JPH05302678A - Opening/closing valve for fluid - Google Patents

Opening/closing valve for fluid

Info

Publication number
JPH05302678A
JPH05302678A JP11003792A JP11003792A JPH05302678A JP H05302678 A JPH05302678 A JP H05302678A JP 11003792 A JP11003792 A JP 11003792A JP 11003792 A JP11003792 A JP 11003792A JP H05302678 A JPH05302678 A JP H05302678A
Authority
JP
Japan
Prior art keywords
valve body
opening
support rod
valve
side opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP11003792A
Other languages
Japanese (ja)
Inventor
Terushige Arai
井 輝 繁 荒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11003792A priority Critical patent/JPH05302678A/en
Publication of JPH05302678A publication Critical patent/JPH05302678A/en
Withdrawn legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)

Abstract

PURPOSE:To eliminate the occurrence of dirt/dust by constituting in such a way that the first valve body blocks up a supply side opening by an advance of the first valve body support rod, and opens the supply side opening and blocks up a discharge side opening by a retreat, and the second valve body blocks up an opening to a discharge passage by an advance of the second valve body support rod interlocked with this, and opens it by a retreat. CONSTITUTION:A supply side opening 3 communicated with a fluid supply passage 2 and a discharge side opening 5 communicated with a discharge passage 4 are arranged in a branch part 1a of a fluid flow passage 1. When a valve body support rod 6 passing penetratingly in non-contact through the discharg side opening 5 is advanced, a valve body 7 blocks up the supply side opening 3, and when being retreated, it opens the supply side opening 3, and blocks up the discharge side opening 5. An opening 8 is arranged in the middle of flowing fluid circulating on the side D to be supplied to the discharge passage 4, and when a valve body support rod 10 is interlocked with a valve body support rod 6 so as to be advanced, a valve body 9 blocks up the opening 8, and opens the opening 8 when it is retreated. Since the valve body 7 and the valve body support rod 6 have no sliding part at all on the fluid supply passage 2 side, the occurrence of dirt/dust caused by sliding movement is eliminated, so that pollution caused by the fluid can be also eliminated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、流体たとえばクリー
ンエアを被供給側に供給したり、排気側に排出させたり
する流体の開閉バルブに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid on / off valve for supplying a fluid, for example, clean air, to a supply side or discharging it to an exhaust side.

【0002】[0002]

【従来の技術】コンピュータシステムの外部記憶装置で
ある磁気ディスク装置の一部分である、スピンドルと、
磁気ディスクと、アクセスアームおよび磁気ヘッドと、
ボイスコイルモータなどを筐体に組み込んだディスクエ
ンクロージャの組立完成後に、たとえば塵埃が零に近い
クリーンエアをこのディスクエンクロージャの筐体の中
に流してエア交換を行うことによって、ディスクエンク
ロージャの組立時に発生または混入した塵埃を除去する
ようにしている。
2. Description of the Related Art A spindle, which is a part of a magnetic disk device which is an external storage device of a computer system,
A magnetic disk, an access arm and a magnetic head,
Generated when the disk enclosure is assembled by, for example, flowing clean air with dust close to zero into the disk enclosure's housing to replace the air after completing the assembly of the disk enclosure with a voice coil motor etc. Alternatively, the mixed dust is removed.

【0003】図4はその従来例を示すものであり、21
はディスクエンクロージャDEの筐体内にクリーンエア
を供給循環させて、筐体内の塵埃を除去するエア給排器
で、このエア給排器21の供給口21aと排気口21b
との上にディスクエンクロージャDEの開口を連結す
る。
FIG. 4 shows an example of the prior art.
Is an air supply / exhaust device that removes dust inside the housing by supplying and circulating clean air into the housing of the disk enclosure DE. The air supply / exhaust device 21 has a supply port 21a and an exhaust port 21b.
Connect the opening of the disk enclosure DE over and.

【0004】前記エア給排器21の供給口21aにはエ
ア供給ホース22の一端が接続され、このエア供給ホー
ス22の他端がバルブ23に接続され、このバルブ23
がエア供給管24に接続されている。また、前記エア給
排器21の排気口21bには排気ホース25が接続され
ている。
One end of an air supply hose 22 is connected to the supply port 21a of the air supply / discharge device 21, the other end of the air supply hose 22 is connected to a valve 23, and this valve 23
Are connected to the air supply pipe 24. An exhaust hose 25 is connected to the exhaust port 21b of the air supply / exhaust device 21.

【0005】図5はバルブ23の各例を示すもので、そ
の(A)図はいわゆる蛇口などで使用されているバルブ
であり、弁支持杆23aの先端に弁体23bを取付け、
この弁支持杆23aは管体23cに螺合されており、こ
の弁支持杆23aはそれを回転させることにより進退
し、前進したときには弁体23bが管体23cの中に設
けた仕切壁23dに穿設した開口23eを塞ぐように形
成されている。
FIG. 5 shows an example of the valve 23. FIG. 5A shows a valve used in a so-called faucet or the like. A valve element 23b is attached to the tip of a valve support rod 23a.
The valve support rod 23a is screwed to the pipe body 23c, and the valve support rod 23a advances and retreats by rotating it. When the valve support rod 23a moves forward, the valve body 23b is attached to the partition wall 23d provided in the pipe body 23c. It is formed so as to close the drilled opening 23e.

【0006】図5の(B)図に示すバルブ23はいわゆ
るコックで、所定幅の円柱弁体あるいは球状弁体23f
に直径方向の貫通孔23gを穿設し、この貫通孔23g
が管体23hの軸方向と同一方向に向いたときにクリー
ンエアが流通し、この貫通孔23gが管体23hの軸方
向と直角方向に向いたときにクリーンエアの流通が止ま
るように形成されている。
The valve 23 shown in FIG. 5B is a so-called cock, which is a cylindrical valve element or spherical valve element 23f having a predetermined width.
A diametrical through hole 23g is formed in the
Is formed so that when the air flows in the same direction as the axial direction of the pipe body 23h, the clean air flows, and when this through hole 23g faces in the direction perpendicular to the axial direction of the pipe body 23h, the flow of the clean air stops. ing.

【0007】図5の(C)図に示すバルブ23は、蝶形
弁体23iが管体23jの軸方向に向いたときにクリー
ンエアが流通し、蝶形弁体23iが管体23jの軸方向
と直角方向に向いたときにはクリーンエアの流通が止ま
るように形成されている。
In the valve 23 shown in FIG. 5 (C), clean air flows when the butterfly valve body 23i is oriented in the axial direction of the tube body 23j, and the butterfly valve body 23i is rotated by the axis of the tube body 23j. It is formed so that the circulation of clean air is stopped when it faces in the direction perpendicular to the direction.

【0008】[0008]

【発明が解決しようとする課題】前記従来例の図5の
(A)に示すバルブ23においては、先端に弁体23b
を取付けた弁支持杆23aは管体23cに螺合されてい
るので、弁体23bで開口23eを塞いだり開けたりす
るため、この弁支持杆23aを回動させて軸方向に移動
させる際に、弁支持杆23aの摺動により塵埃が発生す
る。
In the valve 23 shown in FIG. 5 (A) of the conventional example, the valve element 23b is provided at the tip.
Since the valve support rod 23a attached with is screwed to the pipe body 23c, the opening 23e is closed or opened by the valve body 23b. Therefore, when the valve support rod 23a is rotated and axially moved. Dust is generated due to the sliding of the valve support rod 23a.

【0009】また、図5の(B)に示すバルブ23にお
いては、所定幅の円柱弁体あるいは球状弁体23fを回
動させてクリーンエアを流通させたり止めたりする際
に、所定幅の円柱弁体あるいは球状弁体23fと管体2
3hの内面との摺動により塵埃が発生する。
Further, in the valve 23 shown in FIG. 5B, when the cylindrical valve body or the spherical valve body 23f having a predetermined width is rotated to pass or stop the clean air, a cylinder having a predetermined width is used. Valve body or spherical valve body 23f and tube body 2
Dust is generated by sliding on the inner surface for 3 h.

【0010】また、図5の(C)に示すバルブ23にお
いては、蝶形弁体23iを回動させてクリーンエアを流
通させたり止めたりする際に、蝶形弁体23iと管体2
3jの内面との摺動により塵埃が発生する。
In the valve 23 shown in FIG. 5C, the butterfly valve body 23i and the tube body 2i and the tube body 2 are rotated when the butterfly valve body 23i is rotated to allow or stop the circulation of clean air.
Dust is generated by sliding on the inner surface of 3j.

【0011】図4に示すように、ディスクエンクロージ
ャDEの筐体内にクリーンエアを供給循環させて、この
筐体内の塵埃を除去するためのクリーンエアを流通させ
たり止めたりするため、エア供給ホース22とエア供給
管24との間に前記のようなバルブ23を取付けた場
合、このバルブ23の開閉の際の弁体あるいは弁支持杆
の摺動により発生した塵埃がディスクエンクロージャD
Eの中に入り、悪影響を及ぼすといった問題があった。
As shown in FIG. 4, clean air is supplied and circulated in the housing of the disk enclosure DE, and clean air for removing dust in the housing is circulated or stopped. When the valve 23 as described above is attached between the air supply pipe 24 and the air supply pipe 24, dust generated by sliding of the valve body or the valve support rod when the valve 23 is opened and closed is disc enclosure D.
There was a problem that it got into E and had an adverse effect.

【0012】この発明は、弁体およびその支持杆が、流
体の供給路側において全く摺動しないように開閉バルブ
を構成することにより、従来のように弁体およびその支
持杆の摺動により、塵埃が発生することがないようにす
ることを目的とするものである。
According to the present invention, the on-off valve is constructed so that the valve body and its supporting rod do not slide at all on the fluid supply path side, so that the sliding of the valve body and its supporting rod in the conventional manner causes dust. The purpose is to prevent the occurrence of.

【0013】[0013]

【課題を解決するための手段】この発明は、前記目的を
達成するために、図1に示すように、流体の流通路1の
分岐部1aに、流体の供給路2と連通する供給側開口3
と、排出路4と連通する排出側開口5を設けるととも
に、前記排出側開口5を非接触で貫通した第一の弁体支
持杆6の先端に第一の弁体7を取付け、この第一の弁体
支持杆6を、前進させると第一の弁体7が前記供給側開
口3を塞ぎ、後退させると第一の弁体7が前記供給側開
口3を開いて前記排出側開口5を塞ぐように第一の弁体
支持杆6を移動させる移動手段を設け、被供給側Dを循
環してきた流体を排出路4へ流す途中に開口8を設け、
この開口8を開閉する第二の弁体9を第二の弁体支持杆
10の先端に設け、この第二の弁体支持杆10を前記第
一の弁体支持杆6と連動して前進させると第二の弁体9
が前記開口8を塞ぎ、後退させると第二の弁体9が前記
開口8を開くように第二の弁体支持杆10を第一の弁体
支持杆6と連動して移動させる移動手段を設けた流体の
開閉バルブとしたものである。
In order to achieve the above-mentioned object, the present invention, as shown in FIG. 1, provides a branch portion 1a of a fluid flow passage 1 with a supply side opening communicating with a fluid supply passage 2. Three
And a discharge side opening 5 communicating with the discharge path 4 is provided, and a first valve body 7 is attached to the tip of a first valve body supporting rod 6 that penetrates the discharge side opening 5 in a non-contact manner. When the valve body support rod 6 is moved forward, the first valve body 7 closes the supply side opening 3, and when it is retracted, the first valve body 7 opens the supply side opening 3 and opens the discharge side opening 5. A moving means for moving the first valve body support rod 6 so as to close it is provided, and an opening 8 is provided in the middle of flowing the fluid circulating on the supply side D to the discharge path 4,
A second valve body 9 that opens and closes the opening 8 is provided at the tip of the second valve body support rod 10, and the second valve body support rod 10 moves forward in conjunction with the first valve body support rod 6. Second valve body 9
Means for moving the second valve body support rod 10 in conjunction with the first valve body support rod 6 so that the second valve body 9 opens the opening 8 when the opening 8 is closed and retracted. It is an on-off valve for the provided fluid.

【0014】[0014]

【作用】この発明の流体の開閉バルブは、前記のように
構成しているので、流体の供給路2側において、弁体7
および弁体支持杆6の摺動部が全くないので、摺動によ
る塵埃の発生が全くなく、従って、被供給側Dに循環さ
せる流体を汚染させるおそれは全くなくなる。
Since the fluid on-off valve of the present invention is constructed as described above, the valve element 7 is provided on the fluid supply passage 2 side.
Also, since there is no sliding portion of the valve element support rod 6, there is no generation of dust due to sliding, and therefore there is no possibility of contaminating the fluid circulated to the supplied side D.

【0015】[0015]

【実施例】以下、この発明の流体の開閉バルブの実施例
を図2および図3に従って詳細に説明する。図2はこの
発明の流体の開閉バルブによって、ディスクエンクロー
ジャの組立完成後に、たとえば塵埃が零に近いクリーン
エアをこのディスクエンクロージャの筐体の中に流して
エア交換を行うことによって、ディスクエンクロージャ
の組立時に発生した塵埃を除去する実施例の概略図で、
図3はその右側面図である。
Embodiments of the fluid on-off valve of the present invention will be described in detail below with reference to FIGS. FIG. 2 shows that the assembly of the disk enclosure is performed by, for example, flowing clean air with dust close to zero into the housing of the disk enclosure to perform air exchange after the completion of the assembly of the disk enclosure by the fluid on-off valve of the present invention. A schematic view of an embodiment for removing dust that sometimes occurs,
FIG. 3 is a right side view thereof.

【0016】これらの図において、1はクリーンエアの
流通路で、その分岐部1aに、クリーンエアの供給路2
と連通する供給側開口3と、排出路4と連通する排出側
開口5を設けるとともに、前記排出側開口5を非接触で
貫通した第一の弁体支持杆6の先端に第一の弁体7を設
け、この第一の弁体支持杆6を、前進させると第一の弁
体7が前記供給側開口3を塞ぎ、後退させると第一の弁
体7が前記供給側開口3を開いて前記排出側開口5を塞
ぐように第一の弁体支持杆6を移動させる移動手段とし
て第一のエアシリンダ11が設けられている。
In these figures, 1 is a clean air flow passage, and a clean air supply passage 2 is provided at a branch portion 1a thereof.
A supply side opening 3 that communicates with the discharge side opening 5 and a discharge side opening 5 that communicates with the discharge path 4 are provided, and a first valve body is provided at the tip of a first valve body supporting rod 6 that penetrates the discharge side opening 5 in a non-contact manner. 7 is provided, and when the first valve body support rod 6 is moved forward, the first valve body 7 closes the supply side opening 3, and when it is retracted, the first valve body 7 opens the supply side opening 3. A first air cylinder 11 is provided as a moving unit that moves the first valve body support rod 6 so as to close the discharge side opening 5.

【0017】ディスクエンクロージャDEの筐体の中を
循環してきたクリーンエアを排出路4へ流す途中に開口
8を設け、この開口8を開閉する第二の弁体9を第二の
弁体支持杆10の先端に設け、この第二の弁体支持杆1
0を前記第一の弁体支持杆6と連動して前進させると第
二の弁体9が前記開口8を塞ぎ、後退させると第二の弁
体9が前記開口8を開くように第二の弁体支持杆10を
第一の弁体支持杆6と連動して移動させる移動手段とし
て前記第一のエアシリンダ11が併用されている。以上
のようにしてクリーンエアの開閉バルブVが構成されて
いる。
An opening 8 is provided in the middle of flowing the clean air circulated in the housing of the disk enclosure DE to the discharge path 4, and a second valve body 9 for opening and closing the opening 8 is provided with a second valve body support rod. This second valve body support rod 1 is provided at the tip of 10
The second valve body 9 closes the opening 8 when 0 is moved forward in association with the first valve body support rod 6, and the second valve body 9 opens the opening 8 when moved backward. The first air cylinder 11 is also used as a moving means for moving the valve body supporting rod 10 in conjunction with the first valve body supporting rod 6. The open / close valve V for clean air is configured as described above.

【0018】この開閉バルブVは保護カバー12の中に
組み込まれており、この保護カバー12に第二のエアシ
リンダ13の進退ロッド13aが連結されており、この
第二のエアシリンダ13の動作によって保護カバー12
に保護された開閉バルブVが上下動するようになってい
る。
The opening / closing valve V is incorporated in the protective cover 12, and the advancing / retreating rod 13a of the second air cylinder 13 is connected to the protective cover 12, and by the operation of the second air cylinder 13. Protective cover 12
The on-off valve V protected by the above is designed to move up and down.

【0019】この保護カバー12の上下動を可能にする
ため、前記流通路1の下端に鍔1bが形成され、この鍔
1bがエア供給管14の中に摺動時に非接触状態で嵌合
され、保護カバー12と共に流通路1の下端の鍔1bが
上昇したときに、エア供給管14の上端に形成した内方
向の鍔14aに当接して、エア供給管14と流通路1と
の間でエア漏れがなくなる。
To enable the protective cover 12 to move up and down, a flange 1b is formed at the lower end of the flow passage 1, and the flange 1b is fitted in the air supply pipe 14 in a non-contact state when sliding. When the flange 1b at the lower end of the flow passage 1 rises together with the protective cover 12, it comes into contact with the inward flange 14a formed at the upper end of the air supply pipe 14, and the space between the air supply pipe 14 and the flow passage 1 is increased. No air leakage.

【0020】なお、前記エア供給管14の上端に形成し
た内方向の鍔14aと流通路1の下端の鍔1bとの当接
部、クリーンエアの供給路2と連通する供給側開口3と
第一の弁体7との当接部、排出路4と連通する排出側開
口5と当接する第一の弁体7との当接部、および排出路
4の途中に設けた開口8と第二の弁体9との当接部に
は、図示しないが、それぞれ機密性を良くするためにフ
ッ素樹脂などの発塵性の少ない材料で作られたOリング
が設けられている。
A contact portion between the inward flange 14a formed at the upper end of the air supply pipe 14 and the flange 1b at the lower end of the flow passage 1, the supply side opening 3 communicating with the clean air supply passage 2, and the first side. The contact portion with one valve body 7, the contact portion with the first valve body 7 in contact with the discharge side opening 5 communicating with the discharge path 4, and the opening 8 and the second hole provided in the middle of the discharge path 4. Although not shown, an O-ring made of a material such as a fluororesin having a low dust generation property is provided at a contact portion with the valve body 9 for improving the airtightness.

【0021】前記クリーンエアの供給路2と排出路4と
の間の隔壁15の上端に、側面櫛形のクリーンエアの整
流板15aが形成されており、コンベヤー16によって
開閉バルブVの上方にディスクエンクロージャDEが移
動して来て、開閉バルブVがディスクエンクロージャD
Eの方向に上昇したときに、前記整流板15aが、図2
および図3に示すように、ディスクエンクロージャDE
を構成する磁気ディスク17の間に嵌合して、クリーン
エアの流れを良好にする。なお、18は排気ホースであ
る。
A side-comb-shaped clean air rectifying plate 15a is formed at the upper end of the partition wall 15 between the clean air supply path 2 and the discharge path 4, and a conveyor 16 drives the disk enclosure above the opening / closing valve V. The DE has moved, and the on-off valve V has the disk enclosure D.
When rising in the direction of E, the current plate 15a is
And as shown in FIG. 3, the disk enclosure DE
Are fitted between the magnetic disks 17 constituting the above to improve the flow of clean air. In addition, 18 is an exhaust hose.

【0022】この実施例においては、以上説明したよう
なクリーンエアの開閉バルブを用いて、ディスクエンク
ロージャの組立完成後に、たとえば塵埃が零に近いクリ
ーンエアをこのディスクエンクロージャの筐体の中に流
してエア交換を行う際に、開閉バルブの開閉動作によっ
て塵埃を発生することがないので、ディスクエンクロー
ジャの組立時に発生した塵埃を完全に除去することがで
きる。
In this embodiment, by using the clean air opening / closing valve as described above, for example, clean air with dust close to zero is flowed into the enclosure of the disk enclosure after the completion of the assembly of the disk enclosure. Since dust is not generated by the opening / closing operation of the open / close valve when performing the air exchange, it is possible to completely remove the dust generated during the assembly of the disk enclosure.

【0023】なお、以上説明した実施例においては、ク
リーンエアの開閉バルブについて説明したが、その他、
極めて高いクリーン度が要求されるガスや液体の開閉バ
ルブとして利用することも可能である。
In the embodiment described above, the open / close valve for clean air is explained.
It can also be used as an on-off valve for gas or liquid that requires extremely high cleanliness.

【0024】[0024]

【発明の効果】以上説明したように、この発明の流体の
開閉バルブは、流体の流通路の分岐部に、流体の供給路
と連通する供給側開口と、排出路と連通する排出側開口
を設けるとともに、前記排出側開口を非接触で貫通した
第一の弁体支持杆の先端に第一の弁体を取付け、この第
一の弁体支持杆を、前進させると第一の弁体が前記供給
側開口を塞ぎ、後退させると第一の弁体が前記供給側開
口を開いて前記排出側開口を塞ぐように第一の弁体支持
杆を移動させる移動手段を設け、被供給側を循環してき
た流体を排出路へ流す途中に開口を設け、この開口を開
閉する第二の弁体を第二の弁体支持杆の先端に設け、こ
の第二の弁体支持杆を前記第一の弁体支持杆と連動して
前進させると第二の弁体が前記開口を塞ぎ、後退させる
と第二の弁体が前記開口を開くように第二の弁体支持杆
を第一の弁体支持杆と連動して移動させる移動手段を設
けた流体の開閉バルブとしたので、流体の供給路側にお
いて、弁体および弁体支持杆の摺動部が全くないので、
弁体および弁体支持杆の摺動による塵埃の発生が全くな
く、従って、被供給側に循環させる流体を汚染させるお
それは全くなくなる。
As described above, in the fluid on-off valve of the present invention, at the branch portion of the fluid flow passage, the supply side opening communicating with the fluid supply path and the discharge side opening communicating with the discharge path are provided. The first valve body is attached to the tip of the first valve body support rod that penetrates the discharge side opening without contact, and the first valve body is moved when the first valve body support rod is moved forward. Provided is a moving means for moving the first valve body support rod so that the first valve body opens the supply side opening and closes the discharge side opening when the supply side opening is closed and retracted. An opening is provided in the middle of flowing the circulated fluid to the discharge passage, and a second valve body for opening and closing the opening is provided at the tip of the second valve body supporting rod, and the second valve body supporting rod is provided with the first valve body. The second valve element closes the opening when it is moved forward in conjunction with the valve element support rod of, and the second valve element moves forward when it is retracted. Since the fluid opening / closing valve is provided with the moving means for moving the second valve body supporting rod in conjunction with the first valve body supporting rod so as to open the opening, the valve body and the valve body are provided on the fluid supply path side. Since there is no sliding part of the support rod,
There is no generation of dust due to sliding of the valve element and the valve element support rod, and therefore there is no possibility of contaminating the fluid circulated on the supply side.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の流体の開閉バルブの原理図である。FIG. 1 is a principle view of a fluid on-off valve according to the present invention.

【図2】この発明の流体の開閉バルブの実施例を示す図
である。
FIG. 2 is a diagram showing an embodiment of a fluid on-off valve of the present invention.

【図3】図2の右側面図である。FIG. 3 is a right side view of FIG.

【図4】従来の流体の開閉バルブの使用例を示す図であ
る。
FIG. 4 is a diagram showing an example of use of a conventional fluid on-off valve.

【図5】従来の流体の開閉バルブの各例を示す図であ
る。
FIG. 5 is a diagram showing each example of a conventional fluid on-off valve.

【符号の説明】[Explanation of symbols]

1 流体の流通路 1a 分岐部 1b 鍔 2 流体の供給路 3 供給側開口 4 排出路 5 排出側開口 6 第一の弁体支持杆 7 第一の弁体 8 開口 9 第二の弁体 10 第二の弁体支持杆 11 第一のエアシリンダ V 開閉バルブ 12 保護カバー 13 第二のエアシリンダ 13a 進退ロッド 14 エア供給管 14a 鍔 15 隔壁 15a 整流板 16 コンベヤー 17 磁気ディスク 18 排気ホース DE ディスクエンクロージャ 21 エア給排器 21a 供給口 21b 排気口 22 エア供給ホース 23 バルブ 23a 弁支持杆 23b 弁体 23c 管体 23d 仕切壁 23e 開口 23f 球状弁体 23g 貫通孔 23h 管体 23i 蝶形弁体 23j 管体 24 エア供給管 25 排気ホース DESCRIPTION OF SYMBOLS 1 Fluid flow path 1a Branch part 1b Collar 2 Fluid supply path 3 Supply side opening 4 Discharge path 5 Discharge side opening 6 First valve body support rod 7 First valve body 8 Opening 9 Second valve body 10th Second valve support rod 11 First air cylinder V Opening / closing valve 12 Protective cover 13 Second air cylinder 13a Advance rod 14 Air supply pipe 14a Collar 15 Partition wall 15a Rectifier plate 16 Conveyor 17 Magnetic disk 18 Exhaust hose DE disk enclosure 21 Air supply / drainer 21a Supply port 21b Exhaust port 22 Air supply hose 23 Valve 23a Valve support rod 23b Valve body 23c Tubular body 23d Partition wall 23e Opening 23f Spherical valve body 23g Through hole 23h Tubular body 23i Butterfly valve body 23j Tubular body 24 Air supply pipe 25 Exhaust hose

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】流体の流通路(1)の分岐部(1a)に、
流体の供給路(2)と連通する供給側開口(3)と、排
出路(4)と連通する排出側開口(5)を設けるととも
に、前記排出側開口(5)を非接触で貫通した第一の弁
体支持杆(6)の先端に第一の弁体(7)を取付け、こ
の第一の弁体支持杆(6)を、前進させると第一の弁体
(7)が前記供給側開口(3)を塞ぎ、後退させると第
一の弁体(7)が前記供給側開口(3)を開いて前記排
出側開口(5)を塞ぐように第一の弁体支持杆(6)を
移動させる移動手段を設け、被供給側Dを循環してきた
流体を排出路(4)へ流す途中に開口(8)を設け、こ
の開口(8)を開閉する第二の弁体(9)を第二の弁体
支持杆(10)の先端に設け、この第二の弁体支持杆
(10)を前記第一の弁体支持杆(6)と連動して前進
させると第二の弁体(9)が前記開口(8)を塞ぎ、後
退させると第二の弁体(9)が前記開口(8)を開くよ
うに第二の弁体支持杆(10)を第一の弁体支持杆
(6)と連動して移動させる移動手段を設けたことを特
徴とする流体の開閉バルブ。
1. A branch portion (1a) of a fluid flow passage (1),
A supply-side opening (3) communicating with the fluid supply path (2) and a discharge-side opening (5) communicating with the discharge path (4) are provided, and the discharge-side opening (5) penetrates the discharge-side opening (5) without contact. The first valve body (7) is attached to the tip of the one valve body support rod (6), and when the first valve body support rod (6) is moved forward, the first valve body (7) supplies the above-mentioned supply. When the side opening (3) is closed and retracted, the first valve body (7) opens the supply side opening (3) and closes the discharge side opening (5). ) Is provided, an opening (8) is provided in the middle of flowing the fluid circulating on the supply side D to the discharge passage (4), and the second valve body (9) for opening and closing this opening (8) is provided. ) Is provided at the tip of the second valve disc support rod (10), and when the second valve disc support rod (10) is moved forward in conjunction with the first valve disc support rod (6), Disc The second valve body support rod (10) is connected to the first valve body support rod (10) so that the second valve body (9) opens the opening (8) when the opening (8) is closed and retracted by the second valve body (9). A fluid on-off valve comprising a moving means for moving in conjunction with (6).
JP11003792A 1992-04-28 1992-04-28 Opening/closing valve for fluid Withdrawn JPH05302678A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11003792A JPH05302678A (en) 1992-04-28 1992-04-28 Opening/closing valve for fluid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11003792A JPH05302678A (en) 1992-04-28 1992-04-28 Opening/closing valve for fluid

Publications (1)

Publication Number Publication Date
JPH05302678A true JPH05302678A (en) 1993-11-16

Family

ID=14525517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11003792A Withdrawn JPH05302678A (en) 1992-04-28 1992-04-28 Opening/closing valve for fluid

Country Status (1)

Country Link
JP (1) JPH05302678A (en)

Similar Documents

Publication Publication Date Title
ATE165524T1 (en) ACCESS VALVE, ITS USE IN A SEPARATOR AND PROCEDURE
WO2010068387A1 (en) Stemless ball valve
BR112018010249B1 (en) SWITCH VALVE
CN110023032A (en) Coolant liquid piecing devices
JPH05302678A (en) Opening/closing valve for fluid
TW201739528A (en) Substrate processing device, substrate processing method, and program recording medium
US4660592A (en) Butterfly valve
US8132786B2 (en) Stemless ball valve
JPH0434028B2 (en)
TWI723628B (en) Auxiliary device that provides cooling or maintaining temperature effect to the components of the machine tool
JP2000337550A (en) Valve device
JPS632704Y2 (en)
KR102191207B1 (en) Lapping apparatus for globe valve
JP2000012448A (en) Treatment apparatus for substrate
KR20210142824A (en) Engine room cooling apparatus for a construction equipment
KR102613012B1 (en) Lens cleaning device using dry ice
JP2887162B2 (en) Trap device
JPH01169179A (en) Non-sliding three-way valve
JP3772457B2 (en) Refrigerant valve device
JP2009045589A (en) Washing apparatus of base
KR20230104588A (en) Silicon wafer adsorption unit and silicon wafer transfer device
KR0132524Y1 (en) Device for removing chip from gas pipes
JPH1030748A (en) Valve having repairing device
JP2000104836A (en) Valve device
JPH0410449Y2 (en)

Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 19990706