JPH05305567A - Handling device for polishing machine - Google Patents

Abstract

PURPOSE:To provide a handling device capable of taking out a workpiece on the carrier of a polishing machine. CONSTITUTION:A handling device for polishing machine has rotary encoders 13, 14 provided on the driving shafts of an internal gear and a sun gear, respectively, a controller 12 for operating the coordinate after working of a workpiece on a carrier according to the rotating angles of the internal gear and the sun gear detected by the encoders 13, 14 and preliminarily stored gear numbers of the internal gear, the sun gear, and the carrier, and a transfer device 11 for taking out the workpiece according to the coordinate outputted by the controller 12. The coordinate of the workpiece on the carrier can be precisely operated, the workpiece can be taken out according to the coordinate, whereby the device can be unmanned, and the yield of workpiece can be improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing machine (lapping machine and polishing machine) for lapping and polishing a workpiece such as a silicon wafer or a photomask substrate.
The present invention relates to a workpiece handling device.

[0002]

2. Description of the Related Art The construction of the essential parts of a polishing machine will be described with reference to FIG. FIG. 3 is a perspective view in which the upper platen of the double-sided polishing machine is removed. The sun gear 2 is an external gear that rotates at the center of the lower platen 1, and the outer periphery of the lower platen 1 is concentric with the sun gear 2. An internal gear 3 that is an internal gear that is located at and is rotated is provided, and the sun gear 2 and the internal gear 3 are provided.
There is provided a carrier 6 which is a thin planetary gear which meshes with the workpiece 4 and inserts a workpiece 4 such as a silicon wafer into the hole 5 and revolves between the upper and lower surface plates while revolving. In FIG.
Reference numeral 7 is an upper platen driving gear.

With the above structure, the sun gear 2 and the internal gear 3 are rotated, the carrier 6 holding the workpiece 4 is caused to make a planetary motion, and the workpiece 4 is wrapped between the upper and lower surface plates. In the conventional double-sided polishing machine, an operator takes out the workpiece 4 after processing.

[0004]

When a worker takes out the work piece 4 as described above, dust caused by the worker itself adheres to the work piece 4 and causes a decrease in yield. Therefore, automation is desired. However, in such a double-sided polishing machine, the position of the carrier 6 can be controlled by operating the internal gear 3 or the sun gear 2 to a position where the presence or absence of the carrier 6 is confirmed after processing, but the position of the workpiece 4 is controlled. There is a problem that the workpiece 4 cannot be automatically taken out because it cannot be done.

The present invention solves the above problems,
An object of the present invention is to provide a handling device capable of taking out a work piece of a carrier.

[0006]

In order to solve the above problems, a handling device for a double-sided polishing machine according to the present invention is a handling device for taking out a workpiece of a polishing machine having a planetary gear mechanism. Rotation angle detectors of the respective gears are provided on the drive shafts of the internal gear and the sun gear, respectively, and the rotation angles of the internal gear and the sun gear detected by these rotation angle detectors and the internal gears of the planetary gear mechanism stored in advance. Based on the number of gears of the sun gear and the carrier, a workpiece position calculator that calculates the coordinates of the workpiece after machining from the predetermined position of the carrier before machining the workpiece is provided. It is characterized in that a transfer device for picking up a workpiece according to the output coordinate signal is provided.

[0007]

With the above construction, the coordinates after machining of the workpiece are calculated from the rotation angles of the internal gear and the sun gear detected by the rotation angle detector, and the workpiece is taken out according to the coordinates.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. The same components as those in FIG. 3 will be described with the same reference numerals.

FIG. 1 is a block diagram showing the configuration of a handling device of the present invention. The handling device of the present invention is
Transfer device 11, which is the main body of the handling device, and a controller that commands the coordinates of the workpiece 4 transferred to this transfer device 11.
12 and a rotary encoder 13 that is connected to the drive shaft of the internal gear 3 and detects the rotation angle of the internal gear 3.
And a rotary encoder 14 that is connected to the drive shaft of the sun gear 2 and detects the rotation angle of the sun gear 2. The transfer device 11 drives a free arm that can freely move in and out according to the coordinates of the workpiece 4 output from the controller 12, and sucks the workpiece 4 at this coordinate position at the tip of the free arm. It is lifted by the device and moved into position.

The configuration of the controller 12 will be described. Reference numeral 15 resets the count value in response to a processing start signal of the workpiece 4 output from the controller 21 of the double-sided grinder, counts the number of pulses of the input rotary encoder 13, and counts the value, that is, the internal gear 3 at the end of processing. A first counter 16 that outputs the total rotation angle ω _i [radian], 16 resets the count value by the machining start signal, counts the number of pulses of the rotary encoder 14 that has been input, and the count value, that is, A second counter that outputs the total rotation angle ω _s [radian] of the sun gear 2, 17 is a rewritable memory, and 18 is a control unit that commands the transfer device 11 to specify movement coordinates. The rotation angle outputs of 15 and 16 are input to the workpiece position calculation unit 19.

The workpiece position calculator 19 is a computer for a double-sided polishing machine.
The processing completion signal of the workpiece 4 output from the trawler 21
The total rotation of the internal gear 3 from the first counter 15
Angle ω _i[Radian], from the second counter 16
Total rotation angle ω_sEnter [radian] and add the value shown in Fig. 2.
Rotation angle Θ of the carrier 6 center after the work_kAnd the predetermined work
4A rotation angle Θ_wIs calculated by Equation 1 and Equation 2. Note that the formula
1, in the formula 2, Z _iIs the number of teeth of the internal gear, Z
_sIs the number of teeth of the sun gear, Z_kIs the number of teeth on the carrier, n_kIs Θ
_kThe largest integer that satisfies ≧ 0, n_wIs Θ_wThe maximum of ≧ 0
An integer, π is the pi.

Θ _k = Z _i / (Z _s + Z _i ) * ω _i + Z _s / (Z _s + Z _i ) * ω _s −2πn _k [radian] (1) Θ _w = Z _i (Z _s + Z _k). ) / {Z _k (Z _s + Z _i )} * ω _i −Z _s (Z _i −Z _k ) / {Z _k (Z _s + Z _i )} * ω _s −Θ _k −2πn _w [radian] ... ( 2) Next, according to the calculated rotation angle Θ _{k of the} center of the carrier 6 and the rotation angle Θ _w of the work 4A, the work 3
The coordinates (x, y) of the center position of 4A are calculated, and the coordinates are stored in the memory 17. In Equations 3 and 4, R is the pitch circle radius of the carrier 6, r is the pitch circle radius of the sun gear 2, and L is the distance from the center of the carrier 6 to the center of the workpiece 4.

[0013] x = (R + r) sin Θ k + Lsin (π-Θ k -Θ w) ... (3) y = 2R + r- (R + r) cos Θ k + Lcos (π-Θ k -Θ w) ... (4) and , Workpiece 4B on the same carrier 6 adjacent to workpiece 4A
The coordinates of Θ _w by a predetermined angle Θ _u (2π in FIG. 2).
/ 5) is added and the coordinates are calculated by Equations 3 and 4 and stored in the memory 17. Similarly, the coordinates of the other workpiece 4 on the carrier 6 are calculated and stored in the memory 17.

Next, the center position of the adjacent carrier 6 is _obtained by adding the adjacent predetermined angle Θ _j to Θ _k , and by the equation 2, Θ
_{The w} is calculated, the coordinates of the workpiece 4 on the adjacent carrier 6 are calculated by the formulas 3 and 4, and are similarly stored in the memory 17. Calculate the coordinates of the workpieces 4 of all carriers 6 in order,
When stored, the calculation end signal is output to the control unit 18.

When the control unit 18 receives the machining end signal and the calculation end signal from the workpiece position calculating unit 19, first, the coordinates (x, y) of the workpiece 4A stored in the memory 17 are transferred to the transfer device 11. When the transfer end signal is input from the transfer device 11, the coordinates (x, y) of the next workpiece 4B are output to the transfer device 11, and the transfer end signal is input from the transfer device 11. , And the like, the coordinates of all the workpieces 4 are sequentially output.

With the above configuration, when the controller 12 receives a processing start signal from the controller 21 of the double-sided polishing machine,
When the detection of the rotation angle of the internal gear 3 and the rotation angle of the sun gear 2 is started, and a processing end signal is input from the controller 21 of the double-side polishing machine, the total rotation angle ω _{i of} the detected internal gear 3 and the total rotation of the sun gear 2 are detected. The coordinates of all workpieces 4 after machining are calculated from the angle ω _s and stored in the memory 17,
Upon completion of the calculation, the coordinates of the workpieces 4 to be sequentially transferred are output to the transfer device 11. The transfer device 11 performs the work of taking out the workpiece 4 according to the instructed coordinates, and outputs a transfer end signal when the work is completed.

In this way, the workpieces 4 of all the carriers 6 after machining can be taken out, and unmanned operation can be achieved, so that the reduction of the yield of the workpieces 4 caused by the worker itself can be prevented. The yield can be improved.

Further, in a machine having a platen having an outer diameter of 1355 mm (commonly known as size; 20B machine), if rotary encoders 15 and 16 capable of dividing one rotation into 14400 are used, the pitch circle of the internal gear 3 and the sun gear 2 Since the diameters are 1416 mm and 396 mm, respectively, the positioning error e _i of the internal gear 3 and the positioning error e _s of the sun gear 2 are as follows.

[0019] _{e i = 708 * sin (2π} / 14400) = 0.31mm e s = 198 * sin (2π / 14400) = 0.09mm Therefore, the position of the workpiece 4 in position and the carrier 6 of the carrier 6 1 mm or less Therefore, it is possible to recognize the workpiece 4 accurately, and it is possible to accurately perform the work of taking out the workpiece 4.

[0020]

As described above, according to the present invention, the coordinates of the workpiece of the carrier can be accurately calculated, the workpiece can be taken out in accordance with the coordinates, and unmanned operation can be achieved. The yield of goods can be improved.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a handling device of a polishing machine according to an embodiment of the present invention.

FIG. 2 is a schematic diagram showing a positional relationship between a handling device of the polishing machine and a double-sided polishing machine.

FIG. 3 is a perspective view of a main part of a double-side polishing machine.

[Explanation of symbols]

 1 Lower surface plate 2 Sun gear 3 Internal gear 4 Work piece 6 Carrier 11 Transfer device 12 Controller 13, 14 Rotary encoder (rotation angle detector)

Front page continuation (72) Inventor Mitsuhide Isobe 5-3-28 Nishikujo, Konohana-ku, Osaka City, Osaka Prefecture Hitachi Shipbuilding Co., Ltd. (72) Inventor Kuniaki Noami 5-3, Nishijojo, Konohana-ku, Osaka City, Osaka Prefecture No. 28 within Hitachi Zosen Corporation

Claims (1)

[Claims] 1. A handling device for taking out a workpiece of a grinding machine having a planetary gear mechanism, wherein a rotation angle detector of each gear is provided on a drive shaft of an internal gear and a sun gear of the planetary gear mechanism. From the rotation angles of the internal gear and the sun gear detected by the rotation angle detector, and the number of gears of the internal gear, the sun gear, and the carrier of the planetary gear mechanism stored in advance, the coordinates after machining of the workpiece of the carrier are calculated. A handling device for a polishing machine, which is provided with a workpiece position calculator, and a transfer device for picking up a workpiece according to the coordinates output by the workpiece position calculator.