JPH0529138A - Soft magnetic metallized alloy film, method of manufacturing same and magnetic core using same - Google Patents

Abstract

PURPOSE:To produce a soft metallized alloy film for high frequency by metallization (metal spraying). CONSTITUTION:In a method of producing a soft magnetic metallized alloy film 1 by metallization of soft magnetic alloy powder, a waving layer structure of a soft magnetic alloy layer 1 and a high resistance layer 2 are formed by metallization at a time of powder of high resistance materials 2. The metallizing method enables manufacture of a soft metallized alloy film for high frequency in order to improve productivity.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inductance element used at high frequencies.

[0002]

2. Description of the Related Art "Surface technology" Vol. 41, No. 10
(1991) pp. 64-68, an Fe-Si-B system amorphous soft magnetic alloy is directly sprayed on the peripheral surface of a steel round bar to form an amorphous soft magnetic sprayed film. It is described that it is used as a non-contact type torque sensor by utilizing the strain effect. In general, the soft magnetic sprayed film has good productivity, so it should be possible to use it as a magnetic core for an inductance element used in a high frequency range, but no one has tried it yet.

[0003]

Generally, since the film thickness of the sprayed film is large and varies widely, it is impossible to form a thin film capable of reducing high frequency loss. Therefore, despite the high productivity of the sprayed coating, there is no soft magnetic sprayed coating used as a high frequency inductance material in the past. Therefore, an object of the present invention is to provide a soft magnetic sprayed film having good magnetic properties.

[0004]

According to the present invention, a soft alloy sprayed coating having excellent magnetic characteristics at high frequencies can be provided by controlling the internal structure of the soft magnetic sprayed coating. That is,
According to the present invention, the internal structure of the sprayed film is controlled so as to be a multilayer film structure in which a high electric resistance layer is interposed between soft magnetic alloy layers, which makes it difficult to manufacture a thin layer. This problem is avoided by making the internal structure thin to improve the magnetic characteristics.

According to the present invention, when a soft magnetic sprayed alloy film is produced by spraying a soft magnetic alloy powder, magnetic or non-magnetic oxide or other high electric resistance material powder is mixed and sprayed together. As a result, it is possible to realize a wavy layered structure in which the soft magnetic alloy layer and the high electric resistance layer are intricately intricate, and as a result, the individual soft magnetic alloy layer inside the soft magnetic sprayed film becomes thin and the magnetic characteristics are improved. This is because the soft magnetic alloy powder and the high electric resistance material powder become layered or lobed when they adhere to the substrate in a molten state during thermal spraying.

The soft magnetic alloy that can be used for producing the soft magnetic sprayed film of the present invention may be amorphous alloy powder or crystalline soft magnetic alloy powder as long as it is suitable for thermal spraying. Examples of such materials are permalloy, sendust, super sendust, Co-based amorphous alloys, alloys with fine crystal grains, F
There are i-Si alloys and the like. The average particle size of the powder used is 10
It may be 0 μm or less, but is preferably about 10 μm or less. Since the powder is melted during thermal spraying and flattened with a high electric resistance layer interposed when it adheres to the substrate, it can easily become a thin layer of 3 μm or less in terms of internal structure. However, if it is too rough, the surface of the sprayed film will be rough, so it should not exceed 100 μm.

Next, the material for forming the high electric resistance layer may be a magnetic material or non-magnetic resistance,
It must have a large electrical resistance. For example, magnetic ferrite powder or non-magnetic ferrite powder can be used because it has high electric resistance. As the non-magnetic high electric resistance material, various oxides and nitrides such as SiO ₂ , SiN, SiC, soft glass, hard glass, quartz glass, Mgo, steatite, magnesium silicate, and ALTIC can be used. The average particle size of these powders is 100
μm or less, preferably 10 μm or less.

As a thermal spraying method, a conventionally known method may be used. For example, the reduced pressure thermal spraying described in the above-mentioned documents and the other Japanese Patent Publication Nos. 60-54389 and 60-31900.
No. 61, No. 61-36061, No. 61-54107, Japanese Patent Publication No. 2-55493, No. 1-24223, No. 3-1.
3303, 261-36, JP-A-61-10676.
No. 3, No. 61-119657, No. 61-197701.
No. 61, No. 61-261467, No. 61-270302.
No. 61-3888, 60-249830, 62
-2639951, 63-109151, 62-
130261, 63-235448, JP-A-2-
213455, 3-64443, 3-8731
Any method described in No. 0, etc. can be used.

In the thermal spraying, a mixture of the above soft magnetic alloy powder and high electric resistance powder is applied onto a ceramic substrate such as alumina to form a soft magnetic alloy sprayed film. Thermal spraying may also be performed on the metal substrate. Alternatively, in order to form a laminated or wound type magnetic core, a film is formed by thermal spraying on a substrate such as glass which is easily peeled off, and the film is peeled off and wound or laminated.

The sprayed film obtained has a corrugated layered structure as shown in FIG. 2 which will be described later. In particular, the high electric resistance layer 2 is interposed between the soft magnetic alloy layers 1 to reduce the thickness of the soft magnetic alloy layer 1. For this reason, eddy current loss and the like at high frequencies are reduced even if the overall thickness is large.
In order to reduce the coercive force and form a sprayed film with good characteristics, the absolute value of the magnetostriction (λs) of the soft magnetic alloy layer is 2 × 10.
^-6 or less is preferable.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The preferred embodiments of the present invention will be described below.

Example 1 Mo permalloy powder having an average particle size of 6 μm was prepared by an atomizing method, and 20% by volume of SiO ₂ powder (average particle size of 5 μm) was mixed and sprayed on an alumina substrate to form a film. A multilayer film having a thickness of about 10 μm was produced. As a result of observing the cross section with a microscope, as shown in FIG. 1, Mo permalloy layer 1 and SiO
It was confirmed that the _two layers had a corrugated, multi-layered structure. This film was peeled from the substrate to form a toroidal shape having an inner diameter of 6 mm and an outer diameter of 10 mm, and 30 sheets were laminated and the results of examining the change in initial magnetic permeability with frequency are shown in FIG. However, the initial permeability μ ₁ at 1 kHz was used as a reference. Comparing this with a rolled material having the same composition and a film thickness of about 10 μm, it can be seen that excellent soft magnetic characteristics can be realized at high frequencies. When the magnetostriction was measured, it was 5 × 10 ⁻⁷ in the present invention.

Example 2 An amorphous Co-Fe-Si-B alloy powder having an average particle size of 3 μm and a Cu-Zn ferrite powder having an average particle size of about 2 μm were supplied from different nozzles to obtain a sprayed multilayer film. . The cross section of the sprayed film was observed, and it was confirmed that the film thickness was about 20 μm and the film structure was multi-layered. This sprayed film is peeled off and wound on a quartz bobbin with an outer diameter of 20 mm, and the temperature is set at 420 ° C.
After heat treatment for a time, iron loss was measured. Further, the iron loss of a sample obtained by subjecting an amorphous ribbon of the same composition to the same heat treatment was also shown in FIG. From this, it can be seen that the thermal sprayed multilayer film is superior in iron loss to the ribbon.

[0014]

As described above, according to the present invention, when the soft magnetic sprayed alloy film is manufactured by spraying the soft magnetic alloy powder, the soft magnetic alloy powder is mixed and sprayed together to form the soft magnetic alloy. A soft magnetic sprayed film having a wavy layered structure of a layer and a high electric resistance layer is obtained, and the high frequency magnetic characteristics are improved by this configuration.

[Brief description of drawings]

FIG. 1 is a view showing a cross section of a soft magnetic sprayed film according to the present invention.

FIG. 2 is a graph showing frequency dependence of initial magnetic permeability of a soft magnetic sprayed film according to an example of the present invention.

FIG. 3 is a graph showing core loss of an amorphous soft magnetic sprayed film according to Example 2 of the present invention in comparison with core loss of a conventional amorphous ribbon.

[Explanation of symbols]

1-soft magnetic alloy layer (Mo permalloy layer), 2-high electrical resistance layer (SiO ₂ layer)

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location H01F 41/16 7371-5E

Claims (7)

[Claims] 1. A soft magnetic sprayed film having a multilayer film structure including a soft magnetic alloy layer and a high electric resistance layer therebetween. 2. The multilayer film structure is formed by corrugating a soft alloy layer and a high electrical resistance layer in a cross section of the film.
The soft magnetic sprayed film described in 1. 3. The absolute value of magnetostriction (λs) of the magnetic alloy layer is 2 ×
The soft magnetic sprayed film according to claim 1 or 2, which is 10 ^-6 or less. 4. The soft magnetic sprayed film according to claim 1, wherein the high electric resistance layer is a nonmagnetic compound layer. 5. The soft magnetic sprayed film according to claim 1, wherein the high electric resistance layer is ferrite. 6. A magnetic core formed by winding or laminating the soft magnetic sprayed film according to claim 1. 7. A method of manufacturing a soft magnetic sprayed alloy film by thermal spraying of a soft magnetic alloy powder, wherein powders of a high electrical resistance material are mixed and sprayed together to form a wavy layered structure of a soft magnetic alloy layer and a high electrical resistance layer. A method for producing a soft magnetic sprayed film, which comprises forming a structure.