JPH0530597B2 - - Google Patents

Info

Publication number
JPH0530597B2
JPH0530597B2 JP16992384A JP16992384A JPH0530597B2 JP H0530597 B2 JPH0530597 B2 JP H0530597B2 JP 16992384 A JP16992384 A JP 16992384A JP 16992384 A JP16992384 A JP 16992384A JP H0530597 B2 JPH0530597 B2 JP H0530597B2
Authority
JP
Japan
Prior art keywords
contact
suction pad
conductive
common contact
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16992384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6148766A (ja
Inventor
Toshuki Nagamine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP16992384A priority Critical patent/JPS6148766A/ja
Publication of JPS6148766A publication Critical patent/JPS6148766A/ja
Publication of JPH0530597B2 publication Critical patent/JPH0530597B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Manipulator (AREA)
JP16992384A 1984-08-16 1984-08-16 導電体部品の位置修正装置 Granted JPS6148766A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16992384A JPS6148766A (ja) 1984-08-16 1984-08-16 導電体部品の位置修正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16992384A JPS6148766A (ja) 1984-08-16 1984-08-16 導電体部品の位置修正装置

Publications (2)

Publication Number Publication Date
JPS6148766A JPS6148766A (ja) 1986-03-10
JPH0530597B2 true JPH0530597B2 (Direct) 1993-05-10

Family

ID=15895451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16992384A Granted JPS6148766A (ja) 1984-08-16 1984-08-16 導電体部品の位置修正装置

Country Status (1)

Country Link
JP (1) JPS6148766A (Direct)

Also Published As

Publication number Publication date
JPS6148766A (ja) 1986-03-10

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