JPH05302872A - Method and equipment for analyzing atmosphere and equipment for controlling atmosphere of clean room - Google Patents
Method and equipment for analyzing atmosphere and equipment for controlling atmosphere of clean roomInfo
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- JPH05302872A JPH05302872A JP4108204A JP10820492A JPH05302872A JP H05302872 A JPH05302872 A JP H05302872A JP 4108204 A JP4108204 A JP 4108204A JP 10820492 A JP10820492 A JP 10820492A JP H05302872 A JPH05302872 A JP H05302872A
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は雰囲気の分析方法及び分
析装置並びにクリーンルーム雰囲気の制御装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an atmosphere analysis method and analysis apparatus, and a clean room atmosphere control apparatus.
【０００２】クリーンルーム内の不純物といえば従来パ
ーティクルとして捕らえられる不純物であり，それを測
定する技術及びそれを制御するための空調技術が発達し
てきている。Impurities in a clean room are impurities that are conventionally captured as particles, and techniques for measuring them and air-conditioning techniques for controlling them have been developed.
【０００３】ところが，近年，半導体装置製造プロセス
の高度化に伴い，空気中に極く微量に存在するイオン状
の成分が問題視されるようになってきた。イオン状の成
分は例えばＮａ+ のような不純物イオンを含み，製造さ
れる半導体装置の信頼性を阻害する。However, in recent years, as the semiconductor device manufacturing process has become more sophisticated, ionic components present in the air in a very small amount have come to be regarded as a problem. The ionic components include impurity ions such as Na + , and impair the reliability of the manufactured semiconductor device.
【０００４】したがって，クリーンルーム雰囲気に含ま
れるこのような成分を分析し，その量を抑制するよう対
策することが要求される。Therefore, it is required to analyze such a component contained in the clean room atmosphere and take measures to suppress the amount.
【０００５】[0005]
【従来の技術】従来，空気中のイオン状成分の分析方法
として次のようなものがある。 ガスクロマトグラフィーにより，直接空気中の成分
を分析する方法。2. Description of the Related Art Conventionally, there are the following methods for analyzing ionic components in air. A method for directly analyzing components in the air by gas chromatography.
【０００６】 純水中をバブリングして空気を通する
ことにより純水に空気中の成分を溶解し，その純水を分
析する方法。 ところが，これらの方法は次のような問題がある。即
ち，では空気中に極く微量に存在するイオン状の成分
（例えば１ｍ3 中に数ｎｇ）の測定は極めて困難であ
り，では純水中に溶解させるためには数時間乃至数十
時間の空気との強制的接触が必要であり，リアルタイム
の測定ができない。A method of analyzing the pure water by bubbling the pure water and passing air to dissolve the components in the pure water. However, these methods have the following problems. That is, it is extremely difficult to measure an ionic component (for example, several ng in 1 m 3 ) that exists in the air in a very small amount, and it takes several hours to several tens of hours to dissolve it in pure water. Forced contact with air is required and real-time measurement is not possible.
【０００７】そのため，空気中に極く微量に存在するイ
オン状の成分をリアルタイムに測定する方法の開発が必
要となっている。Therefore, it is necessary to develop a method for measuring in real time the ionic components present in the air in a very small amount.
【０００８】[0008]
【発明が解決しようとする課題】本発明は上記の問題に
鑑み，空気中の成分を純水中に溶解させる方法を発展さ
せ，直接雰囲気から水分を取り出して分析する新しい分
析方法及び分析装置を提供するものであり，さらに，ク
リーンルーム雰囲気のイオン状成分をある値以下に押さ
える制御装置を提供するものである。In view of the above problems, the present invention develops a method for dissolving components in air in pure water, and provides a new analysis method and analysis apparatus for directly extracting water from an atmosphere for analysis. The present invention further provides a control device for suppressing the ionic components in the clean room atmosphere to be below a certain value.
【０００９】[0009]
【課題を解決するための手段】図１は雰囲気の分析装置
を説明する図，図２はクリーンルーム雰囲気の制御方法
（その１）を説明する図，図３はクリーンルーム雰囲気
の制御方法（その２）を説明する図である。FIG. 1 is a diagram for explaining an atmosphere analyzer, FIG. 2 is a diagram for explaining a clean room atmosphere control method (No. 1), and FIG. 3 is a clean room atmosphere control method (No. 2). It is a figure explaining.
【００１０】上記課題は，雰囲気の水分を結露させて結
露水２とし, 該結露水２に含まれる不純物を分析するこ
とにより該雰囲気に含まれる不純物を分析する雰囲気の
分析方法によって解決される。The above problem can be solved by an atmosphere analysis method in which the moisture in the atmosphere is condensed to form condensed water 2 and the impurities contained in the condensed water 2 are analyzed to analyze the impurities contained in the atmosphere.
【００１１】また，雰囲気を採取して冷却し結露水２を
得る冷却部３と，該結露水２を受けるドレイン受け4a
と, 該結露水２に含まれる不純物を分析する分析装置と
を有し, 該冷却部３及び該ドレイン受け4aは表面が石英
又は高分子材料である雰囲気の分析装置によって解決さ
れる。Further, a cooling unit 3 for collecting and cooling the atmosphere to obtain condensed water 2, and a drain receiver 4a for receiving the condensed water 2
And an analyzer for analyzing impurities contained in the condensed water 2, and the cooling unit 3 and the drain receiver 4a are solved by an analyzer having an atmosphere whose surface is made of quartz or a polymer material.
【００１２】また，上記の雰囲気の分析装置と，クリー
ンルーム11に外気を供給する外気供給経路12に設けられ
た第１の空気量調整弁13と, 該クリーンルーム11から排
出された空気を該クリーンルーム11へリターンするリタ
ーン経路15に設けられた第２の空気量調整弁16と, 該分
析装置による不純物の量が予め設定した量より多くなっ
た時，リターン経路15風量の外気供給経路12風量に対す
る割合を下げるように該第２の空気量調整弁16及び又は
該第１の空気量調整弁13を操作する入出力変換部17とを
有するクリーンルーム雰囲気の制御装置によって解決さ
れる。Further, the above-mentioned atmosphere analyzer, the first air amount adjusting valve 13 provided in the outside air supply path 12 for supplying the outside air to the clean room 11, and the air discharged from the clean room 11 When the amount of impurities by the second air amount adjusting valve 16 provided in the return path 15 for returning to the return path 15 and the analyzer exceeds a preset amount, the ratio of the return path 15 air volume to the outside air supply path 12 air volume And a second input / output conversion unit 17 for operating the second air amount adjusting valve 16 and / or the first air amount adjusting valve 13 to lower the temperature.
【００１３】また，上記の雰囲気の分析装置と，クリー
ンルーム11から排出された空気を該クリーンルーム11へ
リターンするリターン主経路21に設けられた第１の空気
量調整弁22と, 該リターン主経路21の一部と並列に設け
られ，一部に不純物吸着剤24の装填されたリターン副経
路23に設けられた第２の空気量調整弁25と, 該分析装置
による不純物の量が予め設定した量より多くなった時，
リターン主経路21風量のリターン副経路23風量に対する
割合を下げるように該第１の空気量調整弁22及び該第２
の空気量調整弁25を操作する入出力変換部26とを有する
クリーンルーム雰囲気の制御装置によって解決される。Further, the above-mentioned atmosphere analyzer, the first air amount adjusting valve 22 provided in the return main passage 21 for returning the air discharged from the clean room 11 to the clean room 11, and the return main passage 21. And a second air amount adjusting valve 25 provided in parallel with a part of the above, and provided in the return sub-path 23 partially filled with the impurity adsorbent 24, and the amount of impurities by the analyzer is a preset amount. When there are more,
The first air amount adjusting valve 22 and the second air amount adjusting valve 22 and the second air amount adjusting valve 22 so as to reduce the ratio of the air volume of the return main path 21 to the air volume of the return sub path 23
This is solved by the control device for the clean room atmosphere having the input / output conversion unit 26 for operating the air amount adjusting valve 25 of FIG.
【００１４】[0014]
【作用】図４は水分を含む雰囲気からの結露を説明する
図であり，温度に対する空気の保有水分量を示してい
る。曲線ａは飽和水蒸気を含む空気の場合，曲線ｂは未
飽和水蒸気を含む空気の場合である。FIG. 4 is a diagram for explaining dew condensation from an atmosphere containing water, showing the amount of water retained in air with respect to temperature. Curve a is for air containing saturated steam and curve b is for air containing unsaturated steam.
【００１５】未飽和水蒸気を含む空気を温度Ｔ1 から冷
却して行くと，温度Ｔ2 で飽和に達し，さらに冷却する
と余剰水分が結露してくる。温度Ｔ3 では（ｘ1 −
ｘ2 ）の余剰水分が結露する。When the air containing the unsaturated steam is cooled from the temperature T 1 , it reaches saturation at the temperature T 2 , and when it is further cooled, excess moisture is condensed. At temperature T 3 , (x 1 −
The excess water of x 2 ) is condensed.
【００１６】したがって，雰囲気を冷却することにより
雰囲気に含まれる水分を結露させて結露水を得ることが
できる。結露水は雰囲気中の不純物を溶解しているの
で，結露水に含まれる不純物を分析することにより雰囲
気に含まれる不純物を分析することができる。Therefore, by cooling the atmosphere, the water contained in the atmosphere can be condensed to obtain condensed water. Since the condensed water dissolves impurities in the atmosphere, the impurities contained in the atmosphere can be analyzed by analyzing the impurities contained in the condensed water.
【００１７】クリーンルームの雰囲気は，例えば温度２
４℃，水分が飽和水蒸気量の４５％に調整されており，
これを冷却すると 11.5 ℃で飽和に達する。したがっ
て，この雰囲気を例えば６℃の冷却水の流れる冷却部
（パイプ）３に接触させたとすると冷却部３の外面に結
露水２を生じる。The atmosphere in the clean room has, for example, a temperature of 2
4 ℃, the water content is adjusted to 45% of the saturated water vapor,
When it is cooled, it reaches saturation at 11.5 ° C. Therefore, if this atmosphere is brought into contact with the cooling part (pipe) 3 in which cooling water of 6 ° C. flows, for example, dew condensation water 2 is generated on the outer surface of the cooling part 3.
【００１８】この結露水２をドレイン受け4aで受け，結
露水２に含まれる不純物を分析装置７により分析すれ
ば，リアルタイムで連続してクリーンルーム雰囲気に含
まれる不純物を分析することができる。この時，冷却部
３及びドレイン受け4aの表面が石英又は高分子材料であ
れば冷却部３及びドレイン受け4aから結露水２に不純物
が入り込まないので，分析精度が向上する。If the condensed water 2 is received by the drain receiver 4a and the impurities contained in the condensed water 2 are analyzed by the analyzer 7, the impurities contained in the clean room atmosphere can be continuously analyzed in real time. At this time, if the surfaces of the cooling unit 3 and the drain receiver 4a are made of quartz or a polymer material, impurities do not enter the condensed water 2 from the cooling unit 3 and the drain receiver 4a, so that the analysis accuracy is improved.
【００１９】クリーンルームの運転に際し，クリーンル
ーム11への外気の供給を節約するため，クリーンルーム
11から排出された空気をクリーンルーム11へ一部リター
ンすることが行われるが，クリーンルーム11内の汚染が
進んだ時はその汚染を減らすためリターン空気量と外気
供給量の割合を調整しなければならない。そのため，雰
囲気の分析装置７と，外気供給経路12に第１の空気量調
整弁13と, リターン経路15に第２の空気量調整弁16と，
入出力変換部17とを設け，雰囲気の分析装置７による不
純物の量が予め設定した量より多くなった時，入出力変
換部17によりリターン経路15風量の外気供給経路12風量
に対する割合を下げるように第２の空気量調整弁16及び
又は第１の空気量調整弁13を操作する。これによりクリ
ーンルーム雰囲気の汚染が抑制される。In order to save the supply of outside air to the clean room 11 when operating the clean room, the clean room
The air discharged from 11 is partially returned to the clean room 11, but when pollution in the clean room 11 progresses, the ratio of the return air amount and the outside air supply amount must be adjusted to reduce the pollution. .. Therefore, the atmosphere analyzer 7, the first air amount adjusting valve 13 in the outside air supply path 12, the second air amount adjusting valve 16 in the return path 15,
An input / output conversion unit 17 is provided so that when the amount of impurities by the atmosphere analyzer 7 exceeds a preset amount, the input / output conversion unit 17 reduces the ratio of the return passage 15 air volume to the outside air supply passage 12 air volume. Then, the second air amount adjusting valve 16 and / or the first air amount adjusting valve 13 are operated. This suppresses contamination of the clean room atmosphere.
【００２０】また，クリーンルーム11内の汚染が進んだ
時その汚染を減らすため，リターン主経路21に第１の空
気量調整弁22と, リターン主経路21の一部と並列に設け
られ一部に不純物吸着剤24の装填されたリターン副経路
23に第２の空気量調整弁25と，入出力変換部26を設け，
雰囲気の分析装置７による不純物の量が予め設定した量
より多くなった時，入出力変換部26によりリターン主経
路21風量のリターン副経路23風量に対する割合を下げる
ように第１の空気量調整弁22及び第２の空気量調整弁25
を操作する。これによりクリーンルーム雰囲気の汚染が
抑制される。Further, in order to reduce the pollution when the inside of the clean room 11 progresses, the first main air amount adjusting valve 22 is provided in the return main path 21 and a part of the main return path 21 is provided in parallel. Impurity adsorbent 24 loaded return sub-path
23 is provided with a second air amount adjusting valve 25 and an input / output converter 26,
When the amount of impurities by the atmosphere analyzer 7 becomes larger than a preset amount, the first air amount adjusting valve is set by the input / output conversion unit 26 so as to reduce the ratio of the return main route 21 air amount to the return sub route 23 air amount. 22 and second air amount adjusting valve 25
To operate. This suppresses contamination of the clean room atmosphere.
【００２１】[0021]
【実施例】図１(a), (b)は雰囲気の分析装置を説明する
図で，(a) は全体図, (b) は冷却除湿器を示し, １は採
取した空気，２は結露水，３は冷却部であって冷却パイ
プ，4aはドレイン受け, 4bは水封トラップ, 4cは結露水
取り出し口, ５はファン，６はフィルタ，７は分析装
置，８はコンピュータ，９はディスプレイを表す。EXAMPLES FIGS. 1 (a) and 1 (b) are views for explaining an atmosphere analyzer, (a) shows an overall view, (b) shows a cooling dehumidifier, 1 is sampled air, and 2 is dew condensation. Water, 3 is a cooling section and a cooling pipe, 4a is a drain receiver, 4b is a water trap, 4c is a condensed water outlet, 5 is a fan, 6 is a filter, 7 is an analyzer, 8 is a computer, 9 is a display Represents.
【００２２】採取した空気１は例えばクリーンルーム雰
囲気である。ドレイン受け4aは冷却パイプ３の外壁につ
いた結露水が滴り落ちるのを受けるものであり，水封ト
ラップ4bが形成されている。冷却パイプ３，ドレイン受
け4a，水封トラップ4bは石英で作るかまたはテフロンの
ような高分子材料で作る。または高分子材料でコーティ
ングする。このようにすれば，分析精度が向上する。も
し，冷却パイプ３，ドレイン受け4a，水封トラップ4bが
金属製であれば，結露水にそこから微量の金属が取り込
まれる可能性が大きく，分析精度が低下する。The sampled air 1 has, for example, a clean room atmosphere. The drain receiver 4a receives the dew condensation water attached to the outer wall of the cooling pipe 3 and forms a water seal trap 4b. The cooling pipe 3, the drain receiver 4a, and the water seal trap 4b are made of quartz or a polymer material such as Teflon. Alternatively, it is coated with a polymer material. By doing so, the accuracy of analysis is improved. If the cooling pipe 3, the drain receiver 4a, and the water seal trap 4b are made of metal, there is a high possibility that a very small amount of metal will be taken into the dew condensation water, and the analysis accuracy will decrease.
【００２３】分析装置は，例えば，イオンクロマトグラ
フィ分析装置，原子吸光分析装置，ＩＣＰ発光分析装置
である。結露水の分析値出力はコンピュータ８に送ら
れ，クリーンルームの状態が監視，判断される。The analyzer is, for example, an ion chromatography analyzer, an atomic absorption analyzer, or an ICP emission analyzer. The analysis value output of the dew condensation water is sent to the computer 8 and the state of the clean room is monitored and judged.
【００２４】除湿された空気はファン５により直接排気
するか又はフィルタ６を通してクリーンルームへ戻す。
この分析装置を使用して，クリーンルーム雰囲気を分析
した一例について説明する。室温２４℃，相対湿度４５
％に調節されたクリーンルーム雰囲気を採取して，６℃
の冷却水の通る冷却パイプで冷却して結露水２を得た。The dehumidified air is directly exhausted by the fan 5 or returned to the clean room through the filter 6.
An example of analyzing a clean room atmosphere using this analyzer will be described. Room temperature 24 ° C, relative humidity 45
%, Clean room atmosphere adjusted to 6%,
The condensed water 2 was obtained by cooling with a cooling pipe through which the cooling water of FIG.
【００２５】結露水２をイオンクロマトグラフィーによ
り分析した。その時の各種イオンの結露水中濃度を表１
に示す。さらに表１にはそれに対応する空気中濃度を示
す。結露水中濃度と空気中濃度の関係は，予備実験によ
り定めておいた。The condensed water 2 was analyzed by ion chromatography. Table 1 shows the concentrations of various ions in dew water at that time.
Shown in. Further, Table 1 shows the corresponding concentrations in air. The relationship between the concentration in condensed water and the concentration in air was determined by preliminary experiments.
【００２６】[0026]
【表１】 クリーンルーム雰囲気の分析結果の一例 結露水中濃度（ppb) 空気中濃度 (μg/m3) Ｎａ 5.7 0.057 Ｚｎ 18.1 0.18 ＮＨ4 + 220.9 2.2 Ｆ- 35.1 0.35 Ｃｌ- 46.2 0.46 ＮＯ2 - 120.5 1.2 ＮＯ3 - 110.5 1.1 ＳＯ4 2- 9.2 0.092 ＰＯ4 3- 8.0 0.08 図２はクリーンルーム雰囲気の制御方法（その１）を説
明する図で，１は採取した空気，10は前述の雰囲気の分
析装置, 11はクリーンルーム, 12は外気供給経路, 12a
は外調機, 13は空気量調整弁, 14は空調供給経路, 14a
は空調機, 15はリターン経路, 16は空気量調整弁, 17は
入出力変換部, 18は排気経路, 18a はファン, 19は空気
量調整弁を表す。さらに，Ａは外気供給経路の風量，Ｂ
はリターン経路の風量，Ｃは排気経路の風量，Ｄは空調
供給経路の風量を表す。Table 1 An example condensation water concentration (ppb) in the air concentration of the analysis results of the clean room atmosphere (μg / m 3) Na 5.7 0.057 Zn 18.1 0.18 NH 4 + 220.9 2.2 F - 35.1 0.35 Cl - 46.2 0.46 NO 2 - 120.5 1.2 NO 3 - 110.5 1.1 SO 4 2- 9.2 0.092 PO 4 3- 8.0 0.08 2 is a diagram illustrating a control method for a clean room atmosphere (Part 1), 1 air taken, 10 analyzer of the above atmosphere, 11 is a clean room, 12 is an outside air supply path, 12a
Is an external air conditioner, 13 is an air quantity adjusting valve, 14 is an air conditioning supply path, 14a
Is an air conditioner, 15 is a return path, 16 is an air quantity adjusting valve, 17 is an input / output conversion unit, 18 is an exhaust path, 18a is a fan, and 19 is an air quantity adjusting valve. Furthermore, A is the air volume of the outside air supply path, and B
Is the air volume of the return path, C is the air volume of the exhaust path, and D is the air volume of the air conditioning supply path.
【００２７】外調機12a は外気を取り込んで清浄化し，
外気供給経路12，空気量調整弁13を経て空調機14a に送
る。空調機14a は空気を一定温度，一定湿度（例えば２
４℃，４５％）に調整し，空調供給経路14を経てクリー
ンルーム11に空気を送る。The outside air conditioner 12a takes in outside air and cleans it.
It is sent to the air conditioner 14a via the outside air supply path 12 and the air amount adjusting valve 13. The air conditioner 14a controls the air at a constant temperature and a constant humidity (for example, 2
The temperature is adjusted to 4 ° C., 45%) and air is sent to the clean room 11 via the air conditioning supply path 14.
【００２８】クリーンルーム11の空気はファン18a によ
り，空気量調整弁19，排気経路18を経て排気されるが，
一部はリターン経路15，空気量調整弁16を経てクリーン
ルーム11へリターンされる。クリーンルーム雰囲気に含
まれる不純物濃度がある値以下に保たれている間は排気
量を減らしてリターンする空気の量を多くすることが経
済的である。The air in the clean room 11 is exhausted by the fan 18a through the air amount adjusting valve 19 and the exhaust path 18.
A part is returned to the clean room 11 through the return path 15 and the air amount adjusting valve 16. While the impurity concentration in the clean room atmosphere is kept below a certain value, it is economical to reduce the exhaust amount and increase the amount of returned air.
【００２９】ところが，クリーンルーム11内で例えば半
導体装置の製造作業で不純物が雰囲気に拡散するような
場合は，クリーンルーム雰囲気に含まれる不純物濃度を
ある値以下に保つため，排気量を大きくしリターンする
空気の量を少なくしなければならない。However, when impurities are diffused into the atmosphere in the clean room 11, for example, in a semiconductor device manufacturing operation, in order to keep the concentration of impurities contained in the clean room atmosphere at a certain value or less, the amount of exhaust gas is increased to return air. The amount of must be reduced.
【００３０】まず，クリーンルーム雰囲気の不純物濃度
と結露水の不純物濃度の関係を予め調べておく。そし
て，クリーンルーム雰囲気の不純物濃度の上限値に合わ
せて結露水の不純物濃度の上限値を定めておく。First, the relationship between the impurity concentration of the clean room atmosphere and the impurity concentration of the condensed water is investigated in advance. Then, the upper limit of the impurity concentration of the condensed water is set in accordance with the upper limit of the impurity concentration of the clean room atmosphere.
【００３１】運転中のクリーンルーム11の空気を採取
し，前述の雰囲気の分析装置10により結露水を得てその
結露水を分析する。不純物濃度が上限値を超えた時，入
出力変換部17を作動させてリターン経路15の空気量調整
弁16及び又は外気供給経路12の空気量調整弁13を調整
し，リターン経路15の風量の外気供給経路12の風量に対
する比（Ｂ／Ａ）を下げるようにする。それに合わせて
空気量調整弁19を調整し，排気経路18の風量（Ｃ）を増
し，クリーンルーム11内の空気圧のバランスを保つよう
にする。The air in the clean room 11 during operation is sampled, the condensed water is obtained by the analyzer 10 in the atmosphere described above, and the condensed water is analyzed. When the impurity concentration exceeds the upper limit value, the input / output converter 17 is operated to adjust the air amount adjusting valve 16 of the return path 15 and / or the air amount adjusting valve 13 of the outside air supply path 12 to adjust the air amount of the return path 15. The ratio (B / A) to the air volume of the outside air supply path 12 is lowered. In accordance therewith, the air amount adjusting valve 19 is adjusted to increase the air amount (C) in the exhaust path 18 so as to maintain the balance of the air pressure in the clean room 11.
【００３２】具体的には，リターン経路15の空気量調整
弁16の開度を小さくし，排気経路18の空気量調整弁19の
開度を大きくする。同時に外気供給経路12の空気量調整
弁13の開度を大きくしてもよい。Specifically, the opening degree of the air amount adjusting valve 16 in the return path 15 is reduced, and the opening degree of the air amount adjusting valve 19 in the exhaust path 18 is increased. At the same time, the opening degree of the air amount adjusting valve 13 of the outside air supply path 12 may be increased.
【００３３】このようにすれば，汚染されたクリーンル
ーム雰囲気は清浄な雰囲気に置換され，クリーンルーム
雰囲気の不純物濃度は予め定めた値以下に保たれる。図
３はクリーンルーム雰囲気の制御方法（その２）を説明
する図で，符号は図２と共通であり，さらに，21はリタ
ーン主経路, 22は空気量調整弁, 23はリターン副経路,
24は不純物吸着剤, 25は空気量調整弁, 26は入出力変換
部を表す。さらに，Ｅはリターン主経路21の風量，Ｆは
リターン副経路23の風量を表す。In this way, the contaminated clean room atmosphere is replaced with a clean atmosphere, and the impurity concentration of the clean room atmosphere is kept below a predetermined value. FIG. 3 is a diagram for explaining a clean room atmosphere control method (No. 2), the reference numerals are the same as those in FIG. 2, 21 is a main return path, 22 is an air amount adjusting valve, 23 is a return sub path,
Reference numeral 24 is an impurity adsorbent, 25 is an air amount adjusting valve, and 26 is an input / output converter. Further, E represents the air volume of the return main route 21, and F represents the air volume of the return sub route 23.
【００３４】この例は前述の図２の方法に加えて，リタ
ーン主経路21の一部と平行して, 一部に不純物吸着剤24
を装填したリターン副経路23を設け, リターン副経路23
に空気量調整弁25を設けたものである。不純物吸着剤24
は例えば活性炭である。In this example, in addition to the method shown in FIG.
A return sub-path 23 loaded with
The air amount adjusting valve 25 is provided in the. Impurity adsorbent 24
Is, for example, activated carbon.
【００３５】運転中のクリーンルーム11の空気を採取
し，前述の雰囲気の分析装置10により結露水を作り，そ
の結露水を分析する。不純物濃度が上限値を超えた時，
入出力変換部26を作動させてリターン主経路21の空気量
調整弁22及びリターン副経路23の空気量調整弁25を調整
し，リターン主経路21の風量のリターン副経路23の風量
に対する比（Ｅ／Ｆ）を下げるようにする。さらにこの
調整はクリーンルーム11内の空気圧のバランスを保つよ
うにする。The air in the clean room 11 during operation is sampled, dew condensation water is made by the analyzer 10 in the atmosphere described above, and the dew condensation water is analyzed. When the impurity concentration exceeds the upper limit,
The input / output converter 26 is operated to adjust the air amount adjusting valve 22 of the return main route 21 and the air amount adjusting valve 25 of the return sub route 23, and the ratio of the air volume of the return main route 21 to the air amount of the return sub route 23 ( Try to lower E / F). Further, this adjustment keeps the air pressure in the clean room 11 balanced.
【００３６】具体的には，リターン主経路21の空気量調
整弁22の開度を小さくし，リターン副経路23の空気量調
整弁25の開度を大きくする。このようにすれば，リター
ン副経路23で空気の不純物が除去され，リターンされた
空気の不純物濃度が減少する。汚染されたクリーンルー
ム雰囲気は清浄な雰囲気に置換され，クリーンルーム雰
囲気の不純物濃度は予め定めた値以下に保たれる。Specifically, the opening degree of the air amount adjusting valve 22 in the return main path 21 is decreased, and the opening degree of the air amount adjusting valve 25 in the return sub path 23 is increased. By doing so, impurities in the air are removed in the return sub-path 23, and the concentration of impurities in the returned air is reduced. The contaminated clean room atmosphere is replaced with a clean atmosphere, and the impurity concentration in the clean room atmosphere is kept below a predetermined value.
【００３７】[0037]
【発明の効果】以上説明したように，本発明によれば，
クリーンルームの汚染状況を連続で監視することが可能
となる。また，クリーンルームの不純物濃度を予め定め
た値以下に抑制することができる。As described above, according to the present invention,
It is possible to continuously monitor the contamination status of the clean room. Further, the impurity concentration in the clean room can be suppressed to a predetermined value or less.
【００３８】これにより，製品製造工程でクリーンルー
ム環境からの影響をなくし，安定した製品歩留りを確保
できる。また，クリーンルームの不純物濃度が上昇した
時だけ換気処理または不純物吸着処理を行えばよいか
ら，空調システムのランニングコストの低減を図ること
ができる。As a result, it is possible to eliminate the influence of the clean room environment in the product manufacturing process and to secure a stable product yield. Further, since the ventilation process or the impurity adsorption process only needs to be performed when the impurity concentration in the clean room rises, the running cost of the air conditioning system can be reduced.
【００３９】本発明は半導体装置の製造に使用するクリ
ーンルームの環境管理に適用する時特に大きな効果を奏
するものである。The present invention exerts a particularly great effect when applied to environmental control of a clean room used for manufacturing a semiconductor device.
【図１】(a), (b)は雰囲気の分析装置を説明する図であ
る。FIG. 1A and FIG. 1B are diagrams illustrating an atmosphere analyzer.
【図２】クリーンルーム雰囲気の制御方法（その１）を
説明する図である。FIG. 2 is a diagram illustrating a clean room atmosphere control method (No. 1).
【図３】クリーンルーム雰囲気の制御方法（その２）を
説明する図である。FIG. 3 is a diagram illustrating a clean room atmosphere control method (No. 2).
【図４】水分を含む雰囲気からの結露を説明する図であ
る。FIG. 4 is a diagram illustrating dew condensation from an atmosphere containing water.
１は採取した空気 ２は結露水 ３は冷却部であって冷却パイプ 4aはドレイン受け 4bは水封トラップ 4cは結露水取り出し口 ５はファン ６はフィルタ ７は分析装置 ８はコンピュータ ９はディスプレイ 10は雰囲気の分析装置 11はクリーンルーム 12は外気供給経路 12a は外調機 13は空気量調整弁 14は空調供給経路 14a は空調機 15はリターン経路 16は空気量調整弁 17は入出力変換部 18は排気経路 18a はファン 19は空気量調整弁 21はリターン主経路 22は空気量調整弁 23はリターン副経路 24は不純物吸着剤 25は空気量調整弁 26は入出力変換部 Ａは外気供給経路の風量 Ｂはリターン経路の風量 Ｃは排気経路の風量 Ｄは空調供給経路の風量 Ｅはリターン主経路の風量 Ｆはリターン副経路の風量 1 is the collected air 2 is dew condensation water 3 is a cooling unit and cooling pipe 4a is a drain receiver 4b is a water seal trap 4c is a dew condensation water outlet 5 is a fan 6 is a filter 7 is an analyzer 8 is a computer 9 is a display 10 Is an atmosphere analyzer 11 is a clean room 12 is an outside air supply path 12a is an outside air conditioner 13 is an air quantity adjusting valve 14 is an air conditioning supply path 14a is an air conditioner 15 is a return path 16 is an air quantity adjusting valve 17 is an input / output converter 18 Is an exhaust path 18a is a fan 19 is an air quantity adjusting valve 21 is a return main path 22 is an air quantity adjusting valve 23 is a return sub path 24 is an impurity adsorbent 25 is an air quantity adjusting valve 26 is an input / output converter A is an outside air supply path B is the flow rate of the return route C is the flow rate of the exhaust route D is the flow rate of the air conditioning supply route E is the flow rate of the main return route F is the flow rate of the return secondary route
Claims (4)
し, 該結露水(2) に含まれる不純物を分析することによ
り該雰囲気に含まれる不純物を分析することを特徴とす
る雰囲気の分析方法。1. An atmosphere characterized by condensing water in an atmosphere into condensed water (2) and analyzing impurities contained in the condensed water (2) to analyze impurities contained in the atmosphere. Analysis method.
る冷却部(3) と，該結露水(2) を受けるドレイン受け(4
a)と, 該結露水(2) に含まれる不純物を分析する分析装
置とを有し,該冷却部(3) 及び該ドレイン受け(4a)は表
面が石英又は高分子材料であることを特徴とする雰囲気
の分析装置。2. A cooling unit (3) for collecting condensed water to obtain condensed water (2) and a drain receiver (4) for receiving the condensed water (2).
a) and an analyzer for analyzing impurities contained in the condensed water (2), and the cooling unit (3) and the drain receiver (4a) are characterized in that the surfaces are quartz or a polymer material. Atmosphere analyzer.
リーンルーム(11)に外気を供給する外気供給経路(12)に
設けられた第１の空気量調整弁(13)と,該クリーンルー
ム(11)から排出された空気を該クリーンルーム(11)へリ
ターンするリターン経路(15)に設けられた第２の空気量
調整弁(16)と,該分析装置による不純物の量が予め設定
した量より多くなった時，リターン経路(15)風量の外気
供給経路(12)風量に対する割合を下げるように該第２の
空気量調整弁(16)及び又は該第１の空気量調整弁(13)を
操作する入出力変換部(17)とを有することを特徴とする
クリーンルーム雰囲気の制御装置。3. The atmosphere analyzer according to claim 2, a first air amount adjusting valve (13) provided in an outside air supply path (12) for supplying outside air to the clean room (11), and the clean room ( The second air amount adjusting valve (16) provided in the return path (15) for returning the air discharged from (11) to the clean room (11), and the amount of impurities by the analyzer are set to a predetermined amount. When the amount of air becomes large, the second air amount adjusting valve (16) and / or the first air amount adjusting valve (13) are adjusted so as to reduce the ratio of the air flow rate to the air flow rate of the return air path (12). A control device for a clean room atmosphere, which has an input / output conversion unit (17) to be operated.
リーンルーム(11)から排出された空気を該クリーンルー
ム(11)へリターンするリターン主経路(21)に設けられた
第１の空気量調整弁(22)と,該リターン主経路(21)の一
部と並列に設けられ，一部に不純物吸着剤(24)の装填さ
れたリターン副経路(23)に設けられた第２の空気量調整
弁(25)と,該分析装置による不純物の量が予め設定した
量より多くなった時，リターン主経路(21)風量のリター
ン副経路(23)風量に対する割合を下げるように該第１の
空気量調整弁(22)及び該第２の空気量調整弁(25)を操作
する入出力変換部(26)とを有することを特徴とするクリ
ーンルーム雰囲気の制御装置。4. The atmosphere analyzer according to claim 2, and a first air amount adjustment provided on a return main path (21) for returning the air discharged from the clean room (11) to the clean room (11). A second air amount provided in the valve (22) and a part of the return main path (21) in parallel and provided in the return sub path (23) partly loaded with the impurity adsorbent (24) When the amount of impurities by the adjusting valve (25) and the analyzer becomes larger than a preset amount, the first main route (21) air amount is reduced so as to reduce the ratio to the return sub route (23) air amount. A control device for a clean room atmosphere, comprising: an air amount adjusting valve (22); and an input / output conversion unit (26) for operating the second air amount adjusting valve (25).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10820492A JP3376600B2 (en) | 1992-04-28 | 1992-04-28 | Atmosphere analysis method and analyzer, and clean room atmosphere control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10820492A JP3376600B2 (en) | 1992-04-28 | 1992-04-28 | Atmosphere analysis method and analyzer, and clean room atmosphere control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05302872A true JPH05302872A (en) | 1993-11-16 |
| JP3376600B2 JP3376600B2 (en) | 2003-02-10 |
Family
ID=14478663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10820492A Expired - Fee Related JP3376600B2 (en) | 1992-04-28 | 1992-04-28 | Atmosphere analysis method and analyzer, and clean room atmosphere control device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3376600B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5725634A (en) * | 1995-08-24 | 1998-03-10 | Sharp Kabushiki Kaisha | Method for collecting impurities in the atmosphere by state and apparatus for analyzing the same in real time |
| JP2002357346A (en) * | 2001-03-29 | 2002-12-13 | Ricoh Co Ltd | Clean room |
| KR100475460B1 (en) * | 1998-02-05 | 2005-05-27 | 삼성전자주식회사 | Clean Room Pollution Assessment Method |
| KR20220160981A (en) * | 2021-05-28 | 2022-12-06 | 주식회사 선반도체 | Residual gas and surface ion analysis system with moisture content measurement using condensation temperature |
-
1992
- 1992-04-28 JP JP10820492A patent/JP3376600B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5725634A (en) * | 1995-08-24 | 1998-03-10 | Sharp Kabushiki Kaisha | Method for collecting impurities in the atmosphere by state and apparatus for analyzing the same in real time |
| KR100475460B1 (en) * | 1998-02-05 | 2005-05-27 | 삼성전자주식회사 | Clean Room Pollution Assessment Method |
| JP2002357346A (en) * | 2001-03-29 | 2002-12-13 | Ricoh Co Ltd | Clean room |
| KR20220160981A (en) * | 2021-05-28 | 2022-12-06 | 주식회사 선반도체 | Residual gas and surface ion analysis system with moisture content measurement using condensation temperature |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3376600B2 (en) | 2003-02-10 |
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