JPH05311906A - Partition for clean room - Google Patents

Abstract

PURPOSE:To enable sealing without using a sealing compound such as a sealant to the mutual connecting sections of adjacent panels, and to facilitate detachability at the time of the change of the layout in the clean-room partition of semiconductor industry. CONSTITUTION:A rubber packing 4 is mounted on the side face of a panel, in which a calcium silicate structural material 1 is included by a color iron plate 2 and an aluminum channel 3. Compressed air is introduced into the rubber packing 4 by a pump, etc., from a compressed-air introducing port 5, thus expanding the rubber packing, then conducting sealing. When the panel is removed, a check valve 6 is opened and the rubber packing is deaerated, thus releasing sealing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a partition for a clean room, and more particularly to a partition for a clean room which is easy to attach and detach to partition clean rooms of a semiconductor factory.

[0002]

2. Description of the Related Art In a conventional clean room partition, as shown in the cross-sectional views of FIGS. 3 (a) and 3 (b), a calcium silicate structural material 1 is enclosed by a colored iron plate 2 and an aluminum square pipe 7. FIG. 6A is a view in which the sealant is filled in the panel-shaped panels and the connection portion is sealed.
Type and the aluminum structure material 11 are enclosed by the color iron plate 2, the insert clip 12 is formed at the tip thereof, and the insert clip 12 is inserted into the holder clip 15 fixed to the holder clip post 13 by the bolt 14. There is a type shown in FIG.

[0003]

In these conventional partitions, the former requires hitting a silicone sealant, and this work requires technical skill and takes a lot of construction time. Also, when removing the panel, the seal must be cut with a cutter such as a cutter, which is dangerous in the work.

The latter does not require a skilled worker because it is not necessary to hit with a silicone sealant, but since it is necessary to erect a post with a connecting clip attached to the joint of each panel, the equipment is embedded in a partition using this method. In this case, it is impossible for the equipment side to cross the seam of the panel. In addition, since the posts are forested on the back surface of the panel, space efficiency is poor, and there is a high possibility that dust will accumulate due to the presence of unnecessary unevenness, and there are many problems in using it as a partition between clean rooms.

[0005]

A partition for a clean room according to the present invention has a valve for preventing deaeration of introduced air by introducing compressed air from the outside and a panel side surface which is expanded by the pressure of the introduced compressed air. Has rubber packing to seal.

[0006]

The present invention will be described below with reference to the drawings.

FIG. 1A is a cross-sectional view of a partition according to the first embodiment of the present invention. The panel used in this example is a honeycomb-shaped structure material 1 of calcium silicate, a colored iron plate 2, aluminum 3, and an aluminum square pipe 7.
It is configured to be included in. A rubber packing 4 for sealing is arranged on one side surface of the panel so as to be embedded in the aluminum channel 3, and compressed air can be introduced into the rubber packing 4 from a compressed air introduction port 5 outside the panel. .. Further, a check valve 6 is attached to the compressed air introducing port 5 so that the air inside the rubber packing 4 is not released to the outside.

FIG. 1B is a horizontal sectional view showing the details when the panels are connected to each other and sealed. When compressed air is introduced from the compressed air introduction port 5, the rubber packing 4 expands and seals the gap between the side walls of the aluminum square pipes 7 of the adjacent panels.

When the panel is removed, the check valve 6 is opened so that the rubber packing 4 contracts, the seal is released, and the panel can be removed.

Next, a second embodiment of the present invention will be described with reference to the drawings.

FIG. 2 is a transverse sectional view of a clean room partition according to a second embodiment of the present invention. The panel used in the present embodiment is configured such that the structural material 1 of calcium silicate is enclosed by the color iron plate 2 and the aluminum channel 3. A rubber packing 4 is arranged so as to be embedded in the aluminum channel 3 of this panel, and compressed air is introduced into the inside of the rubber packing 4 from a compressed air introduction port 5 outside the panel.
Then, the rubber packing 4 expands and the sealing effect is produced. However, if the pressure is too high, the rubber packing 4 is deteriorated. Excess air is discharged from the surplus air discharge port 9. By adding the relief valve 8 in this way, the pressure in the rubber packing 4 can be automatically made constant, and the pressure adjustment on the compressed air supply pump side, which is required in the first embodiment, is unnecessary. Becomes

[0012]

As described above, according to the present invention, the rubber packing capable of introducing compressed air from the outside is attached to the side surface of the panel, so that the sealing can be performed only by introducing the air from the outside of the panel with a pump or the like. In addition, the seal can be released by simply opening the check valve, and the panel can be removed, so it is possible to safely and quickly attach and detach the clean room partition in the semiconductor industry, which frequently changes layouts. Has the effect that

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a first embodiment of the present invention, in which FIG. 1 (a) is a cross-sectional view of the entire panel, and FIG. 1 (b) is a cross-sectional view showing details of a connecting portion with an adjacent panel. ..

FIG. 2 is a cross-sectional view of a second embodiment of the present invention.

3A and 3B are cross-sectional views of the related art, in which FIG. 3A is a cross-sectional view of a type of sealing with a sealant, and FIG. 3B is a cross-sectional view of a type of clamping with a clip.

[Explanation of symbols]

 1 Calcium Silicate Structural Material 2 Colored Iron Plate 3 Aluminum Channel 4 Rubber Packing 5 Compressed Air Inlet 6 Check Valve 7 Aluminum Square Pipe 8 Relief Valve 9 Excess Air Outlet 10 Silicon Sealant 11 Aluminum Structural Material 12 Insert Clip 13 For Holder Clip Post 14 Bolt 15 Holder clip

Claims (1)

[Claims] 1. A partition for partitioning between clean rooms having different cleanliness and room pressure, wherein a partition for a clean room is provided with a valve for introducing compressed air and a rubber packing for sealing which expands by compressed air. ..