JPH0530676U - Stop valve for high-purity gas - Google Patents

Abstract

(57) [Summary] (Correction) [Purpose] Despite having a rubber annular body provided on the valve body or valve seat, the structure is simple and the generation of fine particles due to retention of air etc. and abrasion A stop valve for high-purity gas that is prevented is provided. A high-purity gas stop valve having a rubber annular body 12 provided at either one of a valve body 5 and a valve seat 4 at a mutual pressure contact portion, wherein the rubber annular body 12 is the valve body. 5 or the valve seat 4 is vulcanized and adhered. [Effect] Since the rubber annular body is vulcanized and adhered to the valve body or valve seat, the structure is simple, and there is no gap between them in which air or the like enters or stays. Even if the annular body is deformed, it does not come into sliding contact with the valve body or valve seat that supports the annular body, so that the generation of fine particles is prevented.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a stop valve for high-purity gas used, for example, in semiconductor manufacturing equipment.

[0002]

[Prior Art]

 In high-purity gas stop valves used in semiconductor manufacturing equipment, generally, a rubber annular body provided on either the valve body or valve seat and a metal annular body provided on the other side are pressed against each other. By doing so, leakage is prevented. Moreover, this rubber annular body is provided so that it can be easily attached and detached from the viewpoint of maintenance and inspection.

In this type of stop valve, for example, when a rubber annular body is supported by a valve body, conventionally, as shown in FIG. 3, the valve is opposed to a metal annular body b projecting on a valve seat a. A concave portion d is formed in the body c, and a rubber annular body e is accommodated in the concave portion d and a holding portion f is formed to cover the outer peripheral edge portion of the annular body e, or as shown in FIG. When an O-ring is used as the annular body e, the peripheral wall is inclined so that the opening of the recess d is narrowed.

[0004]

[Problems to be solved by the device]

 In the above-mentioned conventional example, the gap g generated between the inner wall of the recess d and the rubber annular body e is apt to become an air pocket, and the rubber annular body e is in operation, the metal annular body b (FIG. 3) or the concave portion. Particles are easily generated by sliding contact (arrow) with the side wall of the location d (FIG. 4) or the like.

By the way, when it is necessary to raise the degree of vacuum in a short time in an exhaust system of a semiconductor manufacturing facility, air easily stays in the gap g in the above conventional example, which becomes an obstacle to exhaust. In addition, when used in a high-purity gas distribution system, the retention of air and other gases and the generation of fine particles adversely affect the gas purity. Moreover, the structure for holding the rubber annular body tends to be complicated.

The present invention has been made in order to solve the above-mentioned problems, and has a simple structure and retains air etc. even though it has a valve body or a rubber annular body provided on the valve seat. An object of the present invention is to provide a stop valve for high-purity gas that can prevent the generation of fine particles due to wear and abrasion.

[0007]

[Means for Solving the Problems]

 The present invention relates to a high-purity gas stop valve having a rubber annular body provided at one of a valve body and a valve seat located at a mutual pressure contact portion, wherein the rubber annular body is the valve body or the valve seat. It is characterized by being vulcanized and adhered to.

[0008]

[Action]

 In the above structure, since the rubber annular body is vulcanized and adhered to the valve body or the valve seat, the structure is simple and there is no gap between them in which air or the like enters or stays. Further, even if the rubber annular body is deformed, it does not come into sliding contact with the valve body or the valve seat that supports it, so that the generation of fine particles and the like is prevented.

[0009]

【Example】

 The present invention will be described below with reference to an embodiment shown in FIGS. FIG. 1 shows a master-slave valve for a vacuum device provided in an exhaust passage of a semiconductor manufacturing facility, and a valve box 1 is provided with a main valve seat 4 located between an inflow passage 2 and an outflow passage 3. A main valve 6 is formed together with the main valve body 5 that faces the main valve seat 4 so as to come into contact with and separate from the main valve seat 4. Further, the sub valve seat 7 provided on the main valve body 5 constitutes a sub valve 9 together with the sub valve body 8 facing the sub valve seat 7 so as to freely come into contact therewith. At the beginning of evacuation, the auxiliary valve body 8 is separated from the auxiliary valve seat 7 via the valve shaft 10 so that only the low speed evacuation by the child valve 9 is performed and the degree of vacuum of the target device reaches a desired level. After that, when the valve shaft 10 is further moved, the main valve body 5 is separated from the main valve seat 4 and the parent valve 6 is also opened, so that high-speed exhaust is performed.

In the parent valve 6, as shown in a partially enlarged view of FIG. 2, an annular groove 11 that opens downward is formed in the main valve body 5, and inside this annular groove 11. The rubber annular body 12 is formed by vulcanizing and adhering a corrosion resistant rubber material. On the other hand, the main valve seat 4 located at the inner end of the inflow passage 2 is integrally provided with a metal annular body 13 that faces the rubber annular body 12. The metal annular body 13 has a projecting curved surface at its upper end so that the rubber annular body 12 can be deformed according to the relative displacement of the master valve 6 during operation without substantial sliding. ing.

Further, in the child valve 9, the auxiliary valve seat 7 is located above the main valve body 5, and the corrosion-resistant rubber material is vulcanized and bonded inside the annular groove 14 that opens upward. A rubber annular body 15 molded by is provided. On the other hand, on the sub-valve body 8 provided at the lower end of the valve shaft 10, a metal annular body 16 facing the rubber annular body 15 is integrally projected. This metal annular body 16 also has a lower end portion formed into a protruding curved surface so that the rubber annular body 15 is deformed according to the relative displacement during operation of the child valve 9 without substantially sliding. ing.

Next, the operation of the above embodiment will be described. In the master valve 6, a rubber annular body 12 is formed by vulcanizing and adhering a corrosion resistant rubber material inside the annular groove 11 as shown in FIG. No gaps for inflowing or stagnation of other gases or the like are formed, and even if the rubber annular body 12 is deformed during operation, it does not come into sliding contact with the inner wall of the annular groove 11. In addition, since the end portion of the metal annular body 13 is formed in a protruding curved surface shape, even if the metal annular body 13 is deformed by being pressed against the rubber annular body 12 during operation, the stress is evenly distributed along the protruding curved surface as indicated by the arrow. It is dispersed and the surface pressure does not increase locally, and it is difficult for wear and crevices to occur at the mutual contact parts. Therefore, as compared with the above-mentioned conventional example, the retention of air and the like and the generation of fine particles are greatly suppressed, and the rubber annular body 12 is less worn because it has excellent durability, and the labor required for maintenance and inspection is significantly reduced. To be done.

As described above, the child valve 9 is only configured such that the material of the valve body and the annular body of the valve seat and the vertical arrangement are opposite to those of the parent valve 6, and the action and effect of both are substantially the same. The description is omitted because they are the same.

The present invention is not limited to the above-mentioned embodiment, but can be applied to various stop valves for high-purity gas having a structure different from that of the parent-child valve, for example. Besides, various modifications and applications are possible within the scope of the gist of the present invention.

[0015]

[Effect of the device]

 As described above, according to the present invention, even though it has the rubber annular body provided on the valve body or the valve seat, the structure is simple, and the generation of fine particles due to the retention of air etc. and abrasion is suppressed. A stop valve for a high-purity gas to be obtained can be provided.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention.

FIG. 2 is a partial cross-sectional view showing an enlarged main part in the same example.

FIG. 3 is a partial cross-sectional view showing an enlarged main part of a conventional example.

FIG. 4 is a partial cross-sectional view showing an enlarged main part of another conventional example.

[Explanation of symbols]

4 ... Main valve seat, 5 ... Main valve body, 6 ... Parent valve, 7 ... Sub valve seat, 8 ...
Sub valve body, 9 ... Child valve, 12, 15 ... Rubber annular body, 13,
16 ... Metal annular body.

Claims (1)

[Scope of utility model registration request] 1. A high-purity gas stop valve having a rubber annular body provided at either one of a valve body and a valve seat at a mutual pressure contact portion, wherein the rubber annular body is the valve body or the valve. A stop valve for high-purity gas, characterized by being vulcanized and adhered to a seat.