 gas are in a molar ratio such that the reaction start time is AlCl 3 / TiCl 4 = 1 × 10 -2 , and the reaction end time is AlCl 3 / TiCl 4 = 1 × 10 -3. Supply so that it decreases with time,
A hard coating layer made of an Al solid solution TiC layer (single layer) having an average layer thickness of 6 μm was formed, and a cutting tool 7 coated with the present invention was produced.

【0031】この本発明被覆切削工具7の硬質被覆層に
含まれるAlの全体組成、最内面および最外面における
Al含有量をIMAによる深さ方向分析により測定し、
それらの測定結果を表2に示した。
The overall composition of Al contained in the hard coating layer of the coated cutting tool 7 of the present invention, the Al content in the innermost surface and the outermost surface were measured by IMA depth analysis,
The measurement results are shown in Table 2.

【0032】実施例8 上記WC基超硬合金基体Cを用い、実施例3のTiCN
層を得るための温度および圧力下で基本反応ガスを流し
ながら、同時にAlCl3 ガスをTiCl4 ガスに対し
てモル比で、 反応開始時:AlCl3 /TiCl4 =6×10-3、 反応終了時:AlCl3 /TiCl4 =1×10-4 となるように反応時間とともに減少するように供給し、
平均層厚:10μmのAl固溶TiCN層(単層)から
なる硬質被覆層を形成し、本発明被覆切削工具8を作製
した。
Example 8 Using the above WC-based cemented carbide substrate C, TiCN of Example 3
While flowing the basic reaction gas at the temperature and pressure for obtaining the layer, at the same time, the AlCl 3 gas in a molar ratio to the TiCl 4 gas, at the start of the reaction: AlCl 3 / TiCl 4 = 6 × 10 −3 , the end of the reaction Time: AlCl 3 / TiCl 4 = 1 × 10 −4 The supply was made so as to decrease with the reaction time,
A hard coating layer made of an Al solid solution TiCN layer (single layer) having an average layer thickness of 10 μm was formed, and a coated cutting tool 8 of the present invention was produced.

【0033】この本発明被覆切削工具8の硬質被覆層に
含まれるAlの全体組成、最内面および最外面における
Al含有量をIMAによる深さ方向分析により測定し、
それらの測定結果を表2に示した。
The overall composition of Al contained in the hard coating layer of the coated cutting tool 8 of the present invention, the Al content in the innermost surface and the outermost surface were measured by the depth direction analysis by IMA,
The measurement results are shown in Table 2.

【0034】実施例9 上記WC基超硬合金基体Eを用い、実施例3に示される
温度および圧力で基本反応ガスを流しながら、同時にA
lCl3 ガスをTiCl4 ガスに対してモル比で、 反応開始時:AlCl3 /TiCl4 =6×10-3、 反応終了時:AlCl3 /TiCl4 =8×10-4 となるように反応時間とともに減少するように供給し、 平均層厚:1μmのAl固溶TiN層(第1層)、 平均層厚:1μmのAl固溶TiCN層(第2層)、 平均層厚:6μmのAl固溶TiN層(第3層)、 平均層厚:1μmのAl固溶TiC層(第4層) からなる硬質被覆層を形成し、本発明被覆切削工具9を
作製した。
Example 9 Using the above WC-based cemented carbide substrate E, the basic reaction gas was made to flow at the temperature and pressure shown in Example 3 while at the same time A
The reaction is carried out so that lCl 3 gas and TiCl 4 gas are in a molar ratio such that the reaction starts: AlCl 3 / TiCl 4 = 6 × 10 −3 , and the reaction end: AlCl 3 / TiCl 4 = 8 × 10 −4. Supplying so as to decrease with time, average layer thickness: 1 μm Al solid solution TiN layer (first layer), average layer thickness: 1 μm Al solid solution TiCN layer (second layer), average layer thickness: 6 μm Al A hard coating layer consisting of a solid solution TiN layer (third layer) and an Al solid solution TiC layer (fourth layer) having an average layer thickness of 1 μm was formed, and a coated cutting tool 9 of the present invention was produced.

【0035】得られた本発明被覆切削工具9の硬質被覆
層に含まれるAlの全体組成、最内面におけるAl含有
量(第1層の最内面におけるAl含有量)および最外面
におけるAl含有量(第4層の最外面におけるAl含有
量)をIMAによる深さ方向分析により測定し、それら
の測定結果を表2に示した。
The overall composition of Al contained in the hard coating layer of the obtained coated cutting tool 9 of the present invention, the Al content in the innermost surface (Al content in the innermost surface of the first layer) and the Al content in the outermost surface ( The Al content in the outermost surface of the fourth layer) was measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0036】実施例10 上記WC基超硬合金基体Dを用い、実施例3に示される
温度および圧力で基本反応ガスを流しながら、同時にA
lCl3 ガスをTiCl4 ガスに対してモル比で、 反応開始時:AlCl3 /TiCl4 =3×10-3、 反応終了時:AlCl3 /TiCl4 =3×10-4 となるように反応時間とともに減少するように供給し、 平均層厚:2μmのAl固溶TiC層(第1層)、 平均層厚:2μmのAl固溶TiCN層(第2層)、 平均層厚:2μmのAl固溶TiC層(第3層)、 平均層厚:2μmのAl固溶TiCN層(第4層) からなる硬質被覆層を形成し、本発明被覆切削工具10
を作製した。
Example 10 Using the above WC-based cemented carbide substrate D, at the same time as the basic reaction gas was made to flow at the temperature and pressure shown in Example 3, A
The reaction is carried out so that lCl 3 gas and TiCl 4 gas are in a molar ratio such that the reaction starts: AlCl 3 / TiCl 4 = 3 × 10 −3 , and the reaction ends: AlCl 3 / TiCl 4 = 3 × 10 −4. Supplying so as to decrease with time, average layer thickness: 2 μm Al solid solution TiC layer (first layer), average layer thickness: 2 μm Al solid solution TiCN layer (second layer), average layer thickness: 2 μm Al A hard coating layer composed of a solid solution TiC layer (third layer) and an Al solid solution TiCN layer (fourth layer) having an average layer thickness of 2 μm is formed, and the coated cutting tool 10 according to the present invention is formed.
Was produced.

【0037】得られた本発明被覆切削工具10の硬質被
覆層に含まれるAlの全体組成、最内面におけるAl含
有量(第1層の最内面におけるAl含有量)および最外
面におけるAl含有量(第4層の最外面におけるAl含
有量)をIMAによる深さ方向分析により測定し、それ
らの測定結果を表2に示した。
The overall composition of Al contained in the hard coating layer of the obtained coated cutting tool 10 of the present invention, the Al content in the innermost surface (Al content in the innermost surface of the first layer) and the Al content in the outermost surface ( The Al content in the outermost surface of the fourth layer) was measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0038】実施例11 上記WC基超硬合金基体Bを用い、実施例3に示される
温度および圧力で基本反応ガスを流しながら、同時にA
lCl3 ガスをTiCl4 ガスに対してモル比で、 反応開始時:AlCl3 /TiCl4 =1×10-2、 反応終了時:AlCl3 /TiCl4 =5×10-3 となるように反応時間とともに減少するように供給し、 平均層厚:3μmのAl固溶TiCN層(第1層) 平均層厚:6μmのAl固溶TiC層(第2層) からなる硬質被覆層を形成し、本発明被覆切削工具11
を作製した。
Example 11 Using the above WC-based cemented carbide substrate B, the basic reaction gas was made to flow at the temperature and pressure shown in Example 3 while at the same time A
The reaction is carried out so that lCl 3 gas and TiCl 4 gas are in a molar ratio such that the reaction start time is AlCl 3 / TiCl 4 = 1 × 10 -2 , and the reaction end time is AlCl 3 / TiCl 4 = 5 × 10 -3. Supplying so as to decrease with time, a hard coating layer composed of an Al solid solution TiCN layer (first layer) having an average layer thickness: 3 μm and an Al solid solution TiC layer (second layer) having an average layer thickness: 6 μm is formed. The coated cutting tool 11 of the present invention
Was produced.

【0039】得られた本発明被覆切削工具11の硬質被
覆層に含まれるAlの全体組成、最内面におけるAl含
有量(第1層の最内面におけるAl含有量)および最外
面におけるAl含有量(第2層の最外面におけるAl含
有量)をIMAによる深さ方向分析により測定し、それ
らの測定結果を表2に示した。
The overall composition of Al contained in the hard coating layer of the obtained coated cutting tool 11 of the present invention, the Al content in the innermost surface (Al content in the innermost surface of the first layer) and the Al content in the outermost surface ( The Al content in the outermost surface of the second layer) was measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0040】比較例1 実施例1において、AlCl3 ガスをTiCl4 ガスに
対してモル比でAlCl3 /TiCl4 =2×10
-3(一定)となるように供給し、平均層厚:10μmの
Al固溶TiC層からなる硬質被覆層を形成して比較被
覆切削工具1を作製し、この比較被覆切削工具1の上記
硬質被覆層に含まれるAlの全体組成、最内面および最
外面におけるAl含有量をIMAによる深さ方向分析に
より測定し、それらの測定結果を表2に示した。
Comparative Example 1 In Example 1, AlCl 3 gas was mixed with TiCl 4 gas in a molar ratio of AlCl 3 / TiCl 4 = 2 × 10.
-3 (constant) is supplied, a hard coating layer made of an Al solid solution TiC layer having an average layer thickness of 10 μm is formed to prepare a comparative coated cutting tool 1, and the comparative coated cutting tool 1 is hard. The total composition of Al contained in the coating layer, the Al content in the innermost surface and the outermost surface were measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0041】比較例2 実施例8において、AlCl3 ガスをTiCl4 ガスに
対してモル比でAlCl3 /TiCl4 =8×10
-5(一定)となるように供給し、平均層厚:10μmの
Al固溶TiCN層からなる硬質被覆層を形成して比較
被覆切削工具2を作製し、この比較被覆切削工具2の上
記硬質被覆層に含まれるAlの全体組成、最内面および
最外面におけるAl含有量をIMAによる深さ方向分析
により測定し、それらの測定結果を表2に示した。
Comparative Example 2 In Example 8, AlCl 3 gas was mixed with TiCl 4 gas in a molar ratio of AlCl 3 / TiCl 4 = 8 × 10.
-5 (constant) is supplied, a hard coating layer made of an Al solid solution TiCN layer having an average layer thickness of 10 μm is formed to prepare a comparative coated cutting tool 2, and the comparative coated cutting tool 2 is hard. The total composition of Al contained in the coating layer, the Al content in the innermost surface and the outermost surface were measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0042】比較例3 実施例2において、AlCl3 ガスをTiCl4 ガスに
対してモル比でAlCl3 /TiCl4 =5×10
-2(一定)となるように供給する以外は実施例2と全く
同一条件で同一平均層厚のTiC層(第1層)およびT
iN層(第2層)からなる硬質被覆層を形成して比較被
覆切削工具3を作製し、比較切削工具3の上記硬質被覆
層に含まれるAlの全体組成、最内面および最外面にお
けるAl含有量をIMAによる深さ方向分析により測定
し、それらの測定結果を表2に示した。
Comparative Example 3 In Example 2, AlCl 3 gas was mixed with TiCl 4 gas in a molar ratio of AlCl 3 / TiCl 4 = 5 × 10 5.
−2 (constant) except that the TiC layer (first layer) and T having the same average layer thickness and the same average thickness as in Example 2 were used.
A hard coating layer composed of an iN layer (second layer) is formed to produce a comparatively coated cutting tool 3, and the overall composition of Al contained in the hard coating layer of the comparative cutting tool 3 and the Al content in the innermost surface and the outermost surface. The amount was measured by depth analysis by IMA, and the measurement results are shown in Table 2.

【0043】比較例4 実施例3において、AlCl3 ガスをTiCl4 ガスに
対してモル比でAlCl3 /TiCl4 =3×10
-2(一定)となるように供給する以外は実施例3と全く
同一条件で同一平均層厚のTiC層(第1層)、TiC
N層(第2層)、TiC層(第3層)およびTiN層
(第4層)からなる硬質被覆層を形成して比較被覆切削
工具4を作製し、この比較被覆切削工具4の硬質被覆層
に含まれるAlの全体組成、最内面および最外面におけ
るAl含有量をIMAによる深さ方向分析により測定
し、それらの測定結果を表2に示した。
Comparative Example 4 In Example 3, AlCl 3 gas was mixed with TiCl 4 gas in a molar ratio of AlCl 3 / TiCl 4 = 3 × 10.
-2 (constant) except that the TiC layer (first layer) and TiC having the same average layer thickness under exactly the same conditions as in Example 3 were used.
A hard coating layer composed of an N layer (second layer), a TiC layer (third layer), and a TiN layer (fourth layer) is formed to produce a comparatively coated cutting tool 4, and the comparatively coated cutting tool 4 has a hard coating layer. The total composition of Al contained in the layer, the Al content in the innermost surface and the outermost surface were measured by depth direction analysis by IMA, and the measurement results are shown in Table 2.

【0044】このようにして作製された本発明被覆切削
工具1〜11および比較切削工具1〜4について、 切削材:SNCM439(硬さ:HB 260)、 切削速度:200m/min 、 送り:0.3mm/刃、 切込み/1.5mm、 切削時間:15min 、 冷却油:なし、 の条件で鋼のフライス切削試験を行ない、切刃の逃げ面
摩耗幅を測定するとともに、切刃状況も観察し、これら
の測定結果も表2に示した。
With respect to the coated cutting tools 1 to 11 of the present invention and the comparative cutting tools 1 to 4 thus produced, cutting material: SNCM439 (hardness: H B 260), cutting speed: 200 m / min, feed: 0 Steel milling test is performed under the following conditions: 0.3 mm / blade, depth of cut / 1.5 mm, cutting time: 15 min, cooling oil: none, and the flank wear width of the cutting edge is measured and the cutting edge condition is also observed. The measurement results are also shown in Table 2.

【0045】[0045]

【表2】 [Table 2]

【0046】表2に示された結果から、本発明切削工具
1〜11は、いずれも15分間のフライス切削に対して
摩耗状況は正常摩耗となるに対し、Al含有量が全体組
成でこの発明の条件をみたしても最内面と最外面の間に
濃度差のない硬質被覆層を有する比較被覆切削工具1、
Al含有量の全体組成がこの発明の条件から外れている
比較被覆切削工具2〜4は、いずれも15分間のフライ
ス切削に耐えられず、15分以内に異常摩耗またはチッ
ピングが発生することがわかる。
From the results shown in Table 2, all of the cutting tools 1 to 11 of the present invention show normal wear in 15 minutes of milling, while the Al content is the entire composition. Comparative coated cutting tool 1 having a hard coating layer having no concentration difference between the innermost surface and the outermost surface even if the conditions of
It can be seen that the comparative coated cutting tools 2 to 4 in which the overall composition of the Al content is out of the conditions of the present invention cannot withstand milling cutting for 15 minutes, and abnormal wear or chipping occurs within 15 minutes. .

【0047】なお、上記実施例1〜11および比較例1
〜4で得られた本発明切削工具1〜11および比較切削
工具1〜4について、高速連続切削試験を特に行ってい
ないが、前述の苛酷なフライス切削試験に耐え得ること
は上記高速連続切削試験に対しても十分な耐摩耗性を発
揮しうることを示唆している。
The above Examples 1 to 11 and Comparative Example 1
The high-speed continuous cutting test is not particularly performed on the cutting tools 1 to 11 of the present invention and the comparative cutting tools 1 to 4 obtained in Nos. 4 to 4, but the fact that they can withstand the above-mentioned severe milling cutting test is It also suggests that sufficient wear resistance can be exhibited.

【0048】従来例1〜7 表1に示されるWC基超硬合金基体の表面に、直接下記
の条件でAlを含まないTiC、TiN、TiCN、T
iCO、TiCNOおよびAl2 3 のうちの単層また
は2種以上の複層を被覆し、表3に示される従来被覆切
削工具1〜7を作製した。
Conventional Examples 1 to 7 TiC, TiN, TiCN, and T containing no Al under the following conditions directly on the surface of the WC-based cemented carbide substrate shown in Table 1.
The conventional coated cutting tools 1 to 7 shown in Table 3 were prepared by coating a single layer of iCO, TiCNO and Al 2 O 3 or a multilayer of two or more types.

【0049】上記TiC、TiN、TiCN、TiC
O、TiCNOおよびAl2 3 の硬質層を化学蒸着法
により形成する条件は、次の通りである。
The above TiC, TiN, TiCN, TiC
The conditions for forming a hard layer of O, TiCNO and Al 2 O 3 by the chemical vapor deposition method are as follows.

【0050】(a) TiCの場合 温 度:1030℃、 圧 力:100torr、 反応ガス組成:4%TiCl4 −5%CH4 −91%H
2 、 (b) TiNの場合 温 度:980℃、 圧 力:100torr、 反応ガス組成:4%TiCl4 −8%N2 −88%
2 、 (c) TiCNの場合 温 度:1000℃、 圧 力:100torr、 反応ガス組成:4%TiCl4 −3%CH4 −4%N2
−89%H2 、 (d) TiCOの場合 温 度:1000℃、 圧 力:100torr、 反応ガス組成:4%TiCl4 −6%CO−90%
2 、 (e) TiCNOの場合 温 度:1000℃、 圧 力:100torr、 反応ガス組成:4%TiCl4 −3%CO−3%N2
90%H2 、 (f) Al2 3 の場合 温 度:1000℃、 圧 力:100torr、 反応ガス組成:3%AlCl3 −5%CO2 −92%H
2
(A) In the case of TiC Temperature: 1030 ° C. Pressure: 100 torr Reaction gas composition: 4% TiCl 4 -5% CH 4 -91% H
2 , (b) In the case of TiN Temperature: 980 ° C, Pressure: 100 torr, Reaction gas composition: 4% TiCl 4 -8% N 2 -88%
In the case of H 2 , (c) TiCN Temperature: 1000 ° C., Pressure: 100 torr, Reaction gas composition: 4% TiCl 4 -3% CH 4 -4% N 2
-89% H 2 , (d) In case of TiCO Temperature: 1000 ° C, Pressure: 100 torr, Reaction gas composition: 4% TiCl 4 -6% CO-90%
In the case of H 2 , (e) TiCNO Temperature: 1000 ° C., Pressure: 100 torr, Reaction gas composition: 4% TiCl 4 -3% CO-3% N 2-
90% H 2 , (f) Al 2 O 3 Temperature: 1000 ° C, Pressure: 100 torr, Reaction gas composition: 3% AlCl 3 -5% CO 2 -92% H
2 ,

【0051】[0051]

【表3】 [Table 3]

【0052】実施例12〜18 上記実施例5〜11で作製された本発明被覆切削工具5
〜11の硬質被覆層を下部層とし、この下部層の上にさ
らに表4に示される平均層厚を有するAlを含まないT
iCO、TiN、TiCNOおよびAl2 3 のうちの
1種または2種以上を上記従来例1〜7で示した条件と
全く同一条件にて上部層を被覆し、本発明被覆切削工具
12〜18を作製した。
Examples 12 to 18 The coated cutting tool 5 of the present invention produced in Examples 5 to 11 above.
.About.11 as a lower layer, and on top of this lower layer, an Al-free T having an average layer thickness shown in Table 4 is further provided.
The upper layer is coated with one or more of iCO, TiN, TiCNO and Al 2 O 3 under exactly the same conditions as those shown in the conventional examples 1 to 7, and the coated cutting tools 12 to 18 of the present invention are coated. Was produced.

【0053】[0053]

【表4】 [Table 4]

【0054】このようにして作製された従来被覆切削工
具1〜7および本発明被覆切削工具12〜18について
も、上記実施例1〜11で行った試験条件と同一のフラ
イス切削試験を行ない、切刃の逃げ面摩耗幅を測定する
とともに、切刃状況も観察し、これらの結果を表5に示
した。
The conventional coated cutting tools 1 to 7 and the coated cutting tools 12 to 18 of the present invention thus produced were also subjected to the same milling cutting test as the test conditions conducted in Examples 1 to 11 above. While measuring the flank wear width of the blade, the cutting edge condition was also observed, and these results are shown in Table 5.

【0055】[0055]

【表5】 [Table 5]

【0056】表3〜表5に示される結果から、Alを含
まない硬質被覆層のみからなる従来被覆切削工具1〜7
は、15分以内にチッピングが発生するに対し、全体組
成で1×10-5〜1×10-3原子%のAlを含有する下
部層を形成した本発明被覆切削工具12〜18は、いず
れも15分間のフライス切削に対して摩耗状況は正常摩
耗となることがわかる。
From the results shown in Tables 3 to 5, the conventional coated cutting tools 1 to 7 consisting only of a hard coating layer containing no Al are shown.
Chipping occurs within 15 minutes, whereas the coated cutting tools 12 to 18 of the present invention, which have formed a lower layer containing 1 × 10 −5 to 1 × 10 −3 atomic% of Al in the overall composition, are Also, it can be seen that the wear situation becomes normal wear after milling for 15 minutes.

【0057】また、上記苛酷な条件のフライス切削試験
に耐えることのできる本発明被覆切削工具12〜18
は、高速連続切削に対しても十分な耐摩耗性を発揮でき
ることを示唆している。
Further, the coated cutting tools 12 to 18 of the present invention capable of withstanding the above-mentioned severe milling cutting test.
Suggests that sufficient wear resistance can be exhibited even for high-speed continuous cutting.

【0058】[0058]

【発明の効果】この発明の表面被覆炭化タングステン基
超硬合金製切削工具部材は、硬質被覆層に直接衝撃が加
わるフライス切削などの苛酷な切削に対しても異常摩耗
またはチッピングが発生せず、優れた工具寿命を示すの
で切削分野において格別な効果を奏するものである。
The surface coated tungsten carbide based cemented carbide cutting tool member of the present invention does not cause abnormal wear or chipping even under severe cutting such as milling cutting in which a hard coating layer is directly impacted, Since it has an excellent tool life, it has an outstanding effect in the cutting field.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 ローランド・ハウブナー オーストリア国A−1060ウイーン・ゲトラ イデマルクト9 ウイーン工科大学内   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Roland Haubner             Austria A-1060 Vienna Getra             Idemarkt 9 Vienna University of Technology

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 炭化タングステン基超硬合金基体の表面
に、Tiの炭化物、窒化物および炭窒化物のうち1種の
単層または2種以上の複層からなる平均層厚:0.5〜
20μmの硬質被覆層を形成してなる表面被覆切削工具
部材において、 上記硬質被覆層は、全体組成で1×10-5〜1×10-3
原子%のアルミニウム(以下、Alと記す)を含有し、
かつ上記Al含有量は基体との界面において最大とな
り、表面に向って減少し表面で最小となっていることを
特徴とする表面被覆炭化タングステン基超硬合金製切削
工具部材。
1. An average layer thickness of 0.5 to 10 consisting of a single layer of one or more of Ti carbide, nitride and carbonitride on the surface of a tungsten carbide based cemented carbide substrate.
In the surface-coated cutting tool member having a hard coating layer of 20 μm formed, the hard coating layer has a total composition of 1 × 10 −5 to 1 × 10 −3.
Containing atomic% aluminum (hereinafter referred to as Al),
A surface-coated tungsten carbide-based cemented carbide cutting tool member characterized in that the Al content is maximum at the interface with the substrate, decreases toward the surface, and is minimum at the surface.
【請求項2】 請求項1記載の硬質被覆層の表面におけ
るAl含有量は、基体との界面におけるAl含有量の1/
5 以下となっていることを特徴とする表面被覆炭化タン
グステン基超硬合金製切削工具部材。
2. The Al content on the surface of the hard coating layer according to claim 1 is 1 / of the Al content at the interface with the substrate.
A surface-coated tungsten carbide-based cemented carbide cutting tool member characterized by being 5 or less.
【請求項3】 炭化タングステン基超硬合金基体の表面
に、Tiの炭化物、窒化物および炭窒化物のうち1種の
単層または2種以上の複層からなる平均層厚:0.5〜
20μmの下部層と、 炭酸化チタン、炭窒酸化チタン、窒化チタンおよび酸化
アルミニウムのうちの1種の単層または2種以上の複層
からなる平均層厚:0.1〜10μmの上部層で構成さ
れた硬質被覆層を形成してなる表面被覆切削工具部材に
おいて、 上記下部層は、1×10-5〜1×10-3原子%のAlを
含有し、かつ上記Al含有量は基体との界面において最
大となり、表面に向かって減少し表面で最小となってい
ることを特徴とする表面被覆炭化タングステン基超硬合
金製切削工具部材。
3. An average layer thickness of 0.5 to 10 consisting of a single layer of one or more of Ti carbide, nitride and carbonitride on the surface of a tungsten carbide based cemented carbide substrate.
A lower layer having a thickness of 20 μm and an upper layer having a mean layer thickness of 0.1 to 10 μm consisting of a single layer of one or more of titanium carbonate, titanium oxycarbonitride, titanium nitride and aluminum oxide. In the surface-coated cutting tool member having the hard coating layer formed, the lower layer contains 1 × 10 −5 to 1 × 10 −3 atomic% of Al, and the Al content is the same as that of the substrate. The surface-coated tungsten carbide-based cemented carbide cutting tool member is characterized in that it becomes maximum at the interface, decreases toward the surface, and becomes minimum at the surface.
【請求項4】 請求項3記載の下部層の上部層との界面
におけるAl含有量は、基体との界面におけるAl含有
量の1/5 以下となっていることを特徴とする表面被覆炭
化タングステン基超硬合金製切削工具部材。
4. The surface-coated tungsten carbide according to claim 3, wherein the Al content at the interface with the upper layer of the lower layer is 1/5 or less of the Al content at the interface with the substrate. Cutting tool member made of base cemented carbide.
JP20645091A 1991-07-23 1991-07-23 Surface-coated tungsten carbide based cemented carbide cutting tool members Expired - Fee Related JP2864801B2 (en)

Priority Applications (1)

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JP20645091A JP2864801B2 (en) 1991-07-23 1991-07-23 Surface-coated tungsten carbide based cemented carbide cutting tool members

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20645091A JP2864801B2 (en) 1991-07-23 1991-07-23 Surface-coated tungsten carbide based cemented carbide cutting tool members

Publications (2)

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JPH0531602A true JPH0531602A (en) 1993-02-09
JP2864801B2 JP2864801B2 (en) 1999-03-08

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Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011161590A (en) * 2010-02-12 2011-08-25 Sumitomo Electric Hardmetal Corp Surface coated cutting tool
JP2011161585A (en) * 2010-02-12 2011-08-25 Sumitomo Electric Hardmetal Corp Surface coated cutting tool
JP2018034216A (en) * 2016-08-29 2018-03-08 三菱マテリアル株式会社 Surface-coated cutting tool whose hard coating layer exerts excellent chipping resistance and peeling resistance

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011161590A (en) * 2010-02-12 2011-08-25 Sumitomo Electric Hardmetal Corp Surface coated cutting tool
JP2011161585A (en) * 2010-02-12 2011-08-25 Sumitomo Electric Hardmetal Corp Surface coated cutting tool
JP2018034216A (en) * 2016-08-29 2018-03-08 三菱マテリアル株式会社 Surface-coated cutting tool whose hard coating layer exerts excellent chipping resistance and peeling resistance
US11278967B2 (en) 2016-08-29 2022-03-22 Mitsubishi Materials Corporation Surface-coated cutting tool in which hard coating layer exhibits excellent chipping resistance and peeling resistance

Also Published As

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